Target profile for a physical vapor deposition chamber target
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The broken lines in the drawings represent unclaimed environment and form no part of the claimed design.
The long dash sort dash broken lines in
Claims
We claim the ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.
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Type: Grant
Filed: Dec 2, 2020
Date of Patent: Jan 11, 2022
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: David Gunther (Santa Clara, CA), Jiao Song (Singapore), Kirankumar Neelasandra Savandaiah (Bangalore), Madan Kumar Shimoga Mylarappa (Bengaluru)
Primary Examiner: Calvin E Vansant
Assistant Examiner: Mark T. Philipps
Application Number: 29/760,578