Patents by Inventor Makoto Furuhata
Makoto Furuhata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20150266720Abstract: An electronic device includes an accommodation space formed between a first base material and a second base material, and a first functional element and a second functional element in the accommodation space. The accommodation space is disposed in an internal region of a bonding portion that bonds the first base material and the second base material together. The bonding portion includes a first bonding region provided on one side thereof and a second bonding region provided on the other side thereof. The electronic device includes a first wiring portion which is electrically connected to the first functional element and has a first direction toward the outside of the accommodation space through the first bonding region, and a second wiring portion which is electrically connected to the second functional element and has a second direction toward the outside of the accommodation space through the second bonding region.Type: ApplicationFiled: March 17, 2015Publication date: September 24, 2015Inventor: Makoto FURUHATA
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Publication number: 20150212526Abstract: There is provided a functional element capable of preventing an oblique vibration due to a vibration leakage phenomenon from propagating to degrade the detection accuracy. A gyro element as the functional element includes a support body, a detection section, a drive coupling section having a first part and a second part, and a mass section connected to the drive coupling section, and connected to the support body via the drive coupling section, and the mass section performs the drive vibration in a direction along a third axis parallel to a normal line of a plane including the first axis and the second axis perpendicular to each other.Type: ApplicationFiled: January 27, 2015Publication date: July 30, 2015Inventors: Kei KANEMOTO, Makoto FURUHATA
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Patent number: 9067777Abstract: A MEMS device includes: a base substrate; a first wiring disposed on the base substrate using a first structure; a second wiring disposed on the base substrate using the first structure and a second structure connected to the first structure; and a MEMS element connected with the first wiring and the second wiring and arranged on the base substrate, wherein the first wiring and the second wiring include a crossing portion where the first wiring and the second wiring cross each other, and at the crossing portion, the first structure of the first wiring and the second structure of the second wiring cross each other.Type: GrantFiled: July 15, 2013Date of Patent: June 30, 2015Assignee: Seiko Epson CorporationInventors: Makoto Furuhata, Satoru Tanaka
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Patent number: 8899112Abstract: A gyro sensor includes: a driving mass; a detection mass connected with the driving mass; a driving connection one end and the other end of which are connected with the driving mass and an anchor, respectively; an island connected with the anchor, and disposed with a clearance left between the island and the driving mass in such a manner as to be electrically connected with the driving mass; and a projection provided at least either on the surface of the driving mass opposed to the island, or on the surface of the island opposed to the driving mass. The driving unit includes a movable electrode unit connected with the driving mass, and a fixed electrode unit. The minimum distance between the driving mass and the island is longer than the driving amplitude of the driving mass and shorter than the maximum amplitude of the movable electrode unit.Type: GrantFiled: March 22, 2013Date of Patent: December 2, 2014Assignee: Seiko Epson CorporationInventors: Makoto Furuhata, Satoru Tanaka
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Publication number: 20140245831Abstract: A gyro sensor includes a vibrating body, a first spring structure portion that extends in a direction along a first axis and is connected to the vibrating body, first and second vibrating portions that are disposed in parallel to each other in the direction along the first axis and are excited and vibrated in an opposite phase to each other, and a second spring structure portion that extends in the direction along the first axis and is connected to the first and second vibrating portions, in which a first spring constant K1 of the first spring structure portion is smaller than a second spring constant K2 from a middle point at which a length between both ends of the second spring structure portion is equally divided into two to one end of the second spring structure portion.Type: ApplicationFiled: February 25, 2014Publication date: September 4, 2014Applicant: Seiko Epson CorporationInventor: Makoto FURUHATA
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Patent number: 8766515Abstract: Deterioration of the Q value caused by the thermoelastic effect is suppressed. Since a first depth of a first groove and a second depth of a second groove are smaller than a distance between a surface including a third surface and a surface including a fourth surface, the first and second grooves do not penetrate between the surface including the third surface and the surface including the fourth surface. In addition, the sum of the first depth of the first groove and the second depth of the second groove is greater than the distance between the third and fourth surfaces, a heat transfer path between a first expandable portion (the first surface) and a second expandable portion (the second surface) cannot be formed as a straight line. As such, the heat transfer path between the first expandable portion (the first surface) and a second expandable portion (the second surface) is made to detour to the first and second grooves and and thus be lengthened.Type: GrantFiled: October 22, 2009Date of Patent: July 1, 2014Assignee: Seiko Epson CorporationInventors: Makoto Furuhata, Takeo Funakawa, Takashi Yamazaki
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Publication number: 20140021562Abstract: A MEMS device includes: a base substrate; a first wiring disposed on the base substrate using a first structure; a second wiring disposed on the base substrate using the first structure and a second structure connected to the first structure; and a MEMS element connected with the first wiring and the second wiring and arranged on the base substrate, wherein the first wiring and the second wiring include a crossing portion where the first wiring and the second wiring cross each other, and at the crossing portion, the first structure of the first wiring and the second structure of the second wiring cross each other.Type: ApplicationFiled: July 15, 2013Publication date: January 23, 2014Inventors: Makoto Furuhata, Satoru Tanaka
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Publication number: 20130283909Abstract: A gyro sensor includes a vibrator, a spring part extending from a first fixing part to the vibrator in a direction along a first axis, a drive part that excites the vibrator, and a detection part provided on the vibrator, wherein the vibrator has, in a plan view, first and second vibrating parts arranged side by side in the direction along the first axis and drive-vibrate in anti-phase with each other, a connecting spring part that connects the first and second vibrating parts in the direction along the first axis, and a first elastic member extending from the connecting spring part in a direction along a second axis intersecting with the first axis and fixed to a second fixing part.Type: ApplicationFiled: April 2, 2013Publication date: October 31, 2013Inventor: Makoto FURUHATA
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Publication number: 20130270707Abstract: A semiconductor device includes a base substrate and first and second semiconductor wires which are arranged side by side on the base substrate, and the base substrate is provided with an opening (inter-wire grove, slit) in an extending direction of the first and second semiconductor wires between the first semiconductor wire and the second semiconductor wire.Type: ApplicationFiled: April 10, 2013Publication date: October 17, 2013Applicant: Seiko Epson CorporationInventor: Makoto FURUHATA
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Publication number: 20130255377Abstract: A gyro sensor includes: a driving mass; a detection mass connected with the driving mass; a driving connection one end and the other end of which are connected with the driving mass and an anchor, respectively; an island connected with the anchor, and disposed with a clearance left between the island and the driving mass in such a manner as to be electrically connected with the driving mass; and a projection provided at least either on the surface of the driving mass opposed to the island, or on the surface of the island opposed to the driving mass. The driving unit includes a movable electrode unit connected with the driving mass, and a fixed electrode unit. The minimum distance between the driving mass and the island is longer than the driving amplitude of the driving mass and shorter than the maximum amplitude of the movable electrode unit.Type: ApplicationFiled: March 22, 2013Publication date: October 3, 2013Applicant: Seiko Epson CorporationInventors: Makoto FURUHATA, Satoru TANAKA
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Patent number: 8432087Abstract: A resonator element includes: a base portion; and a resonating arm extending in a first direction from the base portion, wherein the resonating arm includes a first surface, a second surface facing the first surface, a first side surface extending in the first direction so as to connect the first and second surfaces, and a second side surface facing the first side surface, wherein the resonating arm includes a first width portion having a first width and a second width portion provided at a root of the resonating arm so as to have a second width larger than the first width, wherein the resonating arm includes a groove portion provided on at least one of the first and second surfaces so as to extend in the first direction, the groove portion in the second width portion having a width larger than a width of the groove portion in the first width portion, and wherein a sum of the width between the groove portion in the second width portion and the first side surface and the width between the groove portion in theType: GrantFiled: September 9, 2010Date of Patent: April 30, 2013Assignee: Seiko Epson CorporationInventors: Akinori Yamada, Makoto Furuhata
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Patent number: 8415863Abstract: A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.Type: GrantFiled: April 30, 2012Date of Patent: April 9, 2013Assignee: Seiko Epson CorporationInventors: Takashi Yamazaki, Tsukasa Funasaka, Takeo Funakawa, Makoto Furuhata
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Patent number: 8405283Abstract: A flexural vibration piece includes a flexural vibrator that has a first region on which a compressive stress or a tensile stress acts due to vibration and a second region having a relationship in which a tensile stress acts thereon when a compressive stress acts on the first region and a compressive stress acts thereon when a tensile stress acts on the first region, and performs flexural vibration in a first plane. The flexural vibration piece also includes a heat conduction path, in the vicinity of the first region and the second region, that is formed of a material having a thermal conductivity higher than that of the flexural vibrator and thermally connects between the first region and the second region.Type: GrantFiled: June 27, 2012Date of Patent: March 26, 2013Assignee: Seiko Epson CorporationInventors: Makoto Furuhata, Takashi Yamazaki, Yuji Hamayama
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Patent number: 8362854Abstract: A flexural vibration piece including a vibrator having a first region on which a compressive stress or a tensile stress acts and a second region on which a tensile stress acts when a compressive stress acts on the first region and a compressive stress acts when a tensile stress acts on the first region, and performs flexural vibration in a first plane; and a heat conduction path formed of a material having a thermal conductivity higher than the vibrator and that thermally connects the regions, wherein when m is the number of heat conduction paths, ?th is the thermal resistivity of the heat conduction path, ?v is the thermal resistivity of the vibrator, tv is the thickness of the vibrator in a direction orthogonal to the first plane, and tth is the thickness of the heat conduction path, a relationship of tth?(1/m)×tv×(?th/?v) is satisfied.Type: GrantFiled: March 23, 2010Date of Patent: January 29, 2013Assignees: Epson Toyocom Corporation, Seiko Epson CorporationInventors: Makoto Furuhata, Akinori Yamada, Yuji Hamayama
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Publication number: 20120267985Abstract: A flexural vibration piece includes a flexural vibrator that has a first region on which a compressive stress or a tensile stress acts due to vibration and a second region having a relationship in which a tensile stress acts thereon when a compressive stress acts on the first region and a compressive stress acts thereon when a tensile stress acts on the first region, and performs flexural vibration in a first plane. The flexural vibration piece also includes a heat conduction path, in the vicinity of the first region and the second region, that is formed of a material having a thermal conductivity higher than that of the flexural vibrator and thermally connects between the first region and the second region.Type: ApplicationFiled: June 27, 2012Publication date: October 25, 2012Applicant: SEIKO EPSON CORPORATIONInventors: Makoto FURUHATA, Takashi YAMAZAKI, Yuji HAMAYAMA
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Patent number: 8294337Abstract: A flexural vibration piece includes a base, and a vibrating arms extending therefrom, each pair of vibrating arms has a first groove formed in the extension direction of the vibrating arm in one main surface following the direction in which the pair of vibrating arms are aligned, and a second groove formed side by side to the first groove in another main surface, the sum of the depths of the first and second groove portions is greater than the interval between the one main surface and the other main surface, and a mass portion is provided on each of the pair of vibrating arms, on the one main surface which is the opening side of the first grooves formed toward the outer sides opposite the inner sides on which the vibrating arms face each other.Type: GrantFiled: March 29, 2010Date of Patent: October 23, 2012Assignee: Seiko Epson CorporationInventors: Hiroki Kawai, Makoto Furuhata, Akinori Yamada, Yuji Hamayama
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Patent number: 8288926Abstract: A resonator having a base part; and a resonating arm that performs flexing vibration, the resonating arm part has two principal surfaces, a first groove provided on the one principal surface, a second groove provided in juxtaposition with the first groove on the other principal surface, a third groove provided in juxtaposition with the first groove and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove provided in juxtaposition with the second groove and provided nearer the base part side than the second groove on the principal surface. The sum of a depth of the first and second groove part and a sum of a depth of the third and fourth groove part are larger than a distance between the one principal surface and the other principal surface.Type: GrantFiled: December 20, 2011Date of Patent: October 16, 2012Assignee: Seiko Epson CorporationInventors: Makoto Furuhata, Takashi Yamazaki
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Publication number: 20120212109Abstract: A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.Type: ApplicationFiled: April 30, 2012Publication date: August 23, 2012Applicant: SEIKO EPSON CORPORATIONInventors: Takashi YAMAZAKI, Tsukasa Funasaka, Takeo Funakawa, Makoto Furuhata
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Patent number: 8232707Abstract: A flexural vibration piece includes a flexural vibrator that has a first region on which a compressive stress or a tensile stress acts due to vibration and a second region having a relationship in which a tensile stress acts thereon when a compressive stress acts on the first region and a compressive stress acts thereon when a tensile stress acts on the first region, and performs flexural vibration in a first plane. The flexural vibration piece also includes a heat conduction path, in the vicinity of the first region and the second region, that is formed of a material having a thermal conductivity higher than that of the flexural vibrator and thermally connects between the first region and the second region.Type: GrantFiled: March 23, 2010Date of Patent: July 31, 2012Assignee: Seiko Epson CorporationInventors: Makoto Furuhata, Takashi Yamazaki, Yuji Hamayama
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Patent number: 8191216Abstract: A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.Type: GrantFiled: January 6, 2009Date of Patent: June 5, 2012Assignee: Seiko Epson CorporationInventors: Takashi Yamazaki, Tsukasa Funasaka, Takeo Funakawa, Makoto Furuhata