Abstract: A coating and developing treatment apparatus includes a substrate transfer mechanism; a defect inspection section; means for controlling transfer of a substrate; means for classifying a defect based on the state of the defect; means for storing a transfer route of the substrate by the substrate transfer mechanism when the substrate has been treated by treatment sections; and means for specifying, based on a kind of the defect classified by the defect classification means and the transfer route of the substrate stored in the storage means, a treatment section which is a cause of occurrence of the classified defect, and judging presence or absence of an abnormality of the specified treatment section, wherein the transfer control means controls the substrate transfer mechanism to transfer a substrate bypassing the treatment section which has been judged to be abnormal by the defective treatment specification means.

Abstract: In the present invention, an image of a substrate is picked up by an image pickup unit with the substrate being held by a transfer member. A drive unit for the transfer member is controlled by a driving signal from a first controller. A driving signal outputted to the first controller is outputted also to a second controller so that the second controller controls the image pickup unit based on the driving signal, thereby synchronizing drive of the transfer member with the image pickup by the image pickup unit. According to the present invention, the throughput in performing a defect inspection for the substrate is improved and a precise image is captured and subjected to accurate inspection.

Abstract: In one embodiment, a coating and developing apparatus includes a processing block having two early-stage coating unit blocks, two later-stage coating unit blocks and two developing unit blocks, each unit blocks being vertically stacked on each other. The apparatus has at least two operation modes M1 and M2 adapted for abnormality. In mode M1 the processing module that processed the abnormal substrate in the developing unit blocks is identified, and subsequent substrates are transported to the processing module or modules, of the same type as the identified processing module, other than the identified processing module. In mode M2, the developing unit block that processed the abnormal substrate is identified, and subsequent substrates are transported to the developing unit block other than the identified developing unit block.

Abstract: Disclosed are a photocatalyst-coated body that can realize a good weather resistance, a photocatalyst-coated body that, in removing NOx, particularly in removing NOx in air, can suppress the production of an intermediate product such as NO2 while increasing the NOx removed, and a photocatalytic coating liquid for use in the formation of the photocatalyst-coated body. The photocatalyst-coated body comprises a photocatalyst layer provided on a substrate. The photocatalyst layer comprises at least photocatalytic titanium oxide particles, silica particles, and a product obtained by drying water soluble zirconium compound.

Abstract: A power amplifier according to the present invention includes: a carrier amplifier (2) that amplifies a carrier of a high-frequency input signal; a peak amplifier (3) that amplifies a peak component of the high-frequency input signal; an average power level detecting circuit (11) that detects an average power level of the high-frequency input signal; a peak power level detecting circuit (12) that detects a peak power level of the high-frequency input signal; a first voltage controller (10a) that controls a DC voltage supplied to the carrier amplifier (2) according to an output voltage signal from the average power level detecting circuit (11); and a second voltage controller (10b) that controls a DC voltage supplied to the peak amplifier (3) according to an output voltage signal from the peak power level detecting circuit (12).

Abstract: There is disclosed a photocatalyst-coated body which is superior in weather resistance, noxious gas decomposability, and various coating properties (such as ultraviolet absorptivity, transparency and film strength) while preventing corrosion of a substrate (in particular an organic substrate), and a photocatalyst coating liquid therefor. The photocatalyst-coated body comprises a substrate and a photocatalyst layer provided on the substrate. The photocatalyst layer comprises photocatalyst particles of 1 part or more by mass and less than 20 parts by mass; inorganic oxide particles of 70 parts or more by mass and less than 99 parts by mass; and a hydrolyzable silicone of zero parts or more by mass and less than 10 parts by mass, provided that a total amount of the photocatalyst particles, the inorganic oxide particles and the hydrolyzable silicone is 100 parts by mass.

Abstract: A photocatalyst-coated body includes a substrate with an organic material as a surface thereof, a photocatalyst layer with interstices between the particles in the layer and an intermediate layer provided between the substrate and the photocatalyst layer. The photocatalyst layer includes photocatalyst particles in a range of 1 part?x<20 parts by mass, inorganic oxide particles in a range of 70 parts?y<99 parts by mass, and a dried substance of a hydrolyzable silicone in a range of zero parts?z<10 parts by mass, provided that a total amount of the photocatalyst particles, the inorganic oxide particles, and the dried substance of the hydrolyzable silicone is 100 parts by mass in terms of silica. The intermediate layer comprising a silicone-modified resin, wherein the silicone-modified resin includes silicon atom in an amount of 0.2% by mass or more and less than 16.5% by mass.

Abstract: A photocatalyst-coated body which exhibits ability to decompose harmful gases while preventing deterioration of the substrate for a long time period is provided. The photocatalyst-coated body comprises a substrate, an intermediate layer provided on the substrate and a photocatalyst layer provided on the intermediate layer. The photocatalyst layer comprises photocatalyst particles composed of metal oxide which is excited by ultraviolet light. The intermediate layer comprises a weather resistant resin and a hydroxyphenyl triazine compound.

Abstract: A photocatalyst-coated body comprises a substrate and a photocatalyst layer provided on the substrate, the photocatalyst layer comprising photocatalyst particles of 1 part or more by mass and less than 20 parts by mass, inorganic oxide particles of 70 parts or more by mass and less than 99 parts by mass, and the dried substance of a hydrolyzable silicone of zero parts or more by mass and less than 10 parts by mass, provided that a total amount of the photocatalyst particles, the dried substance of the inorganic oxide particles and the hydrolyzable silicone is 100 parts by mass in terms of silica, wherein the photocatalyst layer has a film thickness of 3.0 ?m or less.

Abstract: A photocatalyst-coated body and a photocatalytic coating liquid which exert an excellent weather resistance, harmful gas decomposability, and other desired characteristics (such as transparency and film strength), while preventing erosion of the substrate are provided. The photocatalyst-coated body comprises a substrate and a photocatalytic layer provided on the substrate. The photocatalytic layer comprises photocatalytic particles and inorganic oxide particles, and has interstices between the particles in the layer.

Abstract: In the present invention, an image pickup device moving by drive of a drive unit picks up an image of a substrate on a mounting table. The drive unit is controlled by a driving signal from a first controller. The driving signal outputted to the first controller is outputted also to a second controller, so that the second controller controls the image pickup device based on the driving signal. The movement of the image pickup device itself is synchronized with the image pickup by the image pickup device. According to the present invention, at the time when the mounting table mounting the substrate thereon and the image pickup device are relatively moved to capture the image of the substrate, a precise image without image distortion can be captured for accurate inspection.

Abstract: A photocatalyst-coated body and a photocatalytic coating liquid which exert an excellent weather resistance, harmful gas decomposability, and other desired characteristics (such as transparency and film strength), while preventing erosion of the substrate are provided. The photocatalyst-coated body comprises a substrate and a photocatalytic layer provided on the substrate. The photocatalytic layer comprises photocatalytic particles and inorganic oxide particles, and has interstices between the particles in the layer.

Abstract: An optical apparatus includes a photographic lens and a vibratory actuator configured to move the photographic lens. The vibratory actuator includes a vibration member having an electro-mechanical energy conversion function for generating vibration and a contact member contacting the vibration member. At least one press-contact surface of the vibration member and the contact member is configured into an arc shape having a central axis corresponding to a moving direction of the photographic lens.

Abstract: There is disclosed a photocatalyst-coated body which is superior in weather resistance, noxious gas decomposability, and various coating properties (such as ultraviolet absorptivity, transparency and film strength) while preventing corrosion of a substrate (in particular an organic substrate), and a photocatalyst coating liquid therefor. The photocatalyst-coated body comprises a substrate and a photocatalyst layer provided on the substrate. The photocatalyst layer comprises photocatalyst particles of 1 part or more by mass and less than 20 parts by mass; inorganic oxide particles of 70 parts or more by mass and less than 99 parts by mass; and a hydrolyzable silicone of zero parts or more by mass and less than 10 parts by mass, provided that a total amount of the photocatalyst particles, the inorganic oxide particles and the hydrolyzable silicone is 100 parts by mass.

Abstract: According to a heat radiation structure of a semiconductor element of the invention, by providing a recess for a thermal conductive sheet on the bottom surface of a mounting seat of a heat sink, disposing the thermal conductive sheet in this recess, and screwing a source electrode of a power FET on the bottom surface of the mounting seat of the heat sink, it is possible to efficiently radiate the heat generated by the semiconductor element without damaging semiconductor chips in the interior of the semiconductor element and without deteriorating electrical properties.

Abstract: An optical apparatus includes a photographic lens and a vibratory actuator configured to move the photographic lens. The vibratory actuator includes a vibration member having an electro-mechanical energy conversion function for generating vibration and a contact member contacting the vibration member. At least one press-contact surface of the vibration member and the contact member is configured into an arc shape having a central axis corresponding to a moving direction of the photographic lens.

Abstract: A method of preventing or reducing fogging of a surface of a composite when subjected to humid conditions includes providing a composite with a surface. The composite includes a substrate and a photocatalytic surface layer. The photocatalytic surface layer includes a photocatalyst. The method further includes subjecting the photocatalyst to photoexcitation to render the surface of the composite hydrophilic, wherein, after the photoexcitation, the surface of the composite has a water wettability of less than 10° in terms of the contact angle with water. The method further includes subjecting the composite to humidity that is sufficient to induce fogging of the substrate if the photocatalytic surface layer were absent.

Abstract: In the present invention, an image pickup device moving by drive of a drive unit picks up an image of a substrate on a mounting table. The drive unit is controlled by a driving signal from a first controller. The driving signal outputted to the first controller is outputted also to a second controller, so that the second controller controls the image pickup device based on the driving signal. The movement of the image pickup device itself is synchronized with the image pickup by the image pickup device. According to the present invention, at the time when the mounting table mounting the substrate thereon and the image pickup device are relatively moved to capture the image of the substrate, a precise image without image distortion can be captured for accurate inspection.

Abstract: In the present invention, an image of a substrate is picked up by an image pickup unit with the substrate being held by a transfer member. A drive unit for the transfer member is controlled by a driving signal from a first controller. A driving signal outputted to the first controller is outputted also to a second controller so that the second controller controls the image pickup unit based on the driving signal, thereby synchronizing drive of the transfer member with the image pickup by the image pickup unit. According to the present invention, the throughput in performing a defect inspection for the substrate is improved and a precise image is captured and subjected to accurate inspection.

Abstract: According to a heat radiation structure of a semiconductor element of the invention, by providing a recess for a thermal conductive sheet on the bottom surface of a mounting seat of a heat sink, disposing the thermal conductive sheet in this recess, and screwing a source electrode of a power FET on the bottom surface of the mounting seat of the heat sink, it is possible to efficiently radiate the heat generated by the semiconductor element without damaging semiconductor chips in the interior of the semiconductor element and without deteriorating electrical properties.