Patents by Inventor Makoto Iida

Makoto Iida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20010018883
    Abstract: A sewn cover assembly of a type that is to undergo a foaming process involving injection and curing of a liquid foaming material therein. The cover assembly is formed by sewing together plural cover elements via two different sewing threads, using a sewing machine, so as to completely close and seal the needle holes formed therein against leakage of the liquid foaming material through the needle holes. Namely, one of the two threads used is large in thickness relative to another of them, thereby serving as a leakage preventive member in addition to being a sewing thread. A foamed product is also disclosed, which is formed by injecting and curing a liquid foaming material in such sewn cover assembly.
    Type: Application
    Filed: April 9, 2001
    Publication date: September 6, 2001
    Inventor: Makoto Iida
  • Patent number: 6261361
    Abstract: There is disclosed a method for producing a silicon single crystal wafer wherein a silicon single crystal is grown in accordance with the CZ method with doping nitrogen in an N-region in a defect distribution chart which shows a defect distribution in which the horizontal axis represents a radial distance D (mm) from the center of the crystal and the vertical axis represent a value of F/G (mm2/° C.·min), where F is a pulling rate (mm/min) of the single crystal, and G is an average intra-crystal temperature gradient(° C./mm) along the pulling direction within a temperature range of the melting point of silicon to 1400° C. There can be provided a method of producing a silicon single crystal wafer consisting of N-region where neither V-rich region nor I-rich region is present in the entire surface of the crystal by CZ method, under the condition that can be controlled easily in a wide range, in high yield, and in high productivity.
    Type: Grant
    Filed: May 19, 2000
    Date of Patent: July 17, 2001
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Makoto Iida, Masaro Tamatsuka, Masanori Kimura, Shozo Muraoka
  • Patent number: 6197109
    Abstract: There is disclosed a method for producing a silicon single crystal by growing the silicon single crystal by the Czochralski method, characterized in that the crystal is pulled at a pulling rate [mm/min] within a range of from V1 to V1+0.062×G while the crystal is doped with nitrogen during the growing, where G [K/mm] represents an average temperature gradient along the crystal growing direction, which is for a temperature range of from the melting point of silicon to 1400° C., and provided in an apparatus used for the crystal growing, and V1 [mm/min] represents a pulling rate at which an OSF ring disappears at the center of the crystal when the crystal is pulled by gradually decreasing the pulling rate.
    Type: Grant
    Filed: June 10, 1999
    Date of Patent: March 6, 2001
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Makoto Iida, Masaro Tamatsuka, Wataru Kusaki, Masanori Kimura, Shozo Muraoka
  • Patent number: 6191675
    Abstract: A small-sized heat resisting high voltage transformer and an ignition transformer using the high voltage transformer are provided and utilize both a heat resistant casting resin and a bobbin, which contain an inorganic filler. The high voltage transformer is capable of producing an output voltage of 10-35 kV and comprises a primary coil, a secondary coil, and a magnetic core, wherein a casting resin is injected into the coil part and subsequently cured. The casting resin and bobbin material used for making the coils have heat distortion temperature of at least 130° C., and contain an inorganic filler. The surface of the bobbin may be pretreated. Thereby, adhesion between a bobbin and a casting resin is enhanced to ensure operating properly under the sever heat cycle condition and provide a small-sized heat resistant high voltage transformer.
    Type: Grant
    Filed: April 20, 1999
    Date of Patent: February 20, 2001
    Assignee: Hitachi, Ltd.
    Inventors: Ryoichi Sudo, Tetsuo Tajima, Kazutoshi Kobayashi, Makoto Iida
  • Patent number: 6191009
    Abstract: In a method for producing a silicon single crystal wafer, a silicon single crystal ingot in which nitrogen is doped is grown by a Czochralski method, sliced to provide a silicon single crystal wafer, and then subjected to heat treatment to out-diffuse nitrogen on the surface of the wafer. According to a further method, a silicon single crystal ingot is grown in which nitrogen is doped by a Czochralski method, with controlling nitrogen concentration, oxygen concentration and cooling rate, and then the silicon single crystal ingot is sliced to provide a wafer. A silicon single crystal wafer is obtained by slicing a silicon single crystal ingot grown by a Czochralski method with doping nitrogen, wherein the depth of a denuded zone after gettering heat treatment or device fabricating heat treatment is 2 to 12 &mgr;m, and the bulk micro-defect density after gettering heat treatment or device fabricating heat treatment is 1×108 to 2×1010 number/cm3.
    Type: Grant
    Filed: March 8, 1999
    Date of Patent: February 20, 2001
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Masaro Tamatsuka, Makoto Iida, Norihiro Kobayashi
  • Patent number: 6159438
    Abstract: In method for manufacturing a silicon single crystal in accordance with a Czochralski method, during the growth of the silicon single crystal, pulling is performed such that a solid-liquid interface in the crystal, excluding a peripheral 5 mm-width portion, exists within a range of an average vertical position of the solid-liquid interface.+-. 5 mm. There is also disclosed a method for manufacturing a silicon single crystal in accordance with the Czochralski method, wherein during the growth of a silicon single crystal, a furnace temperature is controlled such that a temperature gradient difference .DELTA.G (=Ge-Gc) is not greater than 5.degree. C./cm, where Ge is a temperature gradient (.degree. C./cm) at a peripheral portion of the crystal, and Gc is a temperature gradient (.degree. C./cm) at a central portion of the crystal, both in an in-crystal descending temperature zone between 1420.degree. C. and 1350.degree. C. or between a melting point of silicon and 1400.degree. C.
    Type: Grant
    Filed: July 22, 1999
    Date of Patent: December 12, 2000
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Makoto Iida, Eiichi Iino, Masanori Kimura, Shozo Muraoka, Hideki Yamanaka
  • Patent number: 6156427
    Abstract: An electromagnetic wave interference shield structure molded from an electroconductive resin composition for molding, which comprises columnar pellets of a specific length, made of a bundle of iron-based metal fibers as an essential component and at least one bundle of at least another kind of electroconductive fibers of different material in a different diameter than that of the iron-based metal fibers as independent electroconductive fiber-cores, coated with a thermoplastic resin having a specific range of heat distortion temperature continuously in the longitudinal direction has a stable and distinguished shield effect for a prolonged time.
    Type: Grant
    Filed: October 2, 1991
    Date of Patent: December 5, 2000
    Assignee: Hitachi, Ltd.
    Inventors: Masao Gotoh, Makoto Iida, Kenichi Waragai, Meiichi Ohta, Susumu Iwai
  • Patent number: 6120599
    Abstract: In a method for producing a silicon single crystal wafer, a silicon single crystal is grown in accordance with the Czochralski method such that the F/G value becomes 0.112-0.142 mm.sup.2 /.degree. C..multidot.min at the center of the crystal, where F is a pulling rate (mm/min) of the single crystal, and G is an average intra-crystal temperature gradient (.degree. C./mm) along the pulling direction within a temperature range of the melting point of silicon to 1400.degree. C. Additionally, the single crystal is pulled such that the interstitial oxygen concentration becomes less than 24 ppma, or the time required to pass through a temperature zone of 1050-850.degree. C. within the crystal is controlled to become 140 minutes or less. The method allows production of silicon single crystal wafers in which neither FPDs nor L/D defects exist on the wafer surface, which therefore has an extremely low defect density, and whose entire surface is usable.
    Type: Grant
    Filed: December 6, 1999
    Date of Patent: September 19, 2000
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Makoto Iida, Eiichi Iino, Masanori Kimura, Shozo Muraoka
  • Patent number: 6120598
    Abstract: A single crystal is grown in accordance with a Czochralski method such that the time for passing through a temperature zone of 1150-1080.degree. C. is 20 minutes or less, or such that the length of a portion of the single crystal corresponding to the temperature zone of 1150-1080.degree. C. in the temperature distribution is 2.0 cm or less. Alternatively, the single crystal is grown such that the time for passing through a temperature zone of 1250-1200.degree. C. is 20 minutes or less, or such that the length of a portion of the single crystal corresponding to the temperature zone of 1250-1200.degree. C. in the temperature distribution is 2.0 cm or less. This method decreases both the density and size of so-called grown-in defects such as FPD (100 defects/cm.sup.2 or less), LSTD, and COP (10 defects/cm.sup.2 or less) to thereby enable efficient production of a single crystal having an excellent good chip yield (80% or greater) in terms of oxide dielectric breakdown voltage characteristics.
    Type: Grant
    Filed: December 13, 1999
    Date of Patent: September 19, 2000
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Makoto Iida, Eiichi Iino, Masanori Kimura, Shozo Muraoka
  • Patent number: 6120749
    Abstract: A silicon single-crystal wafer having a diameter of 6 inches or larger and improved in the dielectric breakdown strength of oxide film especially in a peripheral part thereof is provided to thereby heighten the yield of device chips produced per wafer. This wafer has no crystal defects with regard to the dielectric breakdown strength of oxide film in its peripheral region which extends from the circumference and accounts for up to 50% of the total area, in particular which extends from the circumference to a circle 30 mm apart from the circumference. A process for producing a silicon single crystal for easily producing, by the Czochralski method, a silicon single-crystal wafer improved in the dielectric breakdown strength of oxide film especially in a peripheral part thereof without considerably lowering the production efficiency is provided.
    Type: Grant
    Filed: July 17, 1998
    Date of Patent: September 19, 2000
    Assignee: Shin-Etsu Handotai Co., Ltd
    Inventors: Kiyotaka Takano, Makoto Iida, Eiichi Iino, Masanori Kimura, Hirotoshi Yamagishi
  • Patent number: 6077343
    Abstract: There is disclosed a method for producing a silicon single crystal wafer wherein a silicon single crystal is grown in accordance with the CZ method with doping nitrogen in an N-region in a defect distribution chart which shows a defect distribution in which the horizontal axis represents a radial distance D (mm) from the center of the crystal and the vertical axis represent a value of F/G (mm.sup.2 /.degree. C..multidot.min), where F is a pulling rate (mm/min) of the single crystal, and G is an average intra-crystal temperature gradient (.degree. C./mm) along the pulling direction within a temperature range of the melting point of silicon to 1400.degree. C. There can be provided a method of producing a silicon single crystal wafer consisting of N-region where neither V-rich region nor I-rich region is present in the entire surface of the crystal by CZ method, under the condition that can be controlled easily in a wide range, in high yield, and in high productivity.
    Type: Grant
    Filed: May 25, 1999
    Date of Patent: June 20, 2000
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Makoto Iida, Masaro Tamatsuka, Masanori Kimura, Shozo Muraoka
  • Patent number: 6066306
    Abstract: In a method for producing a silicon single crystal wafer, a silicon single crystal is grown in accordance with the Czochralski method such that the F/G value becomes 0.112-0.142 mm.sup.2 /.degree.C.multidot.min at the center of the crystal, where F is a pulling rate (mm/min) of the single crystal, and G is an average intra-crystal temperature gradient (.degree.C/mm) along the pulling direction within a temperature range of the melting point of silicon to 1400.degree. C. Additionally, the single crystal is pulled such that the interstitial oxygen concentration becomes less than 24 ppma , or the time required to pass through a temperature zone of 1050-850.degree. C. within the crystal is controlled to become 140 minutes or less. The method allows production of silicon single crystal wafers in which neither FPDs nor L/D defects exist on the wafer surface, which therefore has an extremely low defect density, and whose entire surface is usable.
    Type: Grant
    Filed: November 9, 1998
    Date of Patent: May 23, 2000
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Makoto Iida, Eiichi Iino, Masanori Kimura, Shozo Muraoka
  • Patent number: 6053975
    Abstract: In a crystal holding apparatus, a corrugated portion between a seed crystal and a straight cylindrical portion of a monocrystal is held by holding portions of a lifting jig during a monocrystal growth process in which the seed crystal is brought into contact with material melt and is subsequently pulled while being rotated. In the crystal holding apparatus, an attachment member for establishing surface contact with the corrugated portion of the crystal is attached to the tip end of each holding portion of the lifting jig. Therefore, the monocrystal can be held reliably, so that the breaking and falling down of the monocrystal during the pulling operation can be prevented.
    Type: Grant
    Filed: March 16, 1998
    Date of Patent: April 25, 2000
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Makoto Iida, Eiichi Iino, Masanori Kimura, Shozo Muraoka
  • Patent number: 6048395
    Abstract: A method for producing a silicon single crystal in accordance with the Czochralski method. The single crystal is grown in an N.sub.2 (V) region where a large amount of precipitated oxygen and which is located within an N region located outside an OSF ring region, or is grown in a region including the OSF ring region, N.sub.1 (V) and N.sub.2 (V) regions located inside and outside the OSF ring region, in a defect distribution chart which shows a defect distribution in which the horizontal axis represents a radial distance D (mm) from the center of the crystal and the vertical axis represents a value of F/G (mm.sup.2 /.degree.C..multidot.min), where F is a pulling rate (mm/min) of the single crystal, and G is an average intra-crystal temperature gradient (.degree.C./mm) along the pulling direction within a temperature range of the melting point of silicon to 1400.degree. C.
    Type: Grant
    Filed: November 20, 1998
    Date of Patent: April 11, 2000
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Makoto Iida, Satoshi Suzuki, Eiichi Iino, Masanori Kimura, Shozo Muraoka
  • Patent number: 6027562
    Abstract: A single crystal is grown in accordance with a Czochralski method such that the time for passing through a temperature zone of 1150-1080.degree. C. is 20 minutes or less, or such that the length of a portion of the single crystal corresponding to the temperature zone of 1150-1080.degree. C. in the temperature distribution is 2.0 cm or less. Alternatively, the single crystal is grown such that the time for passing through a temperature zone of 1250-1200.degree. C. is 20 minutes or less, or such that the length of a portion of the single crystal corresponding to the temperature zone of 1250-1200.degree. C. in the temperature distribution is 2.0 cm or less. This method decreases both the density and size of so-called grown-in defects such as FPD (100 defects/cm.sup.2 or less), LSTD, and COP (10 defects/cm.sup.2 or less) to thereby enable efficient production of a single crystal having an excellent good chip yield (80% or greater) in terms of oxide dielectric breakdown voltage characteristics.
    Type: Grant
    Filed: October 16, 1998
    Date of Patent: February 22, 2000
    Assignee: Shin-Etsu Handotai Co., Ltd
    Inventors: Makoto Iida, Eiichi Iino, Masanori Kimura, Shozo Muraoka
  • Patent number: 5968264
    Abstract: In method for manufacturing a silicon single crystal in accordance with a Czochralski method, during the growth of the silicon single crystal, pulling is performed such that a solid-liquid interface in the crystal, excluding a peripheral 5 mm-width portion, exists within a range of an average vertical position of the solid-liquid interface .+-.5 mm. There is also disclosed a method for manufacturing a silicon single crystal in accordance with the Czochralski method, wherein during the growth of a silicon single crystal, a furnace temperature is controlled such that a temperature gradient difference .DELTA.G (=Ge-Gc) is not greater than 5.degree. C./cm, where Ge is a temperature gradient (.degree.C./cm) at a peripheral portion of the crystal, and Gc is a temperature gradient (.degree.C./cm) at a central portion of the crystal, both in an in-crystal descending temperature zone between 1420.degree. C. and 1350.degree. C. or between a melting point of silicon and 1400.degree. C.
    Type: Grant
    Filed: July 2, 1998
    Date of Patent: October 19, 1999
    Assignee: Shin-etsu Handotai Co., Ltd.
    Inventors: Makoto Iida, Eiichi Iino, Masanori Kimura, Shozo Muraoka, Hideki Yamanaka
  • Patent number: 5964941
    Abstract: A method and an apparatus for pulling a single crystal are disclosed. A neck portion, a corrugated portion, and a single crystal are formed below a seed crystal held by a seed chuck. When the corrugated portion is raised to a predetermined position (where lifting jig can hold the corrugated portion) by the seed chuck, the rising speed Va of the seed chuck is reduced, and a slider that supports a seed chuck lifting mechanism is raised at a speed Vb in order to maintain a constant pulling speed of the single crystal. Eventually, the pulling by the seed chuck is switched to the pulling by the slider. Subsequently, the lifting jig provided on the slider is raised slightly by a moving mechanism so that the crystal holding portions of the lifting jig are brought into contact with the corrugated portion and 1-50% of the weight of the crystal is shifted to the lifting jig. This enables safe and accurate growth of a heavy single crystal in accordance with, for example, the CZ method.
    Type: Grant
    Filed: September 15, 1997
    Date of Patent: October 12, 1999
    Assignee: Shin-Etsu Handotai., Ltd.
    Inventors: Eiichi Iino, Makoto Iida, Masanori Kimura, Shozo Muraoka
  • Patent number: 5948164
    Abstract: A seed crystal holder used in a crystal pulling apparatus operated in accordance with the Czochralski method. In the seed crystal holder, a heat-resistant cushioning material is provided between the surface of a seed crystal and the contact surface of claws of the holder or between a cutaway surface of the seed crystal and a contact surface of an insert of the holder. The heat-resistant cushioning material is selected from the group consisting of carbon fiber felt, glass fiber felt, metallic fiber felt, or selected from materials that cause plastic deformation such as Al.
    Type: Grant
    Filed: August 25, 1998
    Date of Patent: September 7, 1999
    Assignee: Shin Etsu Handotai Co., Ltd.
    Inventors: Makoto Iida, Eiichi Iino, Masanori Kimura, Shozo Muraoka
  • Patent number: 5911821
    Abstract: There is disclosed a Czochralski method in which a seed crystal in contact with material melt is pulled, while being rotated, so as to grow a monocrystal, and a part of the crystal being grown is mechanically held during the pulling operation. The crystal is mechanically held in such a way that the weight W(kg) of the crystal satisfies the following Formula (1):W<12.5.times..pi.D.sup.2 /4 (1)where D designates the minimum diameter (mm) of a neck. This makes it possible to pull a heavy monocrystal safely and reliably.
    Type: Grant
    Filed: September 5, 1997
    Date of Patent: June 15, 1999
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Eiichi Iino, Makoto Iida, Masanori Kimura, Shozo Muraoka
  • Patent number: 5882397
    Abstract: In a crystal pulling method in which a growing single crystal is initially pulled by a seed chuck and subsequently pulled by lifting jig in the middle of the pulling operation, the speed Va of the seed chuck relative to the lifting jig is decreased, while the rising speed Vb of the lifting jig increases, from a first point where switching of the pulling mechanism from the seed chuck to the lifting jig is started. The total speed Vt=Vb+Va is constantly maintained at a desired pulling speed V up to a third point where the shifting of the load from the seed chuck to the lifting jig is started. Subsequently, the total speed Vt is made less than the desired pulling speed V from the third point where the shifting of the load from the seed shuck to the lifting jig is started. This enables accurate growth of a crystal.
    Type: Grant
    Filed: October 6, 1997
    Date of Patent: March 16, 1999
    Assignee: Shin Etsu Handotai Co., Ltd.
    Inventors: Eiichi Iino, Makoto Iida, Masahiko Urano, Masanori Kimura, Shozo Muraoka