Abstract: A dehydration method is a dehydration method for selectively separating water from a mixture that contains water, and the method includes a step of supplying the mixture to a supply side space of a separation membrane, and a step of making a pressure difference between the supply side space and a permeation side space of the separation membrane. The separation membrane includes a first zeolite membrane that faces the permeation side space and is constituted by a first zeolite and a second zeolite membrane that faces the supply side space and is adjacent to the first zeolite membrane. The second zeolite membrane is constituted by a second zeolite that has the same framework structure as framework of the first zeolite and has a lower Si/Al atom ratio than a Si/Al atom ratio of the first zeolite.

Abstract: An actuator includes a holder, a case, a support assembly, a first magnet, a second magnet, and a coil. The holder includes a sphere centered at a reference point and houses an optical module. The case houses the holder. The support assembly is in the case and supports the holder in a manner rotatable about the reference point. The first magnet is on a portion of the sphere in a first radial direction from the reference point. The second magnet is on a portion of the sphere in a second radial direction from the reference point. The coil is in the case and is energized to generate a magnetic field acting on the first magnet and the second magnet. The first magnet and the second magnet are located asymmetric to each other with respect to the reference point and have different lengths in a circumferential direction of the holder.

Abstract: A crystalline material contains oxygen, aluminum and phosphorus, and has powder X-ray diffraction peaks shown below. When the peak at 2?=14.17±0.2° is used as the reference peak and the intensity of the reference peak is set to 100, for example, the relative intensity of the peak at 2?=8.65±0.2° is 1 to 15. The relative intensity of the peak at 2?=9.99±0.2° is 1 to 15. The relative intensity of the peak at 2?=16.52±0.2° is 5 to 80. The relative intensity of the peak at 2?=17.37±0.2° is 1 to 15. The relative intensity of the peak at 2?=21.81±0.2° is 10 to 80.

Abstract: A piezoelectric actuator includes a common electrode on a piezoelectric layer at a first side adjacent to a first surface and extends over a plurality of piezoelectric elements. A plurality of first individual electrodes is on the piezoelectric layer at a second side adjacent to a second surface. Each of the plurality of first individual electrodes is at a piezoelectric element of the plurality of piezoelectric elements, and are not electrically connected together. A first insulating layer is on the common electrode at the first side and extends over the plurality of piezoelectric elements. A plurality of second individual electrodes is on the first insulating layer at the first side. Each of the plurality of second individual electrodes is at a piezoelectric element of the plurality of piezoelectric elements, and overlap centers of the plurality of first individual electrodes. The plurality of second individual electrodes are electrically connected together.

Abstract: A substrate processing method includes forming a silicon carbide film on a spin on carbon film formed on a substrate; and forming a chemically amplified resist film for EUV on the silicon carbide film.

Abstract: A zeolite membrane complex includes a longitudinal support member having at least one through hole extending along its length and a zeolite membrane on an inner peripheral surface of the through hole or over an outer peripheral surface of the support, from one end portion of the support to the other end portion thereof. Among constituent elements of the zeolite membrane except oxygen, an element with the highest percentage is a main element, and when the concentration of the main element is measured at three portions defined by dividing the support into three equal parts in the longitudinal direction, the concentration of the main element gradually decreases from the one end portion toward the other end portion, and the ratio of the concentration of the main element at the other end portion to that at the one end portion is 0.90 or more.

Abstract: A separation membrane complex includes a porous support, an intermediate membrane which is a polycrystalline membrane formed on a surface of the support and has pores that are originated from a framework structure and have an average pore diameter smaller than that of pores in the vicinity of the surface of the support, and a separation membrane which is formed on the intermediate membrane and is an inorganic membrane having a regular pore structure. In the separation membrane, a functional group is introduced into pores of a surface layer thereof which is away from the intermediate membrane.

Abstract: A zeolite membrane complex includes a porous support and a zeolite membrane formed on the support and composed of ETL-type zeolite. In an X-ray diffraction pattern obtained by X-ray irradiation onto a surface of the zeolite membrane, an intensity of a peak existing in the vicinity of 2?=9.9° and an intensity of a peak existing in the vicinity of 2?=19.8° are each not lower than 0.8 times an intensity of a peak existing in the vicinity of 2?=7.9°.

Abstract: A zeolite membrane complex includes a porous support and a zeolite membrane provided on the support and composed of RHO-type zeolite. In a case where a surface of the zeolite membrane is measured by an X-ray diffraction method, a peak intensity derived from a (310) plane of RHO-type zeolite is not higher than 0.4 times a peak intensity derived from a (110) plane thereof and a peak intensity derived from a (211) plane thereof is not higher than 0.3 times the peak intensity derived from the (110) plane.

Abstract: In an RHO-type zeolite, in a case where a peak at a lattice spacing of 9.96 to 11.25 ? in a measurement using a powder X-ray diffraction method is assumed as a reference peak and an intensity of the reference peak is assumed as 100, a relative intensity of a peak at a lattice spacing of 4.59 to 4.85 ? is 150 to 300, a relative intensity of a peak at a lattice spacing of 3.55 to 3.64 ? is 200 to 500, and a relative intensity of a peak at a lattice spacing of 2.98 to 3.06 ? is 100 to 200.

Abstract: A separation membrane complex includes a porous support, a dense part covering one surface of the support from a boundary position toward one side in a predetermined direction on the surface, and a separation membrane covering the surface from the boundary position toward the other side and covering the dense part in the vicinity of the boundary position. In a case where, in a cross section, within a specified range from the boundary position toward the one side in the predetermined direction up to 30 ?m, a maximum angle among angles formed of the surface and lines connecting respective positions on a surface of the dense part on a side of the separation membrane and the boundary position is acquired as an evaluation angle, a maximum value of four evaluation angles at four measurement positions is not smaller than 5 degrees and not larger than 45 degrees.

Abstract: A method for manufacturing a zeolite membrane structure comprises an immersion step for immersing a porous substrate in a synthetic sol, and a synthesis step for hydrothermally synthesizing a zeolite membrane on a surface of the porous substrate that has been immersed in the synthesis so. When the foamability of the synthetic sol is measured by a Ross-Miles method under a condition of 25 degrees C., the foam height after elapse of 5 minutes from completion of down flow is less than or equal to 5 mm.

Abstract: A zeolite membrane complex includes a porous support, and a zeolite membrane formed on the support. The zeolite membrane includes a zeolite crystal phase constituted by a plurality of zeolite crystals, and a dense grain boundary phase, which is a region between the plurality of zeolite crystals. A density of at least part of the grain boundary phase is smaller than a density of the zeolite crystal phase. A width of the grain boundary phase is 2 nm or more and 10 nm or less. Accordingly, it is possible to realize high permeability and high separating performance, and high durability of the zeolite membrane.

Abstract: A method for inspecting a separation membrane structure includes an assembly step of sealing a separation membrane structure that includes a porous substrate and a separation membrane into a casing, and an inspection step of applying pressure to an inspection liquid that has filled a first main surface side of the separation membrane.

Abstract: In production of a zeolite membrane complex, a starting material solution containing at least a structure-directing agent and FAU-type zeolite particles having an average particle diameter of 50 to 500 nm is prepared. Then, a support is immersed in the starting material solution to form a zeolite membrane on the support by hydrothermal synthesis, the zeolite membrane being composed of AFX-type zeolite. After that, the structure-directing agent in the zeolite membrane is removed.

Abstract: A support is a porous ceramic support for supporting a zeolite membrane. The hydraulic conductivity of the support is less than or equal to 1.1×10?3 m/s. In the support, the total content of alkali metal and alkaline earth metal in a surface part within 30 ?m from a surface in a depth direction perpendicular to the surface is less than or equal to 1% by weight.

Abstract: A separation membrane structure has partition walls including a honeycomb shaped porous ceramic body provided with a large number of pores, and cells to become through channels of a fluid are formed by the partition walls. The cells include separation cells and slit cells. In the separation cells, the intermediate layer is disposed on the surface of a substrate, and a separation layer is further formed. The intermediate layer has a structure where aggregate particles are bonded to one another by an inorganic bonding material having a thermal expansion coefficient equal to or higher than that of the aggregate particles.

Abstract: A dehydration method is a dehydration method for selectively separating water from a mixture that contains water, using a zeolite membrane having an AFX structure, and the method includes a step of supplying the mixture to a supply side space of the zeolite membrane having an AFX structure, and a step of making a pressure difference between the supply side space and a permeation side space of the zeolite membrane having an AFX structure.

Abstract: A peak intensity of a (002) plane is greater than or equal to 0.5 times a peak intensity of a (100) plane in an X-ray diffraction pattern obtained by irradiation of X-rays to a membrane surface of the ERI membrane.

Abstract: An aluminophosphate-metal oxide bonded body including a metal oxide having a bonding surface on a part of the surface thereof, and aluminophosphate that is disposed on the bonding surface of the metal oxide, wherein an alkali metal, an alkaline earth metal or both of these is/are disposed on the bonding surface of the metal oxide, and the content rate of the alkali metal, alkaline earth metal or both is from 0.3 to 30.0% by mass with respect to all of the substances that are disposed on the bonding surface of the metal oxide. An aluminophosphate-metal oxide bonded body that provides a favorable bonded state even for complicated shapes is provided.