Abstract: An exposure apparatus for exposing a plate-like member to a pattern with radiation in a step-and-repeat manner thereby to transfer images of the pattern onto different regions on a surface of the plate-like member. The apparatus includes an X-Y stage for moving the plate-like member in X and Y directions, a .theta.-stage for moving the plate-like member in a .theta. (rotational) direction relative to the X-Y stage, and laser interferometers for measuring an amount of movement of the plate-like member, by the X-Y stage, in each of the X and Y directions by use of a mirror mounted on the .theta.-stage. Placement of the mirror on the .theta.-stage allows correction of yawing if it occurs during movement of the plate-like member by X-Y stage. Also, deviation of the plate-like member in the Y direction if it occurs during movement of the plate-like member by the X-Y stage in the X direction, is detected by the laser interferometers. This allows detection of a positional error of the mirror in the .theta.

Abstract: A wafer pre-alignment apparatus including a mechanical pre-alignment device for positioning a wafer on the basis of an outer periphery configuration of the wafer, an image processing pre-alignment device for positioning the wafer on the basis of a pattern of an image formed on the wafer the image processing aligner being effective to perform the pre-alignment operation with a higher accuracy than the mechanical aligner, and a selector for operating the apparatus selectively in a first mode wherein the mechanical aligner only is operated for the wafer and in a second mode wherein the image processing aligner only is operated for the wafer, or the mechanical aligner and the image processing aligner are operated sequentially for the wafer.

Abstract: A cocatalyst employed with a titanium-containing catalyst, said titanium-containing catalyst comprising titanium atoms, halogen atoms, and an electron donor compound, said cocatalyst comprising(a) an organoaluminum compound represented by the formula R.sup.1 R.sup.2 R.sup.3 (wherein R.sup.1, R.sup.2, and R.sup.3 which may be the same or different, each denote a C.sub.1-20 alkyl, alkenyl, cycloalkyl, aryl, aralkyl, or alkoxy group, or a hydrogen atom;(b) an organoaluminum compound represented by the formula R.sub.3-n.sup.4 AlX.sub.n (wherein R.sup.4 denotes a C.sub.1-20 alkyl, alkenyl, cycloalkyl, aryl, aralkyl, or alkoxy group; X denotes a halogen atom; and n.gtoreq.1),(c) an electron donor compound containing a nitrogen atom, sulfur atom, oxygen atom, or phosphorus atom, and(d) an aromatic carboxylic acid ester.The catalyst is useful for the polymerization of olefins.

Abstract: Modified polymer compositions comprising elastomers blended with not more than 50 parts by weight of a crystalline polyolefin are prepared by reaction of the polymers with an unsaturated carboxylic acid or its acid anhydride. The modified composition optionally containing a filler, is particularly suitable for laminating to metals and other polymers; laminates show superior hot water resistance, salt water resistance and thermal shock resistance.

Abstract: According to a first aspect of this invention, there is provided A magnesium-containing solid, obtained by contacting the reaction product of (1):(A) metallic magnesium;(B) a halogenated hydrocarbon of the general formula RX in which R stands for an alkyl, aryl or cycloalkyl group having 1 to 20 carbon atoms, and X stands for a halogen atom; and(C) an alkoxy compound of the general formula X'.sub.m C(OR').sub.4-m in which X' stands for a hydrogen or halogen atom, or an alkyl, aryl or cycloalkyl group having 1 to 10 carbon atoms, R' stands for an alkyl, aryl or cycloalkyl group having 1 to 20 carbon atoms, and m is 0, 1 or 2, with (2) an electron donative compound and hydrogen halide. The supported transition metal in combination with an organoaluminum co-catalyst is employed as an olefin polymerization catalyst.

Abstract: According to this invention, there is provided a magnesium-containing solid, obtained by contacting the reaction product of (1):a magnesium-containing solid, obtained by contacting the reaction product of:(a) metallic magnesium;(b) a halogenated hydrocarbon of the general formula RX in which R stands for an alkyl, aryl or cycloalkyl group having 1 to 20 carbon atoms, and X stands for a halogen atom; and(c) an alkoxy compound of the general formula X'.sub.m C(OR').sub.4-m in which X' stands for a hydrogenor halogen atoms, or an alkyl, aryl or a cycloalkyl group having 1 to 10 carbon atoms, R' stands for an alkyl, aryl or cycloalkyl group having 1 to 20 carbon atoms and m is 0, 1 or 2, with (2) an organic aluminum compound.The magnesium-containing solid is employed as a carrier for a transition metal halide. The supported transition metal halide in combination with an aluminum alkyl cocatalyst such as aluminum triethyl is usefully employed for the polymerization of olefins.