Abstract: There is provided a communication system for performing communication by flooding using concurrent transmission among a plurality of communication nodes including a transmission node, a relay node, and a destination node. The transmission node generates and transmits the packet including predetermined transmission data, a first error detection code for the transmission data, and a second error detection code for the transmission data, timing information corresponding to a transmission timing of the packet, and the first error detection code. The relay node receives the packet, performs error detection based on the second error detection code, and updates the second error detection code and reconstructs and transmits the packet if no error is detected. The destination node receives the packet, and performs error detection based on the first error detection code.

Abstract: The purpose of the present invention is to provide a charged-particle beam apparatus capable of performing various types of signal discriminations according to the shape and the size of a sample. The present invention proposes a charged-particle beam apparatus for irradiating a sample disposed in a vacuum vessel with a charged particle beam. The charged-particle beam apparatus is provided with: a first light-generating surface for generating light on the basis of the collision of charged particles released from the sample; a light-guiding member for guiding the generated light to the outside of the vacuum vessel while maintaining the generation distribution of the light generated at the first light-generating surface; a photodetector for detecting the light guided by the light-guiding member to the outside of the vacuum vessel; and a light-transmission restricting member for restricting transmission of the light guided by the light-guiding member between the photodetector and the light-guiding member.

Abstract: The present disclosure provides a fuel pipe having a double tube with an inner tube and an outer tube disposed on the outside of the inner tube.

Abstract: The invention provides a power supply device and a charged particle beam device capable of reducing noise generated between a plurality of voltages. The charged particle beam device includes a charged particle gun configured to emit a charged particle beam, a stage on which a sample is to be placed, and a power supply circuit configured to generate a first voltage and a second voltage that determine energy of the charged particle beam and supply the first voltage to the charged particle gun. The power supply circuit includes a first booster circuit configured to generate the first voltage, a second booster circuit configured to generate the second voltage, and a switching control circuit configured to perform switching control of the first booster circuit and the second booster circuit using common switch signals.

Abstract: An object of the invention is to correct an aberration or a defocus of an electron beam for irradiation, and control an influence on a deflector by a fluctuation in an electric field of an electrostatic lens. The invention provides a charged particle beam apparatus including a deflector that deflects a charged particle beam with which a specimen is irradiated, an objective lens that focuses the charged particle beam on the specimen, an electrostatic lens that includes a part of the objective lens and to which a voltage for correcting the aberration or the defocus of the charged particle beam is applied, and an constant electric field applying electrode that is provided between the deflector and the electrostatic lens and to which a constant voltage having a same sign with the voltage applied to the electrostatic lens is applied.

Abstract: A resin composition is provided, wherein polymer particles are dispersed in a matrix of an ethylene-vinyl alcohol copolymer and the polymer particles have a sea-island structure, and one of a sea component and an island component has a glass transition temperature of 30° C. or more and the other has a glass transition temperature of ?10° C. or less. The resin composition has high gas barrier properties and is also excellent in impact resistance, particularly impact resistance at low temperatures.

Abstract: To provide a technique capable of measuring high-frequency electrical noise in a charged particle beam device. A charged particle beam device 100 includes an electron source 2 for generating an electron beam EB1, a stage 4 for mounting a sample 10, a detector 5 for detecting secondary electrons EB2 emitted from the sample 10, and a control unit 7 electrically connected to the electron source 2, the stage 4, and the detector 5 and can control the electron source 2, the stage 4, and the detector 5. Here, when the sample 10 is mounted on the stage 4, and a specific portion 11 of the sample 10 is continuously irradiated with the electron beam EB1 from the electron source 2, the control unit 7 can calculate a time-series change in irradiation position of the electron beam EB1 based on an amount of the secondary electrons EB2 emitted from the specific portion 11, and can calculate a feature quantity for a shake of the electron beam EB1 based on the time-series change in irradiation position.

Abstract: The present disclosure pertains to a method, a system, and a computer-readable medium for highly precisely measuring the depth of a recess formed in a sample even when, inter alia, the material or pattern density of the sample differs.

Abstract: Provided is a charged particle beam control device having improved signal detection accuracy. The charged particle beam control device (detection block) includes: a detector provided in a charged particle beam device, and configured to detect secondary electrons emitted from a sample by irradiating the sample with a charged particle beam and output an electric signal based on the detected secondary electrons; a signal wiring configured to transmit the electric signal; a noise detection wiring configured to detect a noise signal generated in the charged particle beam device; and an arithmetic circuit configured to generate a signal obtained by subtracting the noise signal from the electric signal.

Abstract: The present disclosure provides a pattern cross-sectional shape estimation system which includes a charged particle ray device which includes a scanning deflector that scans a charged particle beam, a detector that detects charged particles, and an angle discriminator that is disposed in a front stage of the detector and discriminates charged particles to be detected, and an arithmetic device that generates a luminance of an image, and calculates a signal waveform of a designated region on the image using the luminance. The arithmetic device generates angle discrimination images using signal electrons at different detection angles, and estimates a side wall shape of a measurement target pattern.

Abstract: A charged particle beam apparatus covering a wide range of detection angles of charged particles emitted from a sample includes an objective lens for converging charged particle beams emitted from a charged particle source and a detector for detecting charged particles emitted from a sample. The objective lens includes inner and outer magnetic paths which are formed so as to enclose a coil. A first inner magnetic path is disposed at a position opposite to an optical axis of the charged particle beams. A second inner magnetic path, formed at a slant with respect to the optical axis of the charged particle beams, includes a leading end. A detection surface of the detector is disposed at the outer side from a virtual straight line that passes through the leading end and that is parallel to the optical axis of the charged particle beams.

Abstract: The present invention proposes a pattern measurement tool characterized by being provided with: a charged-particle beam sub-system having a tilt deflector; and a computer sub-system which is connected to the charged-particle beam sub-system and which is for executing measurement of a pattern on the basis of a signal obtained by said charged-particle beam sub-system, wherein the charged-particle beam sub-system acquires at least two signal profiles by scanning beams having at least two incidence angles, the computer sub-system measures the dimension between one end and the other end of the pattern on the basis of the at least two signal profiles, calculates the difference between the two measurements, and calculates the height of the pattern by inputting the difference value determined by said calculation into a relational formula indicating the relation between the height of the pattern and said difference value.

Abstract: To measure a depth of a three-dimensional structure, for example, a hole or a groove, formed in a sample without preparing information in advance, an electron microscope detects, among emitted electrons generated by irradiating a sample with a primary electron beam, an emission angle in a predetermined range, the emission angle being formed between an axial direction of the primary electron beam and an emission direction of the emitted electrons, and outputs a detection signal corresponding to the number of the emitted electrons detected. An emission angle distribution of a detection signal is obtained based on a plurality of detection signals, and an opening angle is obtained based on a change point of the emission angle distribution, the opening angle being based on an optical axis direction of the primary electron beam with respect to the bottom portion of the three-dimensional structure.

Abstract: An image inspection device includes a mounting unit on which an image projection device that directly projects an image on a retina of a user is to be mounted; a condensing lens that condenses a light beam emitted from the image projection device mounted on the mounting unit; a detector on which an inspection image is projected and detected; and a controller that inspects the inspection image detected by the detector. The image inspection device inspects the image projected by the image projection device, which directly projects the image on the retina of the user.

Abstract: A resin composition (E) includes from 0.1 to 20 parts by mass of an ethylene-vinyl alcohol copolymer (B), from 0.1 to 20 parts by mass of an acid-modified polyolefin (C), and from 0.1 to 10 parts by mass of an acid-modified polyolefin (D) based on 100 parts by mass of a polyolefin (A), wherein the polyolefin (A) has an MFR (190° C., under a load of 2.16 kg) from 0.01 to 10 g/10 min, the acid-modified polyolefin (C) has an acid value from 0.1 to 9 mg KOH/g, the acid-modified polyolefin (D) has an acid value of more than 10 mg KOH/g and 120 mg KOH/g or less, and a ratio (D/A) of an MFR (190° C., under a load of 2.16 kg) of the acid-modified polyolefin (D) to the MFR (190° C., under a load of 2.16 kg) of the polyolefin (A) is 50 or more. The resin composition (E) of the present invention causes reduction in the amount of deteriorated materials adhering to a screw and/or a die even when long-term continuous melt molding is conducted.

Abstract: The present invention provides a charged particle beam apparatus that covers a wide range of detection angles of charged particles emitted from a sample.

Abstract: A visual field/visual acuity examination system includes a retinal projection head-mounted display; and a terminal device. The terminal device outputs examination image data to the retinal projection head-mounted display; displays an image on a display; and generates an examination image based on the examination image data and display the examination image on the display. The retinal projection head-mounted display inputs the examination image data from the terminal device; generates an image light beam based on the input examination image data and control emission of the image light beam from a light source; causes a scanning minor to scan the image light beam to generate an examination image light beam; and projects the examination image light beam as the examination image on a retina of an eyeball of a test subject after converging the examination image light beam in a vicinity of a pupil of the eyeball.

Abstract: There is provided a multilayer structure having a hard layer (A) and either a resin composition layer (B1) or a resin composition layer (B2), wherein the hard layer (A) has a puncture strength of 40 N/mm or more and 150 N/mm or less; the resin composition layer (B1) is made of a resin comprising an ethylene-vinyl alcohol copolymer (b1) having a melting point Tm1 of 170° C. or more and an ethylene-vinyl alcohol copolymer (b2) having a melting point Tm2 of less than 170° C.; and the resin composition layer (B2) is made of a resin comprising a modified ethylene-vinyl alcohol copolymer containing a modifying group having a primary hydroxy group represented by formula (I). The multilayer structure is excellent in mechanical strength and thermal formability, and when being recovered, allows for melt kneading with less hard spots due to resin deterioration (gelation), showing excellent recyclability.

Abstract: The objective of the present invention is to provide a charged particle detector and a charged particle beam device with which it is possible to acquire a high luminous output while rapidly eliminating charged particles that are incident to a scintillator. In order to achieve said objective the present invention proposes: a charged particle detector provided with a light-emitting unit including a laminated structure obtained by laminating a GaInN-containing layer and a GaN layer, and provided with a conductive layer that is in contact with the GaInN-containing layer on the charged particle incidence surface side of the laminated structure; and a charged particle beam device.

Abstract: The invention aims to provide a rotation tool enabling work without obstructing a view of an operator and facilitating fine-adjustment for the tool. A rotation tool includes a flexible shaft including a tool portion at one end and a grip portion at the other end; and a cylindrical exterior body including curved portion on at least a part thereof, wherein a spiral protrusion is formed on at least a part of the shaft and a spiral groove is formed on at least a part of the curved portion, and the shaft is configured to be movable inside the exterior body by screwing the spiral protrusion and the spiral groove to each other.