Abstract: A light detection and ranging (LIDAR) sensor includes a first reflective surface configured to oscillate about a first rotation axis to deflect a light beam into an environment; and a second reflective surface configured to oscillate about a second rotation axis to guide light received from the environment onto a photodetector of the LIDAR sensor. The first rotation axis and the second rotation axis extend parallel to one another. The LIDAR sensor also includes a control circuit configured to drive the first reflective surface to oscillate with a first maximum deflection angle about the first rotation axis, and to drive the second reflective surface to oscillate with a second maximum deflection angle about the second rotation axis, the first maximum deflection angle being greater than the second maximum deflection angle, and an area of the first reflective surface is less than an area of the second reflective surface.

Abstract: An oscillator system includes an electrostatic oscillator structure configured to oscillate about an axis based on a deflection that varies over time; an actuator configured to drive the electrostatic oscillator structure about the axis, the actuator including a first capacitive element having a first capacitance dependent on the deflection and a second capacitive element having a second capacitance dependent on the deflection; a sensing circuit configured to receive a first displacement current from the first capacitive element and a second displacement current from the second capacitive element, to integrate the first displacement current to generate a first capacitive charge value, and to integrate the second displacement current to generate a second capacitive charge value; and a measurement circuit configured to receive the first and the second capacitive charge values and to measure the deflection of the electrostatic oscillator structure based on the first and the second capacitive charge values.

Abstract: A Light Detection and Ranging (LIDAR) system integrated in a vehicle includes a LIDAR transmitter configured to transmit laser beams into a field of view, the field of view having a center of projection, and the LIDAR transmitter including a laser to generate the laser beams transmitted into the field of view. The LIDAR system further includes a LIDAR receiver including at least one photodetector configured to receive a reflected light beam and generate electrical signals based on the reflected light beam. The LIDAR system further includes a controller configured to receive feedback information and modify a center of projection of the field of view in a vertical direction based on the feedback information.

Abstract: A light scanning system includes a transmitter configured to transmit a transmit light beam along a transmission path; a microelectromechanical system (MEMS) mirror arranged on the transmission path and configured to oscillate about a first scanning axis to steer the transmit light beam in a first dimension; a macro scanner arranged on the transmission path and on a receiver path, the macro scanner configured to rotate about a second scanning axis to steer the transmit light beam in a second dimension, where the macro scanner is further configured to receive a receive light beam that is produced from the transmit light beam via backscattering, and where the macro scanner is configured to direct the receive light beam further along the receiver path; and a photodetector configured to receive the receive light beam from the macro scanner and generate a measurement signal representative of the receive light beam.

Abstract: A Light Detection and Ranging (LIDAR) receiver includes a receiver optics configured to receive at least one laser beam and direct the at least one laser beam along a receiver path; at least one silicon photomultiplier (SiPM) pixel including an array of single-photon avalanche diode (SPAD) pixels, the at least one SiPM pixel configured to generate at least one electrical signal based on the at least one laser beam; and a spatial filter arranged between the receiver optics and the at least one SiPM pixel, the spatial filter including an aperture located at a focal point of the receiver optics that is configured to permit a passage of the at least one laser beam therethrough and spread the at least one laser beam across the array of SPAD pixels in at least one direction.

Abstract: An oscillator system includes an electrostatic oscillator structure configured to oscillate about an axis based on a deflection that varies over time; an actuator configured to drive the electrostatic oscillator structure about the axis, the actuator including a first capacitive element having a first capacitance dependent on the deflection and a second capacitive element having a second capacitance dependent on the deflection; a sensing circuit configured to receive a first displacement current from the first capacitive element and a second displacement current from the second capacitive element, to integrate the first displacement current to generate a first capacitive charge value, and to integrate the second displacement current to generate a second capacitive charge value; and a measurement circuit configured to receive the first and the second capacitive charge values and to measure the deflection of the electrostatic oscillator structure based on the first and the second capacitive charge values.

Abstract: An oscillator system includes an electrostatic oscillator structure configured to oscillate about an axis based on a deflection that varies over time; an actuator configured to drive the electrostatic oscillator structure about the axis, the actuator including a first capacitive element having a first capacitance dependent on the deflection and a second capacitive element having a second capacitance dependent on the deflection; a sensing circuit configured to receive a first displacement current from the first capacitive element and a second displacement current from the second capacitive element, to integrate the first displacement current to generate a first capacitive charge value, and to integrate the second displacement current to generate a second capacitive charge value; and a measurement circuit configured to receive the first and the second capacitive charge values and to measure the deflection of the electrostatic oscillator structure based on the first and the second capacitive charge values.

Abstract: A LIDAR system includes a receiver configured to receive a reflected light beam from a receiving direction, the reflected light beam having an oblong shape that extends in a lengthwise direction. The LIDAR receiver includes a two-dimensional (2D) photodetector array including a plurality of pixel rows and a plurality of pixel columns, wherein the reflected light beam, incident on the 2D photodetector array, extends in the lengthwise direction along at least one receiving pixel column of the plurality of pixel columns according to the receiving direction; an analog readout circuit including a plurality of output channels configured to read out electrical signals; and a multiplexer configured to, for each reading cycle, selectively couple receiving pixels of the at least one receiving column to the plurality of output channels based on the receiving direction, while decoupling non-receiving pixels from the plurality of output channels based on the receiving direction.

Abstract: A digital light detector includes a clock signal generator configured to generate a clock signal comprised of clock pulses generated at a predetermined frequency; a single-photon avalanche diode (SPAD) configured to turn on and generate an avalanche current in response to receiving a photon, the SPAD including an internal capacitor coupled internally between an anode terminal and an cathode terminal; and an active quenching-recharging circuit that is triggered by the clock signal. The active quenching-recharging circuit is configured to be activated and deactivated based on the clock signal, where the active quenching-recharging circuit is configured to recharge the internal capacitor on a condition the active quenching-recharging circuit is activated, and where the active quenching-recharging circuit is configured to discharge the internal capacitor on a condition the active quenching-recharging circuit is deactivated.

Abstract: A MEMS device includes a body pivoting around a pivot axis, a support, and a suspension structure mechanically coupling the body to the support. The suspension structure includes a torsion element defining the pivot axis, and first and second spring elements extending with an angle relative to the pivot axis on opposing sides of the torsion element so that a distance between at least portions of the first and second spring elements is changing in the direction of the pivot axis. The extension of the first and second spring elements in the direction of the pivot axis is larger than the extension of the torsion element in the direction of the pivot axis.

Abstract: An oscillator system includes an electrostatic oscillator structure configured to oscillate about an axis based on a deflection that varies over time; an actuator configured to drive the electrostatic oscillator structure about the axis, the actuator including a first capacitive element having a first capacitance dependent on the deflection and a second capacitive element having a second capacitance dependent on the deflection; a sensing circuit configured to receive a first displacement current from the first capacitive element and a second displacement current from the second capacitive element, to integrate the first displacement current to generate a first capacitive charge value, and to integrate the second displacement current to generate a second capacitive charge value; and a measurement circuit configured to receive the first and the second capacitive charge values and to measure the deflection of the electrostatic oscillator structure based on the first and the second capacitive charge values.

Abstract: A Light Detection and Ranging (LIDAR) receiver includes a receiver optics configured to receive at least one laser beam and direct the at least one laser beam along a receiver path; at least one silicon photomultiplier (SiPM) pixel including an array of single-photon avalanche diode (SPAD) pixels, the at least one SiPM pixel configured to generate at least one electrical signal based on the at least one laser beam; and a spatial filter arranged between the receiver optics and the at least one SiPM pixel, the spatial filter including an aperture located at a focal point of the receiver optics that is configured to permit a passage of the at least one laser beam therethrough and spread the at least one laser beam across the array of SPAD pixels in at least one direction.

Abstract: Disclosed is an apparatus which has, among other things, a MEMS device with a first measurement arrangement for capturing a measurement variable (X1) based on a physical variable, which has a useful variable component (N1) and a first disturbance variable component (Z1), and a second measurement arrangement for capturing a second disturbance variable component (Z2). The apparatus furthermore has a disturbance compensation circuit which is configured to combine the second disturbance variable component (Z2) and the measurement variable (X1) with one another and to obtain a disturbance-compensated measurement variable (Xcomp). The MEMS device is arranged in a housing, wherein the MEMS device is in immediate mechanical contact with the housing by way of at least 50% of a MEMS device surface.

Abstract: A digital light detector includes a clock signal generator configured to generate a clock signal comprised of clock pulses generated at a predetermined frequency; a single-photon avalanche diode (SPAD) configured to turn on and generate an avalanche current in response to receiving a photon, the SPAD including an internal capacitor coupled internally between an anode terminal and an cathode terminal; and an active quenching-recharging circuit that is triggered by the clock signal. The active quenching-recharging circuit is configured to be activated and deactivated based on the clock signal, where the active quenching-recharging circuit is configured to recharge the internal capacitor on a condition the active quenching-recharging circuit is activated, and where the active quenching-recharging circuit is configured to discharge the internal capacitor on a condition the active quenching-recharging circuit is deactivated.

Abstract: A device is provided for detecting and/or regulating an amplitude of an oscillation of an oscillatory body about an oscillation axis, wherein a change in a capacitance between at least one electrode of the oscillatory body and a stationary electrode takes place during the oscillation of the oscillatory body. The device comprises a detection circuit for detecting a signal representing a measure of the change in capacitance; and an evaluation circuit for determining information from the signal, wherein the evaluation circuit is designed to calculate the amplitude of the oscillation of the oscillatory body from the determined information and an ascertained period of the oscillation of the oscillatory body and/or to regulate the amplitude of the oscillation of the oscillatory body using the determined information and the ascertained period of the oscillation of the oscillatory body.

Abstract: A Light Detection and Ranging (LIDAR) system integrated in a vehicle includes a LIDAR transmitter configured to transmit laser beams into a field of view, the field of view having a center of projection, and the LIDAR transmitter including a laser to generate the laser beams transmitted into the field of view. The LIDAR system further includes a LIDAR receiver including at least one photodetector configured to receive a reflected light beam and generate electrical signals based on the reflected light beam. The LIDAR system further includes a controller configured to receive feedback information and modify a center of projection of the field of view in a vertical direction based on the feedback information.

Abstract: A light detection and ranging (LIDAR) sensor includes a first reflective surface configured to oscillate about a first rotation axis to deflect a light beam into an environment; and a second reflective surface configured to oscillate about a second rotation axis to guide light received from the environment onto a photodetector of the LIDAR sensor. The first rotation axis and the second rotation axis extend parallel to one another. The LIDAR sensor also includes a control circuit configured to drive the first reflective surface to oscillate with a first maximum deflection angle about the first rotation axis, and to drive the second reflective surface to oscillate with a second maximum deflection angle about the second rotation axis, the first maximum deflection angle being greater than the second maximum deflection angle, and an area of the first reflective surface is less than an area of the second reflective surface.

Abstract: A LIDAR system includes a receiver configured to receive a reflected light beam from a receiving direction, the reflected light beam having an oblong shape that extends in a lengthwise direction. The LIDAR receiver includes a two-dimensional (2D) photodetector array including a plurality of pixel rows and a plurality of pixel columns, wherein the reflected light beam, incident on the 2D photodetector array, extends in the lengthwise direction along at least one receiving pixel column of the plurality of pixel columns according to the receiving direction; an analog readout circuit including a plurality of output channels configured to read out electrical signals; and a multiplexer configured to, for each reading cycle, selectively couple receiving pixels of the at least one receiving column to the plurality of output channels based on the receiving direction, while decoupling non-receiving pixels from the plurality of output channels based on the receiving direction.

Abstract: A device is provided for detecting and/or regulating an amplitude of an oscillation of an oscillatory body about an oscillation axis, wherein a change in a capacitance between at least one electrode of the oscillatory body and a stationary electrode takes place during the oscillation of the oscillatory body. The device comprises a detection circuit for detecting a signal representing a measure of the change in capacitance; and an evaluation circuit for determining information from the signal, wherein the evaluation circuit is designed to calculate the amplitude of the oscillation of the oscillatory body from the determined information and an ascertained period of the oscillation of the oscillatory body and/or to regulate the amplitude of the oscillation of the oscillatory body using the determined information and the ascertained period of the oscillation of the oscillatory body.

Abstract: A MEMS device includes a body pivoting around a pivot axis, a support, and a suspension structure mechanically coupling the body to the support. The suspension structure includes a torsion element defining the pivot axis, and first and second spring elements extending with an angle relative to the pivot axis on opposing sides of the torsion element so that a distance between at least portions of the first and second spring elements is changing in the direction of the pivot axis. The extension of the first and second spring elements in the direction of the pivot axis is larger than the extension of the torsion element in the direction of the pivot axis.