Patents by Inventor Marcus Johannes Henricus van Dal

Marcus Johannes Henricus van Dal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230047356
    Abstract: A semiconductor device is provided. The semiconductor device includes a gate layer, a semiconductor layer and a ferroelectric layer disposed between the gate layer and the semiconductor layer. The semiconductor layer includes a first material containing a Group III element, a rare-earth element and a Group VI element, the ferroelectric layer includes a second material containing a Group III element, a rare-earth element and a Group V element and the gate layer includes a third material containing a Group III element and a rare-earth element. A method of fabricating a semiconductor device is also provided.
    Type: Application
    Filed: August 13, 2021
    Publication date: February 16, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Oreste Madia, Georgios Vellianitis, Gerben Doornbos, Marcus Johannes Henricus Van Dal
  • Patent number: 11581424
    Abstract: In a method of manufacturing a semiconductor device, a gate structure is formed over a fin structure. A source/drain region of the fin structure is recessed. A first semiconductor layer is formed over the recessed source/drain region. A second semiconductor layer is formed over the first semiconductor layer. The fin structure is made of SixGe1-x, where 0?x?0.3, the first semiconductor layer is made of SiyGe1-y, where 0.45?y?1.0, and the second semiconductor layer is made of SizGe1-z, where 0?z?0.3.
    Type: Grant
    Filed: March 29, 2019
    Date of Patent: February 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Martin Christopher Holland, Marcus Johannes Henricus Van Dal
  • Publication number: 20230041622
    Abstract: A ferroelectric memory device includes a substrate, a gate electrode, a ferroelectric layer, and a pair of source/drain electrodes. The gate electrode is disposed over the substrate. The ferroelectric layer at least covers two adjacent side surfaces of the gate electrode. The pair of source/drain electrodes is over the substrate and disposed on two opposite sides of the gate electrode respectively.
    Type: Application
    Filed: February 11, 2022
    Publication date: February 9, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Oreste Madia, Georgios Vellianitis, Gerben Doornbos, Marcus Johannes Henricus Van Dal
  • Patent number: 11574927
    Abstract: A semiconductor device includes a gate electrode, a channel layer, and a ferroelectric layer. The ferroelectric layer includes a monocrystalline region located between the gate electrode and the channel layer to serve as a gate dielectric, and a polycrystalline region located at an edge of the gate electrode. A method for manufacturing the semiconductor device is also disclosed.
    Type: Grant
    Filed: April 16, 2021
    Date of Patent: February 7, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Marcus Johannes Henricus Van Dal, Georgios Vellianitis, Gerben Doornbos
  • Patent number: 11569244
    Abstract: A memory cell comprises a nanowire structure comprising a channel region and source/drain regions of a transistor. The nanowire structure also comprises as first conductor of a capacitive device as a vertical extension of the nanowire structure.
    Type: Grant
    Filed: March 12, 2021
    Date of Patent: January 31, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Gerben Doornbos, Marcus Johannes Henricus Van Dal
  • Patent number: 11569352
    Abstract: A transistor, integrated semiconductor device and methods of making are provided. The transistor includes a dielectric layer having a plurality of dielectric protrusions, a channel layer conformally covering the protrusions of the dielectric layer to form a plurality of trenches between two adjacent dielectric protrusion, a gate layer disposed on the channel layer. The gate layer 106 has a plurality of gate protrusions fitted into the trenches. The transistor also includes active regions aside the gate layer. The active regions are electrically connected to the channel layer.
    Type: Grant
    Filed: April 5, 2021
    Date of Patent: January 31, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Marcus Johannes Henricus van Dal, Gerben Doornbos, Georgios Vellianitis
  • Patent number: 11557678
    Abstract: A transistor includes a first gate electrode, a composite channel layer, a first gate dielectric layer, and source/drain contacts. The composite channel layer is over the first gate electrode and includes a first capping layer, a crystalline semiconductor oxide layer, and a second capping layer stacked in sequential order. The first gate dielectric layer is located between the first gate electrode and the composite channel layer. The source/drain contacts are disposed on the composite channel layer.
    Type: Grant
    Filed: October 22, 2020
    Date of Patent: January 17, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Marcus Johannes Henricus Van Dal, Blandine Duriez, Georgios Vellianitis, Gerben Doornbos, Mauricio Manfrini
  • Patent number: 11557726
    Abstract: Provided herein are wafers that can be used to align carbon nanotubes, as well as methods of making and using the same. Such wafers include alignment areas that have four sides and a surface charge, where the alignment areas are surrounded by areas that have a surface charge of a different polarity. Methods of the disclosure may include depositing and selectively etching a number of hardmasks on a substrate. The described methods may also include depositing a carbon nanotube on such a wafer.
    Type: Grant
    Filed: October 12, 2020
    Date of Patent: January 17, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Timothy Vasen, Marcus Johannes Henricus Van Dal, Gerben Doornbos, Matthias Passlack
  • Publication number: 20230012239
    Abstract: A transistor includes a vertical stack containing, in order from bottom to top or from top to bottom, a gate electrode, a gate dielectric, and an active layer and located over a substrate. The active layer includes an amorphous semiconductor material. A crystalline source region including a first portion of a crystalline semiconductor material overlies, and is electrically connected to, a first end portion of the active layer. A crystalline drain region including a second portion of the crystalline semiconductor material overlies, and is electrically connected to, a second end portion of the active layer.
    Type: Application
    Filed: May 6, 2022
    Publication date: January 12, 2023
    Inventors: Georgios Vellianitis, Marcus Johannes Henricus Van Dal, Gerben Doombos, Mauricio Manfrini
  • Publication number: 20220393033
    Abstract: Semiconductor structures and methods for manufacturing the same are provided. The semiconductor structure includes an interconnect structure and an electrode layer formed over the interconnect structure. The semiconductor structure also includes a gate dielectric layer formed over the electrode layer and an oxide semiconductor layer formed over the gate dielectric layer. The semiconductor structure also includes an indium-containing feature covering a surface of the oxide semiconductor layer and a source/drain contact formed over the indium-containing feature.
    Type: Application
    Filed: September 3, 2021
    Publication date: December 8, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Marcus Johannes Henricus VAN DAL, Gerben DOORNBOS, Georgios VELLIANITIS, Mauricio MANFRINI
  • Publication number: 20220384584
    Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device has a semiconductor layer and a gate structure located on the semiconductor layer. The semiconductor device has source and drain terminals disposed on the semiconductor layer, and a binary oxide layer located between the semiconductor layer and the source and drain terminals.
    Type: Application
    Filed: July 31, 2022
    Publication date: December 1, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Georgios Vellianitis, Gerben Doornbos, Marcus Johannes Henricus Van Dal
  • Publication number: 20220376075
    Abstract: A transistor may be provided by forming, in a forward order or in a reverse order, a gate electrode, a semiconducting metal oxide liner, a gate dielectric, and an active layer over a substrate, and by forming a source electrode and a drain electrode on end portions of the active layer. The semiconducting metal oxide liner comprises a thin semiconducting metal oxide material that functions as a hydrogen barrier material.
    Type: Application
    Filed: September 27, 2021
    Publication date: November 24, 2022
    Inventors: Mauricio MANFRINI, Marcus Johannes Henricus Van Dal, Georgios Vellianitis, Gerben Doornbos
  • Publication number: 20220376078
    Abstract: Semiconductor devices and methods of forming the same are provided. A semiconductor device according to the present disclosure includes a ferroelectric structure including a channel region and a source/drain region, a gate dielectric layer disposed over the channel region of the ferroelectric structure, a gate electrode disposed on the gate dielectric layer, and a source/drain contact disposed on the source/drain region of the ferroelectric structure. The ferroelectric structure includes gallium nitride, indium nitride, or indium gallium nitride. The ferroelectric structure is doped with a dopant.
    Type: Application
    Filed: July 20, 2022
    Publication date: November 24, 2022
    Inventors: Gerben Doornbos, Marcus Johannes Henricus van Dal, Georgios Vellianitis
  • Publication number: 20220367687
    Abstract: In a method of manufacturing a semiconductor device, a gate structure is formed over a fin structure. A source/drain region of the fin structure is recessed. A first semiconductor layer is formed over the recessed source/drain region. A second semiconductor layer is formed over the first semiconductor layer. The fin structure is made of SixGe1-x, where 0?x?0.3, the first semiconductor layer is made of SiyGe1-y, where 0.45?y?1.0, and the second semiconductor layer is made of SizGe1-z, where 0?z?0.3.
    Type: Application
    Filed: July 18, 2022
    Publication date: November 17, 2022
    Inventors: Martin Christopher HOLLAND, Marcus Johannes Henricus VAN DAL
  • Publication number: 20220367666
    Abstract: Semiconductor devices and methods of forming the same are provided. A semiconductor device according to the present disclosure includes a first gate electrode, a ferroelectric insulating layer over the first gate electrode, a semiconductor member over the ferroelectric insulating layer, a gate dielectric layer over the semiconductor member, and a second gate electrode over the gate dielectric layer.
    Type: Application
    Filed: July 26, 2022
    Publication date: November 17, 2022
    Inventors: Marcus Johannes Henricus van Dal, Gerben Doornbos, Georgios Vellianitis
  • Publication number: 20220367515
    Abstract: A device includes a multi-layer stack, a channel layer, a ferroelectric layer and buffer layers. The multi-layer stack is disposed on a substrate and includes a plurality of conductive layers and a plurality of dielectric layers stacked alternately. The channel layer penetrates through the plurality of conductive layers and the plurality of dielectric layers. The ferroelectric layer is disposed between the channel layer and each of the plurality of conductive layers and the plurality of dielectric layers. The buffer layers include a metal oxide, and one of the buffer layers is disposed between the ferroelectric layer and each of the plurality of dielectric layers.
    Type: Application
    Filed: July 27, 2022
    Publication date: November 17, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Chieh Lu, Georgios Vellianitis, Marcus Johannes Henricus Van Dal, Sai-Hooi Yeong, Yu-Ming Lin
  • Publication number: 20220359009
    Abstract: A memory device is provided, which may include a first electrode, a memory layer stack including at least one semiconducting metal oxide layer and at least one hydrogen-containing metal layer, and a second electrode. A semiconductor device is provided, which may include a semiconducting metal oxide layer containing a source region, a drain region, and a channel region, a hydrogen-containing metal layer located on a surface of the channel region, and a gate electrode located on the hydrogen-containing metal layer. Each hydrogen-containing metal layer may include at least one metal selected from platinum, iridium, osmium, and ruthenium at an atomic percentage that is at least 90%, and may include hydrogen atoms at an atomic percentage in a range from 0.001% to 10%. Hydrogen atoms may be reversibly impregnated into a respective semiconducting metal oxide layer to change resistivity and to encode a memory bit.
    Type: Application
    Filed: July 25, 2022
    Publication date: November 10, 2022
    Inventors: Marcus Johannes Henricus VAN DAL, Gerben DOORNBOS, Georgios VELLIANITIS, Blandine DURIEZ, Mauricio MANFRINI
  • Publication number: 20220352070
    Abstract: The present disclosure relates to a method to form an integrated chip including a filament via. In some embodiments, a lower metal layer comprising a first metal line and a second metal line is formed over a substrate. A filament dielectric layer is formed over the lower metal layer. An upper metal layer comprising a first metal line and a second metal line is formed over the filament dielectric layer. A first contact is formed over the upper metal layer. A filament formation bias is applied through the first contact to form a first filament via through the filament dielectric layer and electrically connecting the first metal line of the lower metal layer and the first metal line of the upper metal layer.
    Type: Application
    Filed: July 18, 2022
    Publication date: November 3, 2022
    Inventors: Mauricio Manfrini, Marcus Johannes Henricus van Dal
  • Patent number: 11482609
    Abstract: Semiconductor devices and methods of forming the same are provided. A semiconductor device according to the present disclosure includes a ferroelectric structure including a channel region and a source/drain region, a gate dielectric layer disposed over the channel region of the ferroelectric structure, a gate electrode disposed on the gate dielectric layer, and a source/drain contact disposed on the source/drain region of the ferroelectric structure. The ferroelectric structure includes gallium nitride, indium nitride, or indium gallium nitride. The ferroelectric structure is doped with a dopant.
    Type: Grant
    Filed: May 29, 2020
    Date of Patent: October 25, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Gerben Doornbos, Marcus Johannes Henricus van Dal, Georgios Vellianitis
  • Publication number: 20220336477
    Abstract: A semiconductor device includes a gate electrode, a channel layer, and a ferroelectric layer. The ferroelectric layer includes a monocrystalline region located between the gate electrode and the channel layer to serve as a gate dielectric, and a polycrystalline region located at an edge of the gate electrode. A method for manufacturing the semiconductor device is also disclosed.
    Type: Application
    Filed: April 16, 2021
    Publication date: October 20, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Marcus Johannes Henricus VAN DAL, Georgios VELLIANITIS, Gerben DOORNBOS