Abstract: A vacuum pumping arrangement comprises a first pump which has a first inlet and a first outlet. The first inlet is fluidly connected to a first common pumping line. The first common pumping line includes a plurality of first pumping line inlets each of which is fluidly connectable to a least one process chamber within a group of process chambers that form a semiconductor fabrication tool. The vacuum pumping arrangement also includes a reserve pump which has a reserve inlet and a reserve outlet. The reserve inlet is selectively fluidly connectable to each process chamber within the group of process chambers that form the semiconductor fabrication tool. The vacuum pumping arrangement additionally includes a controller which is configured to selectively fluidly isolate the pump from one or more given process chambers and selectively fluidly connect the reserve pump with the said one or more given process chambers.

Abstract: Lifting devices include a tube with a first slot and a second slot. The devices also include an insert with a first insert projection connected to a second insert projection by a central portion. The first insert projection extends through the first slot and the second insert projection extends through the second slot. A first plate and a second plate are each connected to the central portion of the insert. Additionally provided are methods of lifting a tanker truck or other structures using the disclosed lifting devices.

Abstract: A deployable structure for use in establishing a reflectarray antenna is provided that includes a flexible reflectarray and a deployment structure that includes an endless pantograph for deploying the flexible reflectarray from a folded, undeployed state towards a deployed state in which the flexible reflectarray is substantially planar. In a particular embodiment, the deployment structure includes a plurality of tapes that engage the endless pantograph and are used to establish a positional relationship between the deployed reflectarray and another component of the reflectarray antenna.

Abstract: A deployable structure for use in establishing a reflectarray antenna is provided that includes a flexible reflectarray and a deployment structure that includes an endless pantograph for deploying the flexible reflectarray from a folded, undeployed state towards a deployed state in which the flexible reflectarray is substantially planar. In a particular embodiment, the deployment structure includes a plurality of tapes that engage the endless pantograph and are used to establish a positional relationship between the deployed reflectarray and another component of the reflectarray antenna.

Abstract: Multi-layer devices comprising a layer of an electrochromic lithium nickel oxide composition on a first substrate, the lithium nickel oxide composition comprising lithium, nickel and a Group 5 metal selected from niobium, tantalum and a combination thereof.

Abstract: Multi-layer devices comprising a layer of an electrochromic lithium nickel oxide composition on a first substrate, the lithium nickel oxide composition comprising lithium, nickel and a Group 4 metal selected from titanium, zirconium, hafnium and a combination thereof.

Abstract: Process for forming a multi-layer electrochromic structure, the process comprising depositing a film of a liquid mixture onto a surface of a substrate, and treating the deposited film to form an anodic electrochromic layer, the liquid mixture comprising a continuous phase and a dispersed phase, the dispersed phase comprising metal oxide particles, metal alkoxide particles, metal alkoxide oligomers, gels or particles, or a combination thereof having a number average size of at least 5 nm.

Abstract: Illustrative embodiments disclose systems for sharing, among a group of consumers, data provided by a contributor. Some embodiments are well-suited for real-time distribution of data developing from ongoing incidents, and may be useful, for example, for emergency management. Illustrative embodiments provide a cloud-based system having tenants that are data contributors and data consumers. The system receives, from each contributor, both data and sharing rules that dictate whether and how that data may be shared, and with whom (which consumer or consumers), and then provide data to such consumer or consumers according to the sharing rules.

Abstract: Multi-layer devices comprising a layer of an electrochromic lithium nickel oxide composition on a first substrate, the lithium nickel oxide composition comprising lithium, nickel and a Group 5 metal selected from niobium, tantalum and a combination thereof.

Abstract: A vacuum pumping arrangement comprising multiple pumping stages for evacuating a process chamber and a method of cleaning the vacuum pumping arrangement is discussed. The vacuum pumping arrangement comprises: at least one turbomolecular pumping stage; at least one further pumping stage downstream of the turbomolecular pumping stage; and at least one inlet for admitting radicals into the vacuum pumping arrangement, the at least one inlet being located downstream of the turbomolecular stage and upstream of at least one of the at least one further pumping stage.

Abstract: A turbomolecular pump and method and apparatus for controlling the pressure in a process chamber using such a pump is disclosed. The turbomolecular comprises: a rotor comprising a plurality of blades on a rotatable shaft; a control motor for driving the rotatable shaft; wherein the control motor is sized to output a power that is more than three times larger than a power required to drive the shaft at a constant velocity that is sufficiently high to provide an exhaust pressure of 5 millibars.

Abstract: A vacuum pumping and/or abatement system for evacuating and/or abating fluid from an entity, the system comprising: a first module comprising a vacuum pumping apparatus for pumping the fluid from the entity and/or an abatement apparatus for abating the fluid evacuated from the entity; and a second module arranged adjacent to the first module in a first system dimension; wherein the first and second modules each have a maximum size in the first system dimension that is a respective integer multiple of a common fixed system value.

Abstract: A fuel nozzle assembly includes a flange body. The flange body includes a base portion that defines an aperture. The flange body is connected to a conduit. The flange body and the conduit define a fuel flow passage to a fuel plenum of the fuel nozzle assembly. The fuel nozzle assembly further includes an insert that is partially disposed within the aperture of the base portion. The insert includes an orifice disposed within the aperture of the base portion and a forward portion of the insert extends axially outwardly from the aperture. The orifice is in fluid communication with the fuel flow passage.

Abstract: An inspection system may include an optical component configured to deliver inspection light to a subject and a detector configured to obtain an image of the subject based on the inspection light delivered to the subject. The inspection system may also include a processor in communication with the optical component and the detector. The processor may be configured to: measure an aberration of the optical component based on the image of the subject obtained by the detector; and adjust the optical component to compensate for a change in the aberration.

Abstract: Process for forming a multi-layer electrochromic structure, the process comprising depositing a film of a liquid mixture onto a surface of a substrate, and treating the deposited film to form an anodic electrochromic layer, the liquid mixture comprising a continuous phase and a dispersed phase, the dispersed phase comprising metal oxide particles, metal alkoxide particles, metal alkoxide oligomers, gels or particles, or a combination thereof having a number average size of at least 5 nm.

Abstract: Multi-layer devices comprising a layer of an electrochromic lithium nickel oxide composition on a first substrate, the lithium nickel oxide composition comprising lithium, nickel and a Group 4 metal selected from titanium, zirconium, hafnium and a combination thereof.

Abstract: An apparatus and method for supplying gas to improve heat transfer between a wafer and chuck is disclosed. The apparatus comprises at least one processing chamber comprising a chuck for mounting a semiconductor wafer; at least one processing chamber vacuum pump for evacuating the at least one processing chamber; and a gas supply apparatus for supplying gas to the chuck for providing cooling to a backside of the semiconductor wafer, the gas supply apparatus comprising: a conduit for connecting to a gas supply; a gas supply apparatus vacuum pump, an inlet of the gas supply apparatus vacuum pump being connected to the conduit; the conduit comprising a junction connecting to a further conduit the further conduit being in fluid communication with the chuck.

Abstract: The present disclosure is directed to an end cover assembly for a combustor of a turbomachine. The end cover assembly includes an end cover and a bundled tube fuel nozzle assembly positioned downstream from the end cover. The bundled tube fuel nozzle assembly includes a plurality of fuel nozzle tubes. A flame detector sight tube couples to the end cover. The flame detector sight tube is aligned with one of the fuel nozzle tubes.

Abstract: An endcover assembly for a combustor includes an endcover and a fuel nozzle rigidly connected to the endcover. The fuel nozzle includes a plurality of tubes that extends axially through a first plate, a fuel plenum and a second plate where each tube includes an inlet defined upstream of the first plate and an outlet disposed downstream from the second plate. The endcover assembly further includes an inlet flow conditioner having a forward end connected to the endcover and an aft end axially spaced from the forward end. The inlet flow conditioner circumferentially surrounds at least a portion of the fuel nozzle. A support plate is joined to the aft end of the inlet flow conditioner. Each tube of the fuel nozzle extends through a corresponding tube hole defined by the support plate. The fuel nozzle is connected to the support plate.

Abstract: Lifting devices are provided. The devices include a tube with a first slot and a second slot. The devices also include an insert with a first insert projection connected to a second insert projection by a central portion. The first insert projection extends through the first slot and the second insert projection extends through the second slot. A first plate and a second plate are each connected to the central portion of the insert.