Patents by Inventor Mark D. Smith
Mark D. Smith has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10095122Abstract: A lithography system includes an illumination source, a pattern mask, and an optical element configured to expose a sample with an image of the pattern mask for the fabrication of one or more printed device structures and one or more metrology target structures. The pattern mask includes a device pattern mask area and a metrology target pattern mask area. The device pattern mask area includes a set of device pattern elements distributed with a device pitch. The metrology target pattern mask area includes a set of metrology target pattern elements. The one or more printed metrology target structures include a set of metrology target elements distributed with a metrology target pitch. Regions of the metrology target pattern mask area include sub-resolution features having widths smaller than the resolution of the optical element such that the sub-resolution pattern elements are not included on the one or more printed metrology target structures.Type: GrantFiled: October 10, 2016Date of Patent: October 9, 2018Assignee: KLA-Tencor CorporationInventors: Myungjun Lee, Mark D. Smith
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Publication number: 20180253016Abstract: A process control system includes a controller configured to generate a reference overlay signature based on one or more overlay reference layers of a sample, extrapolate the reference overlay signature to a set of correctable fields for the exposure of a current layer of the sample to generate a full-field reference overlay signature, identify one or more alignment fields of the set of correctable fields, generate an alignment-correctable signature by modeling alignment corrections for the set of correctable fields, subtract the alignment-correctable signature from the full-field reference overlay signature to generate feedforward overlay corrections for the current layer when the one or more overlay reference layers are the same as the one or more alignment reference layers, generate lithography tool corrections based on the feedforward overlay corrections, and provide the lithography tool corrections for the current layer to the lithography tool.Type: ApplicationFiled: December 15, 2017Publication date: September 6, 2018Inventors: Onur Nihat Demirer, William Pierson, Mark D. Smith, Jeremy S. Nabeth, Miguel Garcia-Medina, Lipkong Yap
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Patent number: 10030965Abstract: Methods and systems for monitoring parameters characterizing a set of hot spot structures fabricated at different locations on a semiconductor wafer are presented herein. The hot spot structures are device structures that exhibit sensitivity to process variations and give rise to limitations on permissible process variations that must be enforced to prevent device failures and low yield. A trained hot spot measurement model is employed to receive measurement data generated by one or more metrology systems at one or more metrology targets and directly determine values of one or more hot spot parameters. The hot spot measurement model is trained to establish a functional relationship between one or more characteristics of a hot spot structure under consideration and corresponding measurement data associated with measurements of at least one metrology target on the same wafer. A fabrication process parameter is adjusted based on the value of a measured hot spot parameter.Type: GrantFiled: May 6, 2016Date of Patent: July 24, 2018Assignee: KLA-Tencor CorporationInventors: Stilian Ivanov Pandev, Sanjay Kapasi, Mark D. Smith, Ady Levy
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Patent number: 10024654Abstract: The determination of in-plane distortions of a substrate includes measuring one or more out-of-plane distortions of the substrate in an unchucked state, determining an effective film stress of a film on the substrate in the unchucked state based on the measured out-of-plane distortions of the substrate in the unchucked state, determining in-plane distortions of the substrate in a chucked state based on the effective film stress of the film on the substrate in the unchucked state and adjusting at least one of a process tool or an overlay tool based on at least one of the measured out-of-plane distortions or the determined in-plane distortions.Type: GrantFiled: April 5, 2016Date of Patent: July 17, 2018Assignee: KLA-Tencor CorporationInventors: Mark D. Smith, Jose Solomon, Stuart Sherwin, Walter Mieher, Ady Levy
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Publication number: 20180196358Abstract: A lithography system includes an illumination source, one or more projection optical elements, and a pattern mask. The illumination source includes one or more illumination poles. The pattern mask includes a set of focus-sensitive mask elements periodically distributed with a pitch, wherein the set of focus-sensitive mask elements is configured to diffract illumination from the one or more illumination poles. The pitch is selected such that two diffraction orders of illumination associated with each of the one or more illumination poles are asymmetrically distributed in a pupil plane of the one or more projection optical elements. Further, the one or more projection optical elements are configured to expose a sample with an image of the set of focus-sensitive pattern mask elements based on the two diffraction orders of illumination associated with each of the one or more illumination poles.Type: ApplicationFiled: January 24, 2017Publication date: July 12, 2018Inventors: Myungjun Lee, Stewart Robertson, Mark D. Smith, Pradeep Subrahmanyan
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Patent number: 10018919Abstract: A lithography system includes an illumination source including two illumination poles separated along a first direction and symmetrically distributed around an optical axis, a pattern mask to receive illumination from the illumination source, and a set of projection optics to generate an image corresponding to the pattern mask onto a sample. The pattern mask includes a metrology target pattern mask and device pattern mask elements. The device pattern mask elements are distributed along the first direction with a device separation distance. The metrology target pattern mask includes a set of metrology target pattern mask elements having a diffraction pattern corresponding to that of the device pattern mask elements. A metrology target generated on the sample associated with the metrology target pattern mask is characterizable along a second direction and has printing characteristics corresponding to those of device pattern elements generated on the sample associated with the device pattern mask elements.Type: GrantFiled: July 29, 2016Date of Patent: July 10, 2018Assignee: KLA-Tencor CorporationInventors: Myungjun Lee, Mark D. Smith
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Patent number: 10007191Abstract: In some embodiments, a method may include improving a development process of a photoresist. The method may include simulating a negative-tone development process of a photoresist. The method may include determining a reaction of a developer with a soluble photoresist surface. Determining the reaction of the developer may include applying a reaction rate constant at a power of a reaction order to a blocked polymer concentration to yield a resist dissolution rate of soluble resist comprising the dissolution-limited regime of development. The method may include determining a flux of the developer into exposed and partially soluble resist. Determining the flux of the developer may include applying a vector valued diffusion coefficient of the developer dependent upon the blocked polymer concentration to a gradient of developer concentration to an expansion rate of insoluble resist comprising the expansion-controlled regime of development.Type: GrantFiled: August 9, 2016Date of Patent: June 26, 2018Assignee: KLA-Tencor CorporationInventors: John J. Biafore, Mark D. Smith, John S. Graves, David A. Blankenship, Alessandro Vaglio Pret
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Publication number: 20180173839Abstract: A metrology system includes a controller communicatively coupled to a metrology tool. The controller may generate a three-dimensional model of a sample, generate a predicted metrology image corresponding to a predicted analysis of the sample with the metrology tool based on the three-dimensional model, evaluate two or more candidate metrology recipes for extracting the metrology measurement from the one or more predicted metrology images, select, based on one or more selection metrics, a metrology recipe from the two or more candidate metrology recipes for extracting a metrology measurement from an image of the structure from the metrology tool, receive an output metrology image of a fabricated structure from the metrology tool based on a metrology measurement of the fabricated structure, and extract the metrology measurement associated with the fabricated structure from the output metrology image based on the metrology recipe.Type: ApplicationFiled: November 13, 2017Publication date: June 21, 2018Inventors: Chao Fang, Mark D. Smith, Brian Duffy
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Publication number: 20180157784Abstract: Metrology targets and target design methods are provided, in which target elements are defined by replacing elements from a periodic pattern having a pitch p, by assist elements having at least one geometric difference from the replaced elements, to form a composite periodic structure that maintains the pitch p as a single pitch. Constructing targets within the bounds of compatibility with advanced multiple patterning techniques improves the fidelity of the targets and fill factor modulation enables adjustment of the targets to produce sufficient metrology sensitivity for extracting the overlay while achieving process compatibility of the targets.Type: ApplicationFiled: November 4, 2016Publication date: June 7, 2018Inventors: Vladimir Levinski, Eitan Hajaj, Tal Itzkovich, Sharon Aharon, Michael E. Adel, Yuri Paskover, Daria Negri, Yuval Lubashevsky, Amnon Manassen, Myungjun Lee, Mark D. Smith
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Publication number: 20180096906Abstract: A system is disclosed. The system includes a tool cluster. The tool cluster includes a first deposition tool configured to deposit a first layer on a wafer. The tool cluster additionally includes an interferometer tool configured to obtain one or more measurements of the wafer. The tool cluster additionally includes a second deposition tool configured to deposit a second layer on the wafer. The tool cluster additionally includes a vacuum assembly. One or more correctables configured to adjust at least one of the first deposition tool or the second deposition tool are determined based on the one or more measurements. The one or more measurements are obtained between the deposition of the first layer and the deposition of the second layer without breaking the vacuum generated by the vacuum assembly.Type: ApplicationFiled: September 18, 2017Publication date: April 5, 2018Inventors: Ady Levy, Mark D. Smith
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Publication number: 20180053174Abstract: A card actuated automated banking machine (152, 198, 200) includes a plurality of transaction function devices. The transaction function devices include a card reader (170), a printer (174), a bill dispenser (176), a display (182), a check imaging device (186), and at least one processor (190). The machine is operative, responsive to receiving a check and certification data, to dispense cash in exchange for the check. The person presenting the check to the machine need not provide user identifying inputs through input devices of the machine in order to receive cash for the check. Furthermore, prior to accepting the check as a payment, the person can communicate with at least one computer (204) through at least one consumer interface device (208) to verify that the check is payable for the check amount.Type: ApplicationFiled: October 20, 2017Publication date: February 22, 2018Inventors: Mark D. Smith, David E. Kolinski-Schultz, Dale H. Blackson, Natarajan Ramachandran
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Publication number: 20180017873Abstract: In some embodiments, a method may include improving a development process of a photoresist. The method may include simulating a negative-tone development process of a photoresist. The method may include determining a reaction of a developer with a soluble photoresist surface. Determining the reaction of the developer may include applying a reaction rate constant at a power of a reaction order to a blocked polymer concentration to yield a resist dissolution rate of soluble resist comprising the dissolution-limited regime of development. The method may include determining a flux of the developer into exposed and partially soluble resist. Determining the flux of the developer may include applying a vector valued diffusion coefficient of the developer dependent upon the blocked polymer concentration to a gradient of developer concentration to an expansion rate of insoluble resist comprising the expansion-controlled regime of development.Type: ApplicationFiled: August 9, 2016Publication date: January 18, 2018Inventors: John J. Biafore, Mark D. Smith, John S. Graves, David A. Blankenship, Alessandro Vaglio Pret
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Publication number: 20170343903Abstract: A lithography system includes an illumination source including two illumination poles separated along a first direction and symmetrically distributed around an optical axis, a pattern mask to receive illumination from the illumination source, and a set of projection optics to generate an image corresponding to the pattern mask onto a sample. The pattern mask includes a metrology target pattern mask and device pattern mask elements. The device pattern mask elements are distributed along the first direction with a device separation distance. The metrology target pattern mask includes a set of metrology target pattern mask elements having a diffraction pattern corresponding to that of the device pattern mask elements. A metrology target generated on the sample associated with the metrology target pattern mask is characterizable along a second direction and has printing characteristics corresponding to those of device pattern elements generated on the sample associated with the device pattern mask elements.Type: ApplicationFiled: July 29, 2016Publication date: November 30, 2017Inventors: Myungjun Lee, Mark D. Smith
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Patent number: 9824338Abstract: A card actuated automated banking machine (152, 198, 200) includes a plurality of transaction function devices. The transaction function devices include a card reader (170), a printer (174), a bill dispenser (176), a display (182), a check imaging device (186), and at least one processor (190). The machine is operative, responsive to receiving a check and certification data, to dispense cash in exchange for the check. The person presenting the check to the machine need not provide user identifying inputs through input devices of the machine in order to receive cash for the check. Furthermore, prior to accepting the check as a payment, the person can communicate with at least one computer (204) through at least one consumer interface device (208) to verify that the check is payable for the check amount.Type: GrantFiled: January 24, 2017Date of Patent: November 21, 2017Assignee: Diebold Nixdorf, IncorporatedInventors: Mark D. Smith, David E. Kolinski-Schultz, Dale H. Blackson, Natarajan Ramachandran
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Publication number: 20170299685Abstract: Various communication systems may benefit from suitable antenna systems. For example, unmanned aircraft may benefit from systems and methods for providing a distributed airborne collision avoidance system antenna array. An apparatus can include a transceiver configured to transmit and receive avionics signals at a host vehicle. The apparatus can also include an interface configured to communicate with an array of a plurality of avionics receivers, wherein the avionics receivers are configured to receive the avionics signals at the host vehicle.Type: ApplicationFiled: September 28, 2016Publication date: October 19, 2017Applicant: Aviation Communication & Surveillance Systems LLCInventors: Robert J. McCullen, Mark D. Smith
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Publication number: 20170287754Abstract: A semiconductor tool includes an illumination source to generate an illumination beam, one or more illumination optical elements to direct a portion of the illumination beam to a sample, a detector, one or more collection optical elements to direct radiation emanating from the sample to the detector, and a controller communicatively coupled to the detector. The controller is configured to measure alignment at a plurality of locations across the sample to generate alignment data, select an analysis area for alignment zone determination, divide the analysis area into two or more alignment zones having different alignment signatures; model the alignment data of at least a first alignment zone of the two or more alignment zones using a first alignment model, and model the alignment data of at least a second alignment zone of the two or more alignment zones using a second alignment model different than the first alignment model.Type: ApplicationFiled: March 6, 2017Publication date: October 5, 2017Inventors: Jeremy Nabeth, Onur N. Demirer, Ramkumar Karur-Shanmugam, Choon George Hoong Hoo, Christian Sparka, Hoyoung Heo, Stuart Sherwin, Fatima Anis, Mark D. Smith, William Pierson
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Patent number: 9679278Abstract: A banking system controlled responsive to data bearing records includes a card reader that can read identifying data from user cards. The system can authorize operation of an automated banking machine responsive to the read data. The system can provide an electronic transaction receipt to the machine user. A bank computer is operable to submit the receipt to a system address on record with the bank. The address can correspond to an e-mail address, phone number, or other address associated with an account involved in the transaction. The receipt can also include an image associated with the transaction. The system cal also operate to image a check deposited at the machine, and then electronically send the image to the check maker, the payee, and/or a clearinghouse.Type: GrantFiled: December 17, 2013Date of Patent: June 13, 2017Assignee: Diebold Self-Service SystemsInventors: Jay Paul Drummond, Mark D. Smith, Michael A. Meffie, Daniel D. Wasil
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Patent number: 9679116Abstract: A processor based method for measuring dimensional properties of a photoresist profile by determining a number acid generators and quenchers within a photoresist volume, determining a number of photons absorbed by the photoresist volume, determining a number of the acid generators converted to acid, determining a number of acid and quencher reactions within the photoresist volume, calculating a development of the photoresist volume, producing with the processor a three-dimensional simulated scanning electron microscope image of the photoresist profile created by the development of the photoresist volume, and measuring the dimensional properties of the photoresist profile.Type: GrantFiled: August 28, 2013Date of Patent: June 13, 2017Assignee: KLA-Tencor CorporationInventors: John J. Biafore, Mark D. Smith, John S. Graves, III, David Blankenship
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Publication number: 20170132585Abstract: A card actuated automated banking machine (152, 198, 200) includes a plurality of transaction function devices. The transaction function devices include a card reader (170), a printer (174), a bill dispenser (176), a display (182), a check imaging device (186), and at least one processor (190). The machine is operative, responsive to receiving a check and certification data, to dispense cash in exchange for the check. The person presenting the check to the machine need not provide user identifying inputs through input devices of the machine in order to receive cash for the check. Furthermore, prior to accepting the check as a payment, the person can communicate with at least one computer (204) through at least one consumer interface device (208) to verify that the check is payable for the check amount.Type: ApplicationFiled: January 24, 2017Publication date: May 11, 2017Inventors: Mark D. Smith, David E. Kolinski-Schultz, Dale H. Blackson, Natarajan Ramachandran
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Publication number: 20170045826Abstract: A lithography system includes an illumination source and a set of projection optics. The illumination source directs a beam of illumination from an off-axis illumination pole to a pattern mask. The pattern mask includes a set of pattern elements to generate a set of diffracted beams including illumination from the illumination pole. At least two diffracted beams of the set of diffracted beams received by the set of projection optics are asymmetrically distributed in a pupil plane of the set of projection optics. The at least two diffracted beams of the set of diffracted beams are asymmetrically incident on the sample to form a set of fabricated elements corresponding to an image of the set of pattern elements. The set of fabricated elements on the sample includes one or more indicators of a location of the sample along an optical axis of the set of projection optics.Type: ApplicationFiled: June 6, 2016Publication date: February 16, 2017Inventors: Myungjun Lee, Mark D. Smith, Sanjay Kapasi, Stilian Pandev, Dimitry Sanko, Pradeep Subrahmanyan, Ady Levy