Abstract: An acoustic energy tool comprising a crystal for generating acoustic energy when a volage is applied to the crystal, and a resonator. The resonator has a solid outer structure with the crystal being attached to the solid outer structure, with the resonator being comprised of a material that transmits the acoustic energy through the resonator. The tool includes a curved surface that focuses the acoustic energy being transmitted through the resonator and a fluid passageway that extends through the resonator for allowing a fluid to flow through the resonator. The acoustic energy being focused by the curved surface is concentrated in the fluid passageway so that it causes cavitation of the fluid in at least part of the fluid passageway. The cavitation of the fluid is used to break up clumps that form in the fluid or to generate reactive oxygen species.

Abstract: A method and tool for cleaning the edge exclusion region of a semiconductor wafer, including the bevel regions. The tool comprises a crystal for generating acoustic energy, a resonator for propagating the acoustic energy away from the resonator, and a cleaning zone where the substrate is cleaned. The resonator is shaped to focus the acoustic energy on a focal point located in the cleaning zone. The method comprises causing a circular substrate to be rotated, positioning a crystal and shaped resonator transducer near the substrate, causing a volume of cleaning fluid to contact at least part of the substrate, generating acoustic energy by applying power to the crystal, focusing the acoustic energy by transmitting the acoustic energy through the resonator, and transmitting the focused acoustic energy into at least some of the volume of cleaning fluid that is in contact with the substrate.

Abstract: A fluid manifold comprised of a manifold adapted to deliver fluid directly into a gap formed between a surface of a substrate and an acoustic transducer. The fluid is delivered into the gap at a variable rate along a length of the manifold. Preferably, the manifold includes a plurality of apertures positioned along the length of the manifold for dispensing the fluid into the gap at the variable rate.

Abstract: A fluid manifold comprised of a manifold adapted to deliver fluid directly into a gap formed between a surface of a substrate and an acoustic transducer. The fluid is delivered into the gap at a variable rate along a length of the manifold. Preferably, the manifold includes a plurality of apertures positioned along the length of the manifold for dispensing the fluid into the gap at the variable rate.

Abstract: A fluid manifold comprised of a manifold adapted to deliver fluid directly into a gap formed between a surface of a substrate and an acoustic transducer. The fluid is delivered into the gap at a variable rate along a length of the manifold. Preferably, the manifold includes a plurality of apertures positioned along the length of the manifold for dispensing the fluid into the gap at the variable rate.

Abstract: A fluid manifold comprised of a manifold adapted to deliver fluid directly into a gap formed between a surface of a substrate and an acoustic transducer. The fluid is delivered into the gap at a variable rate along a length of the manifold. Preferably, the manifold includes a plurality of apertures positioned along the length of the manifold for dispensing the fluid into the gap at the variable rate.

Abstract: A method for characterizing cavitation that occurs in a fluid exposed to acoustic energy. The method comprises the steps of exposing a volume of process fluid to acoustic energy at a specified power level; measuring the photon output from the fluid over a period of time; and when the photon output deviates from a desired level, initiating a remedial step to bring the photon output back to approximately the desired level.

Abstract: A method for characterizing cavitation that occurs in a fluid exposed to acoustic energy. The method comprises the steps of exposing a volume of process fluid to acoustic energy at a specified power level; measuring the photon output from the fluid over a period of time; and when the photon output deviates from a desired level, initiating a remedial step to bring the photon output back to approximately the desired level.

Abstract: An apparatus and method for characterizing cavitation that occurs in a fluid exposed to acoustic energy. The apparatus comprises a vessel for holding the fluid; an acoustic energy generating means for generating acoustic energy, the acoustic energy generating means being positioned to transmit the acoustic energy into the fluid while the fluid is held in the vessel; and a cavitation detection means for detecting cavitation in the fluid held in the vessel. In a preferred embodiment, the cavitation detection means comprises a light detection means, such as a photomultiplier tube, that detects sonoluminescent emission from the fluid. The method comprises the steps of exposing a volume of process fluid to acoustic energy at a specified power level; measuring the photon output from the fluid over a period of time; and when the photon output deviates from a desired level, initiating a remedial step to bring the photon output back to approximately the desired level.

Abstract: A shipping container for a motorized vehicle comprises a base frame and a top frame, each constructed of rigid tubing. The base frame has a plurality of tire rests on which respective wheels of the motorized vehicle will be placed. In addition, the base frame has a plurality of base sockets located at respective corners thereof. Each of the base sockets is oriented in an upward direction. The top frame of the shipping container includes a plurality of top sockets located at respective corners thereof. The top sockets are oriented in a downward direction so as to be opposed to the base sockets. A plurality of elongate posts respectively extend between each opposed pair of sockets such that the top frame will be supported in spaced apart relation from the base frame.

Abstract: A shipping container for a motorized vehicle comprises a base frame and a top frame, each constructed of rigid tubing. The base frame has a plurality of tire rests on which respective wheels of the motorized vehicle will be placed. In addition, the base frame has a plurality of base sockets located at respective corners thereof. Each of the base sockets is oriented in an upward direction. The top frame of the shipping container includes a plurality of top sockets located at respective corners thereof. The top sockets are oriented in a downward direction so as to be opposed to the base sockets. A plurality of elongate posts respectively extend between each opposed pair of sockets such that the top frame will be supported in spaced apart relation from the base frame.

Abstract: A transducer comprising an acoustic energy generating means and a resonator. The acoustic energy generating means generates acoustic energy and is adapted for delivering an approximately uniform amount of acoustic energy to each unit of surface area on a substrate in a given time period when the substrate is rotating. The acoustic energy generating means has a surface area that is less than the surface area of the substrate, and may comprise two or more piezoelectric crystal segments that are separately controllable with respect to power and/or time. When assembled, the two more piezoelectric crystal segments give the acoustic energy generating means a rectangular shape, a wedge shape or a triangle shape. The resonator is attached to the acoustic energy generating means for transmitting the acoustic energy to the substrate.

Abstract: An acoustic transducer comprised of a resonator, an acoustic energy generating means, such as one or more piezoelectric crystals, and a bonding layer comprised of indium or tin for attaching the acoustic energy generating means to the resonator. The resonator comprises a material selected from the group consisting of quartz, sapphire, silicon carbide, silicon nitride, aluminum, ceramics and stainless steel. The resonator may form a detachable part of a container or the acoustic energy generating means may be attached directly to a side or to the bottom of the container, in which case a part of the container acts as the resonator.

Abstract: A transducer comprised of a resonator and a piezoelectric crystal for cleaning single items such as semiconductor wafers and flat panel displays. The resonator is an elongated piece of material having a cross section that is trapezoidal in shape. The parallel sides of the trapezoid form the top and bottom ends of the resonator and the nonparallel sides of the trapezoid focus the acoustic energy on the bottom end of the resonator.

Abstract: A shipping container for a motorized vehicle comprises a base frame and a top frame, each constructed of rigid tubing. The base frame has a plurality of tire rests on which respective wheels of the motorized vehicle will be placed. In addition, the base frame has a plurality of base sockets located at respective corners thereof. Each of the base sockets is oriented in an upward direction. The top frame of the shipping container includes a plurality of top sockets located at respective corners thereof. The top sockets are oriented in a downward direction so as to be opposed to the base sockets. A plurality of elongate posts respectively extend between each opposed pair of sockets such that the top frame will be supported in spaced apart relation from the base frame.

Abstract: A transducer comprising an acoustic energy generating means and a resonator. The acoustic energy generating means generates acoustic energy and is adapted for delivering an approximately uniform amount of acoustic energy to each unit of surface area on a substrate in a given time period when the substrate is rotating. The acoustic energy generating means has a surface area that is less than the surface area of the substrate, and may comprise two or more piezoelectric crystal segments that are separately controllable with respect to power and/or time. When assembled, the two more piezoelectric crystal segments give the acoustic energy generating means a rectangular shape, a wedge shape or a triangle shape. The resonator is attached to the acoustic energy generating means for transmitting the acoustic energy to the substrate.

Abstract: A megasonic cleaning system comprised of a container, a resonator, one or more piezoelectric crystals and a bonding layer comprised of indium or tin for attaching the piezoelectric crystal to the resonator. The resonator comprises a material selected from the group consisting of quartz, sapphire, silicon carbide, silicon nitride, aluminum, ceramics and stainless steel. The piezoelectric crystal may be attached directly to a side or to the bottom of the container, in which case the container acts as the resonator.

Abstract: A transducer comprising an acoustic energy generating means and a resonator. The acoustic energy generating means generates acoustic energy and is adapted for delivering an approximately uniform amount of acoustic energy to each unit of surface area on a substrate in a given time period when the substrate is rotating. The acoustic energy generating means has a surface area that is less than the surface area of the substrate, and may comprise a wedge shaped piezoelectric crystal. A resonator is attached to the acoustic energy generating means for transmitting the acoustic energy to the substrate.

Abstract: A shipping container for a motorized vehicle comprises a base frame and a top frame, each constructed of rigid tubing. The base frame has a plurality of tire rests on which respective wheels of the motorized vehicle will be placed. In addition, the base frame has a plurality of base sockets located at respective corners thereof. Each of the base sockets is oriented in an upward direction. The top frame of the shipping container includes a plurality of top sockets located at respective corners thereof. The top sockets are oriented in a downward direction so as to be opposed to the base sockets. A plurality of elongate posts respectively extend between each opposed pair of sockets such that the top frame will be supported in spaced apart relation from the base frame.

Abstract: A shipping container for a motorized vehicle comprises a base frame and a top frame, each constructed of rigid tubing. The base frame has a plurality of tire rests on which respective wheels of the motorized vehicle will be placed. In addition, the base frame has a plurality of base sockets located at respective corners thereof. Each of the base sockets is oriented in an upward direction. The top frame of the shipping container includes a plurality of top sockets located at respective corners thereof. The top sockets are oriented in a downward direction so as to be opposed to the base sockets. A plurality of elongate posts respectively extend between each opposed pair of sockets such that the top frame will be supported in spaced apart relation from the base frame.