Patents by Inventor Mark Klare

Mark Klare has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Second implanted matrix for agglomeration control and thermal stability
    Patent number: 5739064
    Abstract: A semiconductor device on a semiconductor wafer, wherein improvements are realized to agglomeration control, resistivity, and thermal stability of a titanium disilicide layer on a polysilicon layer. Agglomeration control is achieved through the use of two carefully selected low dose barrier diffusion matrix implants into the polysilicon layer, one of which is situated at an interface between the layer of polysilicon and the resultant layer of titanium disilicide film after heat treatment, and the other of which is near the surface of the resultant layer of titanium disilicide film after heat treatment.
    Type: Grant
    Filed: November 27, 1996
    Date of Patent: April 14, 1998
    Assignee: Micron Technology, Inc.
    Inventors: Yong-Jun Hu, Pai-Hung Pan, Mark Klare