Patents by Inventor Mark Lantz
Mark Lantz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 9055701Abstract: An improved alignment precision of Micro-Electromechanical Systems (MEMS). A method includes two parts of MEMS separated by at least one rolling element having a first diameter, where the rolling element is maintained on one of the two parts using a thermally dissipative material, horizontally aligning the two parts by pivoting one of the two parts about the rolling element, and locking the two parts together.Type: GrantFiled: March 13, 2013Date of Patent: June 9, 2015Assignee: International Business Machines CorporationInventors: Stefano S. Oggioni, Michel Despont, Mark Lantz, Thomas Albrecht
-
Patent number: 8707553Abstract: A method and system for improving alignment precision of a pair of MEMS parts. The method involves stacking the two parts such that at least one rolling element is between facing surfaces of said two parts, and each rolling element has a first diameter and an axis of rotation parallel to the facing surfaces. The first and second of a pair of MEMS parts respectively include a first alignment pad and a second alignment pad and a liquid drop formed in contact with both alignment pads can align the two parts which can then be locked together by solidification of solder while remaining spaced by the first diameter.Type: GrantFiled: May 17, 2005Date of Patent: April 29, 2014Assignee: International Business Machines CorporationInventors: Stefano S. Oggioni, Michel Despont, Mark Lantz, Thomas Albrecht
-
Patent number: 8373431Abstract: A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning the storage medium. The storage medium may be comprised in a substrate. The probe comprises a cantilever that comprises terminals serving as electrical contacts an being during operation of the probe mechanically fixed to a probe-holding structure, which may be a common frame of the data storage device. A probe further comprises a supporting structure, to which the terminals are mechanically directly coupled or coupled via hinges and which extends away from the terminals. A tip with a nanoscale apex is provided. A beam structure comprises a heating resistor and is attached at ends to the supporting structure. The beam structure is thinned at least in a direction parallel to an axis of the tip compared to an area of the supporting structure abutting the beam structure.Type: GrantFiled: March 25, 2008Date of Patent: February 12, 2013Assignee: International Business Machines CorporationInventors: Thomas Albrecht, Michel Despont, Urs T. Duerig, Mark Lantz, Hugo E. Rothuizen, Dorothea W. Wiesmann Rothuizen
-
Patent number: 7849516Abstract: A method of scanning over a substrate includes implementing a write mode of the substrate by scanning a probe across a substrate, the probe having a spring cantilever probe mechanically fixed to a probe holding structure, a tip with a nanoscale apex, and an actuator for lateral positioning of the tip; the actuator comprising a thermally switchable element and a heating element for heating the thermally switchable element; and heating the heating element to a given temperature so as to locally soften a portion of the substrate and applying a force to the softened portion of the substrate through the tip so as to create one or more indentation marks in the softened portion of the substrate.Type: GrantFiled: August 7, 2008Date of Patent: December 7, 2010Assignee: International Business Machines CorporationInventors: Gerd Binnig, Evangelos Elefheriou, Mark Lantz
-
Publication number: 20090211087Abstract: A method and system for improving alignment precision of MEMS parts during manufacturing are disclosed. According to the invention at least one of the MEMS parts comprises a cavity wherein a sphere or bearing is centered and preferably temporary blocked with a temperature dissipative material. When MEMS parts are in contact of the sphere or bearing, the temperature dissipative material is evaporated, offering a very low friction against two facing MEMS parts moving in different directions, enabling a very precise positioning.Type: ApplicationFiled: May 5, 2005Publication date: August 27, 2009Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Stefano S. Oggioni, Michel Despont, Mark Lantz, Thomas Albrecht
-
Patent number: 7482826Abstract: A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning the storage medium. The storage medium may be comprised in a substrate. The probe comprises a cantilever that comprises terminals serving as electrical contacts an being during operation of the probe mechanically fixed to a probe-holding structure, which may be a common frame of the data storage device. A probe further comprises a supporting structure, to which the terminals are mechanically directly coupled or coupled via hinges and which extends away from the terminals. A tip with a nanoscale apex is provided. A beam structure comprises a heating resistor and is attached at ends to the supporting structure. The beam structure is thinned at least in a direction parallel to an axis of the tip compared to an area of the supporting structure abutting the beam structure.Type: GrantFiled: January 13, 2006Date of Patent: January 27, 2009Assignee: International Business Machines CorporationInventors: Thomas Albrecht, Michel Despont, Urs T. Duerig, Mark Lantz, Hugo E. Rothuizen, Dorothea W. Wiesmann Rothuizen
-
Publication number: 20090003189Abstract: A method of scanning over a substrate includes implementing a write mode of the substrate by scanning a probe across a substrate, the probe having a spring cantilever probe mechanically fixed to a probe holding structure, a tip with a nanoscale apex, and an actuator for lateral positioning of the tip; the actuator comprising a thermally switchable element and a heating element for heating the thermally switchable element; and heating the heating element to a given temperature so as to locally soften a portion of the substrate and applying a force to the softened portion of the substrate through the tip so as to create one or more indentation marks in the softened portion of the substrate.Type: ApplicationFiled: August 7, 2008Publication date: January 1, 2009Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Gerd Binnig, Evangelos Elefheriou, Mark Lantz
-
Publication number: 20090003188Abstract: A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning the storage medium. The storage medium may be comprised in a substrate. The probe comprises a cantilever that comprises terminals serving as electrical contacts an being during operation of the probe mechanically fixed to a probe-holding structure, which may be a common frame of the data storage device. A probe further comprises a supporting structure, to which the terminals are mechanically directly coupled or coupled via hinges and which extends away from the terminals. A tip with a nanoscale apex is provided. A beam structure comprises a heating resistor and is attached at ends to the supporting structure. The beam structure is thinned at least in a direction parallel to an axis of the tip compared to an area of the supporting structure abutting the beam structure.Type: ApplicationFiled: March 25, 2008Publication date: January 1, 2009Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Thomas Albrecht, Michel Despont, Urs T. Duerig, Mark Lantz, Hugo Rothuizen, Dorothea W. Wiesmann Rothuizen
-
Patent number: 7437915Abstract: A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning over a storage medium. The probe comprises a spring cantilever being during operation of the probe mechanically fixed to a probe holding structure, a tip with a nanoscale apex and an actuator for lateral positioning of the tip.Type: GrantFiled: January 13, 2006Date of Patent: October 21, 2008Assignee: International Business Machines CorporationInventors: Gerd Binnig, Evangelos Eleftheriou, Mark Lantz
-
Publication number: 20080148824Abstract: A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning over a storage medium. The probe comprises a spring cantilever being during operation of the probe mechanically fixed to a probe holding structure, a tip with a nanoscale apex and an actuator for lateral positioning of the tip.Type: ApplicationFiled: January 13, 2006Publication date: June 26, 2008Inventors: Gerd Binnig, Evangelos Eleftheriou, Mark Lantz
-
Publication number: 20080017978Abstract: A semiconductor device having a higher thermal dissipation efficiency comprises a thermally conducting structure attached to a surface of the semiconductor device via soldering. The thermally conducting structure is essentially formed of a thermally conducting material and comprises an array of freestanding fins, studs or frames, or a grid of connected fins. A process for fabricating such a semiconductor device includes forming a thermally conducting structure on a carrier and attaching the thermally conducting structure formed on the carrier to a surface of the semiconductor device via soldering.Type: ApplicationFiled: September 9, 2007Publication date: January 24, 2008Inventors: Thomas Brunschwiler, Michel Despont, Mark Lantz, Bruno Michel, Peter Vettiger
-
Publication number: 20080011814Abstract: A method and system for efficiently self-aligning parts of a MEMS during manufacturing, as well as controlling distance between these parts, are disclosed. According to the invention each MEMS part comprises at least one pad that is aligned so as to form a pair of pads. In a preferred embodiment, each part comprises three pads. The pad shape of two pairs of pads is rectangular, one pair being rotated of an angle approximately equal to 90° from the other, and the pad shape of the third pair is annular. Therefore, one of the pair of pads allows alignment according to a first direction, a second pair of pads allows alignment according to a second direction, and the third pair of pads allows rotational alignment.Type: ApplicationFiled: November 8, 2004Publication date: January 17, 2008Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Stefano Oggioni, Thomas Albrecht, Michel Despont, Mark Lantz, Michele Castriotta
-
Publication number: 20080013437Abstract: A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning the storage medium. The storage medium may be comprised in a substrate. The probe comprises a cantilever that comprises terminals serving as electrical contacts an being during operation of the probe mechanically fixed to a probe-holding structure, which may be a common frame of the data storage device. A probe further comprises a supporting structure, to which the terminals are mechanically directly coupled or coupled via hinges and which extends away from the terminals. A tip with a nanoscale apex is provided. A beam structure comprises a heating resistor and is attached at ends to the supporting structure. The beam structure is thinned at least in a direction parallel to an axis of the tip compared to an area of the supporting structure abutting the beam structure.Type: ApplicationFiled: January 13, 2006Publication date: January 17, 2008Inventors: Thomas Albrecht, Michel Despont, Urs Duerig, Mark Lantz, Hugo Rothuizen, Dorothea Wiesmann Rothuizen
-
Publication number: 20070242594Abstract: Systems and methods for storing and reading data in a data storage system are provided. The data storage system includes a storage medium for storing data. The storage medium stores data as a plurality of topographical features. Further, the data storage system includes one or more transducer. One or more transducer writes data on the storage medium. Additionally, the data storage medium includes one or more gates. A first voltage bias is applied to one or more gates. The data storage system further includes, one or more read heads. One or more read heads include one or more Floating Gate Transistors (FGTs). The first voltage bias creates an electric field between one or more FGTs and one or more gates. A change in the electric field is detected by one or more FGTs.Type: ApplicationFiled: March 30, 2006Publication date: October 18, 2007Applicant: International Business Machines CorporationInventors: Mark Lantz, Brernd Gotsmann
-
Publication number: 20070234816Abstract: The present invention provides a pressure sensor. The pressure sensor comprises a substrate with several support structures attached to the substrate. The pressure sensor further includes a strut structure integrated with a heating element. The strut structure is engaged with the support structures so as to create an air gap between the heating element and the substrate. The heating element has an electrical resistance proportional to changes in air pressure in the air gap.Type: ApplicationFiled: March 30, 2006Publication date: October 11, 2007Applicant: International Business Machines CorporationInventor: Mark Lantz
-
Publication number: 20070069679Abstract: A servo control system micro-electromechanical systems (MEMS)-based motion control system (and method therefor), includes a motion generator having an inherent stiffness component.Type: ApplicationFiled: September 6, 2006Publication date: March 29, 2007Applicant: International Business Machines CorporationInventors: Sri Sri-Jayantha, Hien Dang, Arun Sharma, Evangelos Eleftheriou, Mark Lantz, Charalampos Pozidis
-
Publication number: 20060082463Abstract: A MEMs-based system (and method), includes a sensor array including at least two sensors providing a basis for ensemble averaging.Type: ApplicationFiled: October 20, 2004Publication date: April 20, 2006Applicant: International Business Machines CorporationInventors: Sri Sri-Jayantha, Arun Sharma, Hien Dang, Evangelos Eleftheriou, Mark Lantz, Charalampos Pozidis
-
Publication number: 20060076918Abstract: A servo control system micro-electromechanical systems (MEMS)-based motion control system (and method therefor), includes a motion generator having an inherent stiffness component.Type: ApplicationFiled: October 3, 2005Publication date: April 13, 2006Applicant: International Business Machines CorporationInventors: Sri Sri-Jayantha, Hien Dang, Arun Sharma, Evangelos Eleftheriou, Mark Lantz, Charalampos Pozidis
-
Publication number: 20060043288Abstract: A cantilever device for scanning a surface comprises a support, a tip platform and a flexible arm arrangement. The tip platform has a plurality of tips. These comprise at least two contact tips providing points of contact with a surface to be scanned, and a scanning tip for scanning the surface, where the scanning tip may be one of the two or more contact tips provided on the platform. The flexible arm arrangement connects the tip platform to the support and allows orientation of the platform, via flexing of the arm arrangement, to bring the contact tips into contact with a surface to be scanned. The platform is then at a well-defined orientation relative to the scan surface, and the scanning tip is appropriately positioned for the scanning operation. Scanning probe microscopes and data storage devices incorporating such cantilever devices are also provided.Type: ApplicationFiled: December 11, 2002Publication date: March 2, 2006Inventors: Gerd Binnig, Michel Despont, Walter Haeberle, Mark Lantz
-
Publication number: 20060039442Abstract: A transducer for detecting movement of an article mounted for movement in a plane, the transducer comprising: a heater facing the plane of movement of the article and having a temperature dependent resistance; and, an edge defined in the article between regions of different thermal conductivity; wherein, as the article describes the movement, the edge moves relative to the heater producing a corresponding variation in heat loss from the heater and a corresponding variation in resistance of the heater.Type: ApplicationFiled: August 22, 2003Publication date: February 23, 2006Inventors: Gerd Binnig, Michel Despot, Mark Lantz, Peter Vettiger