Patents by Inventor Marko Radosavljevic
Marko Radosavljevic has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250008852Abstract: A two-terminal ferroelectric perovskite diode comprises a region of ferroelectric perovskite material positioned adjacent to a region of n-type doped perovskite semiconductor material. Asserting a positive voltage across the diode can cause the polarization of the ferroelectric perovskite material to be set in a first direction that causes the diode to be placed in a low resistance state due to the formation of an accumulation region in the perovskite semiconductor material at the ferroelectric perovskite-perovskite semiconductor boundary. Asserting a negative voltage across the diode can cause the polarization of the ferroelectric perovskite material to be set in a second direction that causes the diode to be placed in a high resistance state due to the formation of a depletion region in the perovskite semiconductor material at the ferroelectric perovskite-perovskite semiconductor material. These non-volatile low and high resistance states enable the diode to be used as a non-volatile memory element.Type: ApplicationFiled: July 1, 2023Publication date: January 2, 2025Applicant: Intel CorporationInventors: Punyashloka Debashis, Dominique A. Adams, Gauri Auluck, Scott B. Clendenning, Arnab Sen Gupta, Brandon Holybee, Raseong Kim, Matthew V. Metz, Kevin P. O'Brien, John J. Plombon, Marko Radosavljevic, Carly Rogan, Hojoon Ryu, Rachel A. Steinhardt, Tristan A. Tronic, I-Cheng Tung, Ian Alexander Young, Dmitri Evgenievich Nikonov
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Publication number: 20250006737Abstract: A material stack comprising a plurality of bi-layers, each bi-layer comprising two semiconductor material layers, is fabricated into a transistor structure including a first stack of channel materials that is coupled to an n-type source and drain and in a vertical stack with a second stack of channel materials that is coupled to a p-type source drain. Within the first stack of channel material layers a first of two semiconductor material layers may be replaced with a first gate stack while within the second stack of channel materials a second of two semiconductor material layers may be replaced with a second gate stack.Type: ApplicationFiled: June 29, 2023Publication date: January 2, 2025Applicant: Intel CorporationInventors: Aryan Navabi-Shirazi, Michael Babb, Kai Loon Cheong, Cheng-Ying Huang, Mohammad Hasan, Leonard P. Guler, Marko Radosavljevic
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Publication number: 20250006738Abstract: Embodiments described herein may be related to apparatuses, processes, systems, and/or techniques for integrating different materials into the channels for stacked transistor devices, for example in a CFET configuration, where the bottom device is an NMOS device and the top device is a PMOS device, or vice versa. Other embodiments may be described and/or claimed.Type: ApplicationFiled: June 30, 2023Publication date: January 2, 2025Inventors: Nicole K. THOMAS, Iulian HETEL, Marko RADOSAVLJEVIC
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Publication number: 20250006839Abstract: A transistor device may include a first perovskite gate material, a first perovskite ferroelectric material on the first gate material, a first p-type perovskite semiconductor material on the first ferroelectric material, a second perovskite ferroelectric material on the first semiconductor material, a second perovskite gate material on the second ferroelectric material, a third perovskite ferroelectric material on the second gate material, a second p-type perovskite semiconductor material on the third ferroelectric material, a fourth perovskite ferroelectric material on the second semiconductor material, a third perovskite gate material on the fourth ferroelectric material, a first source/drain metal adjacent a first side of each of the first semiconductor material and the second semiconductor material, a second source/drain metal adjacent a second side opposite the first side of each of the first semiconductor material and the second semiconductor material, and dielectric materials between the source/drainType: ApplicationFiled: June 28, 2023Publication date: January 2, 2025Applicant: Intel CorporationInventors: Kevin P. O'Brien, Dmitri Evgenievich Nikonov, Rachel A. Steinhardt, Pratyush P. Buragohain, John J. Plombon, Hai Li, Gauri Auluck, I-Cheng Tung, Tristan A. Tronic, Dominique A. Adams, Punyashloka Debashis, Raseong Kim, Carly Rogan, Arnab Sen Gupta, Brandon Holybee, Marko Radosavljevic, Uygar E. Avci, Ian Alexander Young, Matthew V. Metz
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Publication number: 20250006791Abstract: Perovskite oxide field effect transistors comprise perovskite oxide materials for the channel, source, drain, and gate oxide regions. The source and drain regions are doped with a higher concentration of n-type or p-type dopants (depending on whether the transistor is an n-type or p-type transistor) than the dopant concentration in the channel region to minimize Schottky barrier height between the source and drain regions and the source and drain metal contact and contact resistance.Type: ApplicationFiled: July 1, 2023Publication date: January 2, 2025Applicant: Intel CorporationInventors: Rachel A. Steinhardt, Kevin P. O'Brien, Dominique A. Adams, Gauri Auluck, Pratyush P. Buragohain, Scott B. Clendenning, Punyashloka Debashis, Arnab Sen Gupta, Brandon Holybee, Raseong Kim, Matthew V. Metz, John J. Plombon, Marko Radosavljevic, Carly Rogan, Tristan A. Tronic, I-Cheng Tung, Ian Alexander Young, Dmitri Evgenievich Nikonov
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Publication number: 20250006840Abstract: In one embodiment, a negative capacitance transistor device includes a perovskite semiconductor material layer with first and second perovskite conductors on opposite ends of the perovskite semiconductor material layer. The device further includes a dielectric material layer on the perovskite semiconductor material layer between the first and second perovskite conductors, a perovskite ferroelectric material layer on the dielectric material layer, and a third perovskite conductor on the perovskite ferroelectric material layer.Type: ApplicationFiled: June 29, 2023Publication date: January 2, 2025Applicant: INTEL CORPORATIONInventors: Rachel A. Steinhardt, Kevin P. O'Brien, Dmitri Evgenievich Nikonov, John J. Plombon, Tristan A. Tronic, Ian Alexander Young, Matthew V. Metz, Marko Radosavljevic, Carly Rogan, Brandon Holybee, Raseong Kim, Punyashloka Debashis, Dominique A. Adams, I-Cheng Tung, Arnab Sen Gupta, Gauri Auluck, Scott B. Clendenning, Pratyush P. Buragohain, Hai Li
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Publication number: 20250006841Abstract: Technologies for a field effect transistor (FET) with a ferroelectric gate dielectric are disclosed. In an illustrative embodiment, a transistor includes a gate of strontium ruthenate and a ferroelectric gate dielectric layer of barium titanate. In order to prevent migration of ruthenium from the strontium ruthenate to the barium titanate, a barrier layer is placed between the gate and the ferroelectric gate dielectric layer. The barrier layer may be a metal oxide, such as strontium oxide, barium oxide, zirconium oxide, etc.Type: ApplicationFiled: June 30, 2023Publication date: January 2, 2025Applicant: Intel CorporationInventors: Arnab Sen Gupta, Dmitri Evgenievich Nikonov, John J. Plombon, Rachel A. Steinhardt, Punyashloka Debashis, Kevin P. O'Brien, Matthew V. Metz, Scott B. Clendenning, Brandon Holybee, Marko Radosavljevic, Ian Alexander Young, I-Cheng Tung, Sudarat Lee, Raseong Kim, Pratyush P. Buragohain
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Patent number: 12183739Abstract: Integrated circuitry comprising a ribbon or wire (RoW) transistor stack within which the transistors have different threshold voltages (Vt). In some examples, a gate electrode of the transistor stack may include only one workfunction metal. A metal oxide may be deposited around one or more channels of the transistor stack as a solid-state source of a metal oxide species that will diffuse toward the channel region(s). As diffused, the metal oxide may remain (e.g., as a silicate, or hafnate) in close proximity to the channel region, thereby altering the dipole properties of the gate insulator material. Different channels of a transistor stack may be exposed to differing amounts or types of the metal oxide species to provide a range of Vt within the stack. After diffusion, the metal oxide may be stripped as sacrificial, or retained.Type: GrantFiled: December 18, 2020Date of Patent: December 31, 2024Assignee: Intel CorporationInventors: Nicole Thomas, Eric Mattson, Sudarat Lee, Scott B. Clendenning, Tobias Brown-Heft, I-Cheng Tung, Thoe Michaelos, Gilbert Dewey, Charles Kuo, Matthew Metz, Marko Radosavljevic, Charles Mokhtarzadeh
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Publication number: 20240429301Abstract: A transistor device may be formed with a doped perovskite material as a channel region. The doped perovskite material may be formed via an epitaxial growth process from a seed layer, and the channel regions of the transistor device may be formed from lateral overgrowth from the epitaxial growth process.Type: ApplicationFiled: June 26, 2023Publication date: December 26, 2024Applicant: Intel CorporationInventors: Rachel A. Steinhardt, Dmitri Evgenievich Nikonov, Kevin P. O'Brien, John J. Plombon, Tristan A. Tronic, Ian Alexander Young, Matthew V. Metz, Marko Radosavljevic, Carly Rogan, Brandon Holybee, Raseong Kim, Punyashloka Debashis, Dominique A. Adams, I-Cheng Tung, Arnab Sen Gupta, Gauri Auluck, Scott B. Clendenning, Pratyush P. Buragohain
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Patent number: 12148747Abstract: Gallium nitride (GaN) three-dimensional integrated circuit technology is described. In an example, an integrated circuit structure includes a layer including gallium and nitrogen, a plurality of gate structures over the layer including gallium and nitrogen, a source region on a first side of the plurality of gate structures, a drain region on a second side of the plurality of gate structures, the second side opposite the first side, and a drain field plate above the drain region wherein the drain field plate is coupled to the source region. In another example, a semiconductor package includes a package substrate. A first integrated circuit (IC) die is coupled to the package substrate. The first IC die includes a GaN device layer and a Si-based CMOS layer.Type: GrantFiled: September 25, 2020Date of Patent: November 19, 2024Assignee: Intel CorporationInventors: Han Wui Then, Marko Radosavljevic, Pratik Koirala, Nicole K. Thomas, Paul B. Fischer, Adel A. Elsherbini, Tushar Talukdar, Johanna M. Swan, Wilfred Gomes, Robert S. Chau, Beomseok Choi
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Patent number: 12148690Abstract: Embodiments of the invention include a microelectronic device that includes a substrate, at least one dielectric layer on the substrate and a plurality of conductive lines within the at least one dielectric layer. The microelectronic device also includes an air gap structure that is located below two or more of the plurality of conductive lines.Type: GrantFiled: February 17, 2023Date of Patent: November 19, 2024Assignee: Tahoe Research, Ltd.Inventors: Han Wui Then, Sansaptak Dasgupta, Marko Radosavljevic, Sanaz K. Gardner
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Patent number: 12148757Abstract: Disclosed herein are IC structures, packages, and devices that include Si-based semiconductor material stack monolithically integrated on the same support structure as non-Si transistors or other non-Si-based devices. In some aspects, the Si-based semiconductor material stack may be provided by semiconductor regrowth over an insulator material. Providing a Si-based semiconductor material stack monolithically integrated on the same support structure as non-Si based devices may provide a viable approach to integrating Si-based transistors with non-Si technologies because the Si-based semiconductor material stack may serve as a foundation for forming Si-based transistors.Type: GrantFiled: April 22, 2019Date of Patent: November 19, 2024Assignee: Intel CorporationInventors: Nidhi Nidhi, Han Wui Then, Marko Radosavljevic, Sansaptak Dasgupta, Paul B. Fischer, Rahul Ramaswamy, Walid M. Hafez, Johann Christian Rode
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Patent number: 12125888Abstract: A device including a III-N material is described. In an example, the device has terminal structure having a first group III-Nitride (III-N) material. The terminal structure has a central body and a first plurality of fins, and a second plurality of fins, opposite the first plurality of fins. A polarization charge inducing layer is above a first portion of the central body. A gate electrode is above the polarization charge inducing layer. The device further includes a source structure and a drain structure, each including impurity dopants, on opposite sides of the gate electrode and on the plurality of fins, and a source contact on the source structure and a drain contact on the drain structure.Type: GrantFiled: September 29, 2017Date of Patent: October 22, 2024Assignee: Intel CorporationInventors: Marko Radosavljevic, Han Wui Then, Sansaptak Dasgupta
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Publication number: 20240332389Abstract: Embodiments disclosed herein include semiconductor devices and methods of making such devices. In an embodiment, the semiconductor device comprises a plurality of stacked semiconductor channels comprising first semiconductor channels and second semiconductor channels over the first semiconductor channels. In an embodiment a spacing is between the first semiconductor channels and the second semiconductor channels. The semiconductor device further comprises a gate dielectric surrounding individual ones of the semiconductor channels of the plurality of stacked semiconductor channels. In an embodiment, a first workfunction metal surrounds the first semiconductor channels, and a second workfunction metal surrounds the second semiconductor channels.Type: ApplicationFiled: June 6, 2024Publication date: October 3, 2024Inventors: Nicole THOMAS, Michael K. HARPER, Leonard P. GULER, Marko RADOSAVLJEVIC, Thoe MICHAELOS
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Patent number: 12080763Abstract: A transistor includes a polarization layer above a channel layer including a first III-Nitride (III-N) material, a gate electrode above the polarization layer, a source structure and a drain structure on opposite sides of the gate electrode, where the source structure and a drain structure each include a second III-N material. The transistor further includes a silicide on at least a portion of the source structure or the drain structure. A contact is coupled through the silicide to the source or drain structure.Type: GrantFiled: May 26, 2022Date of Patent: September 3, 2024Assignee: Intel CorporationInventors: Sansaptak Dasgupta, Marko Radosavljevic, Han Wui Then, Paul Fischer, Walid Hafez
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Patent number: 12046652Abstract: Embodiments disclosed herein include semiconductor devices and methods of making such devices. In an embodiment, the semiconductor device comprises a plurality of stacked semiconductor channels comprising first semiconductor channels and second semiconductor channels over the first semiconductor channels. In an embodiment a spacing is between the first semiconductor channels and the second semiconductor channels. The semiconductor device further comprises a gate dielectric surrounding individual ones of the semiconductor channels of the plurality of stacked semiconductor channels. In an embodiment, a first workfunction metal surrounds the first semiconductor channels, and a second workfunction metal surrounds the second semiconductor channels.Type: GrantFiled: June 25, 2020Date of Patent: July 23, 2024Assignee: Intel CorporationInventors: Nicole Thomas, Michael K. Harper, Leonard P. Guler, Marko Radosavljevic, Thoe Michaelos
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Publication number: 20240234422Abstract: Embodiments disclosed herein include stacked forksheet transistor devices, and methods of fabricating stacked forksheet transistor devices. In an example, an integrated circuit structure includes a backbone. A first transistor device includes a first vertical stack of semiconductor channels adjacent to an edge of the backbone. A second transistor device includes a second vertical stack of semiconductor channels adjacent to the edge of the backbone. The second transistor device is stacked on the first transistor device.Type: ApplicationFiled: March 22, 2024Publication date: July 11, 2024Inventors: Cheng-Ying HUANG, Gilbert DEWEY, Anh PHAN, Nicole K. THOMAS, Urusa ALAAN, Seung Hoon SUNG, Christopher M. NEUMANN, Willy RACHMADY, Patrick MORROW, Hui Jae YOO, Richard E. SCHENKER, Marko RADOSAVLJEVIC, Jack T. KAVALIEROS, Ehren MANNEBACH
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Patent number: 12034085Abstract: A variable capacitance III-N device having multiple two-dimensional electron gas (2DEG) layers are described. In some embodiments, the device comprises a first source and a first drain; a first polarization layer adjacent to the first source and the first drain; a first channel layer coupled to the first source and the first drain and adjacent to the first polarization layer, the first channel layer comprising a first 2DEG region; a second source and a second drain; a second polarization layer adjacent to the second source and the second drain; and a second channel layer coupled to the second source and the second drain and adjacent to the second polarization layer, the second channel layer comprising a second 2DEG region, wherein the second channel layer is over the first polarization layer.Type: GrantFiled: June 23, 2022Date of Patent: July 9, 2024Assignee: Intel CorporationInventors: Harald Gossner, Peter Baumgartner, Uwe Hodel, Domagoj Siprak, Stephan Leuschner, Richard Geiger, Han Wui Then, Marko Radosavljevic, Sansaptak Dasgupta
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Publication number: 20240222521Abstract: Technologies for ribbon field-effect transistors with variable nanoribbon numbers are disclosed. In an illustrative embodiment, a stack of semiconductor nanoribbons is formed, with each semiconductor nanoribbon having a source region, a channel region, and a drain region. Some or all of the channel regions can be selectively removed, allowing for the drive and/or leakage current to be tuned. In some embodiments, one or more of the semiconductor nanoribbons near the top of the stack can be removed. In other embodiments, one or more of the semiconductor nanoribbons at or closer to the bottom of the stack can be removed.Type: ApplicationFiled: December 30, 2022Publication date: July 4, 2024Applicant: Intel CorporationInventors: Evan A. Clinton, Rohit V. Galatage, Cheng-Ying Huang, Jack T. Kavalieros, Munzarin F. Qayyum, Marko Radosavljevic, Jami A. Wiedemer
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Publication number: 20240222440Abstract: Embodiments described herein may be related to apparatuses, processes, systems, and/or techniques for using layer transfer techniques to bond a silicon layer with a GaN layer, where the silicon layer includes a first portion of a device, for example a transistor, and the GaN layer includes a second portion of the device. Other embodiments may be described and/or claimed.Type: ApplicationFiled: December 28, 2022Publication date: July 4, 2024Inventors: Samuel James BADER, Han Wui THEN, Ibrahim BAN, Heli Chetanbhai VORA, Marko RADOSAVLJEVIC