Patents by Inventor Martin D. Giles

Martin D. Giles has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150325648
    Abstract: Nanowire structures having non-discrete source and drain regions are described. For example, a semiconductor device includes a plurality of vertically stacked nanowires disposed above a substrate. Each of the nanowires includes a discrete channel region disposed in the nanowire. A gate electrode stack surrounds the plurality of vertically stacked nanowires. A pair of non-discrete source and drain regions is disposed on either side of, and adjoining, the discrete channel regions of the plurality of vertically stacked nanowires.
    Type: Application
    Filed: July 20, 2015
    Publication date: November 12, 2015
    Inventors: Stephen M. CEA, Annalisa CAPPELLANI, Martin D. GILES, Rafael RIOS, Seiyon KIM, Kelin J. KUHN
  • Publication number: 20150303258
    Abstract: Methods of forming microelectronic structures are described. Embodiments of those methods include forming a nanowire device comprising a substrate comprising source/drain structures adjacent to spacers, and nanowire channel structures disposed between the spacers, wherein the nanowire channel structures are vertically stacked above each other.
    Type: Application
    Filed: July 1, 2015
    Publication date: October 22, 2015
    Inventors: Kelin J. KUHN, Seiyon KIM, Rafael RIOS, Stephen M. Cea, Martin D. GILES, Annalisa CAPPELLANI, Titash RAKSHIT, Peter CHANG, Willy RACHMADY
  • Patent number: 9129829
    Abstract: Methods of forming microelectronic structures are described. Embodiments of those methods include forming a nanowire device comprising a substrate comprising source/drain structures adjacent to spacers, and nanowire channel structures disposed between the spacers, wherein the nanowire channel structures are vertically stacked above each other.
    Type: Grant
    Filed: May 9, 2014
    Date of Patent: September 8, 2015
    Assignee: Intel Corporation
    Inventors: Kelin J. Kuhn, Seiyon Kim, Rafael Rios, Stephen M. Cea, Martin D. Giles, Annalisa Cappellani, Titash Rakshit, Peter Chang, Willy Rachmady
  • Patent number: 9087863
    Abstract: Nanowire structures having non-discrete source and drain regions are described. For example, a semiconductor device includes a plurality of vertically stacked nanowires disposed above a substrate. Each of the nanowires includes a discrete channel region disposed in the nanowire. A gate electrode stack surrounds the plurality of vertically stacked nanowires. A pair of non-discrete source and drain regions is disposed on either side of, and adjoining, the discrete channel regions of the plurality of vertically stacked nanowires.
    Type: Grant
    Filed: December 23, 2011
    Date of Patent: July 21, 2015
    Assignee: Intel Corporation
    Inventors: Stephen M. Cea, Annalisa Cappellani, Martin D. Giles, Rafael Rios, Seiyon Kim, Kelin J. Kuhn
  • Publication number: 20140326952
    Abstract: Methods of forming microelectronic structures are described. Embodiments of those methods include forming a nanowire device comprising a substrate comprising source/drain structures adjacent to spacers, and nanowire channel structures disposed between the spacers, wherein the nanowire channel structures are vertically stacked above each other.
    Type: Application
    Filed: May 9, 2014
    Publication date: November 6, 2014
    Inventors: Kelin J. KUHN, Seiyon KIM, Rafael RIOS, Stephen M. Cea, Martin D. GILES, Annalisa CAPPELLANI, Titash RAKSHIT, Peter CHANG, Willy RACHMADY
  • Patent number: 8753942
    Abstract: Methods of forming microelectronic structures are described. Embodiments of those methods include forming a nanowire device comprising a substrate comprising source/drain structures adjacent to spacers, and nanowire channel structures disposed between the spacers, wherein the nanowire channel structures are vertically stacked above each other.
    Type: Grant
    Filed: December 1, 2010
    Date of Patent: June 17, 2014
    Assignee: Intel Corporation
    Inventors: Kelin J. Kuhn, Seiyon Kim, Rafael Rios, Stephen M. Cea, Martin D. Giles, Annalisa Cappellani, Titash Rakshit, Peter Chang, Willy Rachmady
  • Publication number: 20140151814
    Abstract: Methods are disclosed for forming fins in transistors. In one embodiment, a method of fabricating a device includes forming silicon fins on a substrate and forming a dielectric layer on the substrate and adjacent to the silicon fins such that an upper region of each silicon fin is exposed. Germanium may then be epitaxially grown germanium on the upper regions of the silicon fins to form germanium fins.
    Type: Application
    Filed: December 21, 2011
    Publication date: June 5, 2014
    Inventors: Martin D. Giles, Tahir Ghani
  • Publication number: 20140070273
    Abstract: A method and a device made according to the method. The method comprises providing a substrate including a first material, and providing a fin including a second material, the fin being disposed on the substrate and having a device active portion, the first material and the second material presenting a lattice mismatch between respective crystalline structures thereof. Providing the fin includes providing a biaxially strained film including the second material on the substrate; and removing parts of the biaxially strained film to form a substantially uniaxially strained fin therefrom.
    Type: Application
    Filed: September 5, 2013
    Publication date: March 13, 2014
    Inventors: Stephen M. Cea, Roza Kotlyar, Jack T. Kavalieros, Martin D. Giles, Tahir Ghani, Kelin J. Kuhn, Markus Kuhn, Nancy M. Zelick
  • Publication number: 20140042386
    Abstract: Nanowire structures having non-discrete source and drain regions are described. For example, a semiconductor device includes a plurality of vertically stacked nanowires disposed above a substrate. Each of the nanowires includes a discrete channel region disposed in the nanowire. A gate electrode stack surrounds the plurality of vertically stacked nanowires. A pair of non-discrete source and drain regions is disposed on either side of, and adjoining, the discrete channel regions of the plurality of vertically stacked nanowires.
    Type: Application
    Filed: December 23, 2011
    Publication date: February 13, 2014
    Inventors: Stephen M. Cea, Annalisa Cappellani, Martin D. Giles, Rafael Rios, Seiyon Kim, Kelin J. Kuhn
  • Publication number: 20140035059
    Abstract: Semiconductor devices having metallic source and drain regions are described. For example, a semiconductor device includes a gate electrode stack disposed above a semiconducting channel region of a substrate. Metallic source and drain regions are disposed above the substrate, on either side of the semiconducting channel region. Each of the metallic source and drain regions has a profile. A first semiconducting out-diffusion region is disposed in the substrate, between the semiconducting channel region and the metallic source region, and conformal with the profile of the metallic source region. A second semiconducting out-diffusion region is disposed in the substrate, between the semiconducting channel region and the metallic drain region, and conformal with the profile of the metallic drain region.
    Type: Application
    Filed: December 19, 2011
    Publication date: February 6, 2014
    Inventors: Martin D. Giles, Annalisa Cappellani, Sanaz Kabehie, Rafael Rios, Cory E. Weber, Aaron A. Budrevich
  • Patent number: 8558279
    Abstract: A method and a device made according to the method. The method comprises providing a substrate including a first material, and providing a fin including a second material, the fin being disposed on the substrate and having a device active portion, the first material and the second material presenting a lattice mismatch between respective crystalline structures thereof. Providing the fin includes providing a biaxially strained film including the second material on the substrate; and removing parts of the biaxially strained film to form a substantially uniaxially strained fin therefrom.
    Type: Grant
    Filed: September 23, 2010
    Date of Patent: October 15, 2013
    Assignee: Intel Corporation
    Inventors: Stephen M. Cea, Roza Kotlyar, Jack T. Kavalieros, Martin D. Giles, Tahir Ghani, Kelin J. Kuhn, Markus Kuhn, Nancy M. Zelick
  • Patent number: 8487348
    Abstract: The present disclosure relates to the field of fabricating microelectronic devices. In at least one embodiment, the present disclosure relates to forming isolation structures in strained semiconductor bodies of non-planar transistors while maintaining strain in the semiconductor bodies.
    Type: Grant
    Filed: August 17, 2012
    Date of Patent: July 16, 2013
    Assignee: Intel Corporation
    Inventors: Stephen M. Cea, Martin D. Giles, Kelin Kuhn, Jack T. Kavalieros, Markus Kuhn
  • Publication number: 20120305990
    Abstract: The present disclosure relates to the field of fabricating microelectronic devices. In at least one embodiment, the present disclosure relates to forming isolation structures in strained semiconductor bodies of non-planar transistors while maintaining strain in the semiconductor bodies.
    Type: Application
    Filed: August 17, 2012
    Publication date: December 6, 2012
    Inventors: Stephen M Cea, Martin D. Giles, Kelin Kuhn, Jack T. Kavalieros, Markus Kuhn
  • Patent number: 8269283
    Abstract: The present disclosure relates to the field of fabricating microelectronic devices. In at least one embodiment, the present disclosure relates to forming isolation structures in strained semiconductor bodies of non-planar transistors while maintaining strain in the semiconductor bodies.
    Type: Grant
    Filed: December 21, 2009
    Date of Patent: September 18, 2012
    Assignee: Intel Corporation
    Inventors: Stephen M. Cea, Martin D. Giles, Kelin Kuhn, Jack T. Kavalieros, Markus Kuhn
  • Publication number: 20120138886
    Abstract: Methods of forming microelectronic structures are described. Embodiments of those methods include forming a nanowire device comprising a substrate comprising source/drain structures adjacent to spacers, and nanowire channel structures disposed between the spacers, wherein the nanowire channel structures are vertically stacked above each other.
    Type: Application
    Filed: December 1, 2010
    Publication date: June 7, 2012
    Inventors: Kelin J. Kuhn, Seiyon Kim, Rafael Rios, Stephen M. Cea, Martin D. Giles, Annalisa Cappellani, Titash Rakshit, Peter Chang, Willy Rachmady
  • Publication number: 20120074464
    Abstract: A method and a device made according to the method. The method comprises providing a substrate including a first material, and providing a fin including a second material, the fin being disposed on the substrate and having a device active portion, the first material and the second material presenting a lattice mismatch between respective crystalline structures thereof. Providing the fin includes providing a biaxially strained film including the second material on the substrate; and removing parts of the biaxially strained film to form a substantially uniaxially strained fin therefrom.
    Type: Application
    Filed: September 23, 2010
    Publication date: March 29, 2012
    Inventors: Stephen M. Cea, Roza Kotlyar, Jack T. Kavalieros, Martin D. Giles, Tahir Ghani, Kelin J. Kuhn, Markus Kuhn, Nancy M. Zelick
  • Publication number: 20110147847
    Abstract: The present disclosure relates to the field of fabricating microelectronic devices. In at least one embodiment, the present disclosure relates to forming isolation structures in strained semiconductor bodies of non-planar transistors while maintaining strain in the semiconductor bodies.
    Type: Application
    Filed: December 21, 2009
    Publication date: June 23, 2011
    Inventors: Stephen M. Cea, Martin D. Giles, Kelin Kuhn, Jack T. Kavalieros, Markus Kuhn
  • Patent number: 7719057
    Abstract: Techniques associated with providing multiple gate insulator thickness for a semiconductor device are generally described. In one example, an apparatus includes a semiconductor fin having an impurity introduced to at least a first side of the fin, a first oxide having a first thickness coupled with the first side of the fin, and a second oxide having a second thickness coupled with a second side of the fin, the second thickness being different from the first thickness as a result of the impurity introduced to the first side of the fin.
    Type: Grant
    Filed: July 30, 2007
    Date of Patent: May 18, 2010
    Assignee: Intel Corporation
    Inventors: Martin D Giles, David L Kencke, Stephen M Cea
  • Patent number: 7679145
    Abstract: A semiconductor substrate having metal oxide semiconductor (MOS) devices, such as an integrated circuit die, is mechanically coupled to a stress structure to apply a stress that improves the performance of at least a portion of the MOS devices on the die.
    Type: Grant
    Filed: August 31, 2004
    Date of Patent: March 16, 2010
    Assignee: Intel Corporation
    Inventors: Jun He, Zhiyong Ma, Jose A. Maiz, Mark Bohr, Martin D. Giles, Guanghai Xu
  • Publication number: 20090152589
    Abstract: A transistor structure that increases uniaxial compressive stress on the channel region of a tri-gate transistor comprises at least two semiconductor bodies formed on a substrate, each semiconductor body having a pair of laterally opposite sidewalls and a top surface, a common source region formed on one end of the semiconductor bodies, wherein the common source region is coupled to all of the at least two semiconductor bodies, a common drain region formed on another end of the semiconductor bodies, wherein the common drain region is coupled to all of the at least two semiconductor bodies, and a common gate electrode formed over the at least two semiconductor bodies, wherein the common gate electrode provides a gate electrode for each of the at least two semiconductor bodies and wherein the common gate electrode has a pair of laterally opposite sidewalls that are substantially perpendicular to the sidewalls of the semiconductor bodies.
    Type: Application
    Filed: December 17, 2007
    Publication date: June 18, 2009
    Inventors: Titash Rakshit, Martin D. Giles, Tahir Ghani, Anand Murthy, Stephen M. Cea