Patents by Inventor Martin J. Koxxy

Martin J. Koxxy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer probe station having environment control enclosure
    Patent number: 7595632
    Abstract: A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
    Type: Grant
    Filed: January 2, 2008
    Date of Patent: September 29, 2009
    Assignee: Cascade Microtech, Inc.
    Inventors: Warren K. Harwood, Paul A. Tervo, Martin J. Koxxy
  • Membrane probing system
    Publication number: 20080252316
    Abstract: A membrane probing assembly includes a probe card with conductors supported thereon, wherein the conductors include at least a signal conductor located between a pair of spaced apart guard conductors. A membrane assembly includes a membrane with contacts thereon, and supporting at least a signal conductor located between a pair of spaced apart guard conductors. The guard conductors of the probe card are electrically interconnected proximate the interconnection between the probe card and the membrane assembly. The guard conductors of the membrane assembly are electrically interconnected proximate the interconnection between the probe card and the membrane assembly.
    Type: Application
    Filed: June 16, 2008
    Publication date: October 16, 2008
    Inventors: Paul A. Tervo, Kenneth R. Smith, Clarence E. Cowan, Mike P. Dauphinais, Martin J. Koxxy
  • Membrane probing system
    Patent number: 7403025
    Abstract: A membrane probing assembly includes a probe card with conductors supported thereon, wherein the conductors include at least a signal conductor located between a pair of spaced apart guard conductors. A membrane assembly includes a membrane with contacts thereon, and supporting at least a signal conductor located between a pair of spaced apart guard conductors. The guard conductors of the probe card are electrically interconnected proximate the interconnection between the probe card and the membrane assembly. The guard conductors of the membrane assembly are electrically interconnected proximate the interconnection between the probe card and the membrane assembly.
    Type: Grant
    Filed: August 23, 2006
    Date of Patent: July 22, 2008
    Assignee: Cascade Microtech, Inc.
    Inventors: Paul A. Tervo, Kenneth R. Smith, Clarence E. Cowan, Mike P. Dauphinais, Martin J. Koxxy
  • Wafer probe station having environment control enclosure
    Patent number: 7348787
    Abstract: A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
    Type: Grant
    Filed: December 22, 2005
    Date of Patent: March 25, 2008
    Assignee: Cascade Microtech, Inc.
    Inventors: Warren K. Harwood, Paul A. Tervo, Martin J. Koxxy
  • Membrane probing system
    Patent number: 7148711
    Abstract: A membrane probing assembly includes a probe card with conductors supported thereon, wherein the conductors include at least a signal conductor located between a pair of spaced apart guard conductors. A membrane assembly includes a membrane with contacts thereon, and supporting at least a signal conductor located between a pair of spaced apart guard conductors. The guard conductors of the probe card are electrically interconnected proximate the interconnection between the probe card and the membrane assembly. The guard conductors of the membrane assembly are electrically interconnected proximate the interconnection between the probe card and the membrane assembly.
    Type: Grant
    Filed: June 3, 2005
    Date of Patent: December 12, 2006
    Assignee: Cascade Microtech, Inc.
    Inventors: Paul A. Tervo, Kenneth R. Smith, Clarence E. Cowan, Mike P. Dauphinais, Martin J. Koxxy
  • Wafer probe station having environment control enclosure
    Patent number: 7009383
    Abstract: A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
    Type: Grant
    Filed: August 25, 2004
    Date of Patent: March 7, 2006
    Assignee: Cascade Microtech, Inc.
    Inventors: Warren K. Harwood, Paul A. Tervo, Martin J. Koxxy
  • Membrane probing system
    Patent number: 6930498
    Abstract: A membrane probing assembly includes a probe card with conductors supported thereon, wherein the conductors include at least a signal conductor located between a pair of spaced apart guard conductors. A membrane assembly includes a membrane with contacts thereon, and supporting at least a signal conductor located between a pair of spaced apart guard conductors. The guard conductors of the probe card are electrically interconnected proximate the interconnection between the probe card and the membrane assembly. The guard conductors of the membrane assembly are electrically interconnected proximate the interconnection between the probe card and the membrane assembly.
    Type: Grant
    Filed: July 29, 2004
    Date of Patent: August 16, 2005
    Assignee: Cascade Microtech, Inc.
    Inventors: Paul A. Tervo, Kenneth R. Smith, Clarence E. Cowan, Mike P. Dauphinais, Martin J. Koxxy
  • Membrane probing system
    Patent number: 6838890
    Abstract: A membrane probing assembly includes a probe card with conductors supported thereon, wherein the conductors include at least a signal conductor located between a pair of spaced apart guard conductors. A membrane assembly includes a membrane with contacts thereon, and supporting at least a signal conductor located between a pair of spaced apart guard conductors. The guard conductors of the probe card are electrically interconnected proximate the interconnection between the probe card and the membrane assembly. The guard conductors of the membrane assembly are electrically interconnected proximate the interconnection between the probe card and the membrane assembly.
    Type: Grant
    Filed: November 29, 2000
    Date of Patent: January 4, 2005
    Assignee: Cascade Microtech, Inc.
    Inventors: Paul A. Tervo, Kenneth R. Smith, Clarence E. Cowan, Mike P. Dauphinais, Martin J. Koxxy
  • Wafer probe station having environment control enclosure
    Patent number: 6801047
    Abstract: A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
    Type: Grant
    Filed: May 19, 2003
    Date of Patent: October 5, 2004
    Assignee: Cascade Microtech, Inc.
    Inventors: Warren K. Harwood, Paul A. Tervo, Martin J. Koxxy
  • Wafer probe station having environment control enclosure
    Publication number: 20030205997
    Abstract: A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
    Type: Application
    Filed: May 19, 2003
    Publication date: November 6, 2003
    Applicant: Cascade Microtech, Inc., an Oregon corporation
    Inventors: Warren K. Harwood, Paul A. Tervo, Martin J. Koxxy
  • Wafer probe station having environment control enclosure
    Patent number: 6636059
    Abstract: A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
    Type: Grant
    Filed: October 9, 2002
    Date of Patent: October 21, 2003
    Assignee: Cascade Microtech, Inc.
    Inventors: Warren K. Harwood, Paul A. Tervo, Martin J. Koxxy
  • Membrane probing system
    Publication number: 20030132767
    Abstract: A membrane probing assembly includes a probe card with conductors supported thereon, wherein the conductors include at least a signal conductor located between a pair of spaced apart guard conductors. A membrane assembly includes a membrane with contacts thereon, and supporting at least a signal conductor located between a pair of spaced apart guard conductors. The guard conductors of the probe card are electrically interconnected proximate the interconnection between the probe card and the membrane assembly. The guard conductors of the membrane assembly are electrically interconnected proximate the interconnection between the probe card and the membrane assembly.
    Type: Application
    Filed: November 29, 2000
    Publication date: July 17, 2003
    Inventors: Paul A. Tervo, Kenneth R. Smith, Clarence E. Cowan, Mike P. Dauphinais, Martin J. Koxxy
  • Wafer probe station having environment control enclosure
    Publication number: 20030048110
    Abstract: A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
    Type: Application
    Filed: October 9, 2002
    Publication date: March 13, 2003
    Inventors: Warren K. Harwood, Paul A. Tervo, Martin J. Koxxy
  • Wafer probe station having environment control enclosure
    Patent number: 6486687
    Abstract: A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
    Type: Grant
    Filed: February 6, 2002
    Date of Patent: November 26, 2002
    Assignee: Cascade Microtech, Inc.
    Inventors: Warren K. Harwood, Paul A. Tervo, Martin J. Koxxy
  • Wafer probe station having environment control enclosure
    Publication number: 20020093353
    Abstract: A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
    Type: Application
    Filed: February 6, 2002
    Publication date: July 18, 2002
    Inventors: Warren K. Harwood, Paul A. Tervo, Martin J. Koxxy
  • Wafer probe station having environment control enclosure
    Patent number: 6380751
    Abstract: A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
    Type: Grant
    Filed: June 20, 2001
    Date of Patent: April 30, 2002
    Assignee: Cascade Microtech, Inc.
    Inventors: Warren K. Harwood, Paul A. Tervo, Martin J. Koxxy
  • Wafer probe station having environment control enclosure
    Publication number: 20010040461
    Abstract: A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
    Type: Application
    Filed: June 20, 2001
    Publication date: November 15, 2001
    Inventors: Warren K. Harwood, Paul A. Tervo, Martin J. Koxxy
  • Wafer probe station having environment control enclosure
    Patent number: 6313649
    Abstract: A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probe holders. The positioning mechanisms for the supporting surface and probe holders each have portions located at least partially outside of the enclosure for transferring movement mechanically to the surface or holders, respectively.
    Type: Grant
    Filed: January 29, 1997
    Date of Patent: November 6, 2001
    Assignee: Cascade Microtech, Inc.
    Inventors: Warren K. Harwood, Paul A. Tervo, Martin J. Koxxy
  • WAFER PROBE STATION HAVING ENVIRONMENT CONTROL ENCLOSURE
    Publication number: 20010001538
    Abstract: A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probe holders. The positioning mechanisms for the supporting surface and probe holders each have portions located at least partially outside of the enclosure for transferring movement mechanically to the surface or holders, respectively.
    Type: Application
    Filed: January 29, 1997
    Publication date: May 24, 2001
    Inventors: WARREN K. HARWOOD, PAUL A. TERVO, MARTIN J. KOXXY
  • Wafer probe station having environment control enclosure
    Patent number: 5604444
    Abstract: A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probe holders. The positioning mechanisms for the supporting surface and probe holders each have portions located at least partially outside of the enclosure for transferring movement mechanically to the surface or holders, respectively.
    Type: Grant
    Filed: April 29, 1996
    Date of Patent: February 18, 1997
    Assignee: Cascade Microtech, Inc.
    Inventors: Warren K. Harwood, Paul A. Tervo, Martin J. Koxxy