Patents by Inventor Martin M. Liphardt

Martin M. Liphardt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220244169
    Abstract: Ellipsometer, polarimeter, reflectometer and spectrophotometer systems including one or more wavelength modifiers which convert wavelengths provided by a source of electromagnetic radiation to different wavelengths for use in investigating a sample, and/or which a detector thereof can detect.
    Type: Application
    Filed: September 16, 2021
    Publication date: August 4, 2022
    Applicant: J.A. WOOLLAM CO., INC.
    Inventors: Ping He, Martin M. Liphardt, Jeremy A. Van Derslice, Craig M. Herzinger, Jeffrey S. Hale, Brian D. Guenther, Duane E. Meyer, Stefan Schoeche, James D. Welch
  • Patent number: 11391666
    Abstract: A snapshot ellipsometer or polarimeter which does not require temporally modulated element(s) to measure a sample, but instead uses one or more spatially varying compensators, (eg. microretarder arrays and compound prisms), to vary the polarization state within a measurement beam of electromagnetic radiation. Analysis of an intensity profile of the beam after interaction with the spatially varying compensator(s) and the sample, and after having source beam wavelength content determined using a digital light processor, and/or being directed by a digital light processor elements toward elements in the detector, allows sample parameters to be characterized.
    Type: Grant
    Filed: April 6, 2020
    Date of Patent: July 19, 2022
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Griffin A. P. Hovorka, Jeremy A. Van Derslice, Martin M. Liphardt
  • Patent number: 11035729
    Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of about 400-about 2500 nm, a stage for supporting a sample and a detector of electromagnetic radiation, wherein the supercontinuum source provides a coherent beam of electromagnetic radiation which interacts with a sample, and the detector system comprises functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics, directs wavelengths in various ranges to various detectors that are well suited to detect them.
    Type: Grant
    Filed: August 5, 2019
    Date of Patent: June 15, 2021
    Assignee: J.A. WOQLLAM CO., INC.
    Inventors: Jeremy A. Van Derslice, Martin M. Liphardt
  • Patent number: 10989601
    Abstract: A method of applying a reflective optics system that requires the presence of both convex and a concave mirrors that have beam reflecting surfaces. Application thereof achieves focusing of a beam of electromagnetic radiation with reduced effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved.
    Type: Grant
    Filed: May 1, 2020
    Date of Patent: April 27, 2021
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer, Craig M. Herzinger
  • Patent number: 10627288
    Abstract: Reflectometer, Spectrophotometer, Ellipsometer and Polarimeter Systems that utilize 1) electromagnetic radiation energy absorbing or reflecting material of spatially distributed different optical densities and 2) wavelength dependent electromagnetic radiation energy aperturing, or both, placed near the entry to said multi-element detector, to improve detector capability to monitor intensity vs. wavelength spectra entered thereinto and provide more uniform detector output, while preferably maintaining beam information content.
    Type: Grant
    Filed: April 29, 2019
    Date of Patent: April 21, 2020
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Martin M. Liphardt, Ping He
  • Patent number: 10612976
    Abstract: Methods and systems that utilize 1) electromagnetic radiation energy absorbing or reflecting material of spatially distributed different optical densities and 2) wavelength dependent electromagnetic radiation energy aperturing, or both, placed near the entry to said multi-element detector, to improve detector capability to monitor intensity vs. wavelength spectra entered thereinto and provide more uniform detector output, while preferably maintaining beam angle and plane of incidence.
    Type: Grant
    Filed: September 13, 2016
    Date of Patent: April 7, 2020
    Assignee: J.A. WOOLLAN CO., INC.
    Inventors: Martin M. Liphardt, Ping He
  • Patent number: 10444140
    Abstract: A sample positioning system having two rotation elements with offset therebetween, to the second of which rotation elements is affixed a sample supporting stage. The rotation axes of the two rotation element are parallel, or substantially so. The sample positioning system finds application in the mapping of samples by Metrology systems such as Reflectometer, Spectrophotometer and Ellipsometer systems.
    Type: Grant
    Filed: May 23, 2019
    Date of Patent: October 15, 2019
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Griffin A. P. Hovorka, Martin M. Liphardt, Galen L Pfeiffer
  • Patent number: 10422739
    Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of about 400-about 2500 nm, a stage for supporting a sample and a detector of electromagnetic radiation, wherein the supercontinuum source provides a coherent beam of electromagnetic radiation which interacts with a sample, and the detector system comprises functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics, directs wavelengths in various ranges to various detectors that are well suited to detect them.
    Type: Grant
    Filed: September 12, 2018
    Date of Patent: September 24, 2019
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Jeremy A. Van Derslice, Martin M. Liphardt
  • Patent number: 10338362
    Abstract: In ellipsometer and polarimeter systems, reflective optics including both convex and a concave mirrors that have beam reflecting surfaces, as well as aperture control of beam size to optimize operation with respect to aberration and diffraction effects while achieve the focusing of a beam of electromagnetic radiation with minimized effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved, and further including detectors of electromagnetic radiation that enable optimization of the operation thereof for application over various specific wavelength ranges, involving functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics.
    Type: Grant
    Filed: July 3, 2018
    Date of Patent: July 2, 2019
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer, Duane E. Meyer
  • Patent number: 10247611
    Abstract: Application of detectors of electromagnetic radiation and systems for enabling the optimization thereof for application over various specific wavelength ranges, involving functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics.
    Type: Grant
    Filed: December 14, 2015
    Date of Patent: April 2, 2019
    Assignee: J.A. WOOLIAM CO., INC.
    Inventors: Martin M. Liphardt, Ping He, Duane E. Meyer
  • Patent number: 10209528
    Abstract: A combination of a focusing element, and a filtering element which naturally adjusts the cross-sectional area of a beam of electromagnetic radiation passed through the focusing element as a function of wavelength over a specified range of wavelengths, wherein the filtering element is not uniform, but rather varies as a selection from the group consisting of: optical density and/or thickness is greatest near the center thereof; and optical density and/or thickness is smallest near the center thereof; and can demonstrate neutral density characteristics outside the specified range of wavelengths. The combination of a focusing element, and a filtering element can optionally be present in an ellipsometer or polarimeter system.
    Type: Grant
    Filed: June 9, 2015
    Date of Patent: February 19, 2019
    Assignee: J.A. WOOLLAM CO., INC.
    Inventor: Martin M. Liphardt
  • Patent number: 10132684
    Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of about 400-about 2500 nm, a stage for supporting a sample and a detector of electromagnetic radiation, wherein the supercontinuum source provides a coherent beam of electromagnetic radiation which interacts with a sample, and the detector system comprises functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics, directs wavelengths in various ranges to various detectors that are well suited to detect them.
    Type: Grant
    Filed: September 20, 2016
    Date of Patent: November 20, 2018
    Assignee: J.A. WOOLAM CO., INC.
    Inventors: Jeremy A. Van Derslice, Martin M. Liphardt
  • Patent number: 10066989
    Abstract: A system for providing variable wavelength intensity attenuation to said focused beams by application of an aperture-like element that comprises at least two regions of “filter” material, or comprises different materials graded into one another, which different materials that have different responses to different wavelengths, wherein said system is applied to reduce differences in wavelength intensity levels when applied in collimated portions of a beam as a Spectral Angle Adjustor (SAA) or to preserve information in a beam while changing said beam effective diameter as a Spectral Aperture Stop (SAS); or to affect a Spectral Field Stop (SFS) that controls source image size when applied at a convergent/divergent beam focal point as a Spectrally Varying Aperture, (SVA) the end result depending on where in a beam it is applied.
    Type: Grant
    Filed: September 9, 2016
    Date of Patent: September 4, 2018
    Assignee: J.A. WOOLLAM CO., INC
    Inventors: Martin M. Liphardt, Ping He
  • Patent number: 10018815
    Abstract: A method of applying a reflective optics system that requires the presence of both convex and a concave mirrors that have beam reflecting surfaces. Application thereof achieves focusing of a beam of electromagnetic radiation with minimized effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved.
    Type: Grant
    Filed: March 19, 2018
    Date of Patent: July 10, 2018
    Assignee: J.A. WOOLAM CO., INC.
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L Pfeiffer
  • Patent number: 9952141
    Abstract: An approach to characterizing beams of electromagnetic radiation such as are applied in ellipsometer and the like systems, involving considering the beam to be comprised of a number of spatially distributed beam rays, each of which is represented mathematically as an effectively independent source.
    Type: Grant
    Filed: June 22, 2016
    Date of Patent: April 24, 2018
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Jeffrey S. Hale, Craig M. Herzinger, Martin M. Liphardt
  • Patent number: 9933357
    Abstract: An ellipsometer system with polarization state generator and polarization state analyzer components inside at least one internal environment supporting encasement, said at least one encasement being present inside said environmental chamber.
    Type: Grant
    Filed: February 3, 2017
    Date of Patent: April 3, 2018
    Assignee: J. A. WOOLLAM CO., INC.
    Inventors: Ping He, Gregory K. Pribil, Martin M. Liphardt
  • Patent number: 9921395
    Abstract: A reflective optics system that requires the presence of both convex and a concave mirrors that have beam reflecting surfaces. Application thereof achieves focusing of a beam of electromagnetic radiation with minimized effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved. This invention is also a combination of a focusing element and a filtering element that provides an optimum electromagnetic beam cross-sectional area based on optimizing the beam cross-sectional area in view of conflicting effects of aberration and diffraction inherent in said focusing element, which, for each wavelength, vary oppositely to one another with electromagnetic beam cross-sectional area.
    Type: Grant
    Filed: November 18, 2016
    Date of Patent: March 20, 2018
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
  • Patent number: 9658151
    Abstract: In the context of an ellipsometer or the like, positioning a camera other than directly above a sample being investigated by an electromagnetic beam, while said camera provides an optical view of a surface of said sample which is in focus over the entire viewed extent of the sample, and wherein a contrast improving system involving two beams provided by a beam splitting system is utilized.
    Type: Grant
    Filed: February 6, 2015
    Date of Patent: May 23, 2017
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Martin M. Liphardt, Galen L. Pfeiffer
  • Patent number: 9546943
    Abstract: A system for and method of investigating changes in optical properties of a porous effective substrate surface related to, for instance, effective surface depth and refractive index, pore size, pore volume and pore size distribution at atmospheric pressure.
    Type: Grant
    Filed: March 18, 2016
    Date of Patent: January 17, 2017
    Assignee: J.A. WOOLLAM CO., INC
    Inventors: Jeremy A. Vanderslice, Christopher A. Goeden, Martin M. Liphardt
  • Publication number: 20160356998
    Abstract: A method of calibrating a reflective focusing optics to provide a system that minimizes the effect of multiple beam reflections therewithin on polarization state reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.
    Type: Application
    Filed: August 8, 2016
    Publication date: December 8, 2016
    Applicant: J.A. WOOLLAM CO., INC
    Inventors: MARTIN M. LIPHARDT, JEFFREY S. HALE, PING HE, GALEN L. PFEIFFER