Patents by Inventor Martin M. Liphardt

Martin M. Liphardt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Terahertz-infrared ellipsometer system, and method of use
    Publication number: 20120206724
    Abstract: The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including at least one odd-bounce polarization state image rotating system, and optionally including a polarizer, at least one compensator and/or modulator, in addition to an analyzer.
    Type: Application
    Filed: June 14, 2010
    Publication date: August 16, 2012
    Inventors: Craig M. Herzinger, Mathias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
  • Method of improving ellipsometric and the like data
    Patent number: 8223334
    Abstract: A system and method for improving data provided by ellipsometer, polarimeter and the like systems involving diminishing the effects of undesirable noise in the intensity of a beam of electromagnetic radiation caused by, for instance, random variations in intensity of a source provided beam of electromagnetic radiation and/or periodic or non-periodic variations in beam intensity resulting from wobble/wander of a moving sample, during investigation of the sample by the beam of electromagnetic radiation.
    Type: Grant
    Filed: September 25, 2009
    Date of Patent: July 17, 2012
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Martin M. Liphardt
  • System and method of applying horizontally oriented arc-lamps in ellipsometer or the like systems
    Patent number: 8189193
    Abstract: Control of the angle-of-incidence of a beam of electromagnetic radiation provided by a horizontally oriented arc-lamp in ellipsometer, polarimeter, spectrophotometer, reflectometer, Mueller matrix measuring, or the like systems.
    Type: Grant
    Filed: October 19, 2009
    Date of Patent: May 29, 2012
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Ping He, James D. Welch
  • Terahertz-infrared ellipsometer system, and method of use
    Patent number: 8169611
    Abstract: The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including at least one odd-bounce polarization state image rotating system, and optionally including a polarizer, at least one compensator and/or modulator, in addition to an analyzer.
    Type: Grant
    Filed: June 23, 2009
    Date of Patent: May 1, 2012
    Assignees: University of Nebraska Board of Regents, J. A. Woollam Co., Inc.
    Inventors: Craig M. Herzinger, Matias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
  • System and method of aligning a sample
    Publication number: 20120092653
    Abstract: A system and method of use thereof that enables determining and setting sample alignment based on the location of, and geometric attributes of a monitored image formed by reflection of an electromagnetic beam from a sample and into an image monitor, which beam is directed to be incident onto the sample along a locus which is substantially normal to the surface of the sample.
    Type: Application
    Filed: November 18, 2011
    Publication date: April 19, 2012
    Inventors: Martin M. Liphardt, Blaine D. Johs
  • Sample investigating system and method of use
    Patent number: 8159672
    Abstract: A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.
    Type: Grant
    Filed: November 19, 2009
    Date of Patent: April 17, 2012
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Thomas E. Tiwald, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He, Ronald A. Synowicki, John A. Woollam
  • Ellipsometric investigation and analysis of textured samples
    Publication number: 20120057158
    Abstract: System for, and method of ellipsometric investigation of and analysis of samples which have, for instance, a non-random effectively “regular” textured surface, and/or a surface characterized by an irregular array of faceted structures.
    Type: Application
    Filed: November 3, 2011
    Publication date: March 8, 2012
    Inventors: James N. Hilfiker, Jianing Sun, Ping He, Martin M. Liphardt
  • Small volume cell
    Patent number: 8130375
    Abstract: A small internal volume cell having fluid entry, and exit ports wherein at least one bubble trap is present in a fluid pathway which is continuous with the fluid exit port. There further being present an input/output aperture, for entering and exiting electromagnetic radiation, positioned to allow causing an input beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; and a mirror for directing electromagnetic radiation which reflects from said sample substrate, toward and out of said input/output aperture; as well as methodology of its use.
    Type: Grant
    Filed: July 28, 2009
    Date of Patent: March 6, 2012
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Galen L. Pfeiffer, Thomas E. Tiwald, Martin M. Liphardt
  • Ellipsometric investigation and analysis of textured samples
    Patent number: 8059276
    Abstract: System for, and method of ellipsometric investigation of and analysis of samples which have, for instance, a non-random effectively “regular” textured surface, and/or a surface characterized by an irregular array of faceted structures.
    Type: Grant
    Filed: December 8, 2008
    Date of Patent: November 15, 2011
    Assignee: J.A. Woollam Co., Inc
    Inventors: James N. Hilfiker, Jianing Sun, Ping He, Martin M. Liphardt
  • Spatial filter in sample investigation system
    Patent number: 8013996
    Abstract: Systems which utilize electromagnetic radiation to investigate samples and include at least one spatial filter which has an aperture having an opening therethrough of an arbitrary shape, including methodology for fabracting the aperture on an end of an optical fiber per se.
    Type: Grant
    Filed: May 12, 2009
    Date of Patent: September 6, 2011
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Ping He, Blaine D. Johs, Craig M. Herzinger
  • Mounting for deviation angle self compensating substantially achromatic retarder
    Publication number: 20110188040
    Abstract: A system, method of configuring, and application a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
    Type: Application
    Filed: March 14, 2011
    Publication date: August 4, 2011
    Inventors: Ping He, Blaine D. Johs, Steven E. Green, Craig M. Herzinger, Duane E. Meyer, Martin M. Liphardt
  • Automatic sample alignment system and method of use
    Patent number: 7965390
    Abstract: A system which automatically reduces change in effective angle and plane of incidence of a reflected focused beam of electromagnetic radiation entering a detector, via use of a detector with dimensions less than is the spatial spread of a reflected focused beam at a location distal to the location on said sample from which it is caused to reflect, preferably after passing through a collimating lens. The basis of operation is that the portion of a reflected focused beam intercepted by the detector changes with change in sample position and/or orientation.
    Type: Grant
    Filed: February 10, 2009
    Date of Patent: June 21, 2011
    Assignee: J.A. Woollam Co., Inc.
    Inventor: Martin M. Liphardt
  • Fast sample height, AOI and POI alignment in mapping ellipsometer or the like
    Publication number: 20110109906
    Abstract: A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling calibration and very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
    Type: Application
    Filed: January 15, 2011
    Publication date: May 12, 2011
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
  • Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation
    Patent number: 7907280
    Abstract: A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
    Type: Grant
    Filed: November 4, 2008
    Date of Patent: March 15, 2011
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Steven E. Green, Craig M. Herzinger, Duane E. Meyer, Martin M. Liphardt
  • Fast sample height, AOI and POI alignment in mapping ellipsometer or the like
    Patent number: 7872751
    Abstract: A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
    Type: Grant
    Filed: November 25, 2008
    Date of Patent: January 18, 2011
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
  • System and method for controlling intensity of a beam of electromagnetic radiation in ellipsometers and polarimeters
    Patent number: 7830512
    Abstract: An ellipsometer or polarimeter system and method for controlling intensity of an electromagnetic beam over a spectrum of wavelengths by applying control (P2) and beam (P) polarizers, optionally in combination with an intervening and control compensator (C).
    Type: Grant
    Filed: March 14, 2008
    Date of Patent: November 9, 2010
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Galen L. Pfeiffer, Martin M. Liphardt
  • System for controlling intensity of a beam of electromagnetic radiation and method for investigating materials with low specular reflectance and/or are depolarizing
    Patent number: 7821637
    Abstract: Disclosed is a system for controlling focus, angle of incidence and intensity of an electromagnetic beam over a spectrum of wavelengths, and methodology for optimizing investigation of samples which demonstrate low specular reflectance and/or are depolarizing of a polarized beam of electromagnetic radiation, such as solar cells.
    Type: Grant
    Filed: February 21, 2008
    Date of Patent: October 26, 2010
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Galen L. Pfeiffer, Martin M. Liphardt, James N. Hilfiker
  • Terahertz-infrared ellipsometer system, and method of use
    Publication number: 20100220313
    Abstract: The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including at least one odd-bounce polarization state image rotating system, and optionally including a polarizer, at least one compensator and/or modulator, in addition to an analyzer.
    Type: Application
    Filed: June 23, 2009
    Publication date: September 2, 2010
    Inventors: Craig M. Herzinger, Matias H. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
  • Application of digital light processor in scanning spectrometer and imaging ellipsometer and the like systems
    Patent number: 7777878
    Abstract: Application of digital light processor (DLP) systems in monochromator, spectrophotometer or the like systems to mediate selection of individual wavelengths, and/or to image elected regions of a sample in an imaging ellipsometer, imaging polarimeter, imaging reflectometer, imaging spectrophotometer, and/or to provide chopped beams.
    Type: Grant
    Filed: December 18, 2007
    Date of Patent: August 17, 2010
    Assignee: J.A. Woollam Co., Inc.
    Inventor: Martin M. Liphardt
  • Non-destructive approach to ellipsometric monitoring of a film coating on the inner surface of a tube shaped sample
    Patent number: 7768660
    Abstract: Disclosed is the use of a focused electromagnetic beam which is caused to impinge on the top surface of a tube shaped sample, to investigate a film coating on its inner surface during fabrication thereof and/or thereafter.
    Type: Grant
    Filed: August 30, 2007
    Date of Patent: August 3, 2010
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Gregory K. Pribil, John A. Woollam, Martin M. Liphardt, James D. Welch