Patents by Inventor Martin Michael Frank

Martin Michael Frank has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11889771
    Abstract: A method for mitigating moisture driven degradation of silicon doped chalcogenides includes placing a silicon doped chalcogenide composition in a process chamber, passivating dangling silicon bonds of the silicon doped chalcogenide composition by flooding the process chamber with forming gas or with hydrogen plasma, purging the forming gas or the hydrogen plasma from the process chamber, and removing the passivated silicon doped chalcogenide composition from the process chamber.
    Type: Grant
    Filed: December 29, 2020
    Date of Patent: January 30, 2024
    Assignees: International Business Machines Corporation, Macronix International Co., Ltd.
    Inventors: Cheng-Wei Cheng, Huai-Yu Cheng, I-Ting Kuo, Robert L. Bruce, Martin Michael Frank, Hiroyuki Miyazoe
  • Publication number: 20230210027
    Abstract: A method of fabricating a synaptic device is provided. The method includes forming a channel layer between a first terminal and a second terminal. The channel layer varies in resistance based on a magnesium concentration in the channel layer. The method further includes forming an electrolyte layer. The electrolyte layer includes a magnesium ion conductive material. A third terminal is formed over the electrolyte layer and applies a signal to the electrolyte layer and the channel layer.
    Type: Application
    Filed: March 6, 2023
    Publication date: June 29, 2023
    Inventors: Douglas M. Bishop, Martin Michael Frank, Teodor Krassimirov Todorov
  • Patent number: 11690304
    Abstract: A method of fabricating a synaptic device is provided. The method includes forming a channel layer between a first terminal and a second terminal. The channel layer varies in resistance based on a magnesium concentration in the channel layer. The method further includes forming an electrolyte layer. The electrolyte layer includes a magnesium ion conductive material. A third terminal is formed over the electrolyte layer and applies a signal to the electrolyte layer and the channel layer.
    Type: Grant
    Filed: October 7, 2021
    Date of Patent: June 27, 2023
    Assignee: International Business Machines Corporation
    Inventors: Douglas M. Bishop, Martin Michael Frank, Teodor Krassimirov Todorov
  • Patent number: 11646199
    Abstract: Embodiments of the present invention are directed to forming a sub-stoichiometric metal-oxide film using a modified atomic layer deposition (ALD) process. In a non-limiting embodiment of the invention, a first precursor and a second precursor are selected. The first precursor can include a metal and a first ligand. The second precursor can include the same metal and a second ligand. A substrate can be exposed to the first precursor during a first pulse of an ALD cycle. The substrate can be exposed to the second precursor during a second pulse of the ALD cycle. The second pulse can occur directly after the first pulse without an intervening thermal oxidant. The substrate can be exposed to the thermal oxidant during a third pulse of the ALD cycle.
    Type: Grant
    Filed: May 18, 2021
    Date of Patent: May 9, 2023
    Assignees: International Business Machines Corporation, ULVAC. Inc.
    Inventors: John Rozen, Martin Michael Frank, Yohei Ogawa
  • Patent number: 11508438
    Abstract: Methods and systems for locating a filament in a resistive memory device are described. In an example, a device can acquire an image indicating an occurrence of photoemission from the resistive memory device. The device can determine a location of the filament in a switching medium of the resistive memory device using the acquired image.
    Type: Grant
    Filed: October 16, 2020
    Date of Patent: November 22, 2022
    Assignee: International Business Machines Corporation
    Inventors: Franco Stellari, Takashi Ando, Cyril Cabral, Jr., Eduard Albert Cartier, Martin Michael Frank, Peilin Song, Dirk Pfeiffer
  • Publication number: 20220328302
    Abstract: Embodiments of the present invention are directed to forming a ternary compound using a modified atomic layer deposition (ALD) process. In a non-limiting embodiment of the invention, a first precursor and a second precursor are selected. The first precursor includes a first metal and a first ligand. The second precursor includes a second metal and a second ligand. The second ligand is selected based on the first ligand to target a second metal uptake. A substrate is exposed to the first precursor during a first pulse of an ALD cycle and the substrate is exposed to the second precursor during a second pulse of the ALD cycle, the second pulse occurring after the first pulse. The substrate is exposed to a third precursor (e.g., an oxidant) during a third pulse of the ALD cycle. The ternary compound can include a ternary oxide film.
    Type: Application
    Filed: June 28, 2022
    Publication date: October 13, 2022
    Inventors: Martin Michael Frank, John Rozen, Yohei Ogawa
  • Patent number: 11462398
    Abstract: Embodiments of the present invention are directed to forming a ternary compound using a modified atomic layer deposition (ALD) process. In a non-limiting embodiment of the invention, a first precursor and a second precursor are selected. The first precursor includes a first metal and a first ligand. The second precursor includes a second metal and a second ligand. The second ligand is selected based on the first ligand to target a second metal uptake. A substrate is exposed to the first precursor during a first pulse of an ALD cycle and the substrate is exposed to the second precursor during a second pulse of the ALD cycle, the second pulse occurring after the first pulse. The substrate is exposed to a third precursor (e.g., an oxidant) during a third pulse of the ALD cycle. The ternary compound can include a ternary oxide film.
    Type: Grant
    Filed: July 17, 2019
    Date of Patent: October 4, 2022
    Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION, ULVAC, INC
    Inventors: Martin Michael Frank, John Rozen, Yohei Ogawa
  • Publication number: 20220209113
    Abstract: A method for mitigating moisture driven degradation of silicon doped chalcogenides includes placing a silicon doped chalcogenide composition in a process chamber, passivating dangling silicon bonds of the silicon doped chalcogenide composition by flooding the process chamber with forming gas or with hydrogen plasma, purging the forming gas or the hydrogen plasma from the process chamber, and removing the passivated silicon doped chalcogenide composition from the process chamber.
    Type: Application
    Filed: December 29, 2020
    Publication date: June 30, 2022
    Inventors: Cheng-Wei Cheng, Huai-Yu Cheng, I-Ting Kuo, Robert L. Bruce, Martin Michael Frank, Hiroyuki Miyazoe
  • Publication number: 20220045270
    Abstract: A method of fabricating a synaptic device is provided. The method includes forming a channel layer between a first terminal and a second terminal. The channel layer varies in resistance based on a magnesium concentration in the channel layer. The method further includes forming an electrolyte layer. The electrolyte layer includes a magnesium ion conductive material. A third terminal is formed over the electrolyte layer and applies a signal to the electrolyte layer and the channel layer.
    Type: Application
    Filed: October 7, 2021
    Publication date: February 10, 2022
    Inventors: Douglas M. Bishop, Martin Michael Frank, Teodor Krassimirov Todorov
  • Patent number: 11201284
    Abstract: A method of fabricating a synaptic device is provided. The method includes forming a channel layer between a first terminal and a second terminal. The channel layer varies in resistance based on a magnesium concentration in the channel layer. The method further includes forming an electrolyte layer. The electrolyte layer includes a magnesium ion conductive material. A third terminal is formed over the electrolyte layer and applies a signal to the electrolyte layer and the channel layer.
    Type: Grant
    Filed: March 24, 2020
    Date of Patent: December 14, 2021
    Assignee: International Business Machines Corporation
    Inventors: Douglas M. Bishop, Martin Michael Frank, Teodor Krassimirov Todorov
  • Publication number: 20210305504
    Abstract: A method of fabricating a synaptic device is provided. The method includes forming a channel layer between a first terminal and a second terminal. The channel layer varies in resistance based on a magnesium concentration in the channel layer. The method further includes forming an electrolyte layer. The electrolyte layer includes a magnesium ion conductive material. A third terminal is formed over the electrolyte layer and applies a signal to the electrolyte layer and the channel layer.
    Type: Application
    Filed: March 24, 2020
    Publication date: September 30, 2021
    Inventors: Douglas M. Bishop, Martin Michael Frank, Teodor Krassimirov Todorov
  • Publication number: 20210272796
    Abstract: Embodiments of the present invention are directed to forming a sub-stoichiometric metal-oxide film using a modified atomic layer deposition (ALD) process. In a non-limiting embodiment of the invention, a first precursor and a second precursor are selected. The first precursor can include a metal and a first ligand. The second precursor can include the same metal and a second ligand. A substrate can be exposed to the first precursor during a first pulse of an ALD cycle. The substrate can be exposed to the second precursor during a second pulse of the ALD cycle. The second pulse can occur directly after the first pulse without an intervening thermal oxidant. The substrate can be exposed to the thermal oxidant during a third pulse of the ALD cycle.
    Type: Application
    Filed: May 18, 2021
    Publication date: September 2, 2021
    Inventors: John Rozen, Martin Michael Frank, Yohei Ogawa
  • Patent number: 11081343
    Abstract: Embodiments of the present invention are directed to forming a sub-stoichiometric metal-oxide film using a modified atomic layer deposition (ALD) process. In a non-limiting embodiment of the invention, a first precursor and a second precursor are selected. The first precursor can include a metal and a first ligand. The second precursor can include the same metal and a second ligand. A substrate can be exposed to the first precursor during a first pulse of an ALD cycle. The substrate can be exposed to the second precursor during a second pulse of the ALD cycle. The second pulse can occur directly after the first pulse without an intervening thermal oxidant. The substrate can be exposed to the thermal oxidant during a third pulse of the ALD cycle.
    Type: Grant
    Filed: July 19, 2019
    Date of Patent: August 3, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: John Rozen, Martin Michael Frank, Yohei Ogawa
  • Publication number: 20210020427
    Abstract: Embodiments of the present invention are directed to forming a sub-stoichiometric metal-oxide film using a modified atomic layer deposition (ALD) process. In a non-limiting embodiment of the invention, a first precursor and a second precursor are selected. The first precursor can include a metal and a first ligand. The second precursor can include the same metal and a second ligand. A substrate can be exposed to the first precursor during a first pulse of an ALD cycle. The substrate can be exposed to the second precursor during a second pulse of the ALD cycle. The second pulse can occur directly after the first pulse without an intervening thermal oxidant. The substrate can be exposed to the thermal oxidant during a third pulse of the ALD cycle.
    Type: Application
    Filed: July 19, 2019
    Publication date: January 21, 2021
    Inventors: John Rozen, Martin Michael Frank, Yohei Ogawa
  • Publication number: 20210020426
    Abstract: Embodiments of the present invention are directed to forming a ternary compound using a modified atomic layer deposition (ALD) process. In a non-limiting embodiment of the invention, a first precursor and a second precursor are selected. The first precursor includes a first metal and a first ligand. The second precursor includes a second metal and a second ligand. The second ligand is selected based on the first ligand to target a second metal uptake. A substrate is exposed to the first precursor during a first pulse of an ALD cycle and the substrate is exposed to the second precursor during a second pulse of the ALD cycle, the second pulse occurring after the first pulse. The substrate is exposed to a third precursor (e.g., an oxidant) during a third pulse of the ALD cycle. The ternary compound can include a ternary oxide film.
    Type: Application
    Filed: July 17, 2019
    Publication date: January 21, 2021
    Inventors: Martin Michael Frank, John Rozen, Yohei Ogawa
  • Publication number: 20190245056
    Abstract: A circuit and method relating to a ferroelectric region free of extended grain boundaries through a thickness of ferroelectric film. The circuit includes an interlayer insulating film disposed on a semiconductor wafer; a first conductive film disposed on the interlayer insulating film; a ferroelectric film disposed on the first conductive film; a second conductive film disposed on the ferroelectric film; and a ferroelectric region patterned from the ferroelectric film, wherein the ferroelectric region is free of extended grain boundaries through a thickness of the ferroelectric film. The method includes depositing an interlayer insulating film over a semiconductor wafer; depositing a first conductive film over the interlayer insulating film; depositing a ferroelectric film over the first conductive film; depositing a second conductive film over the ferroelectric film; and forming a capacitor by patterning the first conductive film, the second conductive film, and the ferroelectric film.
    Type: Application
    Filed: February 2, 2018
    Publication date: August 8, 2019
    Inventors: John Bruley, Eduard Albert Cartier, Catherine Dubourdieu, Martin Michael Frank, Lucie Mazet, Vijay Narayanan
  • Publication number: 20150214323
    Abstract: An integrated circuit and method for forming an integrated circuit. There are at least three field-effect transistors with at least two of the field-effect transistors having the same electrically insulating material which is ferroelectric when unstrained or is capable of being ferroelectric when strain is induced. It is optional for the third field-effect transistor to have an electrically insulating material which is ferroelectric when unstrained or is capable of being ferroelectric when strain is induced. The at least three field-effect transistors are strained to varying amounts so that each of the three field-effect transistors has a threshold voltage, Vt, which is different from the Vt of the two other field-effect transistors.
    Type: Application
    Filed: April 8, 2015
    Publication date: July 30, 2015
    Inventors: Catherine Anne Dubourdieu, Martin Michael Frank, Vijay Narayanan
  • Patent number: 9041082
    Abstract: An integrated circuit and method for forming an integrated circuit. There are at least three field-effect transistors with at least two of the field-effect transistors having the same electrically insulating material which is ferroelectric when unstrained or is capable of being ferroelectric when strain is induced. It is optional for the third field-effect transistor to have an electrically insulating material which is ferroelectric when unstrained or is capable of being ferroelectric when strain is induced. The at least three field-effect transistors are strained to varying amounts so that each of the three field-effect transistors has a threshold voltage, Vt, which is different from the Vt of the two other field-effect transistors.
    Type: Grant
    Filed: October 7, 2010
    Date of Patent: May 26, 2015
    Assignees: International Business Machines Corporation, Centre National de la Recherche Scientifique
    Inventors: Catherine Anne Dubourdieu, Martin Michael Frank, Vijay Narayanan
  • Patent number: 8598027
    Abstract: A method for forming a semiconductor structure is disclosed. The method includes forming a high-k dielectric layer over a semiconductor substrate and forming a gate layer over the high-k dielectric layer. The method also includes heating the gate layer to 350° C., wherein, if the gate layer includes non-conductive material, the non-conductive material becomes conductive. The method further includes annealing the substrate, the high-k dielectric layer, and the gate layer in excess of 350° C. and, during the annealing, applying a negative electrical bias to the gate layer relative to the semiconductor substrate. A semiconductor structure is also disclosed. The semiconductor structure includes a high-k dielectric layer over a semiconductor substrate, and a gate layer over the high-k dielectric layer. The gate layer has a negative electrical bias during anneal. A p-channel FET including this semiconductor structure is also disclosed.
    Type: Grant
    Filed: January 20, 2010
    Date of Patent: December 3, 2013
    Assignee: International Business Machines Corporation
    Inventor: Martin Michael Frank
  • Patent number: 8415677
    Abstract: A field effect transistor device and method which includes a semiconductor substrate, a dielectric gate layer, preferably a high dielectric constant gate layer, overlaying the semiconductor substrate and an electrically conductive oxygen barrier layer overlaying the gate dielectric layer. In one embodiment, there is a conductive layer between the gate dielectric layer and the oxygen barrier layer. In another embodiment, there is a low resistivity metal layer on the oxygen barrier layer.
    Type: Grant
    Filed: January 20, 2010
    Date of Patent: April 9, 2013
    Assignee: International Business Machines Corporation
    Inventors: Praneet Adusumilli, Alessandro Callegari, Josephine B. Chang, Changhwan Choi, Martin Michael Frank, Michael A. Guillorn, Vijay Narayanan