Abstract: An automated order fulfillment system and mobile robot are disclosed, where the mobile robot includes a compliant drive for moving between levels of a multilevel storage structure.

Abstract: An automated order fulfillment system and mobile robot are disclosed, where the mobile robot includes a compliant drive for moving between levels of a multilevel storage structure. In one example, the compliant drive comprises a drive shaft having splines configured to provide rotational play that prevents jamming of a vertical drive gear on the end of the shaft with a rack in a vertical track.

Abstract: An automated order fulfillment system and mobile robot are disclosed, where the mobile robot includes a compliant drive for moving between levels of a multilevel storage structure.

Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.

Abstract: A universal gripper is disclosed for transferring totes and sub-totes, for example in an order fulfillment center. The universal gripper includes adjustable tines and pins capable of being positioned to engage within slots in the different configurations of totes and sub-totes.

Abstract: A ball spline with detour tracks includes spline shaft, nut part movable along a longitudinal direction of the spline shaft, and balls between the nut part and the spline shaft, wherein the nut part includes nut adapted to insert the spline shaft thereinto and retainers on longitudinal sides of the nut, the spline shaft includes tracks extended along the longitudinal direction, the nut includes load track grooves formed in longitudinal direction on inner peripheral surface into which the spline shaft is inserted and non-load circulating portions formed in the longitudinal direction, each retainer includes circulating grooves on the inner peripheral surface to face the load track groove and non-load circulating portion, the balls run between the tracks and the load track grooves, and each track includes track groove formed in longitudinal direction of the spline shaft and detour tracks whose longitudinal sides are connected to the track groove.

Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.

Abstract: An automated system structure may be quickly and efficiently assembled using a number of storage modules. Storage modules may be comprised of a pair of shelf modules, each comprising a number of defined storage locations for storing totes, cartons, trays or other containers. The shelf modules may themselves be modular units comprising a number of horizontal storage levels affixed to a pair of vertical support assemblies at each end of the shelf modules. The pair of shelf modules may be accurately spaced from each other by mounting the shelf modules to tie beams at the bottom and tie plates at the top.

Abstract: An automated order fulfillment system and mobile robot are disclosed, where the mobile robot includes a compliant drive for moving between levels of a multilevel storage structure.

Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.

Abstract: An automated system structure is disclosed which may be quickly and efficiently assembled using a number of storage modules. Storage modules may be comprised of a pair of shelf modules, each comprising a number of defined storage locations for storing totes, cartons, trays or other containers. The shelf modules may themselves be modular units comprising a number of horizontal storage levels affixed to a pair of vertical support assemblies at each end of the shelf modules. The pair of shelf modules may be accurately spaced from each other by mounting the shelf modules to tie beams at the bottom and tie plates at the top.

Abstract: The present technology relates to an automated system structure which may be quickly and efficiently assembled using a number of storage modules. Storage modules may be comprised of a pair of shelf modules, each comprising a number of defined storage locations for storing totes, cartons, trays or other containers. The shelf modules may themselves be modular units comprising a number of horizontal storage levels affixed to a pair of vertical support assemblies at each end of the shelf modules. The pair of shelf modules may be accurately spaced from each other by mounting the shelf modules to tie beams at the bottom and tie plates at the top.

Abstract: A universal gripper is disclosed for transferring totes and sub-totes, for example in an order fulfillment center. The universal gripper includes adjustable tines and pins capable of being positioned to engage within slots in the different configurations of totes and sub-totes.

Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.

Abstract: A universal gripper is disclosed for transferring totes and sub-totes, for example in an order fulfillment center. The universal gripper includes adjustable tines and pins capable of being positioned to engage within slots in the different configurations of totes and sub-totes.

Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.

Abstract: An automated order fulfillment system and mobile robot are disclosed, where the mobile robot includes a compliant drive for moving between levels of a multilevel storage structure.

Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.

Abstract: An automated system structure is disclosed which may be quickly and efficiently assembled using a number of storage modules. Storage modules may be comprised of a pair of shelf modules, each comprising a number of defined storage locations for storing totes, cartons, trays or other containers. The shelf modules may themselves be modular units comprising a number of horizontal storage levels affixed to a pair of vertical support assemblies at each end of the shelf modules. The pair of shelf modules may be accurately spaced from each other by mounting the shelf modules to tie beams at the bottom and tie plates at the top.

Abstract: A universal gripper is disclosed for transferring totes and sub-totes, for example in an order fulfillment center. The universal gripper includes adjustable tines and pins capable of being positioned to engage within slots in the different configurations of totes and sub-totes.