Abstract: A system for opening a substrate carrier includes a substrate carrier having an openable portion. The substrate carrier also has an opening mechanism coupled to the openable portion. A substrate transfer location has a support adapted to support a substrate carrier. The substrate transfer location also has an actuator mechanism. The actuator mechanism is positioned relative to the support so as to interact with the opening mechanism of the substrate carrier. The actuator mechanism of the substrate transfer location and the opening mechanism of the substrate carrier are adapted to interface with each other at the substrate transfer location so as to employ movement of the substrate carrier to achieve opening and closing of the substrate carrier.

Abstract: In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.

Abstract: A multi-set robot is provided that includes a first robot set having a first motor coupled to a first rotatable member that is rotatable about an axis; a second motor coupled to a second rotatable member that is rotatable about the axis; a first plurality of blades vertically spaced from one another; and a first linkage adapted to enable coordinated movement of the blades on rotation of the first and second rotatable members. The robot also includes a second robot set positioned above the first robot set having a third motor coupled to a third rotatable member that is rotatable about the axis; a fourth motor coupled to a fourth rotatable member that is rotatable about the axis; a second plurality of blades vertically spaced from one another; and a second linkage adapted to enable coordinated movement of the blades on rotation of the third and fourth rotatable members. Other aspects are provided.

Abstract: A jig used in a substrate carrier handling robot calibration process has features that emulate the overhead transport flange and the bottom surface of a standard substrate carrier. The jig further includes features that are allowed to interact with sensors associated with substrate carrier storage locations and/or sensors associated with an end effector of the substrate carrier handling robot. In calibrating the substrate carrier handling robot the jig is juxtaposed with a substrate carrier storage location. The end effector of the robot is moved relative to the substrate carrier storage location and the above-mentioned sensors are allowed to interact with the jig. A controller for the robot detects locations of the end effector at times when the sensors interact with the jig.

Abstract: A storage surface for a semiconductor substrate carrier has substrate carrier sensors that are integrated with locator pins. Each locator pin includes a pin body mounted on, and extending upwardly from, the surface. The pin body has a slot formed at an upper portion of the pin body. A paddle is mounted in the slot of the pin body and is adapted to be actuated in a downward direction when a substrate carrier is seated on the pin body. The pin body has an uppermost point, and when the paddle is unactuated, the paddle does not extend above the uppermost point of the pin body.

Abstract: An ID code reader, adapted to read an ID code from a wafer cassette or other substrate carrier, is integrated with a substrate carrier handling robot. In one aspect, the robot includes a support structure, and a chassis mounted for movement on the support structure. In this aspect an ID code reader is mounted on the chassis or otherwise mounted for movement along with an end effector adapted to engage the substrate carrier.

Abstract: A multi-set robot is provided that includes a first robot set having a first motor coupled to a first rotatable member that is rotatable about an axis; a second motor coupled to a second rotatable member that is rotatable about the axis; a first plurality of blades vertically spaced from one another; and a first linkage adapted to enable coordinated movement of the blades on rotation of the first and second rotatable members. The robot also includes a second robot set positioned above the first robot set having a third motor coupled to a third rotatable member that is rotatable about the axis; a fourth motor coupled to a fourth rotatable member that is rotatable about the axis; a second plurality of blades vertically spaced from one another; and a second linkage adapted to enable coordinated movement of the blades on rotation of the third and fourth rotatable members. Other aspects are provided.

Abstract: A storage surface for a semiconductor substrate carrier has substrate carrier sensors that are integrated with locator pins. Each locator pin includes a pin body mounted on, and extending upwardly from, the surface. The pin body has a slot formed at an upper portion of the pin body. A paddle is mounted in the slot of the pin body and is adapted to be actuated in a downward direction when a substrate carrier is seated on the pin body. The pin body has an uppermost point, and when the paddle is unactuated, the paddle does not extend above the uppermost point of the pin body.

Abstract: An end effector is adapted to lift a wafer carrier. The end effector includes a substantially planar, horizontally-extending support member, and a pair of fingers extending downwardly from the support member to define a T-shaped slot. In one embodiment at least one of the fingers includes an inwardly-and downwardly-extending inclined surface. One or more of the fingers may include a horizontal surface extending inwardly from a lower edge of the inclined surface. The inclined surface(s) kinematically position the wafer carrier in a pre-determined manner relative to the end effector. In another embodiment a horizontal locating pin may be provided on one of the fingers.

Abstract: In a first aspect, a shelf module is provided that is adapted to store a plurality of substrate carriers. The shelf module includes (1) a plate; and (2) a plurality of shelves attached to the plate at respective elevations, each of the shelves being adapted to store a respective substrate carrier. Also provided are (1) an upper attachment mechanism adapted to attach an upper portion of the plate to a frame of a storage location; and (2) a lower attachment mechanism adapted to attach a lower portion of the plate to the frame of the storage location. At least one of the upper attachment mechanism and the lower attachment mechanism is adjustable so as to allow the plurality of shelves attached to the plate to be aligned to a reference as a unit. Other aspects are provided, as are systems and methods.

Abstract: An apparatus for processing semiconductor wafers has an automatic robot for independently and simultaneously handling two wafers (W) at the same time on two separate transfer planes.

Abstract: A system for positioning a plurality of carriages to preselected positions across a supported article includes moving a train of detachably interconnected carriages with an engine carriage functionally connected to a driving facility, and simultaneously detaching selected ones of the carriages from the train at predetermined positions across the article, in a sequential manner, beginning with the selected carriage farthestmost from the engine carriage, and holding the selected carriages to a member bridging the article. The positioning cycle is completed by stopping the engine train at its preselected position. Thereafter, a work operation is performed on the article by moving a work operation performing means associated with each of the selected carriages from an inoperative or retracted position to an extended or operative position.