Abstract: The number of LIMMS devices in an assembly is increased by stacking multiple layers of LIMMS devices on top of one another, and interconnecting those device layers at an array of solder pads using solder balls. Each device layer uses vias to bring the needed conductors to the array of solder pads. All signals for the entire multi-layer assembly can be routed through the bottom LIMMS device layer to pass, through another array of solder pads onto a “mother substrate” of ceramic or other material that carries the multi-layer assembly. Alternatively, signals may enter or leave the upper LIMMS device layer by way of a flexible printed circuit harness. Vias may pass, either directly or by “dog legs” on interior surfaces, completely through the bottom LIMMS device layer, and through other device layers as needed.

Abstract: The present invention uses a piezoelectric method to actuate a liquid metal relay. The method described here uses the piezoelectric element in an extension mode to cause the switch actuator to insert into a cavity in the static (i.e. nonmoving) switch contact structure. The cavity has sides and a pad on its end that are wettable by the liquid metal. The cavity is filled with liquid metal. Insertion of the switch actuator into the cavity causes the liquid metal to be displaced outward and come in contact with the contact pad on the switch actuator. The volume of liquid metal is chosen so that when the actuator returns to its rest position, the electrical contact is maintained by surface tension and by wetting of the contact pads on both the static switch contact structure and the actuator.

Abstract: Disclosed herein is a switch having a channel plate and a switching fluid. The channel plate defines at least a portion of a number of cavities, a first cavity of which is defined by a laser cut channel in the channel plate. The switching fluid is held within one or more of the cavities, and is movable between at least first and second switch states in response to forces that are applied to the switching fluid. Alternate switch embodiments, and a method for making a switch, are also disclosed.

Abstract: Disclosed herein is a switch having a channel plate and a switching fluid. The channel plate defines at least a portion of a number of cavities, a first cavity of which is defined by an ultrasonically milled channel in the channel plate. The switching fluid is held within one or more of the cavities, and is movable between at least first and second switch states in response to forces that are applied to the switching fluid. Alternate switch embodiments, and a method for making a switch, are also disclosed.

Abstract: A switch and method for producing the same. In one embodiment, the switch is produced by depositing a liquid switching element on a substrate, the volume of the liquid switching element being more than needed to fulfill a switching function. A channel plate is moved toward the substrate, the channel plate having a main channel with at least one reservoir fluidically connected thereto, an excess portion of the liquid switching element flowing into the least one reservoir. The channel plate is closed against the substrate.

Abstract: A volume adjustment apparatus for a switch. One embodiment of the volume adjustment apparatus may comprise a plate member sized to fit over a main channel in the switch displaces an excess of a liquid switching element from the main channel of the switch. At least one collection chamber is formed in the plate member overlapping the main channel of the switch to receive the displaced excess liquid switching element.

Abstract: A switch and production thereof. The switch may be produced by (1) depositing a liquid switching element on a substrate, (2) positioning a channel plate adjacent the substrate, (3) moving the channel plate toward the substrate, the liquid switching element wetting to the channel plate, and a portion of the liquid switching element isolated into at least one waste chamber in the channel plate; and (4) closing the channel plate against the substrate.

Abstract: Disclosed herein is a channel plate for a fluid-based switch. The channel plate is produced by 1) forming a plurality of channel plate layers in ceramic green sheet, 2) forming at least one channel plate feature in at least one of the channel plate layers, and 3) laminating the channel plate layers to form the channel plate. Switches using ceramic channel plates, and a method for making a switch with a ceramic channel plate, are also disclosed.

Abstract: Channels and cavities in a LIMMS device are formed from a layer of thick film dielectric material deposited on a substrate, which layer is then covered with a thin cover plate of ceramic or perhaps glass. The layer of dielectric material may be patterned using established thick film techniques, and good dimensional control can be achieved. The dielectric layer is itself its own hermetic seal against the substrate, and readily lends itself to the formation of the additional hermetic seal needed between itself and the cover plate. Suitable thick film dielectric materials that may be deposited as a paste and subsequently cured include the KQ 150 and KQ 115 thick film dielectrics from Heraeus and the 4141A/D thick film compositions from DuPont.

Abstract: In accordance with the invention, a piezoelectrically actuated relay that switches and latches by means of a liquid metal is disclosed. The relay operates by means of a plurality of shear mode piezoelectric elements used to cause a pressure differential in a pair of fluid chambers. Differential pressure is created in the chambers by contracting and expanding the chambers due to action by the piezoelectric elements. The differential pressure causes the liquid metal drop to overcome the surface tension forces that would hold the bulk of the liquid metal drop in contact with the contact pad or pads near the actuating piezoelectric element. The switch latches by means of surface tension and the liquid metal wetting to the contact pads.

Abstract: A first resist is deposited on at least a portion of a substrate (or existing feature on the substrate) that will underlie a feature in a nonphotoimagable material that is to be deposited on the substrate. Thereafter, the nonphotoimagable material is deposited so that it overlaps at least a portion of the first resist. A second resist is then deposited on at least a portion of the nonphotoimagable material, and a feature is patterned on the second resist. Subsequently, the part is sandblasted until the first resist is exposed, and the first and second resists are then removed. In one embodiment, the nonphotoimagable material is deposited on a channel plate and used to seal at least a switching fluid between the channel plate and another substrate.

Abstract: A volume adjustment apparatus for a switch. One embodiment of the volume adjustment apparatus may comprise a plate member sized to fit over a main channel in the switch displaces an excess of a liquid switching element from the main channel of the switch. At least one collection chamber is formed in the plate member overlapping the main channel of the switch to receive the displaced excess liquid switching element.

Abstract: A polymeric switch in which a switching channel is formed in a polymer layer. The channel is formed by a micro-machining technique such as laser ablation or photo-imaging. A liquid metal switch is contained within the switching channel. The liquid metal switch operates by making or breaking an electrical circuit using a volume of liquid metal. Electrical contact pads within the switching channel are wettable by the liquid metal and provide a latching mechanism for the switch. The polymer layer may be located between two switch substrates. Solder rings are attached to the perimeters of the switch substrates. The solder rings are wettable by solder and facilitate the creation of a hermetic seal between the substrates.

Abstract: A high frequency electrical relay uses a conducting liquid in the switching mechanism. The relay uses an actuator, such as a piezoelectric element, to cause the switch actuator to insert into a cavity in a static switch contact structure. The cavity has sides and a pad on its end that are wettable by the conducting liquid. The cavity is filled with the conducting liquid, which may be liquid metal. The volume of conducting liquid is chosen so that when the actuator returns to its rest position, the electrical contact is maintained by surface tension and by wetting of the contact pads on both the static switch contact structure and the actuator.

Abstract: The present invention uses the deflection of a piezoelectric element to move an optical element into contact with the face of an optical path to redirect an optical signal. In its undeflected state, the optical signal is reflected from the angled face of the optical path by internal reflection. When the piezoelectric actuator moves the optical element into contact with the angled face of the optical path, the index of refraction of the optical path is matched and the optical signal enters the optical element and passes through.

Abstract: An electrical relay array using conducting liquid in the switching mechanism. The relay array is amenable to manufacture by micro-machining techniques. In each element of the relay array, two electrical contacts are held a small distance apart. The facing surfaces of the contacts each support a droplet of a conducting liquid, such as a liquid metal. An actuator, coupled to one of the electrical contacts, is energized in a first direction to reduce the gap between the electrical contacts, causing the two conducting liquid droplets to coalesce and complete an electrical circuit. The actuator is then de-energized and the contacts return to their starting position. The liquid droplets remain coalesced because of surface tension. The electrical circuit is broken by energizing an actuator to increase the gap between the electrical contacts to break the surface tension bond between the conducting liquid droplets.

Abstract: Liquid metal micro-switches. Liquid metal micro-switches and techniques for fabricating them in integrally shielded microcircuits are disclosed. The liquid metal micro-switches can be integrated directly into the construction of shielded thick film microwave modules. This integration is useful in applications requiring high frequency switching with high levels of electrical isolation.

Abstract: In accordance with the invention, Brownian noise caused by molecular gas collisions in a micromachined varactor are substantially reduced, and even eliminated, by specialized packaging of the micromachined varactor. The packaging of the micromachined varactor provides for altering the environment of the micromachined varactor so that it is in a vacuum rather than in a gas. Accordingly, the random pressure fluctuations may be completely eliminated. Since a varactor is a device in which the moveable parts do not make contact with the fixed parts, and then separate, stiction is not a problem.

Abstract: In accordance with the invention a method is provided to allow the moveable signal path plate of a MEMS switch to separate from the fixed signal path plate and open the signal path. A solid-state switch is provided in parallel with the MEMS switch. In operation, the MEMS switch is used for good signal transmission and the solid state switch is only used to open the MEMS switch. As a result, the solid state switch needs to have a low capacitance so it does not appreciably affect the signal transmission. Further, the solid state switch needs to have high power handling capacity, i.e. low resistance, but it is not required that it have good signal transmission qualities.

Abstract: Liquid metal micro-switches. Liquid metal micro-switches and techniques for fabricating them in integrally shielded microcircuits are disclosed. The liquid metal micro-switches can be integrated directly into the construction of shielded thick film microwave modules. This integration is useful in applications requiring high frequency switching with high levels of electrical isolation.