Patents by Inventor Masaaki Ueno

Masaaki Ueno has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20060188240
    Abstract: It is an object of the invention to provide a substrate processing equipment that can predict a temperature of a substrate and easily control temperature of the substrate. Formed in a reactor (processing chamber) 3 are four temperature adjustment zones, of which setting and adjustment of temperature can be made by zone heaters 340-1 to 340-4. A temperature controller 4 mixes temperatures detected by inner thermocouples 302-1 to 302-4 and outer thermocouples 342-1 to 342-4 to calculate predicted temperatures of substrates by means of the first-order lag calculation on the basis of time constants of temperatures of substrates heated by the zone heaters 340-1 to 340-4. Also, the temperature controller 4 calculates electric power values (operating variables) for the zone heaters 340-1 to 340-4 with the use of predicted temperatures of substrates to output the same to the zone heaters 340-1 to 340-4.
    Type: Application
    Filed: June 18, 2004
    Publication date: August 24, 2006
    Inventors: Kazuo Tanaka, Masaaki Ueno, Masashi Sugishita
  • Publication number: 20050266685
    Abstract: In a method for controlling temperatures in a semiconductor manufacturing apparatus including a reaction chamber and a plurality of heating sources, a set of power ratios to be fed to the heating sources is determined for each of two or more selected temperatures. Then, a temperature of the reaction chamber is controlled by performing power control on the heating sources based on at least one set of power ratios obtained.
    Type: Application
    Filed: June 15, 2005
    Publication date: December 1, 2005
    Inventors: Minoru Nakano, Masaaki Ueno, Kazuo Tanaka
  • Patent number: 6767752
    Abstract: A temperature control method is provided which is capable of maintaining the accuracy of control based on a detected value of a temperature sensor substantially constant regardless of a change in an error of measurements of the temperature sensor. Measured values of thermocouples 7A, 7B, 7C of a thermocouple thermometer and those of sensor members 6A, 6B, 6C of a radiation thermometer 6 of a sheet-feed apparatus are detected as the processing proceeds. A temperature control parameter of the sheet-feed apparatus is made to change based on differences between the detected temperature values as the processing proceeds.
    Type: Grant
    Filed: August 6, 2002
    Date of Patent: July 27, 2004
    Assignee: Hitachi Kokusai Electric, Inc.
    Inventors: Minoru Nakano, Masaaki Ueno
  • Patent number: 6746908
    Abstract: A temperature control method is provided which is capable of performing quick, accurate, and error-free soaking control over all wafer areas to be thermally treated at a target temperature without requiring any skilled operator and which can be automated by using a computer. In the temperature control method of controlling a heating apparatus having at least two heating zones in such a manner that temperatures detected at predetermined locations equal a target temperature therefor, temperatures are detected at predetermined locations the number of which is larger than the number of the heating zones, and the heating apparatus is controlled in such a manner that the target temperature falls between a maximum value and a minimum value of a plurality of detected temperatures.
    Type: Grant
    Filed: September 28, 2001
    Date of Patent: June 8, 2004
    Assignee: Hitachi Kokusai Electric, Inc.
    Inventors: Kazuo Tanaka, Masaaki Ueno, Minoru Nakano, Hideto Yamaguchi
  • Patent number: 6662353
    Abstract: The present invention relates to an estimation system that can provide a highly reliable estimation result when the estimation system estimates person-hours required to prepare a film pattern for a circuit to be printed on a board. Upon receiving design conditions from a cline machine, a reference pin calculator of the estimation system calculates a number of reference pins on the basis of a total number of pins extending from parts to be integrated on the printed circuit board and a special specification requirement to be applied to the printed circuit. An additional pin calculator calculates a number of additional pins on the basis of a signal line wiring method. A total estimated pin calculator corrects a sum of the reference pins and the additional pins on the basis of design difficulty, which is determined from a number of signal layers to be made in the printed circuit, a number of signal lines arrangeable between adjacent pins and a pin density, to calculate a total estimated number of pins.
    Type: Grant
    Filed: February 28, 2002
    Date of Patent: December 9, 2003
    Assignee: Oki Electric Industry Co., Ltd.
    Inventors: Junichi Yamamoto, Sachio Henmi, Shigemitsu Fujisawa, Masanobu Sakurai, Kazuyuki Tajima, Fumio Kobayashi, Masaaki Ueno
  • Publication number: 20030088846
    Abstract: The present invention relates to an estimation system that can provide a highly reliable estimation result when the estimation system estimates person-hours required to prepare a film pattern for a circuit to be printed on a board. Upon receiving design conditions from a cline machine, a reference pin calculator of the estimation system calculates a number of reference pins on the basis of a total number of pins extending from parts to be integrated on the printed circuit board and a special specification requirement to be applied to the printed circuit. An additional pin calculator calculates a number of additional pins on the basis of a signal line wiring method. A total estimated pin calculator corrects a sum of the reference pins and the additional pins on the basis of design difficulty, which is determined from a number of signal layers to be made in the printed circuit, a number of signal lines arrangeable between adjacent pins and a pin density, to calculate a total estimated number of pins.
    Type: Application
    Filed: February 28, 2002
    Publication date: May 8, 2003
    Inventors: Junichi Yamamoto, Sachio Henmi, Shigemitsu Fujisawa, Masanobu Sakurai, Kazuyuki Tajima, Fumio Kobayashi, Masaaki Ueno
  • Publication number: 20030040198
    Abstract: A temperature control method is provided which is capable of maintaining the accuracy of control based on a detected value of a temperature sensor substantially constant regardless of a change in an error of measurements of the temperature sensor. Measured values of thermocouples 7A, 7B, 7C of a thermocouple thermometer and those of sensor members 6A, 6B, 6C of a radiation thermometer 6 of a sheet-feed apparatus are detected as the processing proceeds. A temperature control parameter of the sheet-feed apparatus is made to change based on differences between the detected temperature values as the processing proceeds.
    Type: Application
    Filed: August 6, 2002
    Publication date: February 27, 2003
    Applicant: Hitachi Kokusai Electric Inc.
    Inventors: Minoru Nakano, Masaaki Ueno
  • Publication number: 20030033371
    Abstract: After an e-mail address has been designated from a portable terminal and an e-mail and its attachment file have been transmitted together to a mail server, the e-mail address, an ID, a password, and the like are input via an input device of fixed terminals installed at various stores which the public can make use of. The e-mail and its attachment file at the e-mail address are then extracted from the mail server and are printed out at the fixed terminals.
    Type: Application
    Filed: September 19, 2001
    Publication date: February 13, 2003
    Inventor: Masaaki Ueno
  • Publication number: 20020055080
    Abstract: A temperature control method is provided which is capable of performing quick, accurate, and error-free soaking control over all wafer areas to be thermally treated at a target temperature without requiring any skilled operator and which can be automated by using a computer. In the temperature control method of controlling a heating apparatus having at least two heating zones in such a manner that temperatures detected at predetermined locations equal a target temperature therefor, temperatures are detected at predetermined locations the number of which is larger than the number of the heating zones, and the heating apparatus is controlled in such a manner that the target temperature falls between a maximum value and a minimum value of a plurality of detected temperatures.
    Type: Application
    Filed: September 28, 2001
    Publication date: May 9, 2002
    Inventors: Kazuo Tanaka, Masaaki Ueno, Minoru Nakano, Hideto Yamaguchi
  • Patent number: 3945019
    Abstract: A data recording system wherein output data from an electronic computer or the like to a display are re-edited in conformity with a predetermined recording system, and information is recorded in patterns of discrete dots developed by dot-forming means and in the feed direction of a recording paper therefor.
    Type: Grant
    Filed: March 5, 1974
    Date of Patent: March 16, 1976
    Assignee: Kabushiki Kaisha Seikosha
    Inventors: Masaaki Ueno, Takehiro Ono