Abstract: In a chamber, first processing is performed as preliminary processing. After the first processing has been finished, the temperature in a predetermined target region in the chamber is measured with a thermographic camera. Then, whether or not to start second processing on a substrate is determined in accordance with the acquired measured temperature information. If it is determined as a result that the second processing can be started, the second processing is performed. In this case, the second processing on the substrate can be started, with the temperature of the target region in the chamber having reached its stability. Accordingly, the second processing can be performed uniformly on a plurality of substrates. That is, it is possible to reduce variations in processing caused by temperature environments in the chamber.

Abstract: A ring-shaped glass spacer is to be arranged in contact with a magnetic disk in a hard disk drive device. A film that contains at least one of tin oxide, zinc oxide, and titanium oxide is formed on each surface of a main surface, and an outer circumferential edge surface, and an inner circumferential edge surface of the glass spacer. The thickness of the film on a center portion of the outer circumferential edge surface of the glass spacer is larger than the thickness of the film on a center portion of the inner circumferential edge surface of the glass spacer.

Abstract: A housing (20) has a passage port (3) that serves as both the outlet for the illumination light (IL) to go out of the housing (20) toward a sample surface (S) and the inlet for the reflection light (RL) reflected on the sample surface (S) to enter the housing (20). A transparent member (19) is disposed at the passage port (3) to prevent dust including paper dust from entering the housing (20). A light quantity calculation unit (71) calculates the light quantity of light received by a light reception lens (33). A notification unit (81) performs a predetermined notification when the light quantity is less than or equal to a predetermined value.

Abstract: A copper-clad laminate is prepared by laminating a copper foil on one side or both sides of a polyimide film by thermocompression bonding. The flexibility of the copper-clad laminate is remarkably improved by employing a polyimide film having a thickness of 5 to 20 ?m and a copper foil having a thickness of 1 to 18 ?m.

Abstract: A housing (20) has a passage port (3) that serves as both the outlet for the illumination light (IL) to go out of the housing (20) toward a sample surface (S) and the inlet for the reflection light (RL) reflected on the sample surface (S) to enter the housing (20). A transparent member (19) is disposed at the passage port (3) to prevent dust including paper dust from entering the housing (20). A light quantity calculation unit (71) calculates the light quantity of light received by a light reception lens (33). A notification unit (81) performs a predetermined notification when the light quantity is less than or equal to a predetermined value.

Abstract: A copper-clad laminate is prepared by laminating a copper foil on one side or both sides of a polyimide film by thermocompression bonding. The flexibility of the copper-clad laminate is remarkably improved by employing a polyimide film having a thickness of 5 to 20 ?m and a copper foil having a thickness of 1 to 18 ?m.

Abstract: A motor current detecting device includes a first wire, an instantaneous current detecting unit, an average electric current detecting unit, and a calculation unit. The first wire is configured and arranged to carry flow of a motor current that has been passed through a motor and a drive current that has been passed through a motor drive unit to drive the motor. The instantaneous current detecting unit is configured and arranged to detect an instantaneous value for a sum of the motor current and the drive current flowing on the first wire. The average electric current detecting unit is configured and arranged to detect an average value of the sum of the motor current and the drive current flowing on the first wire. The calculation unit is configured to calculate the motor current on the basis of the instantaneous value and the average value.

Abstract: A voltage smoothing circuit is configured to smooth a voltage outputted from a power supply portion. The voltage smoothing circuit includes first and second smoothing capacitors, a first balancing resistor, and a second conduction regulating portion. The first smoothing capacitor and the second smoothing capacitor are connected in series to each other and are connected in parallel to the power supply portion. The first balancing resistor is connected in parallel to the first smoothing capacitor. The second conduction regulating portion is connected on a current path in parallel with the second smoothing capacitor and conducts current in one direction on the current path in a case where a voltage equal to or greater than a second predetermined voltage has been applied.

Abstract: Triggered by a position detection sensor detecting that a rotor is positioned at any one of K predetermined electrical angles, for example, 60°, 180°, and 300°, a voltage vector to be given to a motor is updated. When, for example, the rotation frequency is equal to or higher than a specified value, the predetermined electrical angles is changed into M, for example, into one angle of 60°.

Abstract: A current detecting device includes a current leveling unit, a first wire and a current detecting unit. The current leveling unit is configured to level a drive current that is passed through a motor drive unit to drive a motor. The first wire is configured and arranged to carry flow of a motor current that has been passed through the motor and the drive current that has been leveled by the current leveling unit. The current detecting unit is configured to detect a sum of the motor current flowing on the first wire and the drive current that has been leveled flowing on the first wire.

Abstract: An increase in a ripple voltage of a capacitor in a smoothing circuit is prevented to achieve a compact capacitor and cost reduction for capacitors in an electric power supply circuit which performs PAM control using a switching element. An electric power supply circuit includes a bridge circuit for rectifying alternating current power, a smoothing circuit which has two capacitors serially connected to each other, and a PAM control section for turning a switching element on and off at a predetermined timing. The PAM control section includes a phase difference detection section which detects a phase shift of a PAM waveform based on a change in a voltage difference between the two capacitors, and a phase correction section which corrects the phase of the PAM waveform so that an input current has a sine waveform.

Abstract: An electric power supply circuit includes a switching element (S) for causing a short-circuit for output power of a diode bridge circuit (12), a zero-cross detector section (5a) for detecting a point at which an input voltage reaches a level equal to or lower than a reference level, a timer section (5d) for starting a count upon the detection by the zero-cross detector section (5a), and a PAM waveform output section (5c) for causing the switching element (S) to perform switching with a predetermined output timing so that a waveform of the input current is caused to approximate to a sine wave. The circuit further includes a correction section (5e) for correcting, when a difference between a detection interval from detection to detection by the zero-cross detector section (5a), and an average value for detection intervals up to current detection occurs, an initial value of the count of the timer section (5d) according to the difference.

Abstract: The power supply device according to the present invention converts alternating-current power into direct-current power, and supplies the direct-current power to a load. Further, the power supply device includes a buffer, a control section, a rectifier circuit, a smoothing circuit, and a switch. After a predetermined zero cross point is detected, the control section uses in common, over a predetermined period of the alternating-current power, predetermined parameters retained in the buffer in calculating a timing at which a PAM interrupt pulse is generated.

Abstract: A voltage smoothing circuit is configured to smooth a voltage outputted from a power supply portion. The voltage smoothing circuit includes first and second smoothing capacitors, a first balancing resistor, and a second conduction regulating portion. The first smoothing capacitor and the second smoothing capacitor are connected in series to each other and are connected in parallel to the power supply portion. The first balancing resistor is connected in parallel to the first smoothing capacitor. The second conduction regulating portion is connected on a current path in parallel with the second smoothing capacitor and conducts current in one direction on the current path in a case where a voltage equal to or greater than a second predetermined voltage has been applied.

Abstract: An electric power supply circuit includes a diode bridge circuit (12) for rectifying an alternating current, a switching element (S) for causing a short-circuit for output power of the diode bridge circuit (12), and a PAM control section (15) for causing the switching element (S) to perform switching with a predetermined timing so that a waveform of an input current approximates to a sine wave. The PAM control section (15) outputs ON/OFF pulses so that five pulses are output for each zero-cross point and one of the five pulses located in center extends over the zero-cross point at any time.

Abstract: An adhesion-enhanced polyimide film which includes a core layer composed of a polyimide (a) having high rigidity and a low linear expansion coefficient, at least one side of which has a thin-layer formed by heating a coated layer including a heat-resistant surface treatment agent and a polyimide precursor which yields a highly heat-resistant amorphous polyimide (B).

Abstract: Triggered by a position detection sensor detecting that a rotor is positioned at any one of K predetermined electrical angles, for example, 60°, 180°, and 300°, a voltage vector to be given to a motor is updated. When, for example, the rotation frequency is equal to or higher than a specified value, the predetermined electrical angles is changed into M, for example, into one angle of 60°.

Abstract: A motor current calculation device includes a first wire, a current detecting unit, a decision unit, and a calculation unit. The first wire is configured and arranged to carry flow of a motor current that has been passed through a motor and a drive current that has been passed through a motor drive unit to drive the motor. The current detecting unit is configured and arranged to detect a sum of the motor current and the drive current flowing through the first wire. The decision unit is configured and arranged to determine a first detection result of the current detecting unit when the motor is not rotating as the drive current. The calculation unit is configured to calculate the motor current by subtracting the drive current determined by the decision unit from a second detection result of the current detecting unit when the motor is rotating.

Abstract: A motor current detecting device includes a first wire, an instantaneous current detecting unit, an average electric current detecting unit, and a calculation unit. The first wire is configured and arranged to carry flow of a motor current that has been passed through a motor and a drive current that has been passed through a motor drive unit to drive the motor. The instantaneous current detecting unit is configured and arranged to detect an instantaneous value for a sum of the motor current and the drive current flowing on the first wire. The average electric current detecting unit is configured and arranged to detect an average value of the sum of the motor current and the drive current flowing on the first wire. The calculation unit is configured to calculate the motor current on the basis of the instantaneous value and the average value.

Abstract: A current detecting device includes a current leveling unit, a first wire and a current detecting unit. The current leveling unit is configured to level a drive current that is passed through a motor drive unit to drive a motor. The first wire is configured and arranged to carry flow of a motor current that has been passed through the motor and the drive current that has been leveled by the current leveling unit. The current detecting unit is configured to detect a sum of the motor current flowing on the first wire and the drive current that has been leveled flowing on the first wire.