Abstract: For example, in a plasma processing system, C4F8 gas and C2H4 gas are introduced as film-forming gases at flow rates of 60 sccm and 30 sccm, respectively, under the conditions of a pressure of 0.2 Pa, a microwave power of 2.7 kW, a radiofrequency power of 1.5 kW, and a wafer temperature of 350° C. At the same time, a plasma gas is also introduced at a flow rate of 150 sccm to form CF film 13 having an F content of, for example, 22% on silicon substrate 11. This CF film 13 has a relative dielectric constant of 2.4.

Abstract: Microwave is introduced into a plasma chamber of a plasma processing apparatus and magnetic field is applied thereto to allow plasma generation gas to be placed in plasma state by the electron cyclotron resonance. This plasma is introduced into a film forming chamber of the plasma processing apparatus to allow film forming gas including compound gas of carbon and fluorine or compound gas of carbon, fluorine and hydrogen, and hydro carbon gas to be placed in plasma state. In addition, an insulating film consisting of fluorine added carbon film is formed by the film forming gas placed in plasma state.

Abstract: A control system of a lockup clutch of a torque converter of a vehicle automatic transmission. A basic manipulated variable is determined in response to the vehicle operating condition in accordance with a predetermined characteristic, and the lockup clutch engaging force is controlled in response to the variable. In the system, fuzzy reasoning is carried out using the detected vehicle operating parameters to correct the basic manipulated variable, and the engaging force is controlled in response to the corrected manipulated variable, when the control condition is met. The corrected manipulated variable is gradually decreased with respect to time when the vehicle driving state has shifted from a region in which the engaging force is controlled in response to the corrected manipulated variable to a region in which the lockup clutch is disengaged.

Abstract: In a control apparatus for a hydraulically operated vehicular transmission, the hydraulic pressure of a hydraulic clutch on the engaging side which is engaged at the time of speed changing (engaging pressure) is detected by a hydraulic pressure sensor. When the detected value of the engaging pressure has exceeded a predetermined value, the hydraulic pressure of a hydraulic clutch on the disengaging side to be disengaged at the time of speed changing (disengaging pressure) is reduced to a predetermined low pressure. Even if the detected value of the engaging pressure has exceeded a predetermined value YPC, the decrease in the disengaging pressure down to a predetermined low pressure QUPOFFB is delayed by a predetermined time YTMUP9 at the time of low oil temperature when the detected value of an oil temperature to be detected by an oil temperature sensor is below a predetermined value YTO.

Abstract: A control system of a lockup clutch of a torque converter of a vehicle automatic transmission. A basic manipulated variable is determined in response to the vehicle operating condition in accordance with a predetermined characteristic, and the lockup clutch engaging force is controlled in response to the variable. In the system, fuzzy reasoning is carried out using the detected vehicle operating parameters to correct the basic manipulated variable, and the engaging force is controlled in response to the corrected manipulated variable, when the control condition is met. The corrected manipulated variable is gradually decreased with respect to time when the vehicle driving state has shifted from a region in which the engaging force is controlled in response to the corrected manipulated variable to a region in which the lockup clutch is disengaged.

Abstract: An optical device module comprises a module body including an optical device, a first fiber connector holding a first optical fiber, coupled to one end of the optical device, and a second fiber connector holding a second optical fiber, coupled to the other end of the optical device; and an enclosure body integrally molded with a resin such as an epoxy resin, an urethan resin to coat the module body. Almost the whole module body is coated with the integrally molded epoxy resin, so that the module body is protected efficiently from external heat, moisture, mechanical shock etc.

Abstract: The present invention relates to a package in which an optical waveguide module is mounted, at least having such structure as to reduce influence of expansion or contraction (thermal stress) of a metal housing, caused with a temperature change of the external environment and applied on junction parts between an optical waveguide substrate and members for fixedly supporting tip portions of input and output optical fibers. This package comprises a cavity for housing the whole of the optical waveguide module as covered with a buffer protection material, and a metal housing having through holes for leading the above optical fibers to the outside. Particularly, the optical fibers and the through holes are bonded and secured with a filler having higher airtightness than the buffer protection material and having a lower tensile modulus than a metal material forming the housing.

Abstract: This invention relates to an optical waveguide module having stable temperature characteristics and moist heat characteristics even in a severe environment. This optical waveguide module includes a waveguide component having an optical waveguide on a waveguide substrate made of silicon or silica glass as the first material, and a ferrule made of a plastic material as the second material. An end face of an optical fiber is fixed by adhesion while it is inserted in a through hole of the ferrule, the through hole having a continuous inner wall. This ferrule is fixed with an adhesive having a predetermined strength so that its the end face opposes the end face of the waveguide component. The second material satisfies a relationship:.vertline..DELTA.L/(E.sub.1 /E.sub.2).vertline.<3.0.times.10.sup.-6 (.degree.C..sup.-1)with respect to the first material forming the waveguide substrate, where .DELTA.L is a difference in thermal expansion coefficient between the first material and the second material, E.sub.

Abstract: A process for forming film structure using Flame Hydrolysis Deposition (FHD) in which (1) glass soot is deposited on a substrate via FHD to form a first porous vitreous layer having a first bulk density, (2) a second porous vitreous layer having a second bulk density that is larger than the first bulk density is formed from a portion of the first porous vitreous layer, and (3) a third porous vitreous layer having a third bulk density is formed by depositing glass soot containing a refractive index increasing dopant on the second porous vitreous layer by FHD. The first, second and third porous vitreous layers are then heated to form an undercladding layer and a core layer, the undercladding layer being formed from the first and second porous vitreous layers and the core layer being formed from the third porous vitreous layer.

Abstract: In the method for forming an optical waveguide according to this invention, an optical waveguide comprising a core of quartz as a main component, and a cladding layers surrounding the core is formed by deposition of glass fine particles by flame hydrolysis deposition and vitrifying the glass fine particle layers. This method includes a step of transiently increasing a feed amount of phosphorus to a flame burner in forming glass fine particle layers to be the cladding layers. Feeding phosphorus in this step for the first time after a glass fine particle layer is deposited without feeding phosphorus to the flame burner, whereby generation of foreign objects near the core dan be suppressed.

Abstract: There is disclosed a coupling structure of optical fibers and optical waveguides, comprising optical fibers; an optical fiber arranging connector having a first and second members, the optical fibers being sandwiched by the first and second members to be fixed in the optical fiber arranging connector; a waveguide device having a waveguide substrate, optical waveguides being formed on a surface of the waveguide device, ends of the waveguides and ends of being aligned with each other by abutting end faces thereof against each other; an adhesive interposed and set between said end faces, the adhesive being a photo-setting adhesive, the first member being made of a material preventing light having a wavelength capable of setting said adhesive from passing therethrough, and in at least part of a region where the end faces of the optical fiber arranging connector and the waveguide device oppose to each other, at least one of the optical fiber arranging connector and the waveguide device in the vicinity of the end f

Abstract: An optical waveguide module according to the present invention comprises an optical waveguide substrate having an optical waveguide formed therein, an optical waveguide holder for mounting the optical waveguide substrate thereon, an optical fiber connector supporting an optical fiber therein, and an optical fiber holder for mounting the optical fiber connector thereon, the end faces of the optical waveguide holder and the optical fiber holder are brought into contact with each other while aligning the optical waveguide and the optical fiber, the end faces of the optical waveguide substrate and the optical fiber connector are bonded at least partially through a gap, and a hardening matching agent having a refractive index matching with those of the optical waveguide and the optical fiber is filled in the gap.

Abstract: In the first step, a fuel and raw material gases are fed to burner while flames from the burner scan a Si substrate. Synthesized fine glass particles are deposited on the substrate to form a first porous vitreous layer to be an under cladding layer. In the second step, the first porous vitreous layer is heated by the flames. A bulk density of an upper part of the first porous vitreous layer is raised to 0.3 g/cm.sup.3. Having a raised bulk density, this upper part functions as a shield layer against GeO.sub.2. In the third step, a second porous vitreous layer, to be a core layer, is deposited uniformly on the first porous vitreous layer. In the fourth step, the first and the second porous vitreous layers are sintered. In this case, the shield layer with a higher bulk density hinders the GeO.sub.2 component which has evaporated from the second porous vitreous layer from diffusing into the first porous vitreous layer.

Abstract: A glass preform for an optical fiber is flame abrased with an oxyhydrogen flame while vertically suspending and rotating the glass preform and relatively moving one or both of the glass preform and the oxyhydrogen flame, whereby a surface of the glass preform is smoothened.

Abstract: This invention relates to a sintering furnace for the production of a quartz preform which can be used for carrying out dehydration, fluorine-addition and/or sintering of a porous quartz soot preform prepared by a flame hydrolysis method such as a VAD method or a OVD method, and in particular, to such a furnace in which joints in a long furnace muffle so long that fabricating it as open body is impossible can be maintained fully gas-tight, so that it is possible to prevent H.sub.2 O, O.sub.2 and other impurities in the air from entering the muffle from outside, and corrosive and poisonous gases in the muffle are prevented from leakage to outside the muffle.