Abstract: According to one embodiment, a semiconductor device includes first to third electrodes, first to third nitride regions, and first and second insulating films. The first nitride region includes Alx1Ga1?x1N, and includes first and second partial regions, a third partial region between the first and second partial regions, a fourth partial region between the first and third partial regions, and a fifth partial region between the third and second partial regions. The first nitride region includes first to fifth partial regions. The second nitride region includes Alx2Ga1?x2N, and sixth and seventh partial regions. At least a portion of the third electrode is between the sixth and seventh partial regions. The first insulating film includes silicon and oxygen and includes first and second insulating regions. The third nitride region includes Alx3Ga1?x3N, and first to seventh portions. The second insulating film includes silicon and oxygen and includes third to seventh insulating regions.

Abstract: Provided is a heater including: a substrate that has electrical conductivity; a first insulation portion that is provided on a first surface of the substrate, has an insulation property; at least one heat generation body that is provided on the first insulation portion; a second insulation portion that is provided on a second surface of the substrate which is opposite to the first surface, has an insulation property; at least one detection unit that is provided on at least one of the first insulation portion and the second insulation portion; and a first wiring which is provided on at least one of the first insulation portion and the second insulation portion, and in which one end is electrically connected to one terminal of the detection unit and the other end is electrically connected to the substrate having the electrical conductivity.

Abstract: Provided is an efficient method for attaching a tissue section. In the invention, one of problems is solved by changing attachment conditions of the tissue section depending on an organ from which the tissue section is derived. A technique of achieving good adhesiveness between a microscope slide and a section by introducing unevenness on a front surface of the microscope slide using reactive ion etching as one of the attachment conditions is provided. Further, a technique of optimizing the attachment of the section using a machine learning technique or the like is provided.

Abstract: A pre-drying processing liquid containing a sublimable substance that changes to gas without passing through to a liquid and a solvent in which the sublimable substance dissolves is supplied to a front surface of a substrate on which a pattern has been formed. Thereafter, the solvent is evaporated from the pre-drying processing liquid on the front surface of the substrate to thereby form a solidified body containing the sublimable substance on the front surface of the substrate. Thereafter, the solidified body is sublimated and thereby removed from the front surface of the substrate. A value acquired by multiplying a ratio of the thickness of the solidified body to the height of the pattern by 100 is greater than 76 and less than 219.

Abstract: To dry a substrate formed with a pattern on a front surface satisfactorily and with excellent drying performance, a substrate processing method comprises: a liquid film formation step of forming a liquid film of a processing liquid, in which cyclohexanone oxime is dissolved in a solvent, on a front surface of a substrate formed with a pattern by supplying the processing liquid to the front surface of the substrate; a solidified film formation step of forming a solidified film of the cyclohexanone oxime by solidifying the liquid film of the processing liquid; and a sublimation step of removing the solidified film from the front surface of the substrate by sublimating the solidified film.

Abstract: To dry a substrate formed with a pattern on a front surface satisfactorily and with excellent drying performance, a substrate processing method comprises: a liquid film formation step of forming a liquid film of a processing liquid, in which cyclohexanone oxime is dissolved in a solvent, on a front surface of a substrate formed with a pattern by supplying the processing liquid to the front surface of the substrate; a solidified film formation step of forming a solidified film of the cyclohexanone oxime by solidifying the liquid film of the processing liquid; and a sublimation step of removing the solidified film from the front surface of the substrate by sublimating the solidified film.

Abstract: To dry a substrate formed with a pattern on a front surface satisfactorily and with excellent drying performance, a substrate processing method comprises: a liquid film formation step of forming a liquid film of a processing liquid, in which cyclohexanone oxime is dissolved in a solvent, on a front surface of a substrate formed with a pattern by supplying the processing liquid to the front surface of the substrate; a solidified film formation step of forming a solidified film of the cyclohexanone oxime by solidifying the liquid film of the processing liquid; and a sublimation step of removing the solidified film from the front surface of the substrate by sublimating the solidified film.

Abstract: A pre-drying processing liquid containing a sublimable substance that changes to gas without passing through to a liquid and a solvent in which the sublimable substance dissolves is supplied to a front surface of a substrate on which a pattern has been formed. Thereafter, the solvent is evaporated from the pre-drying processing liquid on the front surface of the substrate to thereby form a solidified body containing the sublimable substance on the front surface of the substrate. Thereafter, the solidified body is sublimated and thereby removed from the front surface of the substrate. A value acquired by multiplying a ratio of the thickness of the solidified body to the height of the pattern by 100 is greater than 76 and less than 219.

Abstract: A pre-drying processing liquid containing a sublimable substance that changes to gas without passing through to a liquid and a solvent in which the sublimable substance dissolves is supplied to a front surface of a substrate on which a pattern has been formed. Thereafter, the solvent is evaporated from the pre-drying processing liquid on the front surface of the substrate to thereby form a solidified body containing the sublimable substance on the front surface of the substrate. Thereafter, the solidified body is sublimated and thereby removed from the front surface of the substrate. A value acquired by multiplying a ratio of the thickness of the solidified body to the height of the pattern by 100 is greater than 76 and less than 219.

Abstract: Disclosed is an immunity inducer. The immunity inducer comprises virus like particles; the virus like particles comprise a virus-derived outer coat protein and an antigen-bound protein comprising an exogenous antigen; the outer coat protein constitutes an outer coat of the virus like particles, and the antigen-bound protein is comprised in the outer coat; and the virus like particles induce an immune effect of a living body on the antigen.

Abstract: To dry a substrate formed with a pattern on a front surface satisfactorily and with excellent drying performance, a substrate processing method comprises: a liquid film formation step of forming a liquid film of a processing liquid, in which cyclohexanone oxime is dissolved in a solvent, on a front surface of a substrate formed with a pattern by supplying the processing liquid to the front surface of the substrate; a solidified film formation step of forming a solidified film of the cyclohexanone oxime by solidifying the liquid film of the processing liquid; and a sublimation step of removing the solidified film from the front surface of the substrate by sublimating the solidified film.

Abstract: A substrate processing method includes a sublimable-substance-containing liquid film forming step of supplying a sublimable-substance-containing liquid to a surface of a substrate on which a pattern is formed, so that a liquid film of the sublimable-substance-containing liquid covering the surface of the substrate is formed on the surface of the substrate, a transition state film forming step of evaporating the solvent from the liquid film to form solids of the sublimable substance, so that a transition state film, that is in a pre-crystal transition state before the solids of the sublimable substance crystallize, is formed on the surface of the substrate, and a transition state film removing step of sublimating the solids of the sublimable substance on the surface of the substrate while maintaining the solids of the sublimable substance in the pre-crystal transition state, so that the transition state film from the surface of the substrate is removed.

Abstract: A substrate processing apparatus comprises: a liquid film former which forms a liquid film by supplying a liquid on an upper surface of the substrate W held horizontally; a cooling gas discharge nozzle which discharges cooling gas of a temperature lower than a freezing point of the liquid forming the liquid film to the liquid film; a thawing liquid discharge nozzle which discharges a thawing liquid to a frozen film formed by freezing the liquid film; a thawing liquid supplier which supplies the heated thawing liquid to the thawing liquid discharge nozzle via a pipe; and a receiver which receives the cooling gas and the thawing liquid respectively discharged from the cooling gas discharge nozzle and the thawing liquid discharge nozzle at the respective retracted position and guides the cooling gas and the thawing liquid to a common flow passage.

Abstract: The present substrate processing method includes a pre-drying processing liquid supplying step of supplying, to a front surface of a substrate, a pre-drying processing liquid, having a freezing point lower than a freezing point of the solidified body forming substance, a solidified body forming step of solidifying a portion of the pre-drying processing liquid on the front surface of the substrate to form the solidified body, containing the solidified body forming substance, inside the pre-drying processing liquid, a liquid removing step of removing the pre-drying processing liquid on the front surface of the substrate while letting the solidified body remain on the front surface of the substrate, and a solid removing step of removing the solidified body, remaining on the front surface of the substrate, from the front surface of the substrate by making the solidified body change to a gas.

Abstract: A pre-drying processing liquid containing a sublimable substance that changes to gas without passing through to a liquid and a solvent in which the sublimable substance dissolves is supplied to a front surface of a substrate on which a pattern has been formed. Thereafter, the solvent is evaporated from the pre-drying processing liquid on the front surface of the substrate to thereby form a solidified body containing the sublimable substance on the front surface of the substrate. Thereafter, the solidified body is sublimated and thereby removed from the front surface of the substrate. A value acquired by multiplying a ratio of the thickness of the solidified body to the height of the pattern by 100 is greater than 76 and less than 219.

Abstract: Provided is a cargo carrying vehicle including; an elevating table 2 elevatable in the vertical direction; a plurality of rotating bodies 31 located on the elevating table 2 and configured to rotate so as to carry a cargo C in a conveyance direction X that is a direction toward a loading-unloading part of an aircraft; and a support 32 configured to support the plurality of rotating bodies 31, wherein the support 32 and the plurality of rotating bodies 31 constitute the conveying unit 3, and the conveying unit 3 is movable on the elevating table 2 in a position adjusting direction Y that is a direction intersecting the vertical direction and the conveyance direction.

Abstract: Disclosed is an immunostimulator containing virus-like particles, in which the virus-like particles contain an outer coat protein containing an amino acid sequence selected from the group consisting of SEQ ID No. 1, SEQ ID No. 26, SEQ ID No. 33, SEQ ID No. 35, SEQ ID No. 37, SEQ ID No. 39, SEQ ID No. 41, SEQ ID No. 43 and SEQ ID No. 45; the outer coat protein constitutes an outer coat of the virus-like particles; and the virus-like particles do not substantially contain a genome DNA of SV40.

Abstract: Provided is a cargo carrying vehicle including; an elevating table 2 elevatable in the vertical direction; a plurality of rotating bodies 31 located on the elevating table 2 and configured to rotate so as to carry a cargo C in a conveyance direction X that is a direction toward a loading-unloading part of an aircraft; and a support 32 configured to support the plurality of rotating bodies 31, wherein the support 32 and the plurality of rotating bodies 31 constitute the conveying unit 3, and the conveying unit 3 is movable on the elevating table 2 in a position adjusting direction Y that is a direction intersecting the vertical direction and the conveyance direction.

Abstract: A substrate processing apparatus comprises: a liquid film former which forms a liquid film by supplying a liquid on an upper surface of the substrate W held horizontally; a cooling gas discharge nozzle which discharges cooling gas of a temperature lower than a freezing point of the liquid forming the liquid film to the liquid film; a thawing liquid discharge nozzle which discharges a thawing liquid to a frozen film formed by freezing the liquid film; a thawing liquid supplier which supplies the heated thawing liquid to the thawing liquid discharge nozzle via a pipe; and a receiver which receives the cooling gas and the thawing liquid respectively discharged from the cooling gas discharge nozzle and the thawing liquid discharge nozzle at the respective retracted position and guides the cooling gas and the thawing liquid to a common flow passage.

Abstract: Disclosed is an immunostimulator containing virus-like particles, in which the virus-like particles contain an outer coat protein containing an amino acid sequence selected from the group consisting of SEQ ID No. 1, SEQ ID No. 26, SEQ ID No. 33, SEQ ID No. 35, SEQ ID No. 37, SEQ ID No. 39, SEQ ID No. 41, SEQ ID No. 43 and SEQ ID No. 45; the outer coat protein constitutes an outer coat of the virus-like particles; and the virus-like particles do not substantially contain a genome DNA of SV40.