Abstract: An etching method includes loading, first and second supplying, removing and etching steps. In the loading step, a target object is loaded into a chamber. In the first supply step, a first gas containing carbon, hydrogen and fluorine is supplied into the chamber. In the modification step, plasma of the first gas is generated to modify a surface of a mask film and a surface of an organic film which is not covered with the mask film. In the second supply step, a second gas for etching the organic film is supplied into the chamber. In the removal step, a modified layer formed on the surface of the organic film is removed by applying a first high frequency bias power. In the etching step, the organic film below the modified layer is etched by applying a second high frequency bias power lower than the first high frequency bias power.

Abstract: An optical writing device includes: a deflector that deflects and scans light; optical elements; and a housing that holds the deflector and the optical element, wherein a support plate of the housing has an enclosed inner region that is substantially surrounded by a vibration suppressor and a vibration transmission blocker and supports the deflector, and the support plate also has a flat portion having a peninsular shape facing the vibration transmission blocker in the enclosed inner region, and an element holder for at least one or more of the optical elements having optical sensitivity in a vibration direction of the housing is disposed outside the enclosed inner region.

Abstract: An optical writing device includes: a light emitting member on which a plurality of light emitting elements are arranged in a row; and a holding member on which a plurality of projections are arranged at intervals. In the optical writing device, a rear surface of the light emitting member opposite to a light emitting surface of the light emitting member contacts tops of the projections, and the light emitting member is fixed to the holding member via adhesives disposed on two opposite sides of each of the projections in a short direction of the holding member on the holding member so as to be separated from the projection.

Abstract: In a displacement sensor, an illumination optical system, which converts laser light emitted from an emission unit into first converging light, and irradiates with the first converging light a detection space through which a target moves. An imaging optical system converts laser light reflected from the target into second converging light, and irradiates with the second converging light a light-receiving surface of a detection unit. The image of the emission unit into which the illumination optical system focuses the first converging light is displaced along the optical axis of the imaging optical system by a temperature change of the illumination optical system. The range in which the image is displaced is limited to be located either anterior to the front principal point of the imaging optical system, or posterior to the rear principal point of the imaging optical system.

Abstract: A cryogenic cooling apparatus includes: a vacuum container configured to form an airtight space capable of forming a vacuum and accommodate a first cooling object; a first bellows connected to a peripheral portion of an opening provided in the vacuum container and configured to form an expandable and contractible communication space; a flange provided at a tip of the first bellows on a side opposite to the opening of the vacuum container and configured to fix a refrigerator; a first sleeve connected to a peripheral edge portion of an opening of the flange, into which the refrigerator is inserted, and configured to form a first accommodation space; a first heat-transfer block provided at a tip of the first sleeve on a side opposite to the flange and thermally connected to the first cooling object by being brought into contact with a first cooling block of the refrigerator; and a second bellows formed in a part of the first sleeve and configured to expand or contract the accommodation space depending on the ref

Abstract: To realize DMA data transfer between a host computer and another computer even in the case that the host computer and the another computer are each equipped with a CPU, a memory, and so forth independently. A computer communicably connected with a first computer including a first memory and a driver for controlling a device, the computer comprising: the device; and a second memory, wherein a first DMA transfer is executed based on a DMA transfer request received from the driver, a second DMA transfer is executed to transfer data existing at a transfer destination address of the first DMA transfer between the first memory and the second memory, and the transfer destination address is detected as a result of executing the first DMA transfer.

Abstract: Provided are an antireflection film having a high antireflection effect and a production process therefor, an optical member excellent in antireflection effect, a water-repellent film having excellent water repellency, a substrate for mass spectrometry having high detection sensitivity, a high-accuracy phase plate, and a fine structure that can be used in the foregoing and a production process therefor. The fine structure is a structure, including multiple conical portions on a surface thereof, in which the conical portions have a mesostructure; and the mesostructure includes a structure having mesopores.

Abstract: An optical writing device includes: a light source substrate in which a plurality of light sources and a driving circuit for driving the plurality of light sources are mounted on the same substrate surface; and an optical element that images outgoing light of the light sources on a photoreceptor, wherein the plurality of light sources are two-dimensionally disposed in plan view from an optical axis direction of the optical element, and the light sources having distances different from each other in the optical axis direction to the photoreceptor are included.

Abstract: This invention expands the scope of application of a pass-through technology in which a guest OS directly controls a remote device that is connected via a network. This data-processing apparatus is provided with a host OS that provides a virtual hardware environment to a guest OS that performs I/O processing with respect to a device implemented in a remote apparatus connected via a network. The host OS has a bus extension unit that traps I/O instructions issued by the guest OS, encapsulates the trapped I/O instructions, and delivers the encapsulated I/O instructions to the remote apparatus as network packets.

Abstract: Provided are constituent particles containing a water-soluble material with high flowability in the form of powder, the constituent particles being capable of forming a support member that can be removed with a water-containing solvent in a process for producing a three-dimensional object. The constituent particles used for the production of a three-dimensional object each include a core and a shell that covers at least part of a surface of the core, the core containing a water-soluble material most abundantly, and a material contained in the shell most abundantly having a lower water solubility than the water-soluble material contained in the core.

Abstract: An optical writing device includes: a light emitting member on which a plurality of light emitting elements are arranged in a row; and a holding member on which a plurality of projections are arranged at intervals. In the optical writing device, a rear surface of the light emitting member opposite to a light emitting surface of the light emitting member contacts tops of the projections, and the light emitting member is fixed to the holding member via adhesives disposed on two opposite sides of each of the projections in a short direction of the holding member on the holding member so as to be separated from the projection.

Abstract: An etching method includes loading, first and second supplying, removing and etching steps. In the loading step, a target object is loaded into a chamber. In the first supply step, a first gas containing carbon, hydrogen and fluorine is supplied into the chamber. In the modification step, plasma of the first gas is generated to modify a surface of a mask film and a surface of an organic film which is not covered with the mask film. In the second supply step, a second gas for etching the organic film is supplied into the chamber. In the removal step, a modified layer formed on the surface of the organic film is removed by applying a first high frequency bias power. In the etching step, the organic film below the modified layer is etched by applying a second high frequency bias power lower than the first high frequency bias power.

Abstract: This computer system improves the ease with which a guest OS and remote device can be connected in a configuration combining pass-through technology and bus extension technology. The computer system is provided with a bus extending means for constructing a virtual bus to one or more remote devices connected via a network, and an executing means for configuring a virtual hardware environment and executing a host operating system for causing a guest operating system to control the remote device(s). The bus extending means comprises a communication controlling means for consulting a management table for managing relationships of correspondence between the guest operating system and the remote device(s) by using identification information that does not change depending on the startup state of the remote device(s), and controlling communication between the guest operating system and the remote device(s).

Abstract: To realize DMA data transfer between a host computer and another computer even in the case that the host computer and the another computer are each equipped with a CPU, a memory, and so forth independently. A computer communicably connected with a first computer including a first memory and a driver for controlling a device, the computer comprising: the device; and a second memory, wherein a first DMA transfer is executed based on a DMA transfer request received from the driver, a second DMA transfer is executed to transfer data existing at a transfer destination address of the first DMA transfer between the first memory and the second memory, and the transfer destination address is detected as a result of executing the first DMA transfer.

Abstract: In a displacement sensor, an illumination optical system, which converts laser light emitted from an emission unit into first converging light, and irradiates with the first converging light a detection space through which a target moves. An imaging optical system converts laser light reflected from the target into second converging light, and irradiates with the second converging light a light-receiving surface of a detection unit. The image of the emission unit into which the illumination optical system focuses the first converging light is displaced along the optical axis of the imaging optical system by a temperature change of the illumination optical system. The range in which the image is displaced is limited to be located either anterior to the front principal point of the imaging optical system, or posterior to the rear principal point of the imaging optical system.

Abstract: A support material contains at least one member selected from the group consisting of low molecular weight saccharides, polyvinyl alcohols, and polyalkylene glycols; non-water-soluble cellulose fibers; and a water-soluble cellulose derivative.

Abstract: A shaping plate to be set on a shaping stage of a shaping system for performing shaping by an additive manufacturing method includes a water-insoluble base substrate and an underlying layer containing a water-soluble material on at least one surface of the base substrate, wherein the base substrate has a plurality of through holes that extend in the direction intersecting the surface provided with the underlying layer.

Abstract: A powder contains particles containing a water-soluble material and a water-insoluble material. When dependence on temperature of a storage elastic modulus and a loss elastic modulus of a cylindrical compact of the powder in a shear direction, the cylindrical compact having a diameter of 10 mm and a thickness of 1 mm, is measured with a rotational rheometer at an angular frequency of 1 Hz and a rate of temperature increase of 2° C./min, letting a temperature at which the storage elastic modulus is 1 MPa be T° C., the storage elastic modulus is always higher than the loss elastic modulus in a temperature range of T° C. to (T+10)° C.

Abstract: Provided are constituent particles containing a water-soluble material with high flowability in the form of powder, the constituent particles being capable of forming a support member that can be removed with a water-containing solvent in a process for producing a three-dimensional object. The constituent particles used for the production of a three-dimensional object each include a core and a shell that covers at least part of a surface of the core, the core containing a water-soluble material most abundantly, and a material contained in the shell most abundantly having a lower water solubility than the water-soluble material contained in the core.

Abstract: A computer system, having a non-volatile storage unit (152), a main storage unit (151), and a data processor (102) including a memory management unit (102A) for managing a program stored in the non-volatile storage unit and the main storage unit to transfer a program stored in the non-volatile storage unit to the main storage unit, wherein the memory management unit (102A) includes a program storage control function of storing a program subjected to predetermined data conversion and a program yet to be subjected to predetermined data conversion in the non-volatile storage unit, and a function of combining programs subjected to predetermined data conversion so as not to bridge over a boundary between blocks at the execution of the program storage control function, as well as, at a first access to a certain block, expanding all the data included in the block to a corresponding block of the main storage unit.