Abstract: A structure includes a polycrystalline substance of yttrium fluoride, wherein an average crystallite size in the polycrystalline substance is less than 100 nanometers. When taking a peak intensity detected near diffraction angle 2?=24.3° by X-ray diffraction as ?, and taking a peak intensity detected near diffraction angle 2?=25.7° as ?, a peak intensity ratio ?/? of the structure is not less than 0% and less than 100%.

Abstract: A structure includes a polycrystalline substance of yttrium fluoride, wherein an average crystallite size in the polycrystalline substance is less than 100 nanometers. When taking a peak intensity detected near diffraction angle 2?=24.3° by X-ray diffraction as ?, and taking a peak intensity detected near diffraction angle 2?=25.7° as ?, a peak intensity ratio ?/? of the structure is not less than 0% and less than 100%.

Abstract: According to one embodiment, a structure includes a polycrystalline substance of yttrium oxyfluoride as a main component. The yttrium oxyfluoride has a rhombohedral crystal structure, and an average crystallite size of the polycrystalline substance is less than 100 nanometers. When taking a peak intensity of rhombohedron detected near diffraction angle 2?=13.8° by X-ray diffraction as r1, taking a peak intensity of rhombohedron detected near diffraction angle 2?=36.1° as r2, and taking a proportion ?1 as ?1(%)=r2/r1×100, the proportion ?1 is not less than 0% and less than 100%.

Abstract: According to one embodiment, a structure includes a polycrystalline substance of yttrium oxyfluoride as a main component. The yttrium oxyfluoride has an orthorhombic crystal structure, and an average crystallite size of the polycrystalline substance is less than 100 nanometers. When taking a peak intensity detected near diffraction angle 2?=32.0° by X-ray diffraction as ?, and taking a peak intensity detected near diffraction angle 2?=32.8° as ?, a peak intensity ratio ?/? is not less than 0% and not more than 150%.

Abstract: According to one embodiment, a structure includes a polycrystalline substance of yttrium oxyfluoride as a main component. The yttrium oxyfluoride has a rhombohedral crystal structure, and an average crystallite size of the polycrystalline substance is less than 100 nanometers. When taking a peak intensity of rhombohedron detected near diffraction angle 2?=13.8° by X-ray diffraction as r1, taking a peak intensity of rhombohedron detected near diffraction angle 2?=36.1° as r2, and taking a proportion ?1 as ?1(%)=r2/r1×100, the proportion ?1 is not less than 0% and less than 100%.

Abstract: According to one embodiment, a structure includes a polycrystalline substance of yttrium oxyfluoride as a main component. The yttrium oxyfluoride has a rhombohedral crystal structure, and an average crystallite size of the polycrystalline substance is less than 100 nanometers. When taking a peak intensity of rhombohedron detected near diffraction angle 2?=13.8° by X-ray diffraction as r1, taking a peak intensity of rhombohedron detected near diffraction angle 2?=36.1° as r2, and taking a proportion ?1 as ?1(%)=r2/r1×100, the proportion ?1 is not less than 0% and less than 100%.

Abstract: According to one embodiment, a structure includes a polycrystalline substance of yttrium oxyfluoride as a main component. The yttrium oxyfluoride has an orthorhombic crystal structure, and an average crystallite size of the polycrystalline substance is less than 100 nanometers. When taking a peak intensity detected near diffraction angle 2?=32.0° by X-ray diffraction as ?, and taking a peak intensity detected near diffraction angle 2?=32.8° as ?, a peak intensity ratio ?/? is not less than 0% and not more than 150%.

Abstract: A composite structure forming method comprises the steps of first pre-treating brittle material fine particles to impart an internal strain to the brittle material fine particles, secondly causing the brittle material fine particles in which the internal strain has been created to collide with a substrate surface at high speed or applying a mechanical impact force to the brittle material fine particles containing the internal strain therein provided on the substrate surface, to deform or fracture the brittle material fine particles, re-joining the fine particles through active new surfaces generated by the deformation or fracture, forming an anchor section made of polycrystalline brittle material of which part bites into the substrate surface at a boundary section between the new surfaces and the substrate, and further forming a structure made of polycrystalline brittle material on the anchor section.

Abstract: A composite structure forming method comprises the steps of first pre-treating brittle material fine particles to impart an internal strain to the brittle material fine particles, secondly causing the brittle material fine particles in which the internal strain has been created to collide with a substrate surface at high speed or applying a mechanical impact force to the brittle material fine particles containing the internal strain therein provided on the substrate surface, to deform or fracture the brittle material fine particles, re-joining the fine particles through active new surfaces generated by the deformation or fracture, forming an anchor section made of polycrystalline brittle material of which part bites into the substrate surface at a boundary section between the new surfaces and the substrate, and further forming a structure made of polycrystalline brittle material on the anchor section.

Abstract: A composite structure forming method comprises the steps of first pre-treating brittle material fine particles to impart an internal strain to the brittle material fine particles, secondly causing the brittle material fine particles in which the internal strain has been created to collide with a substrate surface at high speed or applying a mechanical impact force to the brittle material fine particles containing the internal strain therein provided on the substrate surface, to deform or fracture the brittle material fine particles, re-joining the fine particles through active new surfaces generated by the deformation or fracture, forming an anchor section made of polycrystalline brittle material of which part bites into the substrate surface at a boundary section between the new surfaces and the substrate, and further forming a structure made of polycrystalline brittle material on the anchor section.

Abstract: A rare-earth oxide sintered body, or corrosion-resistant material, having low sintering temperature and high density is prepared by adding a boron compound at a ratio of 0.06 mol % or more and less than 25 mol % when converted into boron oxide (B2O3) to oxide powder of at least one of La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, Lu, and Sc, after which the mixed powder is formed and sintered. The sintered body comprises at least one of La2O3, Nd2O3, Sm2O3, Eu2O3, Gd2O3, Dy2O3, Ho2O3, Er2O3, Tm2O3, Yb2O3, Lu2O3, and Sc2O3, and at least one of Ln3BO6 (Ln=La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, and Lu), and Sc3BO6 as a main constituent crystal thereof.

Abstract: An apparatus for manufacturing a composite structure body is provided which forms structure body having the constitution in which the crystals of more than one type of brittle material are dispersed and having novel properties without involving a heating/sintering process. The apparatus includes an aerosol generator configured to generate an aerosol. The aerosol is generated through dispersing fine particles of more than one type of brittle material, or dispersing composite fine particles, in a gas. The apparatus also includes a nozzle configured to spray the aerosol, a classifier configured to classify the brittle material fine particles in the aerosol, and a disintegrating machine for disintegrating agglomerations of the brittle material fine particles in the aerosol. The composite structure body is manufactured in reduced pressure conditions by bombarding a substrate with the aerosol at a high velocity, whereby at least one of crystals and microstructures of said brittle materials are dispersed.

Abstract: The present invention provides a method of manufacturing an yttria (Y2O3) sintered body having high density and excellent plasma-resistance. The yttria sintered body has a structure in which a Y2O3 crystal and a Y3BO6 crystal are included as the constituent crystal thereof. In production of the yttria sintered body, a boron oxide (B2O3) of 0.02 wt % to 10 wt % is added to an yttria (Y2O3) powder, the mixed powder is formed, and thereafter sintered at 1300-1600° C.

Abstract: A composite structure forming apparatus adapted to ejecting and causing an aerosol generated by scattering brittle material fine particles in a gas to collide with a substrate at high speed to form a structure made of the brittle material. The apparatus includes an aerosol generator for generating the aerosol, a nozzle for ejecting the aerosol, a shredder for shredding the brittle particles cohering in the aerosol and preventing cohesion of the brittle material fine particles, and a classifier for classifying the brittle material fine particles in the aerosol. The apparatus also includes a pretreatment device for creating internal strain in the brittle material fine particles, and a position control device for controlling the position of the nozzle relative to the substrate. The apparatus further includes a container having a sieve and a vibration device, and one or more of these components may be associated with the aerosol generator.

Abstract: A rare-earth oxide sintered body, or corrosion-resistant material, having low sintering temperature and high density is prepared by adding a boron compound at a ratio of 0.06 mol % or more and less than 25 mol % when converted into boron oxide (B2O3) to oxide powder of at least one of La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, Lu, and Sc, after which the mixed powder is formed and sintered. The sintered body comprises at least one of La2O3, Nd2O3, Sm2O3, Eu2O3, Gd2O3, Dy2O3, Ho2O3, Er2O3, Tm2O3, Yb2O3, Lu2O3, and Sc2O3, and at least one of Ln3BO6 (Ln=La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, and Lu), and Sc3BO6 as a main constituent crystal thereof.

Abstract: The present invention provides a method of manufacturing an yttria (Y2O3) sintered body having high density and excellent plasma-resistance. The yttria sintered body has a structure in which a Y2O3 crystal and a Y3BO6 crystal are included as the constituent crystal thereof. In production of the yttria sintered body, a boron oxide (B2O3) of 0.02 wt % to 10 wt % is added to an yttria (Y2O3) powder, the mixed powder is formed, and thereafter sintered at 1300-1600° C.

Abstract: Object: To provide a machineable glass ceramic which has excellent machineable properties and various other physical property values. Solution: A machineable glass ceramic comprises a glass matrix having substantially only fluorine phlogopite crystals dispersed therein, wherein an average dimension in the directions of major axes of said fluorine phlogopite crystals is less than 5 ?m. The machineable glass ceramic constituted as above is produced by forming and degreasing glassy powder containing at least Si, Al, Mg, K, F and O, and thereafter by sintering the same at temperatures of 1000-1100 degrees centigrade.

Abstract: The object of the present invention is to provide a rare-earth oxide sintered body having low sintering temperature and high density. A boron compound is added at a ratio of 0.06 mol % or more and less than 25 mol % when converted into boron oxide (B2O3) to oxide powder of at least one of La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, Lu, and Sc, the mixed powder is formed and sintered.

Abstract: A composite structure forming method comprises the steps of first pre-treating brittle material fine particles to impart an internal strain to the brittle material fine particles, secondly causing the brittle material fine particles in which the internal strain has been created to collide with a substrate surface at high speed or applying a mechanical impact force to the brittle material fine particles containing the internal strain therein provided on the substrate surface, to deform or fracture the brittle material fine particles, re-joining the fine particles through active new surfaces generated by the deformation or fracture, forming an anchor section made of polycrystalline brittle material of which part bites into the substrate surface at a boundary section between the new surfaces and the substrate, and further forming a structure made of polycrystalline brittle material on the anchor section.

Abstract: The object of the present invention is to provide an yttria (Y2O3) sintered body having high density and excellent plasma-resistance. The yttria sintered body has a structure in which a Y2O3 crystal and a Y3BO6 crystal are included as the constituent crystal thereof. In order to produce the yttria sintered body, a boron oxide (B2O3) of 0.02 wt % to 10 wt % is added to an yttria (Y2O3) powder, the mixed powder is formed, and thereafter sintered at 1300-1600° C.