Abstract: A composite structure body obtained through a plurality of processes including forming composite fine particles by way of a process in which a surface of the fine particles of a brittle material is coated with another brittle material; then by bombarding the composite fine particles against a surface of a substrate at high velocities, an anchor portion biting the substrate surface is formed; the composite fine particles are simultaneously distorted and fractured by impact of the bombardment; mutual rejoining of the composite fine particles is made through intermediary of a newly generated active surface formed by the distortion or fracture; and thereby forming a structure body in which crystals and/or microstructures of the brittle materials are dispersed above the anchor portion; and a pre-processing which includes imparting internal distortion to the brittle material fine particles.

Abstract: The present invention provides a composite structure body obtained through processes of forming composite fine particles by way of a process in which a surface of brittle material fine particles is coated with at least one type of ductile material, bombarding the composite fine particles at a high velocity against a surface of a substrate, mutual rejoining of the composite fine particles is made through intermediary of a newly generated active surface formed by distortion or fracture, and thereby forming a structure body, above an anchor portion, in which crystals of the brittle material and crystals and/or microstructures of the ductile material fine particles are dispersed, and imparting internal distortion to the brittle material fine particles.

Abstract: The present invention provides a composite structure body obtained through processes of forming composite fine particles by way of a process in which a surface of brittle material fine particles is coated with at least one type of ductile material, bombarding the composite fine particles at a high velocity against a surface of a substrate, mutual rejoining of the composite fine particles is made through intermediary of a newly generated active surface formed by distortion or fracture, and thereby forming a structure body, above an anchor portion, in which crystals of the brittle material and crystals and/or microstructures of the ductile material fine particles are dispersed, and imparting internal distortion to the brittle material fine particles.

Abstract: A composite structure body obtained through a plurality of processes including forming composite fine particles by way of a process in which a surface of the fine particles of a brittle material is coated with another brittle material; then by bombarding the composite fine particles against a surface of a substrate at high velocities, an anchor portion biting the substrate surface is formed; the composite fine particles are simultaneously distorted and fractured by impact of the bombardment; mutual rejoining of the composite fine particles is made through intermediary of a newly generated active surface formed by the distortion or fracture; and thereby forming a structure body in which crystals and/or microstructures of the brittle materials are dispersed above the anchor portion; and a pre-processing which includes imparting internal distortion to the brittle material fine particles.

Abstract: A structure body having the constitution in which the crystals of more than one types of brittle materials such as ceramics, metalloids, and the like are dispersed, a portion composed of the brittle materials is polycrystalline, the crystals constituting the polycrystalline portion substantially lacks the crystalline orientation, and boundary layers composed of glassy substances are substantially absent in the boundary face between the crystals. Accordingly, it is possible to obtain a structure body composed of more than one types of brittle materials and having novel properties without involving a heating/sintering process.

Abstract: The object of the present invention is to provide an yttria (Y2O3) sintered body having high density and excellent plasma-resistance. The yttria sintered body has a structure in which a Y2O3 crystal and a Y3BO6 crystal are included as the constituent crystal thereof. In order to produce the yttria sintered body, a boron oxide (B2O3) of 0.02 wt % to 10 wt % is added to an yttria (Y2O3) powder, the mixed powder is formed, and thereafter sintered at 1300-1600° C.

Abstract: The present invention provides a composite structure body obtained through processes of forming composite fine particles by way of a process in which a surface of brittle material fine particles is coated with at least one type of ductile material, bombarding the composite fine particles at a high velocity against a surface of a substrate, mutual rejoining of the composite fine particles is made through intermediary of a newly generated active surface formed by distortion or fracture, and thereby forming a structure body, above an anchor portion, in which crystals of the brittle material and crystals and/or microstructures of the ductile material fine particles are dispersed, and imparting internal distortion to the brittle material fine particles.

Abstract: A composite structure body obtained through a plurality of processes including forming composite fine particles by way of a process in which a surface of the fine particles of a brittle material is coated with another brittle material; then by bombarding the composite fine particles against a surface of a substrate at high velocities, an anchor portion biting the substrate surface is formed; the composite fine particles are simultaneously distorted and fractured by impact of the bombardment; mutual rejoining of the composite fine particles is made through intermediary of a newly generated active surface formed by the distortion or fracture; and thereby forming a structure body in which crystals and/or microstructures of the brittle materials are dispersed above the anchor portion; and a pre-processing which includes imparting internal distortion to the brittle material fine particles.

Abstract: The object of the present invention is to provide a rare-earth oxide sintered body having low sintering temperature and high density. A boron compound is added at a ratio of 0.06 mol % or more and less than 25 mol % when converted into boron oxide (B2O3) to oxide powder of at least one of La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, Lu, and Sc, the mixed powder is formed and sintered.

Abstract: A structure body having the constitution in which the crystals of a brittle material such as a ceramic, a metalloid and the like and the crystals or the microstructures (the microstructure bodies composed of amorphous metal layers and an organic substance) of a ductile material such as a metal and the like are dispersed, the structure bodies (the portion composed of the brittle material) are polycrystalline, the crystals constituting the structure bodies substantially lack the crystalline orientation, and boundary layers composed of glassy substances are substantially absent in the boundary face between the crystals. It is thereby possible to obtain a structure body having novel characteristics, composed of a brittle material and a ductile material, without involving a heating/sintering process.

Abstract: A composite structure forming method comprises the steps of first pre-treating brittle material fine particles to impart an internal strain to the brittle material fine particles, secondly causing the brittle material fine particles in which the internal strain has been created to collide with a substrate surface at high speed or applying a mechanical impact force to the brittle material fine particles containing the internal strain therein provided on the substrate surface, to deform or fracture the brittle material fine particles, re-joining the fine particles through active new surfaces generated by the deformation or fracture, forming an anchor section made of polycrystalline brittle material of which part bites into the substrate surface at a boundary section between the new surfaces and the substrate, and further forming a structure made of polycrystalline brittle material on the anchor section.

Abstract: A material composed of brittle material fine particles, such as ceramic or metalloid fine particles, for forming a composite structure on a substrate surface. The brittle material is pretreated to achieve a specific size range of fine particles and to develop a desired range of internal strain therein. The brittle material fine particles are adapted to form an aerosol with a gas stream, and when the aerosol is ejected to collide with a substrate surface, this causes collision of brittle material fine particles with a substrate surface thus imparting a mechanical impact to the fine particles. Such mechanical impact fractures or deforms the particles, and thereby generates an active new surface for brittle material fine particles after being fractured or deformed.

Abstract: A composite structure forming apparatus adapted to ejecting and causing an aerosol generated by scattering brittle material fine particles in a gas to collide with a substrate at high speed to form a structure made of the brittle material. The apparatus includes an aerosol generator for generating the aerosol, a nozzle for ejecting the aerosol, a shredder for shredding the brittle particles cohering in the aerosol and preventing cohesion of the brittle material fine particles, and a classifier for classifying the brittle material fine particles in the aerosol. The apparatus also includes a pretreatment device for creating internal strain in the brittle material fine particles, and a position control device for controlling the position of the nozzle relative to the substrate. The apparatus further includes a container having a sieve and a vibration device, and one or more of these components may be associated with the aerosol generator.

Abstract: In order to control and reduce generation of disjoined grains from a plasma-resistant member, the present invention provides a plasma-resistant member having no pores and boundary layers. In a layer structure made of yttria polycrystal and formed on a surface of a member for a semiconductor manufacturing apparatus on a side exposed to plasma, the ratio of pores to the surface of the layer structure is less than 0.1 area %. With this, corrosion from pores never progresses even in a plasma atmosphere. It is also possible to control and reduce disjoined grains due to such corrosion.

Abstract: In order to control and reduce generation of disjoined grains from a plasma-resistant member, the present invention provides a plasma-resistant member having no pores and boundary layers. In a layer structure made of yttria polycrystal and formed on a surface of a member for a semiconductor manufacturing apparatus on a side exposed to plasma, substantially no hyaline boundary layer exists in the yttria polycrystal. With this, corrosion from a boundary layer never progresses even in a plasma atmosphere. It is also possible to control and reduce disjoined grains due to such corrosion.

Abstract: A method for manufacturing a composite structure body, comprising the steps of bombarding brittle material fine particles and ductile material fine particles separately or simultaneously against a surface of a substrate with high velocities such that an anchor portion biting said substrate surface is formed; the brittle material fine particles are simultaneously distorted or fractured by impact of the bombardment; mutual rejoining of the fine particles is made through intermediary of a newly generated active surface formed by the distortion or fracture; and thereby forming a structure body, above the anchor portion, in which crystals of the brittle material and crystals and/or microstructures of the ductile material fine particles are dispersed.

Abstract: An apparatus for manufacturing a composite structure body is provided which forms structure body having the constitution in which the crystals of more than one type of brittle material are dispersed and having novel properties without involving a heating/sintering process. The apparatus includes an aerosol generator configured to generate an aerosol. The aerosol is generated through dispersing fine particles of more than one type of brittle material, or dispersing composite fine particles, in a gas. The apparatus also includes a nozzle configured to spray the aerosol, a classifier configured to classify the brittle material fine particles in the aerosol, and a disintegrating machine for disintegrating agglomerations of the brittle material fine particles in the aerosol. The composite structure body is manufactured in reduced pressure conditions by bombarding a substrate with the aerosol at a high velocity, whereby at least one of crystals and microstructures of said brittle materials are dispersed.

Abstract: A method is provided for manufacturing a composite structure body on a substrate surface, the structure having excellent chemical properties such as corrosion resistance and the like. The method includes bombarding fine particles of more than one type of brittle material against a surface of a substrate at high velocity to form an anchor portion biting said substrate surface and such that the fine particles of the brittle materials are simultaneously distorted or fractured by impact of the bombardment; and forming a structure body in which the crystals and/or microstructures of the brittle materials are dispersed above said anchor portion through mutual rejoining of the brittle material fine particles via an intermediary of a newly generated active surface formed by the distortion or fracture.

Abstract: A structure body having the constitution in which the crystals of a brittle material such as a ceramic, a metalloid and the like and the crystals or the microstructures (the microstructure bodies composed of amorphous metal layers and an organic substance) of a ductile material such as a metal and the like are dispersed, the structure bodies (the portion composed of the brittle material) are polycrystalline, the crystals constituting the structure bodies substantially lack the crystalline orientation, and the boundary layers composed of glassy substances are substantially absent in the boundary face between the crystals. It is possible to obtain a structure body having novel characteristics, composed of a brittle material and a ductile material, without involving a heating/sintering process.

Abstract: A structure body having the constitution in which the crystals of more than one types of brittle materials such as ceramics, metalloids, and the like are dispersed, the portion composed of the brittle materials is polycrystalline, the crystals constituting the polycrystalline portion substantially lacks the crystalline orientation, and the boundary layers composed of glassy substances are substantially absent in the boundary face between the crystals. Accordingly, it is possible to obtain a structure body composed of more than one types of brittle materials and having novel properties without involving a heating/sintering process.