Abstract: In order to make it possible to obtain information on the movement of a fluid control valve when a fluid control device operates normal, a diagnostic device for a fluid control valve that displaces a valve body to control fluid is adapted to include: a valve body related value reception part that receives a valve body related value inputted/outputted in association with the displacement of the valve body; a displacement sensing part that senses the displacement of the valve body on the basis of the valve body related value; and a displacement count storage part that stores a displacement count sensed by the displacement sensing part.

Abstract: In order to make it possible to obtain information on the movement of a fluid control valve when a fluid control device operates normal, a diagnostic device for a fluid control valve that displaces a valve body to control fluid is adapted to include: a valve body related value reception part that receives a valve body related value inputted/outputted in association with the displacement of the valve body; a displacement sensing part that senses the displacement of the valve body on the basis of the valve body related value; and a displacement count storage part that stores a displacement count sensed by the displacement sensing part.

Abstract: In a gas flow monitoring method using a MFC (a flow control device) for controlling a flow rate of process gas from a process gas supply source and supply the process gas to a predetermined process chamber, a start shut-off valve placed upstream of the MFC, and a pressure gauge placed between the start shut-off valve and the MFC, the start shut-off valve is closed and a drop of pressure on an upstream side of the MFC is measured by the pressure gauge to measure a flow rate of the MFC, thereafter, the start shut-off valve is opened to monitor the flow rate of the MFC. The MFC is switched from an ON state to an OFF state before the start shut-off valve is opened. The method enables in-line monitoring a low rate of process gas without affecting a semiconductor manufacturing process.

Abstract: In a gas flow monitoring method using a MFC (a flow control device) for controlling a flow rate of process gas from a process gas supply source and supply the process gas to a predetermined process chamber, a start shut-off valve placed upstream of the MFC, and a pressure gauge placed between the start shut-off valve and the MFC, the start shut-off valve is closed and a drop of pressure on an upstream side of the MFC is measured by the pressure gauge to measure a flow rate of the MFC, thereafter, the start shut-off valve is opened to monitor the flow rate of the MFC. The MFC is switched from an ON state to an OFF state before the start shut-off valve is opened. The method enables in-line monitoring a low rate of process gas without affecting a semiconductor manufacturing process.

Abstract: Provided are a decorative resin sheet that sufficiently brings together embossing property and embossment-retaining property, and a molded resin article on which an embossment excellent in design is formed and a method of manufacturing the molded resin article. The method of manufacturing a molded resin article includes the steps of: providing a resin sheet having a mold layer containing a polyolefin-based resin as a main component, followed by formation of an embossment on the resin sheet so that the embossment is formed on a surface of the mold layer; crosslinking the mold layer on which the embossment is formed so that a 100% modulus of the resin sheet at 200° C. becomes 0.

Abstract: Provided is a resistor film comprising vanadium oxide as a main component, wherein metal-to-insulator transition is indicated in the vicinity of room temperature in temperature variations of electric resistance, there is no hysteresis in a resistance change in response to temperature variations or the temperature width is small at less than 1.5K even if there is hysteresis, and highly accurate measurement can be provided when used in a bolometer. Upon producing the resistor film comprising vanadium oxide as a main component by treating a coating film of an organovanadium compound via laser irradiation or the like, a crystalline phase and a noncrystalline (amorphous) phase are caused to coexist in the resistor film.

Abstract: Provided are a decorative resin sheet that sufficiently brings together embossing property and embossment-retaining property, and a molded resin article on which an embossment excellent in design is formed and a method of manufacturing the molded resin article. The method of manufacturing a molded resin article includes the steps of: providing a resin sheet having a mold layer containing a polyolefin-based resin as a main component, followed by formation of an embossment on the resin sheet so that the embossment is formed on a surface of the mold layer; crosslinking the mold layer on which the embossment is formed so that a 100% modulus of the resin sheet at 200° C. becomes 0.

Abstract: Provided is a resistor film comprising vanadium oxide as a main component, wherein metal-to-insulator transition is indicated in the vicinity of room temperature in temperature variations of electric resistance, there is no hysteresis in a resistance change in response to temperature variations or the temperature width is small at less than 1.5K even if there is hysteresis, and highly accurate measurement can be provided when used in a bolometer. Upon producing the resistor film comprising vanadium oxide as a main component by treating a coating film of an organovanadium compound via laser irradiation or the like, a crystalline phase and a noncrystalline (amorphous) phase are caused to coexist in the resistor film.

Abstract: A noble metal fine particle support and method of manufacturing the same are provided, in which noble metal fine particles are supported without unevenness on the surface of a substrate and that has almost no limitation on the type of the substrate. The present invention provides a noble metal fine particle support in which a substrate surface is coated with an amino compound, and noble metal fine particles are supported on the coating. The invention also provides a method of manufacturing a noble metal fine particle support, including coating the surface of a substrate with an amino compound to provide a positive charge for the surface, and contacting the substrate and a solution in which noble metal fine particles having a negative charge is dispersed, to cause the substrate to support the noble metal fine particles.

Abstract: The invention presents a mass flow controller capable of supplying always stably at desired flow rate in spite of pressure fluctuations at either upstream side or downstream side of the mass flow controller. The invention is a mass flow controller having a flow rate control valve and a flow rate sensor, more specifically comprising a pressure control valve disposed at the upstream side of the flow rate control valve, a pressure sensor disposed between this pressure control valve and the flow rate control valve, and a controller for controlling the pressure control valve by feeding back the output of this pressure sensor.

Abstract: A tire noise damper to be disposed in an annular tire hollow formed between a wheel rim an a pneumatic tire mounted thereon, the damper made of a flexible material and comprising a base to be secured to the wheel rim and at least one flap extending from the base to be risen radially outwards from the wheel rim by centrifugal force during running to block the annular tire hollow. For example, the damper comprises at least one annular elastic band to be put around the wheel rim, the annular band provided with at least one U-cut for forming a flap, and the base is formed by the remaining annular portion of the band. In another example, the damper is made of a strip of the fixable material having a certain length, the base is formed by one end portion of the strip, and the flap is formed by the remaining portion of the strip.

Abstract: A tire noise reducing system includes a pneumatic tire, a wheel rim and a noise damper disposed in a cavity formed between the rim and tire the noise damper is made of a porous material having a specific gravity of from 0.005 to 0.06 and secured on a surface facing the cavity, the volume S2 of the noise damper is in a range of from 0.4 to 20.0% of the volume S1 of the cavity. Preferably, the noise damper is provided with an uneven surface or an outer layer for less sound reflection, and the shape index E of the noise damper is more than 1, and the ratio T/W of the thickness T to the width W of the damper is not less than 1.

Abstract: A tire noise reducing system comprises a wheel rim, a pneumatic tire to be mounted on the wheel rim and a noise damper to be disposed in an annular tire cavity enclosed by the wheel rim and the pneumatic tire mounted thereon, wherein the noise damper is made of a multi-cellular material whose volume S2 is in a range of not less than 0.4% of the volume S1 of said annular tire cavity. Preferably, the specific gravity of the damper is set in a range of from 0.005 to 0.06.

Abstract: A tire noise reducing system comprises a pneumatic tire, a wheel rim and a noise damper disposed in a cavity formed between the rim and tire when mounted as being surrounded by the tire and rim, the noise damper is made of a porous material having a specific gravity of from 0.005 to 0.06 and secured on a surface facing the cavity, the volume S2 of the noise damper is in a range of from 0.4 to 20.0% of the volume S1 of the cavity. Preferably, the noise damper is provided with an uneven surface or an outer layer for less sound reflection, and the shape index E of the noise damper is more than 1, and the ratio T/W of the thickness T to the width W of the damper is not less than 1.

Abstract: A tire noise reducing system comprises a pneumatic tire, a wheel rim and a noise damper disposed in a cavity formed between the rim and tire when mounted as being surrounded by the tire and rim, the noise damper is made of a porous material having a specific gravity of from 0.005 to 0.06 and secured on a surface facing the cavity, the volume S2 of the noise damper is in a range of from 0.4 to 20.0% of the volume S1 of the cavity. Preferably, the noise damper is provided with an uneven surface or an outer layer for less sound reflection, and the shape index E of the noise damper is more than 1, and the ratio T/W of the thickness T to the width W of the damper is not less than 1.

Abstract: A tire noise reducing system includes a wheel rim, a pneumatic tire mounted on the wheel rim to form an annular tire hollow, and a resonance damper disposed in the annular tire hollow, wherein the damper is one of an annular elastic loose band disposed around the rim and a flexible slack strip having a certain length and fixed to the wheel rim at two points so that a portion between the fixed points slacks, whereby a loose portion of the loose band and the slack portion of the slack strip are risen by a centrifugal force during running to at least partially block the annular tire hollow.

Abstract: A method for correcting dynamic unbalance of a pneumatic tire which comprises adhering a counter weight to an inner surface of the tire to reduce dynamic unbalance of the tire, wherein the counter weight is made of a material having a specific gravity in a range of from 0.016 to 0.21 such as a strip of a spongy material.

Abstract: A tire noise damper to be disposed in an annular tire hollow formed between a wheel rim an a pneumatic tire mounted thereon, the damper made of a flexible material and comprising a base to be secured to the wheel rim and at least one flap extending from the base to be risen radially outwards from the wheel rim by centrifugal force during running to block the annular tire hollow. For example, the damper comprises at least one annular elastic band to be put around the wheel rim, the annular band provided with at least one U-cut for forming a flap, and the base is formed by the remaining annular portion of the band. In another example, the damper is made of a strip of the fixable material having a certain length, the base is formed by one end portion of the strip, and the flap is formed by the remaining portion of the strip.

Abstract: A tire noise reducing system comprises a pneumatic tire, a wheel rim and a noise damper disposed in a cavity formed between the rim and tire when mounted as being surrounded by the tire and rim, the noise damper is made of a porous material having a specific gravity of from 0.005 to 0.06 and secured on a surface facing the cavity, the volume s2 of the noise damper is in a range of from 0.4 to 20.0% of the volume S1 of the cavity. Preferably, the noise damper is provided with an uneven surface or an outer layer for less sound reflection, and the shape index E of the noise damper is more than 1, and the ratio T/W of the thickness T to the width w of the damper is not less than 1.

Abstract: A tire noise damper to be disposed in an annular tire hollow formed between a wheel rim and a pneumatic tire mounted thereon, the damper made of a flexible material and comprising a base to be secured to the wheel rim and at least one flap extending from the base to be risen radially outwards from the wheel rim by centrifugal force during running to block the annular tire hollow. For example, the damper comprises at least one annular elastic band to be put around the wheel rim, the annular band provided with at least one U-cut for forming a flap, and the base is formed by the remaining annular portion of the band. In another example, the damper is made of a strip of the fixable material having a certain length, the base is formed by one end portion of the strip, and the flap is formed by the remaining portion of the strip.