Patents by Inventor Masanobu Zenke

Masanobu Zenke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor capacitor with a metal nitride film and metal oxide dielectric
    Patent number: 5187557
    Abstract: A semiconductor device having a capacitor part which is composed of the first electrode including a first titanium nitride film, a dielectric layer and a second electrode including a second titanium nitride film, the titanium nitride film being sandwiched between the dielectric layer and the first and second electrodes, whereby it is possible to obtain a capacitor having a high capacitance value and which can inhibit the reaction between the dielectric layer and the electrode and which does not result in an increase in a leakage current of the dielectric layer and a deterioration of isolation voltage.
    Type: Grant
    Filed: November 15, 1990
    Date of Patent: February 16, 1993
    Assignee: NEC Corporation
    Inventor: Masanobu Zenke