Patents by Inventor Masanori Okuno
Masanori Okuno has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250032964Abstract: Provided is a gas-liquid separator that can achieve separation of water from water-containing gas while reducing pressure loss in a gas-liquid separation section. The gas-liquid separator includes: a housing having a water storage space in a bottom portion; an inlet port that is connected to the housing and through which the water-containing gas is introduced; a sloping guide section that guides the water-containing gas supplied through the inlet port into the housing in an upward direction above the water storage space; and a separation plate including a comb-like contact surface configured in such a way as to separate water contained in the water-containing gas guided by the sloping guide section by coming into contact with the water-containing gas.Type: ApplicationFiled: July 1, 2024Publication date: January 30, 2025Applicant: AISIN CORPORATIONInventors: Hitoshi OKUNO, Masanori ANDO
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Publication number: 20240378989Abstract: According to one aspect of a technique the present disclosure, there is provided a method of identifying a cause of an abnormality, including: (a) outputting an alarm indicating the failure detected based on sensor information; (b) acquiring a plurality of apparatus data comprising a plurality piece of the sensor information related to the alarm; (c) comparing each of the apparatus data with a threshold value; and (d) when none of the apparatus data acquired in (b) exceed the threshold value according to a comparison result in (c), identifying a specific apparatus data among the plurality of apparatus data closest to the threshold value as a factor of generating the alarm.Type: ApplicationFiled: July 24, 2024Publication date: November 14, 2024Inventors: Masanori OKUNO, Junichi KAWASAKI, Shinichiro MORI, Yasuhiro JOHO, Satomi YAMAZAKI
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Patent number: 12080149Abstract: According to one aspect of a technique the present disclosure, there is provided a processing apparatus including: an apparatus controller including a memory storing apparatus data containing monitor data containing sensor information and an alarm indicating a failure detected based on the sensor information and an alarm analysis table containing analysis items. The apparatus controller is capable of outputting the alarm containing an alarm ID for specifying a type and an occurrence time of the alarm; specifying candidates of the analysis items from the alarm ID; acquiring monitor data corresponding to the candidates; determining a rank of the cause of the alarm according to a difference between monitor data at the occurrence time and a predetermined threshold value; and displaying a relationship between the monitor data and the threshold value. The display screen displays an occurrence history of the alarm and history of acquiring the monitor data.Type: GrantFiled: August 5, 2022Date of Patent: September 3, 2024Assignee: Kokusai Electric CorporationInventors: Masanori Okuno, Junichi Kawasaki, Shinichiro Mori, Yasuhiro Joho, Satomi Yamazaki
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Patent number: 11966210Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.Type: GrantFiled: February 25, 2020Date of Patent: April 23, 2024Assignee: KOKUSAI ELECTRIC CORPORATIONInventors: Kazuhide Asai, Kazuyoshi Yamamoto, Hidemoto Hayashihara, Takayuki Kawagishi, Kayoko Yashiki, Yukio Miyata, Hiroyuki Iwakura, Masanori Okuno, Kenichi Fujimoto, Ryuichi Kaji
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Patent number: 11827982Abstract: Described herein is a technique capable of improving an operation rate of an apparatus using a plurality of detoxification apparatuses by removing by-products adhered thereto. According to one aspect of the technique, a processing apparatus includes a controller configured to perform a process recipe of forming a film on a substrate, The controller performs: (a) when an operation state of the first detoxification apparatus is an operation-in-progress state, checking an operation state of the second detoxification apparatus; (b) when the operation state of the second detoxification apparatus is not a maintenance-in-progress state, starting an operation of the second detoxification apparatus and switching the operation state of the first detoxification apparatus to the maintenance-in-progress state; and (c) when the operation state of the second detoxification apparatus is the maintenance-in-progress state, continuing an operation of the first detoxification apparatus.Type: GrantFiled: September 3, 2020Date of Patent: November 28, 2023Assignee: Kokusai Electric CorporationInventors: Masanori Okuno, Toshihiko Yonejima
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Publication number: 20220375331Abstract: According to one aspect of a technique the present disclosure, there is provided a processing apparatus including: an apparatus controller including a memory storing apparatus data containing monitor data containing sensor information and an alarm indicating a failure detected based on the sensor information and an alarm analysis table containing analysis items. The apparatus controller is capable of outputting the alarm containing an alarm ID for specifying a type and an occurrence time of the alarm; specifying candidates of the analysis items from the alarm ID; acquiring monitor data corresponding to the candidates; determining a rank of the cause of the alarm according to a difference between monitor data at the occurrence time and a predetermined threshold value; and displaying a relationship between the monitor data and the threshold value. The display screen displays an occurrence history of the alarm and history of acquiring the monitor data.Type: ApplicationFiled: August 5, 2022Publication date: November 24, 2022Inventors: Masanori OKUNO, Junichi KAWASAKI, Shinichiro MORI, Yasuhiro JOHO, Satomi YAMAZAKI
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Publication number: 20220136497Abstract: There is provided a technique that includes: a controller configured to execute a process recipe including a plurality of steps to perform a predetermined process on a substrate. The controller acquires device data, which includes at least one of a current value, a rotational speed, and a back pressure of a pump, in a specific step among the plurality of steps and compares an acquired value of the device data with a previously acquired value of the device data. The controller generates a notification if at least one of the following conditions is met: the acquired value for the current value is larger than the previously acquired value for the current value, the acquired value for the back pressure is larger than the previously acquired value for the back pressure, and the acquired value for the rotational speed is smaller than the previously acquired value for the rotational speed.Type: ApplicationFiled: January 14, 2022Publication date: May 5, 2022Applicant: KOKUSAI ELECTRIC CORPORATIONInventors: Masanori OKUNO, Hideki HORITA, Kazuyoshi YAMAMOTO, Kazuhide ASAI, Toshihiko YONEJIMA
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Patent number: 11236743Abstract: There is provided a technique that includes: a main controller configured to execute a process recipe including a plurality of steps to perform a predetermined process on a substrate so as to acquire device data when executing the process recipe; and a storage part configured to store the acquired device data, wherein the main controller is configured to: acquire the device data in a predetermined specific step among the steps constituting the process recipe; calculate a value of the acquired device data in the specific step; compare the calculated value with a value of the device data in the specific step calculated at a time of previous execution of the process recipe; and generate an alarm when the calculated value shows a predefined tendency.Type: GrantFiled: December 20, 2018Date of Patent: February 1, 2022Assignee: KOKUSAI ELECTRIC CORPORATIONInventors: Masanori Okuno, Hideki Horita, Kazuyoshi Yamamoto, Kazuhide Asai, Toshihiko Yonejima
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Patent number: 11237538Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.Type: GrantFiled: March 24, 2017Date of Patent: February 1, 2022Assignee: KOKUSAI ELECTRIC CORPORATIONInventors: Kazuhide Asai, Kazuyoshi Yamamoto, Hidemoto Hayashihara, Takayuki Kawagishi, Kayoko Yashiki, Yukio Miyata, Hiroyuki Iwakura, Masanori Okuno, Kenichi Fujimoto, Ryuichi Kaji
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Publication number: 20220019191Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.Type: ApplicationFiled: September 29, 2021Publication date: January 20, 2022Applicant: KOKUSAI ELECTRIC CORPORATIONInventors: Kazuhide ASAI, Kazuyoshi YAMAMOTO, Hidemoto HAYASHIHARA, Takayuki KAWAGISHI, Kayoko YASHIKI, Yukio MIYATA, Hiroyuki IWAKURA, Masanori OKUNO, Kenichi FUJIMOTO, Ryuichi KAJI
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Publication number: 20200399755Abstract: Described herein is a technique capable of improving an operation rate of an apparatus using a plurality of detoxification apparatuses by removing by-products adhered thereto. According to one aspect of the technique, a processing apparatus includes a controller configured to perform a process recipe of forming a film on a substrate, The controller performs: (a) when an operation state of the first detoxification apparatus is an operation-in-progress state, checking an operation state of the second detoxification apparatus; (b) when the operation state of the second detoxification apparatus is not a maintenance-in-progress state, starting an operation of the second detoxification apparatus and switching the operation state of the first detoxification apparatus to the maintenance-in-progress state; and (c) when the operation state of the second detoxification apparatus is the maintenance-in-progress state, continuing an operation of the first detoxification apparatus.Type: ApplicationFiled: September 3, 2020Publication date: December 24, 2020Applicant: KOKUSAI ELECTRIC CORPORATIONInventors: Masanori OKUNO, Toshihiko YONEJIMA
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Publication number: 20200392620Abstract: According to one aspect of the technique, there is provided a processing apparatus including: a process structure including: a process furnace, in which an object to be processed is processed by a gas, provided in a housing; and an opening configured to enable a maintenance and provided at a rear side of the housing; an exhaust structure configured to allow a maintenance region to be provided at a region facing the opening and to exhaust the gas from the process furnace; and an exhaust apparatus configured to secure the maintenance region at the region facing the opening and placed in contact with a side of the exhaust structure opposite to the process structure.Type: ApplicationFiled: August 24, 2020Publication date: December 17, 2020Applicant: KOKUSAI ELECTRIC CORPORATIONInventors: Masanori OKUNO, Toshihiko YONEJIMA, Masakazu SAKATA, Masamichi YACHI
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Publication number: 20200381268Abstract: Described herein is a technique capable of removing by-products before the by-products are deposited to an exhaust part. According to one aspect of the technique, there is provided a method of manufacturing a semiconductor device including: (a) processing a substrate while maintaining an inner pressure of a process chamber at a process pressure by adjusting a valve configured to adjust the inner pressure of the process chamber; (b) changing the inner pressure of the process chamber from the process pressure to an atmospheric pressure; and (c) supplying a predetermined gas to a downstream side of the valve to bypass the process chamber while performing (b).Type: ApplicationFiled: May 27, 2020Publication date: December 3, 2020Applicant: KOKUSAI ELECTRIC CORPORATIONInventors: Masanori OKUNO, Tatsuya YOTSUTANI, Masaya NAGATO, Toshihiko YONEJIMA
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Publication number: 20200192324Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.Type: ApplicationFiled: February 25, 2020Publication date: June 18, 2020Applicant: KOKUSAI ELECTRIC CORPORATIONInventors: Kazuhide ASAI, Kazuyoshi YAMAMOTO, Hidemoto HAYASHIHARA, Takayuki KAWAGISHI, Kayoko YASHIKI, Yukio MIYATA, Hiroyuki IWAKURA, Masanori OKUNO, Kenichi FUJIMOTO, Ryuichi KAJI
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Publication number: 20190195219Abstract: There is provided a technique that includes: a main controller configured to execute a process recipe including a plurality of steps to perform a predetermined process on a substrate so as to acquire device data when executing the process recipe; and a storage part configured to store the acquired device data, wherein the main controller is configured to: acquire the device data in a predetermined specific step among the steps constituting the process recipe; calculate a value of the acquired device data in the specific step; compare the calculated value with a value of the device data in the specific step calculated at a time of previous execution of the process recipe; and generate an alarm when the calculated value shows a predefined tendency.Type: ApplicationFiled: December 20, 2018Publication date: June 27, 2019Applicant: KOKUSAI ELECTRIC CORPORATIONInventors: Masanori OKUNO, Hideki HORITA, Kazuyoshi YAMAMOTO, Kazuhide ASAI, Toshihiko YONEJIMA
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Patent number: 10163663Abstract: A configuration capable of increasing an exhaust capability of an apparatus without degrading an operation of the apparatus includes: a processing furnace; an exhaust unit configured to exhaust a gas from a process chamber defined by the processing furnace, the exhaust unit having a first sidewall and a second sidewall opposite to the first sidewall; and an exhaust device disposed adjacent to the exhaust unit and connected to the exhaust unit via a connecting pipe provided with a vibration-absorbing member, the exhaust device having a first sidewall and a second sidewall opposite to the first sidewall, wherein the processing furnace, the exhaust unit and the exhaust device are disposed on a same plane, and only the first sidewall of the first and the second sidewalls of the exhaust device is disposed in a space defined by extensions of the first and the second sidewalls of the exhaust unit.Type: GrantFiled: November 22, 2017Date of Patent: December 25, 2018Assignee: Kokusai Electric CorporationInventors: Toshihiko Yonejima, Masanori Okuno, Masakazu Sakata, Hiroki Okamiya, Takeshi Kasai, Katsuaki Nogami, Takashi Ozaki, Kenji Kanayama, Unryu Ogawa, Seiyo Nakashima, Tomoyuki Yamada, Masayuki Yamada
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Patent number: 10132757Abstract: Image data pertaining to substrate transfer is efficiently collected and stored for use in analyzing transfer errors. A substrate processing device includes a first control part for stopping a transfer part upon detecting a transfer error in the transfer part for transferring a substrate; a storage part for storing substrate transfer operations of the transfer part as image data; and a second control part for accumulating the image data in an accumulation part at a predetermined period. The first control part obtains information indicating a state of the substrate from the transfer part or a processing part, and notifies the second control part that the transfer part is stopped due to the transfer error. The second control part retrieves image data of a predetermined period of time including the time that the transfer error occurs from the accumulation part, and converts the image data into a file.Type: GrantFiled: June 18, 2012Date of Patent: November 20, 2018Assignee: HITACHI KOKUSAI ELECTRIC INC.Inventors: Masanori Okuno, Hisaki Kataoka, Tomoyuki Miyada
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Publication number: 20180144953Abstract: A configuration capable of increasing an exhaust capability of an apparatus without degrading an operation of the apparatus includes: a processing furnace; an exhaust unit configured to exhaust a gas from a process chamber defined by the processing furnace, the exhaust unit having a first sidewall and a second sidewall opposite to the first sidewall; and an exhaust device disposed adjacent to the exhaust unit and connected to the exhaust unit via a connecting pipe provided with a vibration-absorbing member, the exhaust device having a first sidewall and a second sidewall opposite to the first sidewall, wherein the processing furnace, the exhaust unit and the exhaust device are disposed on a same plane, and only the first sidewall of the first and the second sidewalls of the exhaust device is disposed in a space defined by extensions of the first and the second sidewalls of the exhaust unit.Type: ApplicationFiled: November 22, 2017Publication date: May 24, 2018Applicant: HITACHI KOKUSAI ELECTRIC INC.Inventors: Toshihiko YONEJIMA, Masanori OKUNO, Masakazu SAKATA, Hiroki OKAMIYA, Takeshi KASAI, Katsuaki NOGAMI, Takashi OZAKI, Kenji KANAYAMA, Unryu OGAWA, Seiyo NAKASHIMA, Tomoyuki YAMADA, Masayuki YAMADA
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Publication number: 20170285613Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.Type: ApplicationFiled: March 24, 2017Publication date: October 5, 2017Applicant: HITACHI KOKUSAI ELECTRIC INC.Inventors: Kazuhide ASAI, Kazuyoshi YAMAMOTO, Hidemoto HAYASHIHARA, Takayuki KAWAGISHI, Kayoko YASHIKI, Yukio MIYATA, Hiroyuki IWAKURA, Masanori OKUNO, Kenichi FUJIMOTO, Ryuichi KAJI
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Publication number: 20140176701Abstract: Image data pertaining to substrate transfer is efficiently collected and stored for use in analyzing transfer errors. A substrate processing device includes a first control part for stopping a transfer part upon detecting a transfer error in the transfer part for transferring a substrate; a storage part for storing substrate transfer operations of the transfer part as image data; and a second control part for accumulating the image data in an accumulation part at a predetermined period. The first control part obtains information indicating a state of the substrate from the transfer part or a processing part, and notifies the second control part that the transfer part is stopped due to the transfer error. The second control part retrieves image data of a predetermined period of time including the time that the transfer error occurs from the accumulation part, and converts the image data into a file.Type: ApplicationFiled: June 18, 2012Publication date: June 26, 2014Inventors: Masanori Okuno, Hisaki Kataoka, Tomoyuki Miyada