Patents by Inventor Masanori Okuno

Masanori Okuno has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Setup method of substrate processing apparatus
    Patent number: 8295968
    Abstract: A setup method of a substrate processing apparatus includes: connecting a test terminal, which includes a pseudo comprehensive control unit and a second operation unit, to a plurality of process chamber control units, with the process chamber control units being separated from the comprehensive control unit and a first operation unit; transmitting a process chamber test operation command from the second operation unit to the plurality of process chamber control units through the pseudo comprehensive control unit; testing operations of a plurality of process chambers in parallel by the plurality of process chamber control units receiving the process chamber test operation command; and transmitting a process chamber test operation report from the plurality of process chamber control units to the second operation unit through the pseudo comprehensive control unit.
    Type: Grant
    Filed: September 21, 2009
    Date of Patent: October 23, 2012
    Assignee: Hitachi Kokusai Electric Inc.
    Inventor: Masanori Okuno
  • SETUP METHOD OF SUBSTRATE PROCESSING APPARATUS
    Publication number: 20100080671
    Abstract: A setup method of a substrate processing apparatus comprises: connecting a test terminal, which includes a pseudo comprehensive control unit and a second operation unit, to a plurality of process furnace control units, with the process furnace control units being separated from the comprehensive control unit and a first operation unit; transmitting a process furnace test operation command from the second operation unit to the plurality of process furnace control units through the pseudo comprehensive control unit; testing operations of a plurality of process furnaces in parallel by the plurality of process furnace control units receiving the process furnace test operation command; and transmitting a process furnace test operation report from the plurality of process furnace control units to the second operation unit through the pseudo comprehensive control unit.
    Type: Application
    Filed: September 21, 2009
    Publication date: April 1, 2010
    Inventor: Masanori OKUNO