Masao Tsuji has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
Abstract: A substrate cooling apparatus is provided with a cooling plate disposed in a treating chamber and Peltier elements for supporting and cooling a substrate. A target temperature setter is operable to set a target temperature to which the substrate is to be cooled and a drive device drives the Peltier elements to cool the cooling plate below the target temperature. When the substrate is found to have reached the target temperature, the substrate is raised to a position free from the thermal influence of the cooling plate, to complete a cooling treatment. Consequently, the substrate is cooled at high speed to achieve a reduced cooling time. Where predetermined process modules are used, processing efficiency is improved with a reduced number of substrate cooling elements.
Abstract: Electronic components such as integrated circuit components have rows of parallel leads extending from the sides of their bodies. In detecting bent leads of an electronic component, at least two measuring lines are set along each row of leads. The intersections between the measuring lines and the leads are extracted and processed to detect a bend in leads. The electronic component is photographed to produce image data which is stored in a memory. At least two measuring lines are virtually set along the row of leads of the image data stored in the memory. An intersection extractor extracts, from the image data, the intersections between the measuring lines and predetermined leads in the row of leads. A detector then uses the extracted intersections to detect bent leads.