Abstract: An optical correction is predictively performed based on a result of AI learning previously performed by use of learning data including measurement data. The optical compensation system is provided with wavefront correction optics, a sensor and a controller. The wavefront correction optics corrects a wavefront of light that passes through a given optical path. The sensor obtains environmental information in the optical path. The controller calculates, based on the environmental information, a predicted wavefront disturbance of the light that has passed through the optical path and controls the wavefront correction optics so as to cancel the predicted wavefront disturbance.

Abstract: A resin composition is provided containing a polymer having a structural unit represented by the following Formula (1) in the molecule, and an inorganic filler, in which the inorganic filler contains silica in which a ratio of a number of Si atoms contained in silanol groups to a total number of Si atoms is 3% or less. In Formula (1), Z represents an arylene group, R1 to R3 each independently represent a hydrogen atom or an alkyl group, and R4 to R6 each independently represent a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.

Abstract: When adjusting optical axes of a multi-beam charged particle beam device, because parameters of optical systems are inter-dependent, the time required to adjust the parameters increases. Thus, the present invention provides a charged particle beam device provided with an optical parameter setting unit for setting parameters of optical systems for emitting a plurality of primary charged particle beams to a sample, detectors for individually detecting a plurality of secondary charged particle beams discharged from the sample, a plurality of memories for storing signals detected by the detectors and converted into digital pixels in the form of images, evaluation value derivation units for deriving evaluation values of the primary charged particle beams from the images, and a GUI capable of displaying the images and receiving an input from a user, wherein the GUI displays the images and evaluation results based on the evaluation values and changes various optical parameters in real-time.

Abstract: The fuel cell system includes a fuel cell, a first injection device associated with a supply of a fuel to the fuel cell, and a second injection device provided on an upstream side of the first injection device in a fuel flow passage from a fuel storage unit to the first injection device. The first and second injection devices switch a flow passage extending downstream from the fuel flow passage, between a first flow passage via the first injection device and second flow passage via the second injection device. The second injection device operates at a lower frequency than the first injection device during an operation of the fuel system.

Abstract: A charged particle beam device includes a detector 109 converting a photon emitted by a scintillator into an electric signal and a signal processing unit 110 processing the electric signal from the detector 109. The signal processing unit 110 detects a peak position of the electric signal, steepness of a rising section associated with the peak position, and steepness of a falling section associated with the peak position and classifies the peak position based on the steepness of the rising section and the steepness of the falling section.

Abstract: The present invention overcomes a trade-off between throughput, SNR, and spatial resolution in a charged particle beam device. Accordingly, a computer 18 sets at least one of a charged particle optical system and a detection system so as to modulate the intensity of signal charged particles or an electromagnetic wave detected by a detector 12 at a prescribed frequency. The charged particle optical system scans a specimen with a charged particle beam. The computer 18 generates an image or a signal profile by associating an irradiation position of the charged particle beam with a DC component of a signal acquired through synchronous detection of a detection signal from the detector at the irradiation position with a reference signal having a prescribed frequency.

Abstract: A method of setting a parameter of a charged particle beam device, for shortening the time required to adjust an ABCC parameter. An inverse conversion processing unit generates a simulator input signal corresponding to an electron emitted from a sample. A simulation detector uses an arithmetic model that simulates a detector and executes arithmetic processing on the simulator input signal in a state in which characteristic information is reflected in an arithmetic parameter. A simulated image conversion unit executes arithmetic processing corresponding to an image conversion unit and converts a signal from the simulation detector into a simulated image. An ABCC search unit searches for an ABCC parameter with respect to the simulation detector so that an evaluation value obtained from the simulated image becomes a specified reference value, and outputs the ABCC parameter as a search result to an ABCC control unit of the actual machine.

Abstract: A charged particle beam device includes a detector 109 converting a photon emitted by a scintillator into an electric signal and a signal processing unit 110 processing the electric signal from the detector 109. The signal processing unit 110 detects a peak position of the electric signal, steepness of a rising section associated with the peak position, and steepness of a falling section associated with the peak position and classifies the peak position based on the steepness of the rising section and the steepness of the falling section.

Abstract: When adjusting optical axes of a multi-beam charged particle beam device, because parameters of optical systems are inter-dependent, the time required to adjust the parameters increases. Thus, the present invention provides a charged particle beam device provided with an optical parameter setting unit for setting parameters of optical systems for emitting a plurality of primary charged particle beams to a sample, detectors for individually detecting a plurality of secondary charged particle beams discharged from the sample, a plurality of memories for storing signals detected by the detectors and converted into digital pixels in the form of images, evaluation value derivation units for deriving evaluation values of the primary charged particle beams from the images, and a GUI capable of displaying the images and receiving an input from a user, wherein the GUI displays the images and evaluation results based on the evaluation values and changes various optical parameters in real-time.

Abstract: A rectenna device includes an antenna (210), a first rectifier (31) to rectify a radio frequency wave input in the antenna (210), an antenna (220), a second rectifier (32) to rectify a radio frequency wave input in the antenna (220), and a capacitive coupler (5) to form an open circuit in response to direct current and to form a short circuit in response to a fundamental wave. The first rectifier (31) includes a ground (GND) conductor (410) to be a reference potential, and the second rectifier (32) includes a GND conductor (420) to be a reference potential. The GND conductor (410) and the GND conductor (420) are connected with the capacitive coupler (5) in between. The first rectifier (31) and the second rectifier (32) are connected in series.

Abstract: A rectenna device includes an antenna (210), a first rectifier (31) to rectify a radio frequency wave input in the antenna (210), an antenna (220), a second rectifier (32) to rectify a radio frequency wave input in the antenna (220), and a capacitive coupler (5) to form an open circuit in response to direct current and to form a short circuit in response to a fundamental wave. The first rectifier (31) includes a ground (GND) conductor (410) to be a reference potential, and the second rectifier (32) includes a GND conductor (420) to be a reference potential. The GND conductor (410) and the GND conductor (420) are connected with the capacitive coupler (5) in between. The first rectifier (31) and the second rectifier (32) are connected in series.

Abstract: A fuel cell stack includes a stack body formed by stacking a plurality of power generation cells. A first seal line of a first metal separator and a second seal line of a second metal separator protrude in a stacking direction of the stack body in a manner to contact a resin film. An insulator is provided with a first elastic seal member which contacts a second end seal line. The width of the first elastic seal member is larger than the maximum width of the second end seal line.

Abstract: A fuel cell stack includes a cell stack body formed by stacking a plurality of power generation cells in a staking direction. The cell stack body includes end metal separators provided at both ends of the power generation cells in the stacking direction. Bead seals are formed integrally with the end metal separators, respectively. Metal plates and elastic seal members are overlapped with each other at positions facing the bead seals. The metal plates are supported by electrically insulating support members, and provided between the bead seals and the elastic seal members, respectively.

Abstract: A fuel cell stack includes a stack body formed by stacking a plurality of power generation cells. A first seal line of a first metal separator and a second seal line of a second metal separator protrude in a stacking direction of the stack body in a manner to contact a resin film. An insulator is provided with a first elastic seal member which contacts a second end seal line. The width of the first elastic seal member is larger than the maximum width of the second end seal line.

Abstract: Provided is a regeneration rotary kiln capable of reducing the proportion of combustible gas in waste gas and capable of reducing cost for generating superheated steam. A regeneration rotary kiln (1) is characterized by including: a superheated steam generation unit (2) that generates superheated steam; a tube (3) capable of rotating about its axis and having a heating section (A) where, while the superheated steam is being supplied thereto, carbon fiber reinforced plastic (10) containing a matrix resin and carbon fibers is heated to generate combustible gas (10G) from the matrix resin to extract the carbon fibers (10S) from the carbon fiber reinforced plastic (10); a first combustion chamber (43a) that is placed outside the tube (3) and that burns the gas (10G) introduced from the heating section (A) to heat the heating section (A); and a second combustion chamber (43b) that burns the gas (10G) introduced from the first combustion chamber (43a) to supply heat for generating the superheated steam.

Abstract: Provided is a regeneration rotary kiln capable of reducing the proportion of combustible gas in waste gas and capable of reducing cost for generating superheated steam. A regeneration rotary kiln (1) is characterized by including: a superheated steam generation unit (2) that generates superheated steam; a tube (3) capable of rotating about its axis and having a heating section (A) where, while the superheated steam is being supplied thereto, carbon fiber reinforced plastic (10) containing a matrix resin and carbon fibers is heated to generate combustible gas (10G) from the matrix resin to extract the carbon fibers (10S) from the carbon fiber reinforced plastic (10); a first combustion chamber (43a) that is placed outside the tube (3) and that burns the gas (10G) introduced from the heating section (A) to heat the heating section (A); and a second combustion chamber (43b) that burns the gas (10G) introduced from the first combustion chamber (43a) to supply heat for generating the superheated steam.

Abstract: A scan control unit for generating two-dimensional coordinates for performing a scan with an electron beam of an electron scanning microscope is provided with first and second transforming units for transforming coordinates in the horizontal (X) direction and the vertical (V) direction. An area to be tested in a sample is scanned with an electron beam in an arbitrary direction. As the first and second transforming units, small-capacity transformation tables (LUTs) capable of operating at high speed in each of the horizontal (X) direction and the vertical (Y) direction are used. By also using a large-capacity transformation table (LUT) that stores coordinate transformation data corresponding to plural scan types, a test apparatus compatible with the plural scan types, having multiple functions, and capable of performing high-speed scan control is realized.

Abstract: A surface mounting apparatus includes a conveyer supporting a printed wiring board being moved in a transportation direction, and a board transfer device that lowers a pair of tab members to positions spaced apart upstream and downstream of the printed wiring board and moves the tab members in the transportation direction. The board transfer device includes an interval changing device to change an interval between a pair of the tab members and a sensor to detect the position of the printed wiring board, an interference determination means to determine the absence or presence of the printed wiring board at the positions to which both the tab members are to be lowered according to the position of the printed wiring board detected by the sensor and interval setting means to move the tab members by driving the interval changing device according to a detection result of the interference determination means.

Abstract: A scan control unit for generating two-dimensional coordinates for performing a scan with an electron beam of an electron scanning microscope is provided with first and second transforming units for transforming coordinates in the horizontal (X) direction and the vertical (V) direction. An area to be tested in a sample is scanned with an electron beam in an arbitrary direction. As the first and second transforming units, small-capacity transformation tables (LUTs) capable of operating at high speed in each of the horizontal (X) direction and the vertical (Y) direction are used. By also using a large-capacity transformation table (LUT) that stores coordinate transformation data corresponding to plural scan types, a test apparatus compatible with the plural scan types, having multiple functions, and capable of performing high-speed scan control is realized.

Abstract: A scan control unit for generating two-dimensional coordinates for performing a scan with an electron beam of an electron scanning microscope is provided with first and second transforming units for transforming coordinates in the horizontal (X) direction and the vertical (V) direction. An area to be tested in a sample is scanned with an electron beam in an arbitrary direction. As the first and second transforming units, small-capacity transformation tables (LUTs) capable of operating at high speed in each of the horizontal (X) direction and the vertical (Y) direction are used. By also using a large-capacity transformation table (LUT) that stores coordinate transformation data corresponding to plural scan types, a test apparatus compatible with the plural scan types, having multiple functions, and capable of performing high-speed scan control is realized.