Abstract: The present invention provides an apparatus for discriminating the kind of a sheet material, comprising: a substrate having a recessed portion; a press member situated so that a sheet material can be deflected using the recessed portion; a support member that is deformed as the sheet material situated to cover the recessed portion is pressed by the press member and thereby deflected; and a sensor for detecting the deformation amount of the support member, wherein the kind of the sheet material is discriminated on the basis of detecting the deformation amount of the support member by the sensor.

Abstract: A signal output apparatus comprises an impact applying unit applying an impact to a sheet from the outside thereof, and a detection unit outputting a signal by the impact. An apparatus for determining the type of sheet comprises an impact applying unit applying an impact to a sheet from the outside thereof, and a detection unit outputting a signal by the impact, wherein the type of the sheet is determined based on the signal from the detection unit. An image forming apparatus comprises an impact applying unit applying an impact to a sheet from the outside thereof, and a detection unit outputting a signal by the impact. A method for determining the type of sheet comprises the steps of applying an impact to a sheet from the outside thereof, outputting a signal from a detection unit by the applying step, and determining the type of sheet based on the signal. An apparatus carries out the method for determining the type of sheet.

Abstract: The present invention provides an apparatus for discriminating the kind of a sheet material, comprising: a substrate having a recessed portion; a press member situated so that a sheet material can be deflected using the recessed portion; a support member that is deformed as the sheet material situated to cover the recessed portion is pressed by the press member and thereby deflected; and a sensor for detecting the deformation amount of the support member, wherein the kind of the sheet material is discriminated on the basis of detecting the deformation amount of the support member by the sensor.

Abstract: The present invention provides an apparatus for discriminating the kind of a sheet material, comprising: a substrate having a recessed portion; a press member situated so that a sheet material can be deflected using the recessed portion; a support member that is deformed as the sheet material situated to cover the recessed portion is pressed by the press member and thereby deflected; and a sensor for detecting the deformation amount of the support member, wherein the kind of the sheet material is discriminated on the basis of detecting the deformation amount of the support member by the sensor.

Abstract: A signal output apparatus comprises an impact applying unit applying an impact to a sheet from the outside thereof, and a detection unit outputting a signal by the impact. An apparatus for determining the type of sheet comprises an impact applying unit applying an impact to a sheet from the outside thereof, and a detection unit outputting a signal by the impact, wherein the type of the sheet is determined based on the signal from the detection unit. An image forming apparatus comprises an impact applying unit applying an impact to a sheet from the outside thereof, and a detection unit outputting a signal by the impact. A method for determining the type of sheet comprises the steps of applying an impact to a sheet from the outside thereof, outputting a signal from a detection unit by the applying step, and determining the type of sheet based on the signal. An apparatus carries out the method for determining the type of sheet.

Abstract: A signal output apparatus comprises an impact applying unit applying an impact to a sheet from the outside thereof, and a detection unit outputting a signal by the impact. An apparatus for determining the type of sheet comprises an impact applying unit applying an impact to a sheet from the outside thereof, and a detection unit outputting a signal by the impact, wherein the type of the sheet is determined based on the signal from the detection unit. An image forming apparatus comprises an impact applying unit applying an impact to a sheet from the outside thereof, and a detection unit outputting a signal by the impact. A method for determining the type of sheet comprises the steps of applying an impact to a sheet from the outside thereof, outputting a signal from a detection unit by the applying step, and determining the type of sheet based on the signal. An apparatus carries out the method for determining the type of sheet.

Abstract: In a method of manufacturing a liquid discharge head, liquid in a pressure generation chamber is pressurized by a piezoelectric driving force of a piezoelectric element, and is discharged from a nozzle communicated with the pressure generation chamber. The method is characterized by the steps of providing a flow passage substrate incorporating the pressure generation chamber, anodically joining a diaphragm to the flow passage substrate, forming electrode layers and a piezoelectric film of the piezoelectric element on the diaphragm, and crystallizing the piezoelectric film during or after the lamination at a crystallization temperature not higher than a strain point of the diaphragm.

Abstract: The present invention provides an apparatus for discriminating the kind of a sheet material, comprising: a substrate having a recessed portion; a press member situated so that a sheet material can be deflected using the recessed portion; a support member that is deformed as the sheet material situated to cover the recessed portion is pressed by the press member and thereby deflected; and a sensor for detecting the deformation amount of the support member, wherein the kind of the sheet material is discriminated on the basis of detecting the deformation amount of the support member by the sensor.

Abstract: The present invention provides an apparatus for discriminating the kind of a sheet material, comprising: a substrate having a recessed portion; a press member situated so that a sheet material can be deflected using the recessed portion; a support member that is deformed as the sheet material situated to cover the recessed portion is pressed by the press member and thereby deflected; and a sensor for detecting the deformation amount of the support member, wherein the kind of the sheet material is discriminated on the basis of detecting the deformation amount of the support member by the sensor.

Abstract: A deflector which makes multilayered wiring possible and prevents contamination during the manufacture includes an electrode substrate (400) having a plurality of through holes, and an electrode pair made up of first and second electrodes which oppose the side walls of each through hole in order to control the locus of a charged particle beam passing through the through hole, and a wiring substrate (500) having connection wiring pads connected to the electrode pairs of the electrode substrate to individually apply voltages to the electrode pairs. This deflector is formed by bonding the electrode substrate and wiring substrate via the connection wiring pads of the wiring substrate.

Abstract: In a method of manufacturing a liquid discharge head, liquid in a pressure generation chamber is pressurized by a piezoelectric driving force of a piezoelectric element, and is discharged from a nozzle communicated with the pressure generation chamber. The method is characterized by the steps of providing a flow passage substrate incorporating the pressure generation chamber, anodically joining a diaphragm to the flow passage substrate, forming electrode layers and a piezoelectric film of the piezoelectric element on the diaphragm, and crystallizing the piezoelectric film during or after the lamination at a crystallization temperature not higher than a strain point of the diaphragm.

Abstract: A signal output apparatus comprises an impact applying unit applying an impact to a sheet from the outside thereof, and a detection unit outputting a signal by the impact. An apparatus for determining the type of sheet comprises an impact applying unit applying an impact to a sheet from the outside thereof, and a detection unit outputting a signal by the impact, wherein the type of the sheet is determined based on the signal from the detection unit. An image forming apparatus comprises an impact applying unit applying an impact to a sheet from the outside thereof, and a detection unit outputting a signal by the impact. A method for determining the type of sheet comprises the steps of applying an impact to a sheet from the outside thereof, outputting a signal from a detection unit by the applying step, and determining the type of sheet based on the signal. An apparatus carries out the method for determining the type of sheet.

Abstract: A deflector which makes multilayered wiring possible and prevents contamination during the manufacture includes an electrode substrate (400) having a plurality of through holes, and an electrode pair made up of first and second electrodes which oppose the side walls of each through hole in order to control the locus of a charged particle beam passing through the through hole, and a wiring substrate (500) having connection wiring pads connected to the electrode pairs of the electrode substrate to individually apply voltages to the electrode pairs. This deflector is formed by bonding the electrode substrate and wiring substrate via the connection wiring pads of the wiring substrate.

Abstract: The present invention provides an apparatus for discriminating the kind of a sheet material, comprising: a substrate having a recessed portion; a press member situated so that a sheet material can be deflected using the recessed portion; a support member that is deformed as the sheet material situated to cover the recessed portion is pressed by the press member and thereby deflected; and a sensor for detecting the deformation amount of the support member, wherein the kind of the sheet material is discriminated on the basis of detecting the deformation amount of the support member by the sensor.

Abstract: A device is formed by transferring a film onto a substrate when the film requires but the substrate is not adapted to a high temperature heat treatment process. The film having layers and formed on a first substrate having layers is transferred onto a second substrate having layers. The method of transferring the film comprises a first step of forming a lift-off layer and the film to be transferred on the first substrate, a second step of bonding the film to be transferred to the second substrate and a third step of separating the film to be transferred from the first substrate by etching the lift-off layer and transferring it onto the second substrate.

Abstract: A signal output apparatus comprises an impact applying unit applying an impact to a sheet from the outside thereof, and a detection unit outputting a signal by the impact. An apparatus for determining the type of sheet comprises an impact applying unit applying an impact to a sheet from the outside thereof, and a detection unit outputting a signal by the impact, wherein the type of the sheet is determined based on the signal from the detection unit. An image forming apparatus comprises an impact applying unit applying an impact to a sheet from the outside thereof, and a detection unit outputting a signal by the impact. A method for determining the type of sheet comprises the steps of applying an impact to a sheet from the outside thereof, outputting a signal from a detection unit by the applying step, and determining the type of sheet based on the signal. An apparatus carries out the method for determining the type of sheet.

Abstract: A device is formed by transferring a film onto a substrate when the film requires but the substrate is not adapted to a high temperature heat treatment process. The film having layers and formed on a first substrate having layers is transferred onto a second substrate having layers. The method of transferring the film comprises a first step of forming a lift-off layer and the film to be transferred on the first substrate, a second step of bonding the film to be transferred to the second substrate and a third step of separating the film to be transferred from the first substrate by etching the lift-off layer and transferring it onto the second substrate.

Abstract: A microstructure comprising a substrate (1), a patterned structure (beam member) (2) suspended over the substrate (1) with an air-space (4) therebetween and supporting structure (3) for suspending the patterned structure (2) over the substrate (1). The microstructure is prepared by using a sacrificial layer (7) which is removed to form the space between the substrate (1) and the patterned structure (2) adhered to the sacrificial layer. In the case of using resin as the material of the sacrificial layer, the sacrificial layer can be removed without causing sticking, and an electrode can be provided on the patterned structure. The microstructure can have application as electrostatic actuator, etc., depending on choice of shape and composition.

Abstract: A method of manufacturing a mask in which laser radiation is projected to a mask substrate of silicon and a supporting frame of heat resisting glass, while a voltage of about 1000-10000 V is applied between the mask substrate and the supporting frame. Cooling water is caused to flow to suppress temperature rise due to the irradiation, to maintain the mask substrate and the supporting frame at a predetermined normal temperature (about the mask temperature in a lithographic pattern transfer process). The light projecting step is performed for a period not shorter than 10 minutes whereby anodic bonding of the mask substrate with the supporting frame is achieved. This prevents a shift of the mask pattern and/or deformation of the mask substrate, and it assures the manufacture of a high precision mask.

Abstract: A process for anodic bonding, in which Si substrate and glass substrate are contacting each other, a voltage is applied therebetween, and then light is irradiated on a contact portion thereof, whereby the Si substrate and the glass substrate are bonded at a lower temperature than transition temperature of the glass substrate.