Abstract: A gas processing apparatus of an embodiment includes: first and second dielectric substrates facing with each other; first and second discharge electrodes respectively disposed on a pair of facing principal surfaces of the dielectric substrates; first and second ground electrodes respectively disposed on a pair of principle surfaces at opposite sides of the principle surfaces of the dielectric substrates; a gas flow path to supply gas to be processed between the discharge electrodes; an AC power source to generate first and second plasma-induced flows by applying an AC voltage between the discharge electrodes and the ground electrodes; and a region disposed between the dielectric substrates at downstream of the plasma-induced flows from the discharge electrodes, and a gap between the dielectric substrates being 1.3 times or less of a sum of thicknesses of the plasma-induced flows.

Abstract: A film forming apparatus includes: a support, a rotator, a gas supplier, and a radiation thermometer configured to measure a temperature of a surface of a substrate, wherein the radiation thermometer includes: a light source of an irradiation light to be irradiated to the surface of the substrate; a first light receiver configured to receive a reflected light from a first measurement region at a predetermined distance from the rotation center on the surface of the substrate; and a second light receiver configured to receive a heat radiation light from a second measurement region extending in a rotation direction of the substrate at the predetermined distance from the rotation center on the surface of the substrate.

Abstract: A curvature measurement apparatus according to an embodiment includes: a laser beam emitting portion emitting a laser beam; a first polarization beam splitter separating the emitted laser beam into first and second laser beams in different polarization directions and in different travel directions; a mirror reflecting the first laser beam so that the first and second laser beams travel side by side to a substrate; a second polarization beam splitter transmitting the second laser beam mirror-reflected from the substrate and reflecting the first laser beam, mirror-reflected from the substrate, in a direction different from a travel direction of the second laser beam; a one-dimensional first position detection device detecting an incident position of the reflected first laser beam on the first position detection device; and a one-dimensional second position detection device detecting an incident position of the transmitted second laser beam on the second position detection device.

Abstract: A radiation thermometer has a broadband light source which generates broadband light; an optical filter which, when the broadband light is incident on the measuring target object, passes only light in a predetermined wavelength range of reflected light and heat radiation light from a measuring target object; a light receiver which receives the light in the predetermined wavelength range through the optical filter; and a calculator which calculates a temperature of the measuring target object by using reflected light intensity and heat radiation intensity of the light in the predetermined wavelength range received by the light receiver, wherein an emission spectrum of the broadband light is a spectrum with a full width at half maximum which is equal to or wider than the predetermined wavelength range, and with light intensity increasing while a wavelength thereof becomes longer in the predetermined wavelength range.

Abstract: In one embodiment, in a fuel cell, a first electrode supplied with an oxidant gas includes a first gas diffusion layer having a first porous base material and a first catalyst layer having a second porous base material. The first catalyst layer is stacked to the first gas diffusion layer. The second porous base material has a pore diameter distribution with a peak in a range of 0.04 ?m to 0.12 ?m, and a volume ratio of pores with diameters of 0.04 ?m to 0.12 ?m to all the pores being 17% or more. A second electrode supplied with a fuel includes a second gas diffusion layer having a third porous base material and a second catalyst layer having a fourth porous base material. The second catalyst layer is stacked to the second gas diffusion layer. An electrolyte film is held between the first and second catalyst layers.

Abstract: A substrate processing apparatus has a process chamber, a long-shaped window on a wall surface of the process chamber, an irradiator configured to irradiate a first laser beam and a second laser beam to a substrate in the process chamber via the long-shaped window so that incident points of the first and second laser beams are aligned substantially along a long side direction of the window, a detector configured to have a light reception surface receiving the first and second laser beams reflected by the substrate and passing through the window, the detector being configured to detect incident positions of the first and second laser beams on the light reception surface, and a calculator configured to calculate a curvature of the substrate by using a relative position of the first laser beam and the second laser beam which are detected by the detector.

Abstract: A curvature measurement apparatus according to an embodiment includes: a laser beam emitting portion emitting a laser beam; a first polarization beam splitter separating the emitted laser beam into first and second laser beams in different polarization directions and in different travel directions; a mirror reflecting the first laser beam so that the first and second laser beams travel side by side to a substrate; a second polarization beam splitter transmitting the second laser beam mirror-reflected from the substrate and reflecting the first laser beam, mirror-reflected from the substrate, in a direction different from a travel direction of the second laser beam; a one-dimensional first position detection device detecting an incident position of the reflected first laser beam on the first position detection device; and a one-dimensional second position detection device detecting an incident position of the transmitted second laser beam on the second position detection device.

Abstract: A gas processing apparatus of an embodiment includes: first and second dielectric substrates facing with each other; first and second discharge electrodes respectively disposed on a pair of facing principal surfaces of the dielectric substrates; first and second ground electrodes respectively disposed on a pair of principle surfaces at opposite sides of the principle surfaces of the dielectric substrates; a gas flow path to supply gas to be processed between the discharge electrodes; an AC power source to generate first and second plasma-induced flows by applying an AC voltage between the discharge electrodes and the ground electrodes; and a region disposed between the dielectric substrates at downstream of the plasma-induced flows from the discharge electrodes, and a gap between the dielectric substrates being 1.3 times or less of a sum of thicknesses of the plasma-induced flows.

Abstract: A fuel cell apparatus includes a fuel cell generating electric power, and including a fuel electrode which includes an anode catalyst, which is disposed in one side of an electrolyte membrane, which is supplied with liquid fuel, and which discharges gas generated by a chemical reaction accelerated by the anode catalyst, and an oxidizing agent electrode which includes a cathode catalyst, which is disposed in the other side of the electrolyte membrane, and which is supplied with air, and a control unit controlling a load applied to the fuel cell. The control unit increases the load in at least one of two cases, one case being when electric power generated by the fuel cell lowers below a predetermined reference value and another case being at predetermined time intervals, and stops the increase of the load after elapsing a predetermined time period from the start of the increase of the load.

Abstract: A fuel cell apparatus includes a fuel cell generating electric power, and including a fuel electrode which includes an anode catalyst, which is disposed in one side of an electrolyte membrane, which is supplied with liquid fuel, and which discharges gas generated by a chemical reaction accelerated by the anode catalyst, and an oxidizing agent electrode which includes a cathode catalyst, which is disposed in the other side of the electrolyte membrane, and which is supplied with air, and a control unit controlling a load applied to the fuel cell. The control unit increases the load in at least one of two cases, one case being when electric power generated by the fuel cell lowers below a predetermined reference value and another case being at predetermined time intervals, and stops the increase of the load after elapsing a predetermined time period from the start of the increase of the load.

Abstract: A direct methanol fuel cell includes a cathode catalyst layer; an electrolyte membrane; an anode catalyst layer; a first fuel control layer that is water-repellent and conductive and that has pores; a second fuel control layer that is water-repellent and conductive and that has larger pores than the those of the first fuel control layer; a third fuel control layer that is water-repellent and conductive and that has smaller porous than those of the first fuel control layer and those of the second fuel control layer; and an anode GDL layer that is water-repellent and conductive, wherein the membrane and the layers above are arranged in the above order.

Abstract: In one embodiment, a method of cleaning a film forming apparatus includes: plasmatizing cleaning gas having at least one of the group consisting of chlorine gas, hydrocarbon gas, and chlorinated hydrocarbon gas; and supplying the plasmatized cleaning gas to a heated inner part of the film forming apparatus.

Abstract: In one embodiment, in a fuel cell, a first electrode supplied with an oxidant gas includes a first gas diffusion layer having a first porous base material and a first catalyst layer having a second porous base material. The first catalyst layer is stacked to the first gas diffusion layer. The second porous base material has a pore diameter distribution with a peak in a range of 0.04 ?m to 0.12 ?m, and a volume ratio of pores with diameters of 0.04 ?m to 0.12 ?m to all the pores being 17% or more. A second electrode supplied with a fuel includes a second gas diffusion layer having a third porous base material and a second catalyst layer having a fourth porous base material. The second catalyst layer is stacked to the second gas diffusion layer. An electrolyte film is held between the first and second catalyst layers.

Abstract: A direct type fuel cell power generator comprises an anode electrode including an anode catalyst layer, a cathode electrode including a cathode catalyst layer, a fuel container comprising at least two electromotive portion units, each of which comprises an electrolyte film disposed between the anode electrode and the cathode electrode, the fuel container housing a fuel therein, and a fuel flow path to supply a fuel in the electromotive portion unit. In the power generator, the fuel flow path has a flow path which produces flow-back again from the fuel container to the first electromotive portion unit via the first electromotive portion unit and the second electromotive portion unit, and which is not branched during the flow-back.

Abstract: A fuel cell include a membrane electrode assembly including an anode, a cathode opposed to the anode, and an electrolyte membrane interposed between the anode and the cathode; a lyophobic porous body in contact with the anode; and an anode passage plate in contact with the lyophobic porous body, the anode passage plate including a gas collection passage and a fuel supplying passage, the gas collection passage collects a gas generated in the anode via the lyophobic porous body, the fuel supplying passage supplies a fuel to the anode via the lyophobic porous body.

Abstract: A liquid cartridge for supplying liquid to an external device connected therewith is provided with a casing, a partition member movably fitted in the casing, which partitions the casing into a first chamber and a second chamber, an outlet port communicating between the first chamber and the external device and a pressure unit housed in the second chamber, which presses the partition member so as to discharge the liquid out of the outlet port.

Abstract: A cathode for a direct methanol fuel cell is provided. The cathode comprises a cathode catalyst layer includes a first carbon powder supporting a noble metal catalyst, a proton conductive polyelectrolyte at least partially covering a surface of the first carbon powder, and a second carbon powder having a water repellent material on a surface thereof. The cathode catalyst layer is accompanied with a porous structure satisfying following conditions. 40%?(V1/V0)?70% wherein V0 represents a volume of pores having a diameter ranging from 3 nm to 10 ?m, and V1 represents a volume of pores having a diameter ranging from 50 nm to 10 ?m.

Abstract: The present invention provides an anode used in a direct methanol fuel cell and a direct methanol fuel cell employing that anode. They can prevent crossovers of methanol and water and also can control permeation of water, so as to achieve high power output. The anode comprises an anode catalyst layer 20 and a gas-diffusion layer 150, and the gas-diffusion layer comprises a porous sheet support mainly made of carbon. In the porous sheet support, a high packing density area 50 is formed near the surface.

Abstract: A fuel cartridge to be connected to a direct methanol fuel cell power generating device includes a spare fuel tank which stores a liquid fuel and is to be connected to the direct methanol fuel cell power generating device and a harmful substance trap member. The spare fuel tank stores a liquid fuel and is to be connected to the direct methanol fuel cell power generating device. The harmful substance trap member is fixed to the spare fuel tank and is to be connected to the direct methanol fuel cell power generating device. The harmful substance trap member contains a harmful substance trap material which traps gaseous harmful substances exhausted from the direct methanol fuel cell power generating device.

Abstract: A fuel cell system is provided with a direct methanol fuel cell having an anode, a cathode and an electrolyte membrane put therebetween, a fuel supply unit supplying fuel to the anode, an air supply unit supplying air to the cathode and a heat exchanger exchanging heat between the fuel supplied by the fuel supply unit to the anode and an exhaust exhausted from the fuel cell.