Abstract: An imaging device includes a light source, a controller, and a camera. The camera generates a captured image by obtaining, in a first cycle, an image of infrared light. The camera also captures an image of infrared light (first light) transmitted through a windshield. The light source emits the infrared light in a second cycle. The second cycle for the emission is longer than the first cycle for the generation of the captured image. The controller generates a third image as a difference between a first image and a second image.

Abstract: An optical module according to one embodiment includes a package having an opening surrounded by side walls, and a lid mounted on the package to seal the opening. The lid has a plate-like shape and includes a welded portion fixed by welding to an upper surface of the side wall of the package having the opening formed thereon, an easily deformable portion formed at a position separated from the welded portion and deformed along with the welding, and a central portion having a flat shape.

Abstract: A bootstrap circuit includes an N-channel MOS transistor including: a first N-type semiconductor layer formed on a surface of a P-type semiconductor substrate and electrically connected to a bootstrap capacitor; a P-type semiconductor layer formed on a surface of the first N-type semiconductor layer; a second N-type semiconductor layer formed on a surface of the P-type semiconductor layer; a first electrode electrically connected to the P-type semiconductor layer; a second electrode electrically connected to the second N-type semiconductor layer; and a power-source terminal connected to each of the first electrode and the second electrode for supplying a power-source voltage thereto, the N-channel MOS transistor supplying power to the bootstrap capacitor, and a current limiting element connected between the power-source terminal and the first electrode.

Abstract: A switching device has a main IGFET having a Schottky barrier diode D3 for blocking an inverse current built therein, a protective switch means, and a protective switch control means. The protective switch means is connected in between a drain electrode D and a gate electrode G of the main IGFET. The protective switch control means turns on the protective switch means when an inverse voltage is impressed to the main IGFET. Thereby, the main IGFET is protected from the inverse voltage.

Abstract: A switching device has a main IGFET having a Schottky barrier diode D3 for blocking an inverse current built therein, a protective switch means, and a protective switch control means. The protective switch means is connected in between a drain electrode D and a gate electrode G of the main IGFET. The protective switch control means turns on the protective switch means when an inverse voltage is impressed to the main IGFET. Thereby, the main IGFET is protected from the inverse voltage.

Abstract: A drive circuit for a switching circuit has a high-side drive circuit to turn on/off, according to a control signal, a switching element QH arranged on a high side of a DC power source Vin and a low-side drive circuit to turn on/off alternately with the switching element QH according to the control signal a switching element QL arranged on a low side of the DC power source and connected in series with the switching element QH. Ends of an auxiliary power source Vcc1 are connected in series with a switch element Qn1, a capacitor C1, and a switch element Qn2. Both ends of the capacitor C1 are connected in series with a switch element Qp1, a capacitor C2, and a switch element Qp2. A control circuit alternately turns on/off the switch elements Qn1 and Qn2 and the switch elements Qp1 and Qp2. The capacitor C2 provides the high-side drive circuit with source power.

Abstract: A drive circuit for a switching circuit has a high-side drive circuit to turn on/off, according to a control signal, a switching element QH arranged on a high side of a DC power source Vin and a low-side drive circuit to turn on/off alternately with the switching element QH according to the control signal a switching element QL arranged on a low side of the DC power source and connected in series with the switching element QH. Ends of an auxiliary power source Vcc1 are connected in series with a switch element Qn1, a capacitor C1, and a switch element Qn2. Both ends of the capacitor C1 are connected in series with a switch element Qp1, a capacitor C2, and a switch element Qp2. A control circuit alternately turns on/off the switch elements Qn1 and Qn2 and the switch elements Qp1 and Qp2. The capacitor C2 provides the high-side drive circuit with source power.

Abstract: The projection aligner transfers a mask pattern formed on a mask to a substrate. A collimated light beam is emitted from a light source toward the mask. The light beam passed through the mask is deflected by a first mirror formed on a deflector toward a lens unit having a positive power. A reflector is provided at the other side of the lens unit to reflect back the light beam passed through the lens unit. The light beam reflected by the reflector passed through the lend unit again and then deflected by a second mirror formed on the deflector toward the substrate to form an image of the mask pattern. The size of the image formed on the substrate is adjusted by moving the reflector along the optical axis of the lens unit, and the deflector along the optical path of the light beam passed through the mask.

Abstract: A projection aligner scans a plurality of light beams over a mask in a main scanning direction to transfer an image of a mask pattern on an object by the light beams passed through the mask. The projection aligner has a plurality of optical systems for projecting light beams passed through the mask onto the object. Each of the optical system includes a lens unit, a reflector provided to one side of the lens unit and a deflector provided to the other side of the lens unit. The light beam passed through the mask is deflected by the deflector, passes through the lens unit, reflected back by the reflector, passes through the lens unit again, and deflected by the deflector toward the object. The size of the image formed by the light beam is varied by moving the reflector in the main scanning direction and moving the deflector in a direction perpendicular to the object. The location of the image on the object in the auxiliary direction is adjusted by further moving the reflector in the auxiliary direction.

Abstract: The projection aligner for transferring an image of a mask pattern of a mask onto an object to be exposed comprises a projection optical system that forms the image of the mask pattern onto the object, an expansion ratio determiner that measures lengths of the object in first and second directions and determines first and second expansion ratios, which are expansion ratios of the object in the first and second directions, respectively, based on those lengths, and a magnification controller that adjusts the magnification of the projection optical system to a value between the first and second expansion ratios.

Abstract: An optical member inspection apparatus includes an inspection optical system having a light source, and a diffusing means for diffusing the light emitted from the light source. The diffusing means has a central portion and a peripheral portion. The diffusion transmittance of the peripheral portion is higher than the diffusion transmittance of the central portion. The inspection optical system is also provided with an image pick-up means to pick-up an image of the optical member to be inspected, and is positioned so as to receive that light emitted from the light source and transmitted through the diffusing means and the optical member. A judging means is also provided, for judging whether or not the optical member has a defect, in accordance with image signals output from the image pick-up means.

Abstract: An optical member inspection apparatus includes an inspection optical system having a light source, and a diffusing means for diffusing the light emitted from the light source. The diffusing means has a central portion and a peripheral portion. The diffusion transmittance of the peripheral portion is higher than the diffusion transmittance of the central portion. The inspection optical system is also provided with an image pick-up means to pick-up an image of the optical member to be inspected, and is positioned so as to receive that light emitted from the light source and transmitted through the diffusing means and the optical member. A judging means is also provided, for judging whether or not the optical member has a defect, in accordance with image signals output from the image pick-up means.

Abstract: The projection aligner transfers the image of the pattern formed on the mask to the object by scanning a light beam across the mask and the object. The projection aligner includes a driving mechanism for synchronously moving the mask and the object and thereby scanning the light beam across the mask and the object in a predetermined beam scanning direction. The light beam scanning the mask passes through the mask and is projected onto the object by a projection optical system of which magnification is adjusted by a magnification adjusting mechanism. The magnification adjusting mechanism and the driving mechanism are controlled by a controller such that the difference between the magnification of said projection optical system and a velocity ratio of the mask and the object moved by the driving mechanism becomes below a predetermined maximum value which is determined based on a line width of the pattern formed on the mask.

Abstract: A target, which is photographed with an object at a spot for a photogrammtric analytical measurement, comprises first, second, third standard point members and assistant point members. The standard point members and the assistant point members are covered by a reflecting sheet. A distance between the first and second standard point members equals a distance between the second and third standard point members. Two assistant point members are positioned on a first straight line connecting the first and second standard point members. One assistant point member is positioned on a second straight line connecting the second and third standard point members. The distance between the first and second standard point members, the distance between the second and third standard point members, and an angle defined by the first and second straight lines, are predetermined.

Abstract: An optical member inspection apparatus includes an inspection optical system having a light source, and a diffusing means for diffusing the light emitted from the light source. The diffusing means has a central portion and a peripheral portion. The diffusion transmittance of the peripheral portion is higher than the diffusion transmittance of the central portion. The inspection optical system is also provided with an image pick-up means to pick-up an image of the optical member to be inspected, and is positioned so as to receive that light emitted from the light source and transmitted through the diffusing means and the optical member. A judging means is also provided, for judging whether or not the optical member has a defect, in accordance with image signals output from the image pick-up means.

Abstract: An optical member inspection apparatus includes an inspection optical system having a light source, and a diffusing means for diffusing the light emitted from the light source. The diffusing means has a central portion and a peripheral portion. The diffusion transmittance of the peripheral portion is higher than the diffusion transmittance of the central portion. The inspection optical system is also provided with an image pick-up means to pick-up an image of the optical member to be inspected, and is positioned so as to receive that light emitted from the light source and transmitted through the diffusing means and the optical member. A judging means is also provided, for judging whether or not the optical member has a defect, in accordance with image signals output from the image pick-up means.

Abstract: A three points range of high brightness and a four points range of high brightness in a photographed image are selected. It is checked if an identical end point is shared by the three and four points range selected. It is checked if a center of gravity corresponding to the identical end point, a center of gravity corresponding to another end point of the three points rage opposite to the identical end point, and a center of gravity corresponding to another end point of the four points range opposite to the identical end point, meet a positional relationship between standard points of a target.

Abstract: The projection aligner transfers the image of the pattern formed on the mask to the object by scanning a light beam across the mask and the object. The projection aligner includes a driving mechanism for synchronously moving the mask and the object and thereby scanning the light beam across the mask and the object in a predetermined beam scanning direction. The light beam scanning the mask passes through the mask and is projected onto the object by a projection optical system of which magnification is adjusted by a magnification adjusting mechanism. The magnification adjusting mechanism and the driving mechanism are controlled by a controller such that the difference between the magnification of said projection optical system and a velocity ratio of the mask and the object moved by the driving mechanism becomes below a predetermined maximum value which is determined based on a line width of the pattern formed on the mask.

Abstract: The projection aligner includes a lens unit having an optical axis parallel to a mask, a reflector provided to one side of the lens unit to reflect back light passed therethrough, a light source that emits a light beam toward the object through the mask, and a deflector being inserted in an optical path of the light beam at the other side of the lens unit movably along the optical axis of said lens unit. The deflector has first and second mirrors which are inclined against the optical axis of the lens unit in opposite, directions to each other. The first mirror is arranged to deflect the light beam coming from the mask toward the reflector through the lens unit. The second mirror is arranged to deflect the light beam reflected by the reflector and passed through the lens unit toward the object.

Abstract: A projection aligner scans a plurality of light beams over a mask in a main scanning direction to transfer an image of a mask pattern on an object by the light beams passed through the mask. The projection aligner has a plurality of optical systems for projecting light beams passed through the mask onto the object. Each of the optical system includes a lens unit, a reflector provided to one side of the lens unit and a deflector provided to the other side of the lens unit. The light beam passed through the mask is deflected by the deflector, passes through the lens unit, reflected back by the reflector, passes through the lens unit again, and deflected by the deflector toward the object. The size of the image formed by the light beam is varied by moving the reflector in the main scanning direction and moving the deflector in a direction perpendicular to the object. The location of the image on the object in the auxiliary direction is adjusted by further moving the reflector in the auxiliary direction.