Abstract: There is provided a robot device including: a head portion coupled to a trunk; four leg portions on a front left, a front right, a rear left, and a rear right coupled to the trunk; a first indirect portion that tilts the head portion left and right; and a second joint portion that rotates, with respect to the trunk, one of the leg portions on the rear left and the rear right to a front side, and the other to a rear side. It is possible to faithfully reproduce the movement of the four-legged animal by providing the first joint portion and the second joint portion.

Abstract: A system for using a motor to control a power transmission device for driving a vehicle is provided with a clutch member movable bidirectionally in an axial direction; a base member prevented from rotating about an axis; a counter member axially away from and opposed to the base member, the counter member being restrained from moving in both a circumferential direction and the axial direction; an action member interposed between the base member and the counter member, movable in the axial direction, drivingly coupled with the clutch member, and coupled with the motor to create a rotational motion about the axis; and a cam slope tilting in the circumferential direction and ascending from the base member toward the counter member to convert the rotational motion into a motion of the action member in the axial direction.

Abstract: A power transmission device is provided with: a rotary body arranged to receive the torque to rotate about an axis; a clutch including a clutch member engaging with the rotary body and axially movable and clutch teeth connectable with the clutch member to transmit the torque; a solenoid configured to generate a magnetic flux in response to input of electric power; a stator coupled with the solenoid as to conduct the magnetic flux and prevented from rotation about the axis; a rotor arranged to receive the magnetic flux from the stator and, when driven by the received magnetic flux, to create a rotational motion about the axis; and a conversion mechanism drivingly connected with the rotor to convert the rotational motion into a linear motion in a direction along the axis, the conversion mechanism including a thrust member transmitting the linear motion to the clutch member.

Abstract: A differential device is provided with: a casing rotatable about an axis; a differential gear set including a pair of side gears housed in the casing and rotatable about the axis, a pinion shaft penetrating perpendicular to the axis and being secured to the casing; and pinion gears rotatably supported by the pinion shaft and so meshed with the side gears as to enable differential motion between the side gears; friction clutches interposed between the side gears and an inner periphery of the casing to limit the differential motion; a pair of repulsive bodies respectively applying force in directions along the axis to the friction clutches; and a block in contact with and supporting in the directions along the axis both the repulsive bodies, the block so fitting on the pinion shaft as to impose reaction forces from the friction clutches on the pinion shaft.

Abstract: A system for using a motor to control a power transmission device for driving a vehicle is provided with a clutch member movable bidirectionally in an axial direction; a base member prevented from rotating about an axis; a counter member axially away from and opposed to the base member, the counter member being restrained from moving in both a circumferential direction and the axial direction; an action member interposed between the base member and the counter member, movable in the axial direction, drivingly coupled with the clutch member, and coupled with the motor to create a rotational motion about the axis; and a cam slope tilting in the circumferential direction and ascending from the base member toward the counter member to convert the rotational motion into a motion of the action member in the axial direction.

Abstract: A power transmission device is provided with: a rotary body arranged to receive the torque to rotate about an axis; a clutch including a clutch member engaging with the rotary body and axially movable and clutch teeth connectable with the clutch member to transmit the torque; a solenoid configured to generate a magnetic flux in response to input of electric power; a stator coupled with the solenoid as to conduct the magnetic flux and prevented from rotation about the axis; a rotor arranged to receive the magnetic flux from the stator and, when driven by the received magnetic flux, to create a rotational motion about the axis; and a conversion mechanism drivingly connected with the rotor to convert the rotational motion into a linear motion in a direction along the axis, the conversion mechanism including a thrust member transmitting the linear motion to the clutch member.

Abstract: A differential device is provided with: a casing rotatable about an axis; a differential gear set including a pair of side gears housed in the casing and rotatable about the axis, a pinion shaft penetrating perpendicular to the axis and being secured to the casing; and pinion gears rotatably supported by the pinion shaft and so meshed with the side gears as to enable differential motion between the side gears; friction clutches interposed between the side gears and an inner periphery of the casing to limit the differential motion; a pair of repulsive bodies respectively applying force in directions along the axis to the friction clutches; and a block in contact with and supporting in the directions along the axis both the repulsive bodies, the block so fitting on the pinion shaft as to impose reaction forces from the friction clutches on the pinion shaft.

Abstract: Plasma processing equipment includes a chuck stage for supporting a wafer and including a lower electrode, an upper electrode disposed on the chuck stage, an AC power supply which applies first to third signals having different magnitudes of frequencies to the upper electrode or the lower electrode, a dielectric ring which surrounds the chuck stage, an edge electrode located within the dielectric ring, and a resonance circuit connected to the edge electrode. The resonance circuit includes a filter circuit which allows only the third signal among the first to third signals to pass, and a series resonance circuit connected in series with the filter circuit and having a first coil and a first variable capacitor connected in series and grounded.

Abstract: Plasma processing equipment includes a chuck stage for supporting a wafer and including a lower electrode, an upper electrode disposed on the chuck stage, an AC power supply which applies first to third signals having different magnitudes of frequencies to the upper electrode or the lower electrode, a dielectric ring which surrounds the chuck stage, an edge electrode located within the dielectric ring, and a resonance circuit connected to the edge electrode. The resonance circuit includes a filter circuit which allows only the third signal among the first to third signals to pass, and a series resonance circuit connected in series with the filter circuit and having a first coil and a first variable capacitor connected in series and grounded.

Abstract: A differential device is provided with a casing rotatable about an axis, a differential gear set coupled therewith including a pinion gear with a pressure angle (a4) and side gears in mesh therewith, output members respectively mediating torque transmission from the side gears to axles, each of which includes a friction face as a friction clutch for limiting the differential motion, dog teeth, and an oblique face forming an angle (a1) and constituting a cam for operating the friction clutch, a clutch member axially movable for functioning as a clutch to lock the differential motion and including a leg having a side face forming an angle (a2) to function as a cam and movable dog teeth each forming an angle (a3) satisfying an inequality a2?a3; and an actuator capable of driving the clutch member toward a position where the movable dog teeth mesh with the dog teeth.

Abstract: A plasma processing apparatus includes a chamber, a lower and upper electrodes vertically spaced apart from each other in the chamber, a RF transmitting part connected to the lower electrode and configured to supply RF power to the lower electrode, a ground plate spaced downwardly from the lower electrode, and an insulating member laterally surrounding a cavity formed between the lower electrode and the ground plate. The cavity is isolated from a region under the ground plate by the ground plate.

Abstract: A final reduction apparatus includes a carrier, a differential device, a clutch member for interrupting a differential movement of the differential device, and an actuator for operating the clutch member. The clutch member is accommodated in a differential case of the differential device. The actuator is disposed outside the differential case. The carrier includes a main body in which an opening is formed and a cover that closes the opening. The differential device is insertable via the opening into the main body. The actuator is disposed on a side of the cover that is, on an opposite side of the actuator with respect to the opening than the differential device.

Abstract: A differential device is provided with a casing rotatable about an axis, a differential gear set coupled therewith including a pinion gear with a pressure angle (a4) and side gears in mesh therewith, output members respectively mediating torque transmission from the side gears to axles, each of which includes a friction face as a friction clutch for limiting the differential motion, dog teeth, and an oblique face forming an angle (a1) and constituting a cam for operating the friction clutch, a clutch member axially movable for functioning as a clutch to lock the differential motion and including a leg having a side face forming an angle (a2) to function as a cam and movable dog teeth each forming an angle (a3) satisfying an inequality a2?a3; and an actuator capable of driving the clutch member toward a position where the movable dog teeth mesh with the dog teeth.

Abstract: A plasma processing apparatus includes a chamber, a lower and upper electrodes vertically spaced apart from each other in the chamber, a RF transmitting part connected to the lower electrode and configured to supply RF power to the lower electrode, a ground plate spaced downwardly from the lower electrode, and an insulating member laterally surrounding a cavity formed between the lower electrode and the ground plate. The cavity is isolated from a region under the ground plate by the ground plate.

Abstract: A substrate processing apparatus includes a processing container; a placement table; a plurality of pins provided on the placement table configured to perform delivery of the substrate; a plurality of drivers configured to vertically drive the plurality of pins, respectively; a plurality of measuring devices each including an encoder configured to measure height positions of the plurality of pins, respectively. The substrate processing apparatus also includes a controller configured to: measure the height positions of the plurality of pins; select a reference pin; estimate a reference height position; calculate an adjustment speed for making the height positions of the pins other than the reference pin match with the estimated reference height position; and control the drivers, which drive the other pins, to adjust driving speeds of the other pins to an adjustment speed.

Abstract: A pin control method includes: measuring respective height positions of a plurality of pins, which is vertically driven respectively by a plurality of driving units while supporting a substrate; selecting a reference pin, which serves as a reference for speed control, from the plurality of pins using the measured height positions of the plurality of pins; estimating, with respect to the selected reference pin, a reference height position, which is a height position after a predetermined time has passed since the height positions of the plurality of pins were measured; calculating an adjustment speed for making the height positions of the pins other than the reference pin match with the estimated reference height position; controlling the driving units, which drive the other pins, to adjust driving speeds of the other pins to the adjustment speed.

Abstract: Plasma processing equipment includes a chuck stage for supporting a wafer and including a lower electrode, an upper electrode disposed on the chuck stage, an AC power supply which applies first to third signals having different magnitudes of frequencies to the upper electrode or the lower electrode, a dielectric ring which surrounds the chuck stage, an edge electrode located within the dielectric ring, and a resonance circuit connected to the edge electrode. The resonance circuit includes a filter circuit which allows only the third signal among the first to third signals to pass, and a series resonance circuit connected in series with the filter circuit and having a first coil and a first variable capacitor connected in series and grounded.

Abstract: A substrate processing apparatus includes a processing container; a placement table; a plurality of pins provided on the placement table configured to perform delivery of the substrate; a plurality of drivers configured to vertically drive the plurality of pins, respectively; a plurality of measuring devices each including an encoder configured to measure height positions of the plurality of pins, respectively. The substrate processing apparatus also includes a controller configured to: measure the height positions of the plurality of pins; select a reference pin; estimate a reference height position; calculate an adjustment speed for making the height positions of the pins other than the reference pin match with the estimated reference height position; and control the drivers, which drive the other pins, to adjust driving speeds of the other pins to an adjustment speed.

Abstract: In a method of an embodiment, radicals, which are generated from a processing gas, is adsorbed to a layer to be etched without applying a high-frequency bias to a lower electrode, in an adsorption step. In the subsequent etching step, ions, which are generated from the processing gas, are drawn into the layer to be etched by applying a high-frequency bias to the lower electrode. The adsorption step and the etching step are alternately repeated. In the adsorption step, a density of radicals is 200 or greater times a density of ions. In the etching step, RF energy having a power density of 0.07 W/cm2 or less is supplied to the lower electrode or a high-frequency bias having a power density of 0.14 W/cm2 or less is supplied to the lower electrode for a period of 0.5 seconds or less.

Abstract: A streaming system includes an authoring unit, a stream server and a client terminal. The authoring unit generates a file composed of encrypted contents data and the ancillary information at least containing the packetizing control information for generating an RTP packet, a non-encrypted codec dependent header made up of the information pertinent to encoded contents data, and the encryption information for decrypting the encrypted contents data form packet to packet. The streaming server packetizes the encrypted contents data along with at least the codec dependent header and distributes the resulting data as a stream. The client terminal refers to the codec dependent header of the received packet, re-assembles the packet, and decrypts the encrypted contents data of the re-assembled packet to generate contents data.