Abstract: By resistor attached by a piezoelectric element, measurement with high accuracy is possible by strain of the piezoelectric element and there is not a trouble by a short, a piezoelectric actuator, the piezoelectric element and a positioning device therewith. The piezoelectric actuator includes; a piezoelectric element which is formed into an arbitrary shape, polarized in an arbitrary direction, and includes electrodes provided on at least two surfaces opposed in a thickness direction thereof; a driver power supply for applying a voltage between the electrodes to generate strain in the piezoelectric element; a driver power supply for applying a voltage to generate strain in the piezoelectric element; resistors provided on the electrodes through intermediation of insulators; and a displacement detection device connected with the resistors; The electrodes of the piezoelectric element on which the resistors are provided are set at a ground potential.

Abstract: An inching mechanism for a scanning probe microscope capable of performing measurement with high precision while enhancing the scanning speed by a probe furthermore, and a scanning probe microscope comprising it. The inching mechanism for a scanning probe microscope which is provided in a scanning probe microscope (SPM) (1) having a stage (16) for mounting a sample S, and a probe (20) approaching closely to or touching the surface of the sample S, characterized in that the inching mechanism comprises a first drive section and a second drive section provided independently, a probe inching mechanism (26) having the first drive section and inching, by the first drive section, the probe (20) in the X direction and Y direction parallel with the surface of the sample S and intersecting each other, and a stage inching mechanism (27) having the second drive section and inching, by the second drive section, the stage (16) in the Z direction perpendicular to the surface of the sample S.

Abstract: A displacement detection mechanism for a scanning probe microscope capable of performing measurement quickly with high precision even if an objective lens or an illumination system is arranged above or below a sample or a cantilever, and a scanning probe microscope comprising it.

Abstract: The optical displacement-detecting mechanism has: a light source for irradiating a target for measurement with light; a light source-driving circuit for driving the light source; an optical detector made from a semiconductor for receiving light after the irradiation of the target for measurement by the light source and converting the light into an electric signal thereby to detect an intensity of light; and an amplifier including a current-voltage conversion circuit for performing current-to-voltage conversion on a detection signal of the optical detector with a predetermined amplification factor. In the optical displacement-detecting mechanism, a light source having a spectrum half width of 10 nm or larger is used, whereby the light source can be driven with an output power of 2 mW or larger without generating mode hop noise and optical feedback noise.

Abstract: There is provided an optical displacement detection mechanism in which, even if a measurement object changes, a detection sensitivity and a ratio of a noise are adjustable without depending on optical characteristics such as reflectivity, or a shape and mechanical characteristics of a measurement object, an influence of a thermal deformation of the measurement object by an irradiated light to the measurement object can be made small, and a measurement accuracy can be ensured under optimum conditions.

Abstract: The invention provides a fine-adjustment mechanism for a scanning probe microscopy with high rigidity and high degree of measurement accuracy wherein a strain gauge displacement sensor which can be installed in a small space is arranged so that temperature compensation is achieved. The fine-adjustment mechanism composed of a piezoelectric device is provided with at least two-piece electrode. One of the electrodes is configured as a dummy electrode, to which no voltage is applied, and the other electrode is configured as an active electrode which generates strain when voltage is applied. One or two resistors are provided on each of the active electrode and dummy electrode, and a bridge circuit is configured by the resistors.

Abstract: A manufacturing method for a light propagating probe comprises a step of sharpening a light-propagating body having a sharpened section formed on an optical fiber, a step of forming the light-propagating body into a hook shape close to the sharpened section, a metal film coating step for forming a transparent opening section in a tip section, a step of protecting the transparent opening section with a resist material, a step of forming a reflecting surface for a light lever method, a step for metal film coating a spring operating part to the rear from the hook-shaped section, and a step of removing the resist material protecting the transparent opening section.

Abstract: In a manufacture of a probe for a scattering type near-field microscope, there is provided a method of coating, with a high reproducibility, uniform metal particles efficiently inducing a surface enhanced Raman scattering. It has been adapted such that, in the probe for the scattering type near-field microscope, one part or all of the probe due to an interaction of at least an evanescent field is coated by metal particles which don't mutually adhere and have a particle diameter of 10 nm or larger and 50 nm or smaller in radius of curvature.

Abstract: The vibration-type cantilever holder for fastening a cantilever opposed to a sample, supported on a main body part at only its base end and having a probe on its leading end. The holder includes: a cantilever-attaching stand on which the main body part is placed and fastened with the cantilever tilted at a predetermined angle with respect to the sample; a first vibration source fastened to the cantilever-attaching stand and vibrating with a phase and an amplitude depending on a predetermined waveform signal; a holder main body to which the first vibration source is fastened; and a second vibration source fastened to at least one location on the holder main body, and generating vibrations to offset vibrations traveling from the first vibration source to the cantilever-attaching stand and holder main body. The holder allows the cantilever to vibrate according to vibrational characteristics of only the cantilever by counteracting additional vibrations.

Abstract: A scanning probe microscope having a cantilever holder is provided which gives a cantilever great amplitude by a small-sized vibrator configurable in a limited space and is stably operated even in environments of high viscous drag such as a liquid. A cantilever base part of a cantilever is fixed to a fixing part of a scanning probe microscopy cantilever holder. A vibrator is mounted on the fixing part. When it is defined that the front side is the side close to a probe and the rear side is the side close to a supporting part of the fixing part along in the longitudinal direction of the cantilever, the vibrator displaces the front and rear sides of the fixing part of the cantilever holder to each other in the opposite directions within the plane orthogonal to the sample surface to vibrate the cantilever in a liquid.

Abstract: In a manufacture of a probe for a scattering type near-field microscope, there is provided a method of coating, with a high reproducibility, uniform metal particles efficiently inducing a surface enhanced Raman scattering. It has been adapted such that, in the probe for the scattering type near-field microscope, one part or all of the probe due to an interaction of at least an evanescent field is coated by metal particles which don't mutually adhere and have a particle diameter of 10 nm or larger and 50 nm or smaller in radius of curvature.

Abstract: A scanning probe microscope having a cantilever holder is provided which gives a cantilever great amplitude by a small-sized vibrator configurable in a limited space and is stably operated even in environments of high viscous drag such as a liquid. A cantilever base part of a cantilever is fixed to a fixing part of a scanning probe microscopy cantilever holder. A vibrator is mounted on the fixing part. When it is defined that the front side is the side close to a probe and the rear side is the side close to a supporting part of the fixing part along in the longitudinal direction of the cantilever, the vibrator displaces the front and rear sides of the fixing part of the cantilever holder to each other in the opposite directions within the plane orthogonal to the sample surface to vibrate the cantilever in a liquid.

Abstract: The invention provides a fine-adjustment mechanism for a scanning probe microscopy with high rigidity and high degree of measurement accuracy wherein a strain gauge displacement sensor which can be installed in a small space is arranged so that temperature compensation is achieved. The fine-adjustment mechanism composed of a piezoelectric device is provided with at least two-piece electrode. One of the electrodes is configured as a dummy electrode, to which no voltage is applied, and the other electrode is configured as an active electrode which generates strain when voltage is applied. One or two resistors are provided on each of the active electrode and dummy electrode, and a bridge circuit is configured by the resistors.

Abstract: A manufacturing method for a light propagating probe comprises a step of sharpening a light-propagating body having a sharpened section formed on an optical fiber, a step of forming the light-propagating body into a hook shape close to the sharpened section, a metal film coating step for forming a transparent opening section in a tip section, a step of protecting the transparent opening section with a resist material, a step of forming a reflecting surface for a light lever method, a step for metal film coating a spring operating part to the rear from the hook-shaped section, and a step of removing the resist material protecting the transparent opening section.

Abstract: A scanning probe microscope comprises an elastic probe having a longitudinal axis and a probe tip. A vibration device has a piezoelectric vibrating member and an AC voltage generator for vibrating the probe tip relative to a surface of a sample. A vibration detecting device has a piezoelectric detecting member and a current/voltage amplifier circuit for detecting vibration of the probe tip. A probe holder supports the probe such that the probe is biased into pressure contact with the piezoelectric detecting member at an oblique angle relative to the longitudinal axis of the probe while the probe tip extends in a Z direction generally perpendicular to sample surface during vibration of the probe tip relative to the sample surface. A coarse movement mechanism effects coarse displacement of the probe tip in the Z direction to bring the probe tip close to the surface of the sample.