Abstract: A deterioration evaluation method of a line sensor includes detecting an interference fringe of pulse laser light using the line sensor; calculating, based on a signal value obtained from each of a plurality of sensor channels included in a sensor channel range being at least a part of the line sensor in accordance with light intensity of the interference fringe, an evaluation value which is an index of deterioration for each of the sensor channels or each group of the sensor channels, and storing the evaluation value in a storage device; and determining a deterioration state of the line sensor based on the evaluation value.

Abstract: An energy measuring apparatus according to one aspect of the present disclosure includes a first beam splitter, a second beam splitter, a third beam splitter, and a fourth beam splitter, which sequentially reflect part of a main beam and input the beam to an energy sensor. The first beam splitter, the second beam splitter, the third beam splitter, and the fourth beam splitter are each arranged to have such an incident angle and a folding direction of an optical path as to suppress a change in detection value of the energy sensor due to a change in incident angle and a change in polarization purity of the main beam.

Abstract: A sensor degradation evaluation method according to an aspect of the present disclosure includes an evaluation step of evaluating degradation of at least one of a sensor for coarse measurement that receives interference fringes produced by a spectrometer for coarse measurement and a sensor for fine measurement that receives interference fringes produced by a spectrometer for fine measurement, and the evaluation step includes causing a plurality of kinds of laser light having wavelengths different from one another to be sequentially incident on the spectrometer for coarse measurement and the spectrometer for fine measurement and acquiring a coarse-measurement wavelength and a fine-measurement wavelength on a wavelength basis from a plurality of the received interference fringes, acquiring a degradation parameter on a wavelength basis from the coarse-measurement wavelength and the fine-measurement wavelength on a wavelength basis, and comparing the degradation parameter on a wavelength basis with a threshold.

Abstract: A laser system connectable to an exposure apparatus includes a spectrometer configured to acquire a measurement waveform from an interference pattern of laser light output from the laser system, and a processor configured to calculate a convolution spectrum waveform using the measurement waveform and a first intermediate function obtained through a process of deconvolution of an aerial image function of the exposure apparatus with an instrument function of the spectrometer.

Abstract: A laser apparatus according to an aspect of the present disclosure includes a laser oscillator that outputs pulsed laser light, a deformable mirror including a deformer that deforms a reflective surface, a first processor that drives the deformer during the period for which the reflective surface reflects the pulsed laser light, a homogenizer that homogenizes the pulsed laser light reflected off the deformable mirror, and a spectrum measuring instrument that measures the spectrum of the pulsed laser light homogenized by the homogenizer.

Abstract: A sensor degradation evaluation method according to an aspect of the present disclosure includes an evaluation step of evaluating degradation of at least one of a sensor for coarse measurement that receives interference fringes produced by a spectrometer for coarse measurement and a sensor for fine measurement that receives interference fringes produced by a spectrometer for fine measurement, and the evaluation step includes causing a plurality of kinds of laser light having wavelengths different from one another to be sequentially incident on the spectrometer for coarse measurement and the spectrometer for fine measurement and acquiring a coarse-measurement wavelength and a fine-measurement wavelength on a wavelength basis from a plurality of the received interference fringes, acquiring a degradation parameter on a wavelength basis from the coarse-measurement wavelength and the fine-measurement wavelength on a wavelength basis, and comparing the degradation parameter on a wavelength basis with a threshold.

Abstract: There is provided a screen guide that engages a support rail or is detachable from the support rail at an intermediate position on the support rail. The support rail supports the screen guide and includes first and second engagement edges, and the screen guide is formed by connecting a plurality of guide pieces to one another in series. Each of the guide pieces includes a piece body that engages an end portion of a screen and an engagement member that includes first and second engagement portions that engage the first and second engagement edges of the support rail, respectively. Each of the engagement members is coupled to the corresponding piece body such that the engagement member is capable of being displaced to a first position at which the first and second engagement portions engage the first and second engagement edges, respectively, and to a second, detached position.

Abstract: An excimer laser apparatus according to the present disclosure includes an etalon spectrometer configured to measure a fringe waveform of a laser beam; and a controller configured to obtain area of a first ratio in a spectral space obtained based on a result of the measurement by the etalon spectrometer, calculate a first spectral line width of the laser beam based on the obtained area of the first ratio, and calibrate a first spectral line width based on a correlation function representing correlation between the first spectral line width and a second spectral line width of the laser beam measured by a reference meter.

Abstract: An energy measuring apparatus according to one aspect of the present disclosure includes a first beam splitter, a second beam splitter, a third beam splitter, and a fourth beam splitter, which sequentially reflect part of a main beam and input the beam to an energy sensor. The first beam splitter, the second beam splitter, the third beam splitter, and the fourth beam splitter are each arranged to have such an incident angle and a folding direction of an optical path as to suppress a change in detection value of the energy sensor due to a change in incident angle and a change in polarization purity of the main beam.

Abstract: Provided are an information processing device, etc. that is capable of extracting information specific to a user from speech data. This information processing device is provided with: speech recognition means for generating a character string based on speech data; filtering means for filtering one or more keywords extracted from the character string generated by the speech recognition means, based on one or more words which are relevant to a speaker of the speech data and stored in advance; and output means for outputting a result of the filtering performed by the filtering means.

Abstract: There is provided a screen device that is capable of preventing deformation such as loosening of a horizontally-sliding roll screen due to the weight of the screen. A guide member has a slit that allows a fastener-like member at an upper end of the screen to be slidably engaged therewith in a retained state. In a state in which a space, which allows bending in the vertical direction, is formed above the guide member, both end portions and of the guide member are fixed to an upper horizontal frame of a screen frame, flange portions of the guide member are positioned above protruding walls in the upper horizontal frame, and spring members that apply upward urging forces to the guide member are provided between the protruding walls and the flange portions. Thus, deformation of the screen due to the weight thereof is suppressed by using the guide member.

Abstract: A wavelength measuring device configured to detect a wavelength of ultraviolet laser light outputted from a laser resonator with at least one etalon, the wavelength measuring device includes: a first housing having an interior space being sealed and accommodating the etalon, an input window through which the ultraviolet laser light enters to the first housing, the input window being provided at a first opening of the first housing, a first sealing member configured to seal a gap between a rim part of the input window and a circumferential portion of the first opening, a shielding film provided between the rim part of the input window and the first sealing member and configured to shield the first sealing member from the ultraviolet laser light coming from the input window, and a diffusing element provided outside of the first housing and configured to diffuse the ultraviolet laser light before being incident on the input window.

Abstract: The purpose of the present invention is to provide a terminal device capable of predicting higher risks. The terminal device determines whether a user is operating a device while walking; collects ambient sound; and, if it is determined that the user is operating the device while walking, predicts a risk to the user on the basis of a risk object candidate captured in image data obtained from a camera with which the terminal device is equipped. The terminal device also calculates the direction of a sound generating source on the basis of a sound signal obtained from a sound collection device.

Abstract: An excimer laser apparatus according to the present disclosure includes an etalon spectrometer configured to measure a fringe waveform of a laser beam; and a controller configured to obtain area of a first ratio in a spectral space obtained based on a result of the measurement by the etalon spectrometer, calculate a first spectral line width of the laser beam based on the obtained area of the first ratio, and calibrate a first spectral line width based on a correlation function representing correlation between the first spectral line width and a second spectral line width of the laser beam measured by a reference meter.

Abstract: Provided are an information processing device, etc. that is capable of extracting information specific to a user from speech data. This information processing device is provided with: speech recognition means for generating a character string based on speech data; filtering means for filtering one or more keywords extracted from the character string generated by the speech recognition means, based on one or more words which are relevant to a speaker of the speech data and stored in advance; and output means for outputting a result of the filtering performed by the filtering means.

Abstract: A line-narrowed KrF excimer laser apparatus includes a laser chamber, a line narrow optical system, an actuator, an output coupling mirror, a wavelength detecting unit, and a wavelength controller. The actuator is capable of changing a wavelength of light selected by the line narrow optical system. The wavelength detecting unit includes a low-pressure mercury lamp accommodating mercury, a getter material that adsorbs at least a part of the mercury, and a hot cathode that excites at least a part of the mercury, an etalon provided at a position where reference light emitted from the low-pressure mercury lamp and detected light emitted from the output coupling mirror are incident on the etalon, and a light intensity distribution sensor configured to detect an intensity distribution profile of interference fringes of the reference light and an intensity distribution profile of interference fringes of the detected light.

Abstract: There is provided a screen device that is capable of preventing deformation such as loosening of a horizontally-sliding roll screen due to the weight of the screen. A guide member has a slit that allows a fastener-like member at an upper end of the screen to be slidably engaged therewith in a retained state. In a state in which a space, which allows bending in the vertical direction, is formed above the guide member, both end portions and of the guide member are fixed to an upper horizontal frame of a screen frame, flange portions of the guide member are positioned above protruding walls in the upper horizontal frame, and spring members that apply upward urging forces to the guide member are provided between the protruding walls and the flange portions. Thus, deformation of the screen due to the weight thereof is suppressed by using the guide member.

Abstract: A line-narrowed KrF excimer laser apparatus includes a laser chamber, a line narrow optical system, an actuator, an output coupling mirror, a wavelength detecting unit, and a wavelength controller. The actuator is capable of changing a wavelength of light selected by the line narrow optical system. The wavelength detecting unit includes a low-pressure mercury lamp accommodating mercury, a getter material that adsorbs at least a part of the mercury, and a hot cathode that excites at least a part of the mercury, an etalon provided at a position where reference light emitted from the low-pressure mercury lamp and detected light emitted from the output coupling mirror are incident on the etalon, and a light intensity distribution sensor configured to detect an intensity distribution profile of interference fringes of the reference light and an intensity distribution profile of interference fringes of the detected light.

Abstract: There is provided a screen guide that engages a support rail or is detachable from the support rail at an intermediate position on the support rail. The support rail supports the screen guide and includes first and second engagement edges, and the screen guide is formed by connecting a plurality of guide pieces to one another in series. Each of the guide pieces includes a piece body that engages an end portion of a screen and an engagement member that includes first and second engagement portions that engage the first and second engagement edges of the support rail, respectively. Each of the engagement members is coupled to the corresponding piece body such that the engagement member is capable of being displaced to a first position at which the first and second engagement portions engage the first and second engagement edges, respectively, and to a second, detached position.

Abstract: A wavelength measuring device configured to detect a wavelength of ultraviolet laser light outputted from a laser resonator with at least one etalon, the wavelength measuring device includes: a first housing having an interior space being sealed and accommodating the etalon, an input window through which the ultraviolet laser light enters to the first housing, the input window being provided at a first opening of the first housing, a first sealing member configured to seal a gap between a rim part of the input window and a circumferential portion of the first opening, a shielding film provided between the rim part of the input window and the first sealing member and configured to shield the first sealing member from the ultraviolet laser light coming from the input window, and a diffusing element provided outside of the first housing and configured to diffuse the ultraviolet laser light before being incident on the input window.