Abstract: The exposure device is able to supply only EUV radiation to a mask, while eliminating radiation other than the EUV radiation. A multi layer made from a plurality of Mo/Si pair layers is provided upon the front surface of a mirror, and blazed grooves are formed in this multi layer. Radiation which is incident from a light source device is incident upon this mirror, and is reflected or diffracted. Since the reflected EUV radiation (including diffracted EUV radiation) and the radiation of other wavelengths are reflected or diffracted at different angles, accordingly their directions of progression are different. By eliminating the radiation of other wavelengths with an aperture and/or a dumper, it is possible to irradiate a mask only with EUV radiation of high purity.

Abstract: An extreme ultra violet light source apparatus in which debris moving within a chamber are prevented from reducing reflectance or transmittance of optical elements of an EUV collector mirror, etc, and extreme ultra violet light can stably be generated in a long period. The apparatus includes: a target supply unit for supplying a target to a predetermined position within a chamber; a driver laser for applying a laser beam to the target to generate first plasma; a collector mirror provided within the chamber, for collecting extreme ultra violet light radiated from the first plasma; a gas supply unit for supplying a gas into the chamber; an excitation unit for exciting the gas to generate second plasma around a region where the first plasma is generated; and an exhaust unit for exhausting the chamber and ejecting debris emitted from the first plasma to outside of the chamber.

Abstract: An extreme ultra violet light source apparatus in which debris staying and accumulating within a chamber can be prevented from contaminating the chamber and deteriorating the performance of important optical component. The extreme ultra violet light source apparatus includes: a chamber in which extreme ultra violet light is generated; a driver laser for applying a laser beam to a target supplied to a predetermined position within the chamber to generate plasma; a collector mirror provided within the chamber, for collecting and outputting the extreme ultra violet light radiated from the plasma; an exhaust path communicating with the chamber and connected to an exhausting device, for maintaining an interior of the chamber at a certain pressure; a catching chamber provided in the exhaust path, for catching debris generated from the plasma; and a collecting unit for collecting the caught debris out of the chamber.

Abstract: [Object] To provide a holding member for a net for a screen door effective for fixing a net for a screen door having fine filaments and a fine mesh compared with a known insect protection net to a frame body for use in a screen door. [Solving Means] A holding member 14 is constructed by providing a pair of elastically deformable leg ridges 16 being fitted into a latch groove 18 under a condition of being in pressure contact with an inward projecting edge 19 thereof, to a cover plate 15 for covering the latch groove 18. A soft pressure-contact portion 15a being in pressure contact with the net 12 sandwiched between the same and an outer surface 19a of the inward projecting edge 19 of the latch groove 18 is integrally formed at an outer side of the leg ridge 16 of the cover plate 15.

Abstract: The present invention is constructed such that in a sliding screen door in which a net is formed to be capable of expansion and contraction by being alternately folded back in a reverse direction, and is formed to be capable of freely opening and closing by horizontal pulling, a net guide for guiding the aforementioned net is formed to be able to form the net guide into a straight line-shape in a condition of being led out from a frame member, and a movement of a net-holding member that follows the net guide is made smooth, and many of the guiding elements form the net guide 12 for guiding the lower end of the net, which is moved out from and into an interior of a vertical frame member 6, from the lower end of the vertical frame member 6 that is attached to both ends of the net in an open and close direction in response to the open-and-close movement of the net, into an approximately U-shape composed of a bottom portion and rising wall portions, and are mutually and flexibly connected by means of inserting a

Abstract: A screen device including a screen guide that has a simple structure, stably operates, and, in a guided-out state, can be formed in a straight rail-like shape. A screen guide of the screen device includes a large number of guide pieces, each formed in an approximately U-shape by a bottom and standing walls respectively extending along the end of a screen and the external side surfaces of the screen, and having a structure in which passage holes are formed along the tops of the standing walls, two strings of wire members are exerted through the respective passage holes, and, when the screen guide is guided out along the end of the screen, the serial contact surfaces of the adjacent guide pieces abut against each other.

Abstract: Solid tin (Sn) is used as a target, a CO2 laser is used as an excitation source for the target, and after the size of debris emitted from plasma is decreased to a nanometer or smaller size by exciting the solid tin by a laser beam outputted from the CO2 laser, the emitted debris of a nanometer or smaller size is acted upon so as not to reach the optical element. In accordance with the present invention, in the EUV light source apparatus, the debris emitted together with EUV light from plasma generated by exciting a target within a chamber by a laser beam is prevented from adhering to an optical element provided within the chamber and forming a metal film. As a result, the service life of the optical element can be extended.

Abstract: A screen device includes an expandable and contractible folding screen connected to a side frame member and to a movable stile to be opened and closed, and a translation mechanism for the movable stile. The translation mechanism includes a single wire having three or more segments arranged in rows extending through the screen. The wire segments are redirected at an inlet to the movable stile, are guided along the length of the movable stile, are redirected in upper and lower areas of the movable stile, and are guided along the lateral frame members toward the opposite frame member, thereby the wire stretches between the movable stile and the opposite frame member the same number of times as the number of wire segments extending through the screen to absorb changes in the length of the wire segments extending through the screen in accordance with movement of the movable stile.

Abstract: An EUV light source apparatus capable of preventing the efficiency of generation of EUV light from decreasing due to deterioration of a window of an EUV light generation chamber. The EUV light source apparatus includes an EUV light generation chamber provided with a window, a driver laser which generates a laser beam, a concave lens which enlarges the laser beam, a convex lens which collimates the enlarged laser beam, a parabolic concave mirror which is arranged in the EUV light generation chamber and reflects the collimated laser beam to collect the laser beam to a target material, a parabolic concave mirror adjusting mechanism which adjusts position and angle of the parabolic concave mirror, an EUV light collector mirror which collects EUV light, and a purge gas supply unit which supplies a purge gas for protecting the window and the parabolic concave mirror.

Abstract: The present invention is constructed such that in a sliding screen door in which a net is formed to be capable of expansion and contraction by being alternately folded back in a reverse direction, and is formed to be capable of freely opening and closing by horizontal pulling, a net guide for guiding the aforementioned net is formed to be able to form the net guide into a straight line-shape in a condition of being led out from a frame member, and a movement of a net-holding member that follows the net guide is made smooth, and many of the guiding elements form the net guide 12 for guiding the lower end of the net, which is moved out from and into an interior of a vertical frame member 6, from the lower end of the vertical frame member 6 that is attached to both ends of the net in an open and close direction in response to the open-and-close movement of the net, into an approximately U-shape composed of a bottom portion and rising wall portions, and are mutually and flexibly connected by means of inserting a

Abstract: In a wavelength detecting apparatus using an etalon, a drift in wavelength measurement by the etalon is stabilized and an adverse influence of out gas is eliminated, so that correct wavelength measurement is realized. The wavelength detecting apparatus includes a housing equipped with a port for use of introducing replacement gas, an etalon set inside the housing, and a moisture-absorbing unit for absorbing at least moisture released inside the housing.

Abstract: A screen device including a screen guide that has a simple structure, stably operates, and, in a guided-out state, can be formed in a straight rail-like shape. A screen guide of the screen device includes a large number of guide pieces, each formed in an approximately U-shape by a bottom and standing walls respectively extending along the end of a screen and the external side surfaces of the screen, and having a structure in which passage holes are formed along the tops of the standing walls, two strings of wire members are exerted through the respective passage holes, and, when the screen guide is guided out along the end of the screen, the serial contact surfaces of the adjacent guide pieces abut against each other.

Abstract: A melt level or the gap between a melt surface and a heat shield is measured accurately irrespective of how the melt surface is. A laser beam from a range-finding unit is reflected by a scanning mirror and projected on a melt surface through an entrance window and a quartz prism in a chamber of a puller. After specular reflection, the beam forms a measurement spot in the bottom of a heat shield and scatters. Part of the scatter, after specular reflection at the melt surface (secondary reflection), passes through the prism, the entrance window and the scanning mirror to the range-finding unit. The range-finding unit carries out triangulation using the distance between a laser source and a photodetector therein, and the angle of incidence and the angle of the received laser beam.

Abstract: In a wavelength detecting apparatus using an etalon, a drift in wavelength measurement by the etalon is stabilized and an adverse influence of out gas is eliminated, so that correct wavelength measurement is realized. The wavelength detecting apparatus includes a housing equipped with a port for use of introducing replacement gas, an etalon set inside the housing, and a moisture-absorbing unit for absorbing at least moisture released inside the housing.

Abstract: A melt level or the gap between a melt surface and a heat shield is measured accurately irrespective of how the melt surface is. A laser beam (2) from a range-finding unit (8) is reflected by a scanning mirror (24) and projected on a melt surface (3) through an entrance window (18) and a quartz prism (20) in a chamber (17) of a puller. After specular reflection, the beam forms a measurement spot (31) in the bottom of a heat shield (16) and scatters. Part of the scatter, after specular reflection at the melt surface (3) (secondary reflection), passes through the prism (20), the entrance window (18) and the scanning mirror (24) to the range-finding unit (8). The range-finding unit (8) carries out triangulation using the distance between a laser source and a photodetector therein, and the angle of incidence and the angle of the received laser beam.

Abstract: A melt level detector is provided for detecting the melt level of a CZ furnace by triangulation. The laser beam (2) from a laser source (1) is moved in radial directions of a crucible (14) in the CZ furnace to find a location where a photodetector system (5, 7) can receive the reflection (4) from the melt level (3), and the laser beam (2) is fixed at the location. Since the measurements thus take place within an extremely small angular range of the laser beam, the melt level (3) can be detected with little effect of noise on the melt level (3) while eliminating complexity of the device.

Abstract: There are provided a CZ system for manufacturing a single-crystal ingot, which produces a perfect crystal with good reproducibility through growth of a single-crystal ingot, as well as a method of manufacturing the single-crystal ingot. A system of manufacturing a single-crystal ingot by pulling a single-crystal ingot from molten raw material by means of a Czochralski technique, the system including measurement means for measuring the distance between the level of molten raw material and the bottom of a heat-shielding member. On the basis of the thus-measured distance, the temperature gradient of area G1 of the single-crystal pulled silicon ingot is controlled so as to produce a perfect crystal with good reproducibility, by means of controlling any factor for pulling a single-crystal silicon ingot selected from the group comprising the amount of heat applied to silicon melt, the level of silicon melt, and the pull rate of a single-crystal silicon ingot.

Abstract: A laser marking method and an apparatus thereof which realize stamp processing with a beautiful appearance and a high precision, without reducing the manufacturing efficiency. The laser marking method comprises a step of sequentially displaying divisional patterns each corresponding to one scanning line of a first deflector, a step of sequentially scanning the divisional patterns with a laser beam from a laser oscillator by the first deflector, and a step of moving a stamp position on a work surface for every one of scanning transmission beams respectively transmitted through the divisional patterns, in a direction perpendicular to a scanning direction, by a second deflector, thereby to synthesize and stamp the divisional patterns.

Abstract: A confocal optical apparatus comprising a light source, a first aperture portion for passing light emitted from the light source and obtaining a point source, an objective lens for causing the light that has passed through the first aperture portion to converge on a measurement object, a second aperture portion located on a plane conjugate with the convergence surface on the measurement object, and light detectors for detecting light that has passed through the second aperture portion, wherein placing the first and second aperture portions in the same position and using them as the same aperture portion, as well as positioning the detection surfaces of the light detectors substantially on the same surfaces as the conjointly used identical aperture portions make it possible to reduce the size and weight of the apparatus, to perform three-dimensional shape measurements rapidly and accurately, and to facilitate the alignment of each portion.

Abstract: A three-dimensional image measuring device which comprises a light source; a plane image forming unit for forming a plane image in a space in its depth direction on the basis of light emitted from the light source; a scanning unit for moving and scanning the plane image formed by the plane image forming unit in its depth direction; an object to be measured disposed in the space where the plane image is formed; a light receiving unit for measuring the strength of light scattered on a surface of the object as the plane image is moved and scanned and; a distance measuring unit for measuring the distance to the object on the basis of the output of the light receiving unit, whereby a three-dimensional image with least reduced invisible area is easily and accurately measured in a short time without using the principle of triangulation.