Abstract: An exposure apparatus is for illuminating a pattern on a mask by an illumination optical system to transfer the pattern on the mask onto a photosensitive substrate set on a stage through a projection optical system. The exposure apparatus comprises a first supply device for supplying an inert gas toward the photosensitive substrate substantially in parallel with the optical axis of the projection optical system in a space open to communicate with the atmosphere between the projection optical system and the photosensitive substrate, and a second supply device for supplying the inert gas to the space in a direction intersecting with the optical axis of the projection optical system so as to establish an inert gas atmosphere in the space together with the first supply device. The transfer is conducted in the inert gas atmosphere.

Abstract: A digitized image data produced by reading a certain scanning line portion of a shading correction plate by an image sensor is stored in a buffer memory as digital data B. A digital comparator compares, on a pixel-by-pixel basis, the digital data B with new digital data A produced by reading another scanning line portion apart from the above portion by a distance of a plurality of scanning lines. This comparison is repeated while the reading line portion on the correction plate is changed until a difference between the data B and the new data A becomes smaller than a predetermined value for all the pixels. The data of one scanning line finally stored in the buffer memory is transferred to a shading correction data memory.

Abstract: A key telephone system includes a temporary registration memory for temporarily storing operating data and a final registration timing data memory for storing final registration timing data, including a timing condition for transferring contents of the temporary registration memory to the operating data memory. Operating data input by a user and the final registration timing data are written into the temporary registration memory and the final registration timing data memory, respectively, from a data input unit connected to the main unit during a data setting mode. The system discriminates establishment of the timing condition designated in accordance with the final registration timing data stored in the final registration timing data memory, whereupon the operating data stored in the temporary registration memory is transferred to the operating data memory.