Abstract: The present invention is to provide a thin miniaturized reactor for chemical reaction with effective use of heat. The reactor has paired channels formed on a substrate such that the channels extend close to and along each other and are provided with a heat exchanger for efficient heat exchange between the channels. The reactor is produced by forming on substrates the paired channels and heat exchanger and then bonding the substrates together. This manufacturing method is simple and reduces steps.

Abstract: A method for fabricating a micromachine component of resin comprising step (a) of forming a sacrifice layer on a substrate, step (b) of forming at least two photosensitive resin composition layers sequentially on the sacrifice layer, and performing photolithography of each photosensitive resin composition layer to form an air gap portion defining the circumferential edge potion of the micromachine component and an air gap portion where an internal structure of the micromachine component is constituted to form a multilayer structure, step (c) for depositing dry film resist on the multilayer structure of the cured photosensitive resin composition layer, and performing photolithography of the dry film resist layer to form a cured dry film resist layer in which an air gap portion defining the circumferential edge of a shroud layer and an air gap where the structure of the shroud layer is constituted are formed, and step (d) for separating the micromachine component having the multilayer structure of the cured pho

Abstract: A bimorph switch electrically connecting a traveling contact and a fixed contact. The switch comprises a substrate having a front face, a rear face, and a through hole penetrating from the front face to the rear face; a fixed contact extending from an edge portion of the aperture of the through hole towards the inside of the aperture; and a bimorph section holding the traveling contact at a position facing the aperture and driving the traveling contact. One end of the bimorph section may be formed on a silicon oxide layer formed on a front face of the substrate.

Abstract: A driving mechanism using shape memory alloys comprises a first and a second shape memory alloys coils (1, 2), a pin-like drive member (3) connected to each of the shape memory alloys coils (1, 2) extending in the axis direction, a substrate (4) having a wiring pattern (11) and a drive circuit (4a) to supply current to the shape memory alloys coils (1, 2), and a magnetic latch part (9) to hold the drive member (3), and the magnetic latch part (9) has a latch position in the axis direction of the drive member (3), the drive circuit (4a) selectively current-drives the first and the second shape memory alloys coils (1, 2), the driven first or second shape memory alloys coils (1, 2) is heated and compressed to move the drive member (3) in the axis direction, and magnetic bodies (9a, 9b) provided to the drive member (3) is magnetically fixed at the latch position, thereby fixed and held in the axis direction.

Abstract: A driving mechanism configured to turn a plate member with respect to a frame member around a predetermined turning axis includes a pair of supporting members supporting the plate member, a pair of actuators provided on both sides with respect to the turning axis and on the same surface side of the plate member. Each of the actuators includes a fixed electrode unit fixed to the frame member and a movable electrode unit fixed to the plate member. The fixed electrode unit includes a substrate, a pair of fixed comb electrodes provided on both surface sides of the substrate. The movable electrode unit includes a pair of movable comb electrodes, each of which engages with the corresponding fixed comb electrode with a gap therebetween. Both pairs of the fixed comb electrode and the corresponding movable comb electrode are configured such that a voltage can be applied therebetween independently.

Abstract: There is provided a micromirror which includes a holding unit, a mirror that is held by the holding unit to be pivotable about a rotation axis of the mirror, a first fixed electrode group including a plurality of electrodes fixed to the holding unit, a second fixed electrode group including a plurality of electrodes fixed to the holding unit, a first movable electrode group including a plurality of electrodes fixed to the mirror and located adjacently to the first fixed electrode group, and a second movable electrode group including a plurality of electrodes fixed to the mirror and located adjacently to the second fixed electrode group.

Abstract: A beam (32) of a probe bead (30) having a uniform thickness is formed by using a silicon layer (64) of a SOI substrate. The beam of the probe head is formed by growing a boron-doped diamond and non-doped diamond on a processing substrate, respectively.

Abstract: A deflector which deflects a charged particle beam includes a substrate having an opening through which the charged particle beam should pass, and a deflection electrode which is arranged in the opening to deflect the charged particle beam and has a first conductive member and second conductive member which are formed by plating. The second conductive member is formed on a surface of the first conductive member and is essentially made of a material that is more difficult to oxidize than the first conductive member.

Abstract: There is provided a micromirror, which is provided with a reflection mirror, a first pair of torsion bars formed to protrude from the reflection mirror, a first supporting frame that supports the reflection mirror such that the reflection mirror is torsionally rotatable about a first rotation axis via the first pair of torsion bars, a second pair of torsion bars formed to protrude from the first supporting frame in a direction substantially perpendicular to a direction in which the first pair of torsion bars are extended, and a second supporting frame that supports the first supporting frame such that the first supporting frame is torsionally rotatable about a second rotation axis substantially perpendicular to the first rotation axis via the second pair of torsion bars. In this configuration, each of the second pair of torsion bars includes two separate conductive members.

Abstract: There is provided a micromirror which includes a holding unit, a mirror that is held by the holding unit to be pivotable about a rotation axis of the mirror, a first fixed electrode group including a plurality of electrodes fixed to the holding unit, a second fixed electrode group including a plurality of electrodes fixed to the holding unit, a first movable electrode group including a plurality of electrodes fixed to the mirror and located adjacently to the first fixed electrode group, and a second movable electrode group including a plurality of electrodes fixed to the mirror and located adjacently to the second fixed electrode group.

Abstract: There is provided a micromirror, which is provided with a reflection mirror, a first pair of torsion bars formed to protrude from the reflection mirror, a first supporting frame that supports the reflection mirror such that the reflection mirror is torsionally rotatable about a first rotation axis via the first pair of torsion bars, a second pair of torsion bars formed to protrude from the first supporting frame in a direction substantially perpendicular to a direction in which the first pair of torsion bars are extended, and a second supporting frame that supports the first supporting frame such that the first supporting frame is torsionally rotatable about a second rotation axis substantially perpendicular to the first rotation axis via the second pair of torsion bars. In this configuration, each of the second pair of torsion bars includes two separate conductive members.

Abstract: A scanning mirror unit for scanning a beam comprises: at least one cantilever which is formed by bonding an elastic material and a piezoelectric material together and supported by a base at its one end; and a movable mirror which is supported at least by a free end of the cantilever at its peripheral part. When voltage is applied to the piezoelectric material, the free end of the cantilever moves in a prescribed direction to press and move the peripheral part of the movable mirror while leaving a central part of the movable mirror at substantially the same position to cause a tilt to the movable mirror. With such composition of the scanning mirror unit, a reflecting member having a sufficient thickness (e.g. some hundreds of microns) can be employed for the movable mirror, by which a high power laser beam effective for treatment of affected parts, etc. can be reflected finely and durably.

Abstract: A method of making an active slender tube as implemented as a catheter, guide wire, or any other medical or non-medical micro-mechanical or -system or system's active micro-component is disclosed, comprising preparing an actuator made from a shape memory alloy (SMA) and forming at least a portion of a tubular body; disposing outside of SMA made actuator an elastically deformable outer skeleton coaxially therewith; and fastening together SMA made actuator and outer skeleton wire adjacent to non-insulated portions, step of fastening includes a step of passing an electric current through a lead wire while in an electroplating liquid to deposit a metal on lead wire and non-insulated portions from said liquid and thereby to electrically join SMA made actuator and outer skeleton together at corresponding areas.

Abstract: An active tube and its system are offered which can be directed by bending its tip, controlling the degree of bend, thereby easily capable of insertion into difficult positions, and which can be driven at low temperature at which it can be used for inspection and medical treatment. A bending mechanism (21) is constructed by wiring an SMA coil (21e) along an outer side of a working channel tube (21a). The bending mechanism (21) is inserted into an outer skin tube (25) with a plurality of built-in weights (22). A front tip (23) is attached to the front end side of the bending mechanism (21) as a tip (2) of an active tube (1). A main tube (4) is connected through the working channel tube (21a) at the tip (2). A wire (21g) is connected to the SMA coil (21e). Said wire (21g) is inserted to the behind end side (41) of the main tube (4) in a wiring channel (4B9 of the main tube, thereby makes it possible to drive the bending mechanism (21) from outside.

Abstract: A functional multilayer film and a method for manufacturing the same is provided in which the intervals of fine metallic bodies in the thickness direction and the arrangement thereof in the surface direction are regular, and the fine metallic bodies arranged on each layer are aligned in the thickness direction. A functional multilayer film is obtained by fixing a plurality of fine metallic bodies to a matrix made of a dielectric substance. The matrix is obtained by laminating metal-arranged thin films, which each contain a dielectric thin film having a predetermined thickness and the fine metallic bodies arranged on the dielectric thin film. A plurality of recesses is regularly formed on the surface of the dielectric thin film, and the fine metallic bodies are arranged in the lower parts of the recesses.

Abstract: A bimorph switch electrically connecting a traveling contact and a fixed contact. The switch comprises a substrate having a front face, a rear face, and a through hole penetrating from the front face to the rear face; a fixed contact extending from an edge portion of the aperture of the through hole towards the inside of the aperture; and a bimorph section holding the traveling contact at a position facing the aperture and driving the traveling contact. One end of the bimorph section may be formed on a silicon oxide layer formed on a front face of the substrate.

Abstract: After a resist mask with a predetermined thickness profile is overlaid on a piezoelectric substrate, the substrate is shaped to an objective three-dimensional configuration by dry etching process using an etching gas with a differential etching rate between the piezoelectric substrate and the mask. The thickness profile may be given to the mask by reflow of masking material or by compression with a precision stamp. The substrates can be shaped to a three-dimensional configuration corresponding to an amplified thickness profile of the mask by compositional control of a reactive gas during dry etching. Since the piezoelectric material is accurately shaped to an objective form without defects, high-quality elements and devices are provided.

Abstract: A bimorph switch electrically connecting a traveling contact and a fixed contact. The switch comprises a substrate having a front face, a rear face, and a through hole penetrating from the front face to the rear face; a fixed contact extending from an edge portion of the aperture of the through hole towards the inside of the aperture; and a bimorph section holding the traveling contact at a position facing the aperture and driving the traveling contact. One end of the bimorph section may be formed on a silicon oxide layer formed on a front face of the substrate.

Abstract: A method of fabricating a mold for glass press, characterized in that silicon carbide is deposited on the surface of a silicon mold, subsequently the deposited silicon carbide is bonded to a silicon carbide substrate, and thereafter the silicon mold is removed by etching. In this method of fabricating a mold for glass press, the bonding between the silicon carbide deposited on the silicon mold surface and the silicon carbide substrate can be strengthened by interposing a metal thin film.

Abstract: Catheter of such a structure that Ti—Ni superelastic allow (SEA) tube has its outside covered with thin-film silicone rubber tube. The SEA tube at part whose flexion is desired is wrought to cut off multiple grooves (crenas) with thin joints left. The covering with the silicone rubber tube is effected without the use of its front end portion in the covering. When a negative pressure is applied to physiological saline placed therein, the front end portion works as a valve, and the silicone rubber tube at the wrought part yields inward so that flexion of the catheter occurs at that part.