Abstract: A semiconductor memory device according to an embodiment includes a substrate, a source line, word lines, a pillar, and a first member. The first member is provided to penetrate the source line. The first member includes a first portion which is far from the substrate, and a second portion which is near the substrate. The first member includes a first contact and a first insulating film. The first contact is provided to extend from the first portion to the second portion. The first contact is electrically connected to the substrate. The first insulating film insulates the source line from the first contact. The first member includes a stepped portion at a boundary part between the first portion and the second portion.

Abstract: A movable device includes: a movable portion; a driving section configured to generate a driving force to move the movable portion; a movement mechanical section; and at least one convex portion. The movement mechanical section includes: a contact portion contacting the movable portion, the contact portion movable in a movement direction by the driving force of the driving section; and multiple concave-convex portions movable with the contact portion in the movement direction. At least one convex portion engaging with corresponding one of the multiple concave-convex portions, said at least one convex portion being static relative to the movement mechanical section in the movement direction.

Abstract: A light deflector includes a reflector having a reflecting surface, a movable part coupled to the reflector, a drive circuit configured to cause the movable part to deform so as to oscillate the reflector, a supporting unit having an opening in part; and a spring having a bending structure. The spring is disposed between the movable part and the supporting unit, the spring coupled to each of the movable part and the supporting unit.

Abstract: A movable device includes: a mechanism configured to drive a movable portion, the mechanism including: a gear including a first protrusion; and a cam in contact with the movable portion; and a driver to drive the mechanism, the driver including: a second protrusion to engage with the first protrusion; and an actuator to cause the second protrusion to reciprocate in response to application of voltage or electric current, to rotate the gear in a predetermined direction, to rotate the cam with the rotation of the gear to drive the movable portion. The first protrusion has a shape in which a downstream portion in the predetermined direction is lower in a direction perpendicular to the predetermined direction than an upstream portion. The second protrusion has a shape in which a downstream portion in the predetermined direction is higher in the direction perpendicular to the predetermined direction than an upstream portion.

Abstract: An operating device includes an oscillator oscillable around an oscillation axis; a support; and a movable portion. The movable portion includes: a first connecting portion on one end, connected to the oscillator; a second connecting portion on the other end, connected to the support; and a beam extending in a direction intersecting the oscillation axis. At least one of the first connecting portion and the second connecting portion includes: a first extending portion extending along the oscillation axis; and a first thick portion extending along the oscillation axis and having a thickness greater than a thickness of another portion other than the first thick portion in the at least one of the first connecting portion and the second connecting portion, at least a part of the first thick portion included in the first extending portion.

Abstract: A light deflector includes a movable portion including a reflector; multiple drive beams supporting the movable portion to allow the movable portion to be oscillatable; at least one supporting part supporting the multiple drive beams, the at least one supporting part including a first connecting portion and a second connecting portion different from the first connecting portion; and a stopper having one end connected to the first connecting portion and the other end connected to the second connecting portion on the at least one supporting part to be contactable with and straddle the multiple drive beams.

Abstract: A movable device includes a movable portion including a reflecting surface; a pair of drive beams to support the movable portion rotatably around a predetermined rotation axis with the movable portion disposed between the pair of drive beams; and a support portion configured to support the pair of drive beams. The support portion has a light passing portion on each of both sides of the movable portion in a direction intersecting with the rotation axis in a plane along the reflecting surface in a state in which the movable portion is not rotated, the light passing portion allowing light reflected by the reflecting surface to pass through the light passing portion.

Abstract: A light deflector includes a movable device; a drive unit configured to drive the movable device; an input wiring board configured to apply electric power from the drive unit to the movable device; and an anisotropic conductive resin film through which the input wiring board is connected to an input part. The movable device includes a movable portion including a reflector, between a pair of drive beams; a pair of supporting parts supporting the pair of drive beams; and a mount unit secured to the pair of supporting parts. The pair of drive beams supports the movable portion to allow the movable portion to oscillate around an oscillation axis. Each of the pair of drive beams includes a beam member and an actuator. At least one of the pair of supporting parts includes the input part to which electric power is input from the input wiring board to the actuator.

Abstract: A movable diffraction element and a spectroscope. The movable diffraction element includes a movable component having a comb-like shape, a supporting unit configured to support the movable component, a first cantilever actuator coupled to the supporting unit, a displacement determiner coupled to an edge of the first cantilever actuator, and a second cantilever actuator disposed parallel to the first cantilever actuator. In the movable diffraction element, a slope generated when the second cantilever actuator deforms is approximately equivalent to a slope generated at the first cantilever actuator. The spectroscope includes the movable diffraction element.

Abstract: (Object) To enable to provide a small-scale and low-cost spectrometer (Means of Achieving the Object) A spectrometer includes: a light incidence unit configured to allow incidence of light from outside; a diffraction grating configured to disperse, according to wavelength, the light that is incident through the light incidence unit; and a reflection unit including a reflection surface for reflecting the light that has been dispersed according to wavelength by the diffraction grating. Tilt of the reflection surface is changeable.

Abstract: A light deflector includes a reflector having a reflecting surface; a first movable unit having one end coupled to the reflector; a second movable unit having one end coupled to the reflector, the reflector disposed between the first movable unit and the second movable unit; a first piezoelectric element on the first movable unit; a second piezoelectric element on the second movable unit; a first supporting part coupled to the other end of the first movable unit; a second supporting part coupled to the other end of the second movable unit; an input part configured to receive voltage to be applied to at least the second piezoelectric element; and a wire electrically connecting the second piezoelectric element and the input part through the reflector configured to transmit the voltage to the second piezoelectric element. A passage area is provided through which light reflected by the reflector passes.

Abstract: A light deflector includes a reflector having a reflecting surface, a movable part coupled to the reflector, a drive circuit configured to cause the movable part to deform so as to oscillate the reflector, a supporting unit having an opening in part; and a spring having a bending structure. The spring is disposed between the movable part and the supporting unit, the spring coupled to each of the movable part and the supporting unit.

Abstract: To enable to provide a small-scale and low-cost spectrometer (Means of Achieving the Object) A spectrometer includes: a light incidence unit configured to allow incidence of light from outside; a diffraction grating configured to disperse, according to wavelength, the light that is incident through the light incidence unit; and a reflection unit including a reflection surface for reflecting the light that has been dispersed according to wavelength by the diffraction grating. Tilt of the reflection surface is changeable.

Abstract: A MEMS device includes a plurality of ribbon elements, a securing portion, and a plurality of connecting portions. The securing portion supports the plurality of ribbon elements. The plurality of connecting portions are disposed on ends of each of the plurality of ribbon elements and connect each of the plurality of ribbon elements to the securing portion. An angle formed by a longitudinal extending line of each of the plurality of ribbon elements and each of the plurality of connecting portions is greater than 0° in a planar direction of each of the plurality of ribbon elements.

Abstract: A frame, a spectroscope, a spectrometry unit, and an image forming apparatus. The frame has hollow structure and includes at least four apertures including a first aperture, a second aperture, a third aperture through which light enters the frame, and a fourth aperture, a concave diffraction grating disposed at a position of the first aperture, and a movable reflector disposed at a position of the second aperture to reflect light dispersed by the concave diffraction grating and change a reflection angle of the reflected light. Through the fourth aperture of the frame, the light reflected by the movable reflector exits the frame. The spectroscope includes the frame, and the frame further includes an optical entrance disposed at a position of the third aperture, and an optical exit disposed at a position of the fourth aperture.

Abstract: To achieve an image pickup element that can utilize polarized light as well as non-polarized light to image or capture an object, an image pickup element is provided to an imaging apparatus that forms an image of an object to be imaged onto a light-receiving surface of an image sensor, acquires a polarized filter image together with a regular luminance image, and executes image processing on the acquired images. The image pickup element includes, on a light-receiving surface LRS of the image sensor IMS, a polarizing filter PFL including at least two kinds of pixels having different transmission and polarization properties from each other.

Abstract: A spectrum measuring device including a ribbon element, a light detection element, and circuitry. The ribbon element includes a first light reflector including a plurality of first light reflection surfaces configured to be translated in an out-of-plane direction, and a second light reflector including a plurality of second light reflection surfaces that are fixed. The circuitry supplies a drive signal to the ribbon element in such a manner that a change of a displacement amount difference between the first light reflection surfaces and the second light reflection surfaces corresponds to a predetermined frequency; and acquires the light quantity data detected by the light detection element at a predetermined sampling frequency.

Abstract: A movable diffraction element and a spectroscope. The movable diffraction element includes a movable component having a comb-like shape, a supporting unit configured to support the movable component, a first cantilever actuator coupled to the supporting unit, a displacement determiner coupled to an edge of the first cantilever actuator, and a second cantilever actuator disposed parallel to the first cantilever actuator. In the movable diffraction element, a slope generated when the second cantilever actuator deforms is approximately equivalent to a slope generated at the first cantilever actuator. The spectroscope includes the movable diffraction element.

Abstract: A spectrum measuring device including a ribbon element, a light detection element, and circuitry. The ribbon element includes a first light reflector including a plurality of first light reflection surfaces configured to be translated in an out-of-plane direction, and a second light reflector including a plurality of second light reflection surfaces that are fixed. The circuitry supplies a drive signal to the ribbon element in such a manner that a change of a displacement amount difference between the first light reflection surfaces and the second light reflection surfaces corresponds to a predetermined frequency; and acquires the light quantity data detected by the light detection element at a predetermined sampling frequency.

Abstract: A MEMS device includes a plurality of ribbon elements, a securing portion, and a plurality of connecting portions. The securing portion supports the plurality of ribbon elements. The plurality of connecting portions are disposed on ends of each of the plurality of ribbon elements and connect each of the plurality of ribbon elements to the securing portion. An angle formed by a longitudinal extending line of each of the plurality of ribbon elements and each of the plurality of connecting portions is greater than 0° in a planar direction of each of the plurality of ribbon elements.