Abstract: A pressure sensor superior in pressure resistance and capable of covering from a low to high pressure range as a measuring range is to be provided. Plural pressure sensing sections for high and low pressures are formed on a silicon board, the pressure sensing sections each com ing an outer frame portion, a diaphragm portion, a strain gauge portion and an electrode portion. The silicon board side with the strain gauge portions formed thereon and an insulating substrate having electrode take-out portions are bonded together in such a manner that the strain gauge portions are hermetically sealed and that the electrode portions on the silicon board and the electrode take-out portions of the insulating substrate are electrically connected with each other, to constitute a pressure sensing unit.

Abstract: A combustion pressure sensor suitable for a highly precise combustion control system of an automobile engine and a sensing system using the sensor. The combustion pressure sensor includes a SOI substrate having a three-layered structure of a first silicon plate, a thermal oxide film, and a second silicon plate, wherein a combustion pressure is sensed on the basis of a pressure or a force applied to the first silicon plate.

Abstract: A capacitance detector comprises switches for charging and discharging a sensing part, an integrator constituted by a condenser and an operational amplifier for integrating a charging current or a discharging current which is generated according to the charging and discharging the sensing part, a switch for charging an output voltage of the operational amplifier and for feedbacking an electric charge to the integrator, and a condenser. The capacitance detector can be provided by the operational amplifier having a low response performance and a small output current and no hold sample circuit, thereby a circuit scale of the capacitance type sensor can be made small.

Abstract: A monoazo compound of the following formula, ##STR1## wherein D is phenylene or naphthylene; X is halogeno, pyridinio or ##STR2## B is --OR.sub.3, --SR.sub.4, ##STR3## in which R.sub.3, R.sub.4, R.sub.5 and R.sub.6 are each hydrogen, alkyl, phenyl, naphthyl or benzyl, r is 0 or 1, and E is O, SO, SO.sub.2, CH.sub.2 or NR.sub.8, in which R.sub.8 is hydrogen or C.sub.1 -C.sub.4 alkyl; R, R.sub.1, R.sub.2 and R.sub.7 are each hydrogen or alkyl; A.sub.1, A.sub.2 and A.sub.3 are each phenylene, naphthylene or alkylene; Z.sub.1, Z.sub.2 and Z.sub.3 are each --SO.sub.2 CH.dbd.CH.sub.2 or --SO.sub.2 CH.sub.2 CH.sub.2 Y, in which Y is a splittable group; and p is 0 or 1; which compound is useful for dyeing or printing fiber materials to obtain a product dyed or printed in a color superior in various fastness properties with superior build-up property.

Abstract: A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode and the two second silicon plates and stick the first silicon plate except the movable electrode and the two second silicon plates together.

Abstract: A monoazo compound of the following formula, ##STR1## wherein D is phenylene or naphthylene; X is halogeno, pyridinio or ##STR2## B is --OR.sub.3, --SR.sub.4, ##STR3## in which R.sub.3, R.sub.4, R.sub.5 and R.sub.6 are each hydrogen, alkyl, phenyl, naphthyl or benzyl, r is 0 or 1, and E is O, SO, SO.sub.2, CH.sub.2 or NR.sub.8, in which R.sub.8 is hydrogen or C.sub.1 -C.sub.4 alkyl; R, R.sub.1, R.sub.2 and R.sub.7 are each hydrogen or alkyl; A.sub.1, A.sub.2 and A.sub.3 are each phenylene, naphthylene or alkylene; Z.sub.1, Z.sub.2 and Z.sub.3 are each --SO.sub.2 CH.dbd.CH.sub.2 or --SO.sub.2 CH.sub.2 CH.sub.2 Y, in which Y is a splittable group; and p is 0 or 1; which compound is useful for dyeing or printing fiber materials to obtain a product dyed or printed in a color superior in various fastness properties with superior build-up property.

Abstract: A semiconductor acceleration sensor is formed by a cantilever having a conductive movable electrode of predetermined mass at one end, at least one pair of fixed conductive electrodes which are stationary with respect to the movable electrode located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate to which the fixed electrodes are mounted, a lower melting point material is firstly coated on the substrates.

Abstract: A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode and the two second silicon plates and stick the first silicon plate except the movable electrode and the two second silicon plates together.

Abstract: An electrostatic type micro accelerometer comprising means for preventing permanent sticking between a movable electrode and a stationary electrode due to residual dielectric polarization, resisual electric charges and water adsorption and condensation around possible contacting portions therebetween when the movable electrode excessively displaces. The sticking preventing means is realized by disposing one of electric field reducing means, water adsorption and condensation reducing means and contacting area limiting means around the possible contacting portions.

Abstract: A signal processor (5) is coupled to a detector (6) for detecting a physical quantity. The signal processor has a zero adjustment memory (14) and a sensitivity adjustment memory (16). The zero adjustment memory and the sensitivity adjustment memory have a number of switches (20, 20A, 20', 20"), respectively. These switches are changed over digitally using a zener zapping method or a polysilicon fuse method at each switch to adjust the characteristics of the detector.

Abstract: A monoazo compound represented by the following formula (I) in the free acid form: ##STR1## wherein X is an alkylamino, C.sub.5 -C.sub.7 cycloalkylamino, piperidino, pyrrolidino or morpholino group which is unsubstituted or substituted with a substituent other than sulfo, R is hydrogen or unsubstituted or substituted C.sub.1 -C.sub.4 alkyl, R.sub.1 and R.sub.2 independently of one another are each hydrogen, methoxy, ethoxy, methyl, ethyl, chloro, bromo, nitro, carboxy or sulfo, Z is vinyl or -CH.sub.2 CH.sub.2 Y in which Y is a group which is split by the action of an alkali and p is 0 or 1. This compound is a reactive dye suitable for dyeing or printing fiber materials containing hydroxyl group and/or amide group in red color. This compound is high in dissolvability and can give dyed or printed products excellent in dyeability such as build-up property and various fastnesses.

Abstract: In a capacitance type accelerometer used for an air bag system etc., a plurality of grooves crossing each other are provided on the surface of a movable electrode which is arranged to face a fixed electrode at a portion having a gap thereinbetween, and end portions of each groove open to an outside space at the portion between the movable electrode and the fixed electrode. The grooves can be provided on surface of the fixed electrodes. Ventilation between inside and outside of the facing portion is improved by opening of the grooves to outside space, and air damping which is caused at operation of the movable electrode at the gap between the electrodes is reduced, and, consequently, response speed of the movable electrode is increased.

Abstract: A capacitive type semiconductor accelerometer has an intermediate silicon plate of n type conductivity including a movable electrode constituting a pendulum mass formed within the intermediate silicon plate and supported thereby via a beam so as to permit movement in a direction perpendicular to its plane. A first conductive island is formed within the intermediate plate and is immovably supported thereby via a first insulating leg so as to be isolated therefrom, and an upper glass plate is anodic bonded to the intermediate silicon plate. A first stationary electrode is formed on the upper glass plate at the position facing one face of the movable electrode with a predetermined gap. A lower glass plate is anodic bonded to the intermediate silicon plate and a second stationary electrode is formed on the lower glass plate at the position facing the other face of the movable electrode with a predetermined gap.

Abstract: A triazine compound which is useful for dyeing or printing materials containing hydroxyl group and/or amide group, and which has the following formula (I) or salts thereof ##STR1## wherein R represents hydrogen or unsubstituted or substituted alkyl; R.sub.1 represents hydrogen, an alkyl unsubstituted or substituted by carboxy, sulfo, alkoxy, halogeno, sulfato or hydroxy, or --Y--SO.sub.2 Z.sub.3 ; R.sub.2 represents hydrogen or unsubstituted or substituted alkyl; A represents unsubstituted or substituted phenylene or naphthylene; Y represents a divalent group which is C.sub.2 -C.sub.7 alkylene and so on; Z.sub.1, Z.sub.2 and Z.sub.3 independently of one another are each --CH.dbd.CH.sub.2 or --CH.sub.2 CH.sub.

Abstract: Disclosed is an acceleration detector which has an electrically conductive mass portion formed at a free end of a cantilever, and fixed electrodes arranged opposite to the mass portion through a gap so that the value of acceleration is detected on the basis of the change of capacitance between the mass portion and the fixed electrodes, and in which at least one space is formed in the inside of the mass portion to lighten the weight of the mass portion to thereby widen the range of measurement.

Abstract: A monoazo compound represented by the following formula in the free acid form: ##STR1## wherein D is unsubstituted or substituted phenylene or naphthylene, X is unsubstituted or substituted pyridinio, Z is --SO.sub.2 CH.dbd.CH.sub.2 or --SO.sub.2 CH.sub.2 CH.sub.2 L in which L is a group capable of being split by the action of an alkali, and Y is --V--R in which V is --O-- or --S--, and R is hydrogen or which may be substituted alkyl, cyclohexyl, phenyl which may be substituted, naphthyl which may be substituted or benzyl which may be substituted, or ##STR2## in which R.sub.1 and R.sub.2 independently of one another are each hydrogen or unsubstituted or substituted alkyl, phenyl, naphthyl or benzyl, which is superior in solubility and useful for dyeing or printing fiber materials such as cellulose to a red color with superior build-up properties.

Abstract: An accelerometer having a movable electrode which is moved according to acceleration with respect to a fixed electrode disposed in opposition to the movable electrode. An output device generates an output voltage which is proportional to the acceleration by measuring a gap between the movable electrode and the fixed electrode. A pulse width modulator generates pulses, wherein a pulse width of the pulses is modulated according to the output voltage, and a feedback device feeds back an electrostatic force which is proportional to the pulse width of the pulses from the pulse modulator between the movable electrode and the fixed electrode. As the acceleration in the acceleration sensor is linearly detected, the acceleration sensor is easily adjusted.

Abstract: A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode and the two second silicon plates and stick the first silicon plate except the movable electrode and the two second silicon plates together. And further, a capacitance type accelerometer, having, a silicon plate forming a movable electrode which is moved according to acceleration, glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are connected to both sides of the silicon plate except the movable electrode and lead wires which are respectively connected to the conductive layers through a groove formed between the silicon plate and the glass plates.

Abstract: Anthrapyridone compounds of the formula, ##STR1## wherein R.sub.1 is hydrogen, benzoyl, acetyl or alkyloxycarbonyl, R.sub.2 is hydrogen or alkyl, R.sub.3 is hydrogen, halogen, sulfo, phenoxy, phenylthio or alkoxy, R.sub.4 is hydrogen, halogen or sulfo, R.sub.5 and R.sub.6 are each hydrogen or alkyl, V is --O--, --S-- or ##STR2## in which R.sub.7 is hydrogen, acetyl or alkyl, B is phenylene or naphthylene, D is vinyl or --CH.sub.2 CH.sub.2 L such as --CH.sub.2 CH.sub.2 OSO.sub.3 H, A is a divalent group, and X is halogen, quaternary ammonium, pyridinio, amino or a ##STR3## like group, which are useful for dyeing or printing fiber materials with superior dyeing performance.

Abstract: An oxygen sensor is disclosed in which an airtight reference chamber isolated from a surrounding space is formed on one main surface of a solid electrolyte, a current is supplied to the solid electrolyte to pump out oxygen from the reference chamber in such a manner that oxygen in the reference chamber is ionized and then passes through the solid electrolyte, means is provided for transferring oxygen from the surrounding space to the reference chamber in such a manner that oxygen in the surrounding space is ionized and then passes through the solid electrolyte, and the oxygen concentration in the surrounding space is detected on the basis of the current supplied to the solid electrolyte.