Patents by Inventor Masayuki Miura

Masayuki Miura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12094710
    Abstract: The method of forming a nitride semiconductor film includes intermittently sputtering a target of gallium nitride inside a vacuum chamber containing nitrogen and argon, and depositing sputtered particles of the gallium nitride that are scattered from the target inside the vacuum chamber, on a substrate having a temperature of 560 degrees C. or higher and 650 degrees C. or lower. A ratio of a flow rate of the nitrogen to a sum of the flow rate of the nitrogen and a flow rate of the argon supplied to the vacuum chamber is 6% or higher and 18% or lower.
    Type: Grant
    Filed: March 31, 2021
    Date of Patent: September 17, 2024
    Assignees: TOKYO ELECTRON LIMITED, OSAKA UNIVERSITY
    Inventors: Nobuaki Takahashi, Hitoshi Miura, Koji Neishi, Ryuji Katayama, Yusuke Mori, Masayuki Imanishi
  • Publication number: 20240284684
    Abstract: A semiconductor device according to the present embodiment includes a first semiconductor chip and a second semiconductor chip. The first semiconductor chip has a first upper surface on which a first electrode pad is formed. The second semiconductor chip has a first lower surface on which a second electrode pad directly joined to the first electrode pad is formed and a second upper surface that is opposite the first lower surface and on which a third electrode pad is formed. The area of the first lower surface is smaller than the area of the first upper surface. The barycenter of the first lower surface and the barycenter of the first upper surface are located at different positions in the in-plane direction of the first upper surface.
    Type: Application
    Filed: January 30, 2024
    Publication date: August 22, 2024
    Applicant: Kioxia Corporation
    Inventors: Shinya WATANABE, Masahiro INOHARA, Tatsuo MIGITA, Masayuki MIURA
  • Publication number: 20240201660
    Abstract: According to one embodiment, a package stocker is configured to store a plurality of semiconductor packages each including one or more nonvolatile memory dies. A drive includes at least one socket on which a semiconductor package is able to be detachably mounted. A host apparatus, which is communicatively connected to the drive, reads/writes data from/to the one or more nonvolatile memory dies of the semiconductor package mounted on the socket. When a first semiconductor package is not mounted on the socket, the host apparatus causes a package transport device to transport the first semiconductor package to the drive and to mount the first semiconductor package on the socket.
    Type: Application
    Filed: February 29, 2024
    Publication date: June 20, 2024
    Inventors: Tatsuro Hitomi, Yasuhito Yoshimizu, Masayuki Miura, Mitoshi Miyaoka, Tetsuharu Kojima, Tomoya Sanuki
  • Publication number: 20240105681
    Abstract: According to one embodiment, a method of manufacturing a semiconductor device includes placing a first semiconductor element on a wiring board, forming a first mask having an opening on the wiring board so that the first semiconductor element is positioned in the opening, putting a liquid first resin precursor into the opening of the first mask, curing the first resin precursor to obtain a first resin layer, and then removing the first mask.
    Type: Application
    Filed: August 29, 2023
    Publication date: March 28, 2024
    Inventors: Satoru ITAKURA, Masayuki MIURA
  • Publication number: 20240105539
    Abstract: A semiconductor device includes: a wiring substrate; at least one first semiconductor element provided above the wiring substrate; a first resin layer configured to seal the first semiconductor element; and a second resin layer provided on an outer surface of the first resin layer. A Young's modulus of the second resin layer is greater than a Young's modulus of the first resin layer, and/or a linear thermal expansion coefficient of the second resin layer is greater than a linear thermal expansion coefficient of the first resin layer.
    Type: Application
    Filed: September 1, 2023
    Publication date: March 28, 2024
    Applicant: Kioxia Corporation
    Inventors: Naoya SHIROSHITA, Masayuki MIURA
  • Patent number: 11942176
    Abstract: A semiconductor memory device has a plastic package including an inductor, a first memory chip including a booster circuit that boosts a voltage from a first voltage to a second voltage using the inductor, and a second memory chip having a terminal supplied with the second voltage from the first memory chip.
    Type: Grant
    Filed: September 15, 2021
    Date of Patent: March 26, 2024
    Assignee: Kioxia Corporation
    Inventors: Tomoya Sanuki, Xu Li, Masayuki Miura, Takayuki Miyazaki, Toshio Fujisawa, Hiroto Nakai, Hideko Mukaida, Mie Matsuo
  • Patent number: 11929332
    Abstract: A semiconductor device includes a semiconductor chip having a first face and a second face on an opposite side to the first face, and including semiconductor elements arranged on the first face. Columnar electrodes are arranged above the first face, and electrically connected to any of the semiconductor elements. A first member is located around the columnar electrodes above the first face. An insulant covers the columnar electrodes and the first member. The first member is harder than the columnar electrodes and the insulant. The first member and the columnar electrodes are exposed from a surface of the insulant.
    Type: Grant
    Filed: March 2, 2021
    Date of Patent: March 12, 2024
    Assignee: Kioxia Corporation
    Inventors: Soichi Homma, Tatsuo Migita, Masayuki Miura, Takeori Maeda, Kazuhiro Kato, Susumu Yamamoto
  • Patent number: 11923325
    Abstract: A memory chip unit includes a pad electrode including first and second portions, and a memory cell array. A prober includes a probe card and a movement mechanism. The probe card includes a probe electrode to be in contact with the pad electrode, and a memory controller electrically coupled to the probe electrode and executes reading and writing on the memory cell array. The movement mechanism executes a first operation that brings the probe electrode into contact with the first portion and does not bring the probe electrode into contact with the second portion, and a second operation that does not bring the probe electrode into contact with the first portion and brings the probe electrode into contact with the second portion.
    Type: Grant
    Filed: March 15, 2022
    Date of Patent: March 5, 2024
    Assignee: Kioxia Corporation
    Inventors: Yasuhito Yoshimizu, Takashi Fukushima, Tatsuro Hitomi, Arata Inoue, Masayuki Miura, Shinichi Kanno, Toshio Fujisawa, Keisuke Nakatsuka, Tomoya Sanuki
  • Patent number: 11894358
    Abstract: In a semiconductor device, a substrate has a main surface. A first semiconductor chip has a first front surface and a first back surface, and is mounted on the main surface via a plurality of bump electrodes. A first spacer has a second front surface and a second back surface that is mounted on the main surface. A height of the second front surface from the main surface is within a range between a highest height and a lowest height of the first back surface from the main surface. A second spacer has a third front surface and a third back surface that is mounted on the main surface. A height of the third front surface from the main surface is within the range between the highest height and the lowest height of the first back surface from the main surface.
    Type: Grant
    Filed: December 27, 2021
    Date of Patent: February 6, 2024
    Assignee: KIOXIA CORPORATION
    Inventor: Masayuki Miura
  • Publication number: 20230411366
    Abstract: A semiconductor device according to the present disclosure includes: a semiconductor chip including a first supply terminal and a second supply terminal; a passive element provided on the semiconductor chip, the passive element including a first electrode, a dielectric provided on the first electrode, and a second electrode provided on the dielectric; a first wiring which electrically connects the first supply terminal and the first electrode to each other; and a second wiring which electrically connects the second supply terminal and the second electrode to each other.
    Type: Application
    Filed: June 16, 2023
    Publication date: December 21, 2023
    Applicant: Kioxia Corporation
    Inventor: Masayuki MIURA
  • Publication number: 20230324455
    Abstract: According to one embodiment, a wafer includes a substrate including a first region and a second region that do not overlap each other; a first chip unit and a second chip unit each arranged on the substrate; a first electrode and a second electrode each electrically connected to the first chip unit; and a third electrode and a fourth electrode each electrically connected to the second chip unit. The first electrode and the third electrode are arranged in the first region. The second electrode and the fourth electrode are arranged in the second region. The first region is independent of a region in which the first chip unit and the second chip unit are provided.
    Type: Application
    Filed: June 13, 2023
    Publication date: October 12, 2023
    Inventors: Tatsuro HITOMI, Yasuhito YOSHIMIZU, Masayuki MIURA, Arata INOUE, Hiroyuki DOHMAE, Koichi NAKAZAWA, Mitoshi MIYAOKA, Kazuhito HAYASAKA, Tomoya SANUKI
  • Publication number: 20230307416
    Abstract: A semiconductor device includes: a wiring substrate in which a wiring layer is provided; a first semiconductor chip that is provided above the wiring substrate and on a surface of which a first pad is formed, the surface being on a side closer to the wiring substrate; a second semiconductor chip that is provided on the first semiconductor chip through a first resin layer and on a surface of which a second pad is formed, the surface being on a side opposite the wiring substrate; a third semiconductor chip that is provided on the second semiconductor chip through a second resin layer and on a surface of which a third pad is formed, the surface being on the side closer to the wiring substrate; and a first wire connecting the first pad and the third pad; and a second wire connecting the second pad and the wiring substrate.
    Type: Application
    Filed: September 8, 2022
    Publication date: September 28, 2023
    Applicant: Kioxia Corporation
    Inventor: Masayuki MIURA
  • Publication number: 20230282289
    Abstract: A method of processing a memory system that includes a substrate with a connector and a semiconductor memory chip connected to the connector is provided. The method includes detaching the semiconductor memory chip from the connector, performing an annealing process with respect to the semiconductor memory chip detached from the connector, and after the annealing process, attaching the semiconductor memory chip to the connector on the substrate.
    Type: Application
    Filed: August 30, 2022
    Publication date: September 7, 2023
    Inventors: Tomoya SANUKI, Hitomi TANAKA, Tatsuro HITOMI, Yasuhito YOSHIMIZU, Masayuki MIURA, Yoshihiro OHBA
  • Publication number: 20230260966
    Abstract: A semiconductor device includes a first stacked body provided above a substrate, and including a plurality of first semiconductor chips stacked on top of one another; and a second stacked body provided further above the first stacked body, and including a plurality of second semiconductor chips stacked on top of one another. The first semiconductor chips each have a first pad facing toward the substrate, and the second semiconductor chips each have a second pad facing away from the substrate.
    Type: Application
    Filed: August 26, 2022
    Publication date: August 17, 2023
    Applicant: KIOXIA CORPORATION
    Inventor: Masayuki MIURA
  • Patent number: 11721672
    Abstract: A semiconductor device includes a first stacked body including a plurality of first semiconductor chips stacked along a first direction, each of the first semiconductor chips being offset from the other first semiconductor chips along a second direction perpendicular to the first direction; a first columnar electrode connected to an electrode pad of the first stacked body, and extending in the first direction; a second stacked body including a plurality of second semiconductor chips stacked along the first direction, each of the second semiconductor chips being offset from the other second semiconductor chips along the second direction, the second stacked body having a height larger than the first stacked body and overlap at least a portion of the first stacked body when viewed from the top; and a second columnar electrode connected to an electrode pad of the second stacked body, and extending in the first direction.
    Type: Grant
    Filed: August 27, 2021
    Date of Patent: August 8, 2023
    Assignee: KIOXIA CORPORATION
    Inventors: Yuichi Sano, Masayuki Miura, Kazuma Hasegawa
  • Patent number: 11705434
    Abstract: A semiconductor device includes a first stacked body including first semiconductor chips stacked in a first direction and offset relative to each other in a second direction; a first columnar electrode coupled to the first semiconductor chip and extending in the first direction; a second stacked body arranged relative to the first stacked body in the second direction and including second semiconductor chips stacked in the first direction and offset relative to each other in the second direction; a second columnar electrode coupled to the second semiconductor chip and extending in the first direction; and a third semiconductor chip arranged substantially equally spaced to the first columnar electrode and the second columnar electrode.
    Type: Grant
    Filed: August 27, 2021
    Date of Patent: July 18, 2023
    Assignee: KIOXIA CORPORATION
    Inventors: Masayuki Miura, Yuichi Sano, Kazuma Hasegawa
  • Publication number: 20230207520
    Abstract: A semiconductor device includes a wiring substrate inside which a wiring layer is provided, a plurality of first semiconductor chips stacked in a shifted manner on the wiring substrate and each provided with a connection terminal on a surface facing the wiring substrate, and a second semiconductor chip having a function different from functions of the first semiconductor chips and provided on the wiring substrate on a side where the connection terminals are electrically connected to the wiring substrate.
    Type: Application
    Filed: September 21, 2022
    Publication date: June 29, 2023
    Applicant: Kioxia Corporation
    Inventors: Masayuki MIURA, Kazuma HASEGAWA, Kazushige KAWASAKI
  • Publication number: 20230178491
    Abstract: A semiconductor device includes: a printed wiring substrate; a semiconductor chip mounted on a first surface of the printed wiring substrate; a sealing resin sealing the semiconductor chip on the first surface of the printed wiring substrate; an electrode pad provided on a second surface on a side opposite to the first surface of the printed wiring substrate; an electrode terminal connected to the electrode pad and protruding from the second surface; and a metal layer provided on a surface of the electrode pad on the electrode terminal side or on the side opposite to the electrode terminal so as to straddle a boundary line of the bonding surface between the electrode terminal and the electrode pad which is at least a boundary line on a side facing an outside of a mounting region of the semiconductor chip.
    Type: Application
    Filed: August 25, 2022
    Publication date: June 8, 2023
    Applicant: KIOXIA CORPORATION
    Inventors: Yasuo TAKEMOTO, Hitoshi ISHII, Masayuki MIURA
  • Patent number: 11579796
    Abstract: A memory system has a memory, a first substrate on which the memory is mounted and which is set to a temperature of ?40[° C.] or lower, a controller configured to control the memory; and a second substrate on which the controller is mounted, which is set to a temperature of ?40[° C.] or higher, and which transmits and receives a signal to and from the first substrate via a signal transmission cable.
    Type: Grant
    Filed: March 10, 2021
    Date of Patent: February 14, 2023
    Assignee: Kioxia Corporation
    Inventors: Tomoya Sanuki, Yuta Aiba, Hitomi Tanaka, Masayuki Miura, Mie Matsuo, Toshio Fujisawa, Takashi Maeda
  • Patent number: 11568901
    Abstract: A semiconductor device of an embodiment includes: a wiring board having a first surface and a second surface on a side opposite to the first surface; a first semiconductor element on the first surface of the wiring board; a second semiconductor element on the first surface of the wiring board; and a first sealing material that seals at least the second semiconductor element. A slit is formed in the first sealing material between the first semiconductor element and the second semiconductor element. When a thickness of the first sealing material on the first semiconductor element is t1 and a thickness of the first sealing material on the second semiconductor element is t2, the t1 and the t2 satisfy a relationship of 0?t1<t2.
    Type: Grant
    Filed: September 9, 2021
    Date of Patent: January 31, 2023
    Assignee: KIOXIA CORPORATION
    Inventors: Kazushige Kawasaki, Masayuki Miura, Hideko Mukaida