Abstract: A liquid supply device includes a swing arm capable of horizontally swinging above a polishing table, and a plurality of spray nozzles that is arranged in a longitudinal direction of the swing arm and sprays a cleaning fluid onto the polishing table, in which each of the plurality of spray nozzles has a slit-shaped fluid outlet, and a fluid outlet of the spray nozzle closer to a distal end of the swing arm is oriented to have a larger inclination angle with respect to a longitudinal direction of the swing arm in plan view.

Abstract: A technique is disclosed that can allow an elastic membrane to be inflated into a desired shape when a workpiece is released from a polishing head, or when the workpiece is held on the polishing head, thereby avoiding excessive stress on the workpiece. The method includes supplying a gas into a first pressure chamber and a second pressure chamber at a first flow rate and a second flow rate regulated by a first flow-rate control valve and a second flow-rate control valve to inflate an elastic membrane of a polishing head when a polished workpiece is released from the polishing head, or when a workpiece to be polished is held on the polishing head. The first pressure chamber and the second pressure chamber are formed by the elastic membrane.

Abstract: A liquid feeder includes: a first arm having a first nozzle; a second arm having a second nozzle; a first rotation shaft supporting a proximal end part of the first arm; a second rotation shaft supporting a proximal end part of the second arm; a first rotation driver configured to rotate the first rotation shaft to turn the first arm from a fluid feed position to a retracted position; a second rotation driver configured to rotate the second rotation shaft to turn the second arm from a fluid feed position to a retracted position; and a controller. The first rotation shaft and the second rotation shaft are disposed coaxially with each other. The controller is capable of controlling the operation of the first rotation driver and the operation of the second rotation driver independently of each other.

Abstract: A substrate processing apparatus includes a polishing section and a transport section. The polishing section has a first polishing unit, a second polishing unit, and a transport mechanism. The first polishing unit has a first polishing apparatus and a second polishing apparatus. The second polishing unit has a third polishing apparatus and a fourth polishing apparatus. Each of the first to fourth polishing apparatuses has a polishing table to which a polishing pad is mounted, a top ring, and auxiliary units that perform a process on the polishing pad during polishing. Around the polishing table, a pair of auxiliary unit mounting units for mounting the respective auxiliary units in a left-right switchable manner with respect to a straight line connecting a swing center of the top ring and a center of rotation of the polishing table is provided at respective positions symmetrical with respect to the straight line.

Abstract: A substrate processing apparatus includes a polishing section and a transport section. The polishing section has a first polishing unit, a second polishing unit, and a transport mechanism. The first polishing unit has a first polishing apparatus and a second polishing apparatus. The second polishing unit has a third polishing apparatus and a fourth polishing apparatus. Each of the first to fourth polishing apparatuses has a polishing table to which a polishing pad is mounted, a top ring, and auxiliary units that perform a process on the polishing pad during polishing. Around the polishing table, a pair of auxiliary unit mounting units for mounting the respective auxiliary units in a left-right switchable manner with respect to a straight line connecting a swing center of the top ring and a center of rotation of the polishing table is provided at respective positions symmetrical with respect to the straight line.

Abstract: Provided are: a package that is capable of transporting a composite material without generating fluff by suppressing shedding of carbon fibers from the composite material while holding the composite material at a fixed position during transportation; and a method for manufacturing the package. This package is prepared by stacking a composite material in the form of a plurality of plates on a mounting stand having a plurality of fitting holes, wherein: the composite material includes carbon fibers and a thermoplastic resin; the composite material is held by a plurality of holding members detachably attached to the fitting holes; of the contact surfaces of the composite material and the holding members, one of the contact surfaces of either the composite material or the holding members is curved, and the other contact surface is flat or curved.

Abstract: After an engine is started, an ECU performs first regeneration processing of a PM sensor through heating by a heater and, after the first regeneration processing, applies a voltage continuously to detection electrodes for a predetermined voltage application period. The ECU causes PM to adhere to an insulating substrate due to the voltage application and, at a time point after the predetermined time period has elapsed, determines the amount of PM that is adhering to the insulating substrate. When a predetermined condition is satisfied outside the voltage application period, the ECU determines whether the amount of adhering PM on the insulating substrate is equal to or greater than an excess determination threshold value. If the amount of adhering PM is determined to be equal to or greater than the excess determination threshold value, the ECU performs second regeneration processing of the PM sensor, through heating by the heater.

Abstract: A particulate matter detection sensor includes a particulate matter detection unit for changing the output of an electrical signal in accordance with change in the electrical characteristics due to the deposition of particulate matter contained in an exhaust gas G discharged from an internal combustion engine, and a cover member having a cylindrical cover wall and disposed to surround the particulate matter detection unit. The particulate matter detection unit includes a deposition portion on which a part of the particulate matter is deposited, and a plurality of detection electrodes disposed being spaced apart from each other on the deposition portion. The deposition portion of the particulate matter detection unit is arranged so as to be oriented towards the tip side of the cover member. The cover wall of the cover member includes a plurality of exhaust gas introduction holes formed at positions closer to the tip side than is the deposition portion.

Abstract: An apparatus which detects particulate matter is provided. This apparatus estimates a volume of water inside an exhaust passage using estimation sections. When an estimated volume of water is larger than a water drainage threshold, an element portion is heated using a heater by the first temperature range controller, in a temperature range which resists water-induced cracking independent of a volume of water droplets. If the estimated volume of water is less than a water drainage threshold, the water drainage determination section determines that the water drainage of the exhaust passage is completed. Additionally, if it is estimated that the water drainage is completed, the element portion is heated by a second temperature controller at temperature lower than a starting temperature of combustion of particulate matter and in order to repel water adhered onto the element portion in a water-repellent temperature range for a predetermined period.

Abstract: A particulate matter detecting device includes: an element unit on which particulate matter contained in exhaust gas from an internal combustion engine is deposited; a heater that heats the element unit; a detecting unit that detects the amount of particulate matter on the basis of electrical characteristics of the element unit; and a control unit that controls the operation of the heater. For a predetermined period that does not include a period in which the particulate matter is deposited on the element unit, the control unit operates the heater using a predetermined amount of control set in advance such that the temperature of the element unit is higher than the temperature of the exhaust gas and lower than a predetermined temperature at which the element unit is thermally degraded.

Abstract: A particulate matter sensor and a particulate matter sensing system using such a sensor are provided which are capable of being produced at decreased cost and accurately measuring the temperature of a heater. The particulate matter sensor includes a deposition portion on which particulate matter contained in exhaust gas is accumulated, a pair of electrodes which are disposed on the deposition portion and separate from each other, a heater which heats the deposition portion, and a pair of heater leads which form a path through which electrical current is delivered to the heater. A sensing line is connected to at least one of the heater leads to measure a resistance of the heater lead.

Abstract: A control unit (6) estimates an output value of a PM sensor (S2) located at a downstream side of a DPF used as a reference filter, and detects whether the estimated output value exceeds a predetermined value (S3). When the estimated output value exceeds the predetermined value (YES in S3), the control unit detects an output value of the PM sensor (S4), and a heater heats the PM sensor (S5). The control unit detects an output value of the PM sensor (S6) after the PM sensor is heated, and calculates a change ratio of the output values of the PM sensor before and after heating (S7). The control unit estimates an average particle size of PM based on the calculated change ratio (S8), and detects whether the DPF has failed based on a comparison result of a corrected output value of the PM sensor with a threshold value.

Abstract: A sensor element which has a pair of positive and negative detection electrodes disposed on a surface of an insulation body as a detecting portion and a cover body configured to cover an opening of a cylindrical housing. The cover body is provided with gas inlet and outlet holes via which the measuring gas is introduced and discharged. The pair of detection electrodes have a plurality of wire electrodes. The wire electrodes electrically connected to the positive electrode and the wire electrodes electrically connected to the negative electrode are alternately arranged in parallel. Any one of a first insulation layer which is a narrow electrode interval Dn and a second insulation layer which is a wide electrode interval Dw, arranged between adjacent wire electrodes, and the first insulation layer arranged in a center part of the detecting portion.

Abstract: A particulate matter detection apparatus is provided with an element portion onto which PM contained in exhaust gas of an engine adheres thereto. A heater which heats the element portion, a quantity detecting portion which detects a quantity of the PM based on electrical properties of the element portion and a temperature detecting portion which detects a temperature of the element portion. The apparatus is further provided with a first and second temperature controller. The first temperature controller heats the element portion using a heater in a first period, which excludes a period in which PM adheres to the element portion based on a detected temperature of the element portion. The element portion is heated in a first temperature range to combust soluble organic fractions contained in the PM and resist melting of ash components contained in the PM. The first period excludes a period in which PM adheres to the element portion.

Abstract: An ignition plug for an internal combustion engine includes an electrode protrusion that protrudes from an electrode base material of a ground electrode toward a discharge gap. The electrode protrusion has a base part that is integrated with the electrode base material and a cover part that is joined to the base part and faces the discharge gap. The base part has an end surface facing a protrusion direction of the base part and a side peripheral surface. An outer edge of the end surface has a curved surface. The cover part is formed from a precious metal or a precious metal alloy having a lower linear expansion coefficient than that of a material for forming the base part and covers at least a part of the side peripheral surface and the end surface of the base part. While the ignition plug is attached to an internal combustion engine and the electrode protrusion is heated and then cooled, a projection is formed on an outer surface of a portion covering the side peripheral surface of the base part.

Abstract: A filter malfunction determination apparatus includes a calculator that calculates, upon determination that a rapid output increase has occurred, an amount of change of a parameter value output from a sensor before and after the rapid output increase. The calculator calculates, based on the calculated amount of change, a correction value for correcting at least one of the parameter value output from the sensor and a malfunction determination threshold. The filter malfunction determination apparatus includes an offset corrector configured to perform, based on the correction value, offset correction of at least one of the parameter value output from the sensor and the malfunction determination threshold after determination that the rapid output increase has occurred.

Abstract: Provided are: a package that is capable of transporting a composite material without generating fluff by suppressing shedding of carbon fibers from the composite material while holding the composite material at a fixed position during transportation; and a method for manufacturing the package. This package is prepared by stacking a composite material in the form of a plurality of plates on a mounting stand having a plurality of fitting holes, wherein: the composite material includes carbon fibers and a thermoplastic resin; the composite material is held by a plurality of holding members detachably attached to the fitting holes; of the contact surfaces of the composite material and the holding members, one of the contact surfaces of either the composite material or the holding members is curved, and the other contact surface is flat or curved.

Abstract: A particulate matter detection sensor has an accumulation section for accumulating a part of particulate matter particles contained in exhaust gas emitted from an internal combustion engine, and a pair of a first detection electrode and a second detection electrode formed on the accumulation section. The second detection electrode is formed separated from the first detection electrode. The first detection electrode has projecting parts which project toward the second detection electrode. Because a separation between the first and second detection electrodes is locally reduced at the projecting parts, the projecting parts attract and accumulate more particulate matter, and this structure makes it possible to allow the particulate matter detection sensor to have improved detection sensitivity.

Abstract: A particulate matter detection element 1 includes paired detection electrodes 12 for detecting particulate matter contained in exhaust gas discharged from an internal combustion engine, and insulating member 13 made of electrically insulating material. In the particulate matter detection element 1, at least part of the paired detection electrodes 12 is exposed from the insulating member 13 in the direction perpendicular to the lamination direction of the paired detection electrodes 1, to cause part of the particulate matter to deposit thereon. The surface roughness of at least the insulating member disposed between the paired detection electrodes is between 0.8 ?m and 8.0 ?m in 10-point average roughness.

Abstract: A particulate matter sensor detecting particulate matter in exhaust emissions is provided, which is resistant to having sensor surfaces buried by particulate matter residue. Detection electrodes are provided, with alternating polarity, laminated in a laminating direction, separated by insulation. Of the detection electrodes, first detection electrodes of one polarity and second detection electrodes of the other polarity are exposed perpendicular to the laminating direction. In the direction perpendicular to the laminating direction, the particulate matter sensor has target accumulating parts on which the particulate matter is accumulated. In the target accumulating parts, the thickness W1 of the first detection electrodes in the laminating direction is greater than the thickness W2 of the second detection electrodes in the laminating direction.