Patents by Inventor Matthew Goodman

Matthew Goodman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11594444
    Abstract: The present disclosure relates to a susceptor having a generally circular body having a face with a radially inward section and a radially outward section which includes a substrate supporting surface elevated relative to the radially inward section. A sidewall surrounds the substrate supporting surface which upon retention of a substrate on the radially outward section, the sidewall surrounds the substrate. The sidewall includes a plurality of humps which protrude from the top surface of the sidewall. Advantageously, the plurality of humps may aid in even thickness of deposition of material at the edge of the substrate.
    Type: Grant
    Filed: January 5, 2021
    Date of Patent: February 28, 2023
    Assignee: ASM IP Holding, B.V.
    Inventors: Matthew Goodman, Thomas John Kirschenheiter, Kevin Eugene Quinn
  • Publication number: 20220352006
    Abstract: A susceptor has a circular pocket portion, an annular ledge portion, and an annular rim ledge portion. The circular pocket portion is arranged along a rotation axis and has a perforated surface. The annular ledge portion extends circumferentially about pocket portion and has ledge surface that slopes axially upward from the perforated surface. The rim portion extends circumferentially about the ledge portion and is connected to the pocket portion by the ledge portion of the susceptor. The susceptor has one or more of a tuned pocket, a contact break, a precursor vent, and a purge channel located radially outward of the perforated surface to control deposition of a film onto a substrate supported by the susceptor. Semiconductor processing systems, film deposition methods, and methods of making susceptors are also described.
    Type: Application
    Filed: April 27, 2022
    Publication date: November 3, 2022
    Inventors: Shujin Huang, Junwei Su, Xing Lin, Alexandros Demos, Rutvij Naik, Wentao Wang, Matthew Goodman, Robin Scott, Amir Kajbafvala, Robinson James, Youness Alvandi-Tabrizi, Caleb Miskin
  • Publication number: 20220298672
    Abstract: A method of operating a reactor system to provide wafer temperature gradient control is provided. The method includes operating a center temperature sensor, a middle temperature sensor, and an edge temperature sensor to sense a temperature of a center zone of a wafer on a susceptor in reaction chamber of the reactor system, to sense a temperature of a middle zone of the wafer, and to sense a temperature of an edge zone of the wafer. The temperatures of the center, middle, and edge zones of the wafer are processed with a controller to generate control signals based on a predefined temperature gradient for the wafer. First, second, and third sets of heater lamps are operated based on the temperature of the center, middle, and edge zones to heat the center, the middle, and the edge zone of the wafer. Reactor systems are also described.
    Type: Application
    Filed: March 17, 2022
    Publication date: September 22, 2022
    Inventors: Hichem M'Saad, Alexandros Demos, Xing Lin, Junwei Su, Matthew Goodman, Daw Gen Lim, Shujin Huang, Rutvij Naik
  • Publication number: 20210225688
    Abstract: The present disclosure relates to a susceptor having a generally circular body having a face with a radially inward section and a radially outward section which includes a substrate supporting surface elevated relative to the radially inward section. A sidewall surrounds the substrate supporting surface which upon retention of a substrate on the radially outward section, the sidewall surrounds the substrate. The sidewall includes a plurality of humps which protrude from the top surface of the sidewall. Advantageously, the plurality of humps may aid in even thickness of deposition of material at the edge of the substrate.
    Type: Application
    Filed: January 5, 2021
    Publication date: July 22, 2021
    Inventors: Matthew Goodman, Thomas John Kirschenheiter, Kevin Eugene Quinn
  • Publication number: 20210080357
    Abstract: The present disclosure relates to methods and apparatuses for sectioning and imaging tissue or other samples, which are then automatically captured to enable subsequent analysis. The apparatus acts as a slice capture mechanism for serial sectioning microscopy in a fashion which enables subsequent interfacing with secondary microscopic interrogations or for processing with molecular diagnostic tools. The slices are spatially indexed to allow specific slices to be recalled from a library via automated handling techniques described herein.
    Type: Application
    Filed: November 30, 2020
    Publication date: March 18, 2021
    Inventors: Cody Daniel, Matthew Goodman, Sean Kolk, Todd Huffman
  • Publication number: 20210073980
    Abstract: The following concerns a method for co-localization of microscopy or histology stains by the assembly of a virtual image from one or more imaging operations. In particular, the method decreases the time required to obtain multiple labeled antigen or protein histology images of a biological sample. The method includes imaging the tissue as it is sliced by a microtome with a knife edge scanning microscope and spatially aligning the samples by the generated images. The spatial alignment of samples enabled by the method allows a panel of different antigen or protein secondary or functional stains to be compared across different sample slices, thereby allowing concurrent secondary stains of tissues and cells.
    Type: Application
    Filed: November 17, 2020
    Publication date: March 11, 2021
    Inventors: Matthew Goodman, Todd Huffman, Cody Daniel
  • Patent number: 10839509
    Abstract: The following concerns a method for co-localization of microscopy or histology stains by the assembly of a virtual image from one or more imaging operations. In particular, the method decreases the time required to obtain multiple labeled antigen or protein histology images of a biological sample. The method includes imaging the tissue as it is sliced by a microtome with a knife edge scanning microscope and spatially aligning the samples by the generated images. The spatial alignment of samples enabled by the method allows a panel of different antigen or protein secondary or functional stains to be compared across different sample slices, thereby allowing concurrent secondary stains of tissues and cells.
    Type: Grant
    Filed: July 8, 2016
    Date of Patent: November 17, 2020
    Assignee: 3Scan Inc.
    Inventors: Matthew Goodman, Todd Huffman, Cody Daniel
  • Patent number: 10446393
    Abstract: A method for forming a silicon-containing epitaxial layer is disclosed. The method may include, heating a substrate to a temperature of less than approximately 950° C. and exposing the substrate to a first silicon source comprising a hydrogenated silicon source, a second silicon source, a dopant source, and a halogen source. The method may also include depositing a silicon-containing epitaxial layer wherein the dopant concentration within the silicon-containing epitaxial layer is greater than 3×1021 atoms per cubic centimeter.
    Type: Grant
    Filed: April 19, 2018
    Date of Patent: October 15, 2019
    Assignee: ASM IP Holding B.V.
    Inventors: Nupur Bhargava, John Tolle, Joe Margetis, Matthew Goodman, Robert Vyne
  • Publication number: 20180323059
    Abstract: A method for forming a silicon-containing epitaxial layer is disclosed. The method may include, heating a substrate to a temperature of less than approximately 950° C. and exposing the substrate to a first silicon source comprising a hydrogenated silicon source, a second silicon source, a dopant source, and a halogen source. The method may also include depositing a silicon-containing epitaxial layer wherein the dopant concentration within the silicon-containing epitaxial layer is greater than 3×1021 atoms per cubic centimeter.
    Type: Application
    Filed: April 19, 2018
    Publication date: November 8, 2018
    Inventors: Nupur Bhargava, John Tolle, Joe Margetis, Matthew Goodman, Robert Vyne
  • Patent number: 10099965
    Abstract: Carbon opals, a form of colloidal crystal, are composed of ordered two-dimensional or three-dimensional arrays of Monodispersed Starburst Carbon Spheres (MSCS). Methods for producing such carbon opals include oxidizing as-synthesized MSCS, for example by heating in air, to increase surface charge. Such oxidation is believed to decrease settling rates of a colloidal suspension, enabling formation of an ordered colloidal crystal. Inverse opals, composed of any of a wide variety of materials, and based on a carbon opal template, have a reciprocal structure to a carbon opal. Inverse opals are formed by methods including: forming a carbon opal as described, impregnating a desired material into pores in the carbon opal to produce a hybrid structure, and removing the carbon portion from the hybrid structure.
    Type: Grant
    Filed: April 3, 2017
    Date of Patent: October 16, 2018
    Assignees: Toyota Motor Engineering & Manufacturing North America, Inc., The Board of Trustees of the University of Illinois
    Inventors: Kazuhisa Yano, Matthew Goodman, Paul Vannest Braun
  • Publication number: 20170260106
    Abstract: Carbon opals, a form of colloidal crystal, are composed of ordered two-dimensional or three-dimensional arrays of Monodispersed Starburst Carbon Spheres (MSCS). Methods for producing such carbon opals include oxidizing as-synthesized MSCS, for example by heating in air, to increase surface charge. Such oxidation is believed to decrease settling rates of a colloidal suspension, enabling formation of an ordered colloidal crystal. Inverse opals, composed of any of a wide variety of materials, and based on a carbon opal template, have a reciprocal structure to a carbon opal. Inverse opals are formed by methods including: forming a carbon opal as described, impregnating a desired material into pores in the carbon opal to produce a hybrid structure, and removing the carbon portion from the hybrid structure.
    Type: Application
    Filed: April 3, 2017
    Publication date: September 14, 2017
    Inventors: Kazuhisa Yano, Matthew Goodman, Paul Vannest Braun
  • Publication number: 20170011511
    Abstract: The following concerns a method for co-localization of microscopy or histology stains by the assembly of a virtual image from one or more imaging operations. In particular, the method decreases the time required to obtain multiple labeled antigen or protein histology images of a biological sample. The method includes imaging the tissue as it is sliced by a microtome with a knife edge scanning microscope and spatially aligning the samples by the generated images. The spatial alignment of samples enabled by the method allows a panel of different antigen or protein secondary or functional stains to be compared across different sample slices, thereby allowing concurrent secondary stains of tissues and cells.
    Type: Application
    Filed: July 8, 2016
    Publication date: January 12, 2017
    Inventors: Matthew GOODMAN, Todd HUFFMAN, Cody DANIEL
  • Publication number: 20160290895
    Abstract: The present disclosure relates to methods and apparatuses for sectioning and imaging tissue or other samples, which are then automatically captured to enable subsequent analysis. The apparatus acts as a slice capture mechanism for serial sectioning microscopy in a fashion which enables subsequent interfacing with secondary microscopic interrogations or for processing with molecular diagnostic tools. The slices are spatially indexed to allow specific slices to be recalled from a library via automated handling techniques described herein.
    Type: Application
    Filed: March 29, 2016
    Publication date: October 6, 2016
    Inventors: Cody DANIEL, Matthew GOODMAN, Sean KOLK, Todd HUFFMAN
  • Publication number: 20150267295
    Abstract: A substrate tray, a susceptor assembly including a substrate tray, and a reactor including a substrate tray and/or susceptor assembly are disclosed. The substrate tray is configured to retain a substrate during processing and can be formed of a substantially non-reactive material. The substrate tray can be received by a susceptor, formed of another material, to form the susceptor assembly.
    Type: Application
    Filed: March 19, 2014
    Publication date: September 24, 2015
    Applicant: ASM IP Holding B.V.
    Inventors: Eric Hill, John Tolle, Matthew Goodman
  • Publication number: 20150138532
    Abstract: Motion strategies in two and three dimensions for scanning microscope imaging are described. An object, sample, or specimen is mounted on a precision three-dimensional stage. The object is moved concurrently with respect to a first axis and a second axis orthogonal to the first against a cutting tool to cut the object. An image of the cut portion is generated as the object is moved. The cutting tool may act as an optical waveguide for illuminating the portion of the object cut. An optical element captures images of the cut and illuminated object. The object may further be concurrently moved with respect to a third axis orthogonal to both the first and second.
    Type: Application
    Filed: October 31, 2014
    Publication date: May 21, 2015
    Inventors: Matthew GOODMAN, Cody DANIEL
  • Publication number: 20130122008
    Abstract: The present invention relates to a new combination comprising a therapeutically effective amount of an anti-IL1? antibody or an antigen-binding fragment thereof and at least one anti-diabetic agent.
    Type: Application
    Filed: May 5, 2010
    Publication date: May 16, 2013
    Inventors: Matthew Goodman, Mariadele Noè
  • Publication number: 20100293198
    Abstract: A photo sharing system includes a database including a user account, a mobile device for sending and receiving a digital image, wherein the digital image has a source identification associated with the user account, and a management server for receiving the digital image, analyzing the source identification associated with the digital image, and automatically storing the digital image on the database in response to the analysis of the source identification.
    Type: Application
    Filed: May 12, 2010
    Publication date: November 18, 2010
    Inventors: Joseph L. Marinucci, Luis A. Ruelas, JR., Matthew Goodman
  • Publication number: 20100116207
    Abstract: A reaction chamber having a reaction spaced defined therein, wherein the reaction space is tunable to produce substantially stable and laminar flow of gases through the reaction space. The substantially stable and laminar flow is configured to improve the uniformity of deposition on substrates being processed within the reaction chamber to provide a predictable deposition profile.
    Type: Application
    Filed: November 5, 2009
    Publication date: May 13, 2010
    Applicant: ASM AMERICA, INC.
    Inventors: Michael Givens, Matthew Goodman, Mark Hawkins, Brad Halleck, Herbert Terhorst
  • Patent number: 7655093
    Abstract: A wafer support system comprising a susceptor having top and bottom sections and gas flow passages therethrough. One or more spacers projecting from a recess formed in the top section of the susceptor support a wafer in spaced relationship with respect to the recess. A sweep gas is introduced to the bottom section of the susceptor and travels through the gas flow passages to exit in at least one circular array of outlets in the recess and underneath the spaced wafer. The sweep gas travels radially outward between the susceptor and wafer to prevent back-side contamination of the wafer. The gas is delivered through a hollow drive shaft and into a multi-armed susceptor support underneath the susceptor. The support arms conduct the sweep gas from the drive shaft to the gas passages in the susceptor. The gas passages are arranged to heat the sweep gas prior to delivery underneath the wafer.
    Type: Grant
    Filed: January 29, 2007
    Date of Patent: February 2, 2010
    Assignee: ASM America, Inc.
    Inventors: Michael W. Halpin, Mark R. Hawkins, Derrick W. Foster, Robert M. Vyne, John F. Wengert, Cornelius A. van der Jeugd, Loren R. Jacobs, Frank B. M. Van Bilsen, Matthew Goodman, Hartmann Glenn, Jason M. Layton
  • Publication number: 20070131173
    Abstract: A wafer support system comprising a susceptor having top and bottom sections and gas flow passages therethrough. One or more spacers projecting from a recess formed in the top section of the susceptor support a wafer in spaced relationship with respect to the recess. A sweep gas is introduced to the bottom section of the susceptor and travels through the gas flow passages to exit in at least one circular array of outlets in the recess and underneath the spaced wafer. The sweep gas travels radially outward between the susceptor and wafer to prevent back-side contamination of the wafer. The gas is delivered through a hollow drive shaft and into a multi-armed susceptor support underneath the susceptor. The support arms conduct the sweep gas from the drive shaft to the gas passages in the susceptor. The gas passages are arranged to heat the sweep gas prior to delivery underneath the wafer.
    Type: Application
    Filed: January 29, 2007
    Publication date: June 14, 2007
    Applicant: ASM AMERICA, INC.
    Inventors: Michael Halpin, Mark Hawkins, Derrick Foster, Robert Vyne, John Wengert, Cornelius van der Jeugd, Loren Jacobs, Frank Van Bilsen, Matthew Goodman, Hartmann Glenn, Jason Layton